CN110614430A - Reflective optical system based on adaptive mirror focusing and working method thereof - Google Patents

Reflective optical system based on adaptive mirror focusing and working method thereof Download PDF

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Publication number
CN110614430A
CN110614430A CN201911029660.1A CN201911029660A CN110614430A CN 110614430 A CN110614430 A CN 110614430A CN 201911029660 A CN201911029660 A CN 201911029660A CN 110614430 A CN110614430 A CN 110614430A
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Prior art keywords
mirror
axis
adaptive
axis parabolic
focus
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邵华江
李思佳
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Shanghai Automobile Gear Works
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Shanghai Automobile Gear Works
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/703—Cooling arrangements

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Lenses (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

The invention discloses a focusing reflective optical system based on an adaptive mirror and a working method thereof, wherein the focusing reflective optical system comprises a first off-axis parabolic mirror, the adaptive mirror, a second off-axis parabolic mirror and an off-axis hyperboloid mirror, the focusing optical system is novel in structural design, based on the aberration eliminating characteristic of the off-axis parabolic mirror and the off-axis hyperboloid mirror on parallel incident light, based on the continuous adjustable focal length characteristic and the use characteristic of the adaptive mirror, based on the good heat conductivity and the direct water cooling effect of a metal reflector, through the change of the focal length of the adaptive mirror, the adjustment of the focal position of a focusing light beam is realized, meanwhile, the roundness of a focusing light spot, the energy distribution and the consistency of the light beam quality in the whole process are ensured, the focusing optical system has the advantages of high bearing power, good optical performance, direct water cooling and the like, and.

Description

Reflective optical system based on adaptive mirror focusing and working method thereof
Technical Field
The invention relates to the technical field of fiber laser cutting, in particular to a reflective optical system based on adaptive mirror focusing and a working method thereof.
Background
The laser processing technology covers various laser processing technologies such as laser cutting, welding, surface treatment, punching, micromachining and the like, and utilizes the basic characteristic of interaction between laser and substances. The laser processing technology is a high and new technology without replacement due to the advantages of non-contact between the laser beam and the processing material, processing speed and quality and the like.
Laser cutting has taken the leading position of whole laser processing trade at present, along with the improvement of laser power, the continuous price reduction of laser instrument and processing equipment, when pursuing the price/performance ratio, high power laser cutting is also marketing in a large scale gradually.
The fiber laser has the advantages of high electro-optic conversion efficiency, good fiber flexibility, high coupling efficiency, good beam quality and the like, and the appearance of high-power lasers, so that the market share is increasingly prominent, the kilowatt level of the fiber coupling output laser is quite popular at present, the kilowatt level laser is gradually released to the market, and various processing technologies of the fiber laser are more generalized.
At present, an optical fiber laser cutting optical path system mainly adopts a transmission type, a lens material is usually a fused quartz material, but along with the increase of the power of a laser, the fused quartz material and the processing cost, the coating material and the coating cost are greatly improved, and even a good quartz lens can generate a thermal lens effect, so that the quality and the stability of a focused light beam can be obviously reduced, which is not superior to a metal curved surface reflector which is directly water-cooled, has good heat conductivity and good aberration elimination.
Conventional metal curved surface reflectors mainly comprise spherical reflectors, off-axis parabolic mirrors, off-axis ellipsoidal mirrors, off-axis hyperboloidal mirrors and the like, and the spherical reflectors are not suitable for laser cutting application due to large optical aberration.
The conventional combination of a single off-axis ellipsoidal mirror, a double off-axis parabolic mirror and the like can form an optical fiber laser cutting optical system by itself, and because the change of optical aberration is seriously influenced by the installation distance between an optical fiber emergent point and a lens, the focal position can not be adjusted, and the focusing beam section needs to be adjusted by a mechanical structure, so that the problems of insufficient adjustment amount, unstable adjustment structure and the like exist, and the conventional combination is not beneficial to laser perforation and medium plate cutting application.
The self-adaptive mirror is added in the single-chip off-axis ellipsoidal mirror and the double-chip off-axis parabolic mirror system, so that the problem of focus adjustment is solved, but the optical aberration after focusing is large, even if the conventional optical fiber laser with the core diameter of 100 mu m for cutting is used, the finally obtained focused beam energy distribution can be seriously distorted, and the cutting of medium-thick plates and the consistency of all cross sections are not facilitated.
Based on the points, the invention provides a focusing reflective optical system based on an adaptive mirror, which is based on the aberration elimination characteristic of an off-axis parabolic mirror and an off-axis hyperboloid mirror on parallel incident light, based on the continuous adjustable focal length characteristic and the use characteristic of the adaptive mirror, based on the good heat conductivity and the direct water cooling effect of a metal reflector, realizes the adjustment of the focal position of a focusing light beam through the change of the focal length of the adaptive mirror, ensures the roundness, the energy distribution and the consistency of the beam quality of the focusing light spot in the whole process, has the advantages of high bearing power, good optical performance, direct water cooling and the like, and is particularly suitable for the cutting application of kilowatt and myriawatt high-power optical fibers with the core diameter of 50um and.
Disclosure of Invention
The invention aims to provide a reflective optical system based on adaptive mirror focusing and a working method thereof, so as to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: a focusing reflective optical system based on an adaptive mirror comprises a first off-axis parabolic mirror, the adaptive mirror, a second off-axis parabolic mirror and an off-axis hyperboloid mirror, and is characterized in that the first off-axis parabolic mirror, the second off-axis parabolic mirror and the off-axis hyperboloid mirror on the focusing reflective optical system are cylindrical inclined plane reflectors;
the adaptive mirror is an elliptic cylindrical reflector, and the ratio of the length axis to the length axis of an ellipse is;
the off-axis double-curved-surface mirror is a metal reflector, common materials comprise copper and aluminum alloy, and are provided with cooling water channels, and the adaptive mirror is also provided with a single gas channel;
the first off-axis parabolic mirror, the adaptive mirror, the second off-axis parabolic mirror and the off-axis hyperbolic mirror are all beam deflection angles of 90 degrees;
the central symmetrical plane of the off-axis hyperboloid mirror is coplanar with the central symmetrical plane of the self-adaptive mirror in the long axis direction;
the center normal of the first off-axis parabolic mirror is parallel to the center normal of the off-axis hyperbolic mirror, the center normal of the adaptive mirror is parallel to the center normal of the second off-axis parabolic mirror, and the center normal of the first off-axis parabolic mirror is perpendicular to the center normal of the adaptive mirror.
Preferably, the adaptive mirror changes the concave-convex characteristic of the mirror surface by inputting different gas pressures, so that the focal length of the adaptive mirror is changed and adjusted.
Preferably, the off-axis hyperboloid mirror comprises a near focus and a far focus, the reflecting surface reflects the corresponding focus to be the near focus, and the far focus is overlapped with the focus of the second off-axis parabolic mirror.
Preferably, the working method of the adaptive mirror based focusing reflective optical system comprises the following steps:
A. the fiber laser emits divergent light, the divergent light is incident on the surface of the first off-axis parabolic mirror and then reflected to form parallel collimated light beams, and the collimated light beams sequentially pass through the adaptive mirror, the second off-axis parabolic mirror and the off-axis hyperbolic mirror and then form focused light beams;
B. when gas is not introduced into the adaptive mirror, the surface of the adaptive mirror is a concave surface, and the surface type of the adaptive mirror can be changed by inputting gas with different pressures, so that the adjustable conversion of the concave surface, the plane and the convex surface is realized, and the change of the focal length of the adaptive mirror from positive focus to negative focus is obtained;
C. when the mirror surface of the adaptive mirror is a concave surface, the focal length is positive, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror are reflected by the mirror surface of the adaptive mirror, reflected light beams have certain convergence, and are finally focused by the second off-axis parabolic mirror and the off-axis hyperbolic mirror;
D. when the mirror surface of the adaptive mirror is a plane, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror are reflected by the mirror surface of the adaptive mirror, the reflected light beams are still parallel light and are finally focused by the second off-axis parabolic mirror and the off-axis hyperbolic mirror, and the focus is in a zero-focus position;
E. when the mirror surface of the self-adaptive mirror is a convex surface, the focal length is negative, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror are reflected by the mirror surface of the self-adaptive mirror, and are finally focused by the second off-axis parabolic mirror and the off-axis hyperboloid mirror, and the focus deviates from a zero-focus position, so that negative defocusing adjustment is realized.
Compared with the prior art, the invention has the beneficial effects that:
(1) the optical fiber laser cutting device is novel in structural design, based on the aberration eliminating characteristic of the off-axis parabolic mirror and the off-axis hyperboloid mirror on parallel incident light, based on the continuous adjustable focal length characteristic and the use characteristic of the adaptive mirror, based on the good heat conductivity and the direct water cooling effect of the metal reflector, the roundness of a focusing light spot, the energy distribution and the consistency of light beam quality in the whole process are guaranteed while the focal length of the focusing light beam is adjusted through the change of the focal length of the adaptive mirror, and the optical fiber laser cutting device has the advantages of high bearing power, good optical performance, direct water cooling and the like, and is particularly suitable for kilowatt and myriawatt high-power optical fiber laser cutting;
(2) the first off-axis parabolic mirror, the adaptive mirror, the second off-axis parabolic mirror and the off-axis hyperboloid mirror are all metal lenses, cooling water channels are arranged inside the metal lenses, the direct water cooling effect is achieved, the heat conductivity is good, the laser power borne by the lenses can be greatly improved, the thermal lens effect is eliminated, and the lenses can be safely used;
(3) the invention adopts the self-adaptive lens for focusing, reduces the design difficulty of a mechanical structure, simultaneously is matched with the long-focusing light path system, can realize larger focus focusing amount, completely meets the cutting requirement of a thick plate with ten-kilowatt-level large focusing amount, simultaneously ensures the roundness of light spots, energy distribution and light beam quality in the whole adjusting process and has the most basic guarantee for the cutting section quality of the medium-thick plate.
Drawings
FIG. 1 is a schematic structural diagram of a cutting machine body according to the present invention;
FIG. 2 is a schematic view of a cutting mechanism according to the present invention.
In the figure: 1. a first off-axis parabolic mirror; 2. an adaptive mirror; 3. a second off-axis parabolic mirror; 4. an off-axis hyperboloid mirror.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a technical solution: a reflective optical system based on adaptive mirror focusing comprises a first off-axis parabolic mirror 1, an adaptive mirror 2, a second off-axis parabolic mirror 3, an off-axis hyperbolic mirror 4, a first off-axis parabolic mirror 1 on the reflective optical system, a second off-axis parabolic mirror 3 and a cylindrical inclined plane mirror 4, wherein the adaptive mirror 2 is an elliptic cylindrical mirror, and the ratio of the length to the axis of an ellipse is equal to that of the length to the axis of the ellipse.
The self-adaptive parabolic mirror comprises a first off-axis parabolic mirror 1, a self-adaptive mirror 2, a second off-axis parabolic mirror 3 and an off-axis hyperboloid mirror 4, wherein the off-axis hyperboloid mirror is a metal reflector, common materials comprise copper and aluminum alloy, the metal reflector and the copper and aluminum alloy are all provided with cooling water channels, and the self-adaptive mirror 2 is also provided with a single gas channel;
the system comprises a first off-axis parabolic mirror 1, a self-adaptive mirror 2, a second off-axis parabolic mirror 3 and an off-axis hyperbolic mirror 4, wherein the off-axis parabolic mirrors are all 90-degree light beam deflection angles;
the center symmetrical plane of the off-axis hyperboloid mirror 4 is coplanar with the center symmetrical plane of the self-adaptive mirror 2 in the long axis direction;
the center normal of the first off-axis parabolic mirror 1 is parallel to the center normal of the off-axis hyperboloid mirror 4, the center normal of the adaptive mirror 2 is parallel to the center normal of the second off-axis parabolic mirror 3, and the center normal of the first off-axis parabolic mirror 1 is perpendicular to the center normal of the adaptive mirror 2.
The adaptive mirror 2 changes the concave-convex characteristic of the mirror surface by inputting different gas pressures, and realizes the self focal length change adjustment.
The off-axis hyperboloid mirror 4 comprises a near focus and a far focus, the reflecting surface reflects the corresponding focus to be the near focus, and the far focus is superposed with the focus of the second off-axis parabolic mirror 3.
The working principle is as follows: the fiber laser emits divergent light, the divergent light is incident on the surface of the first off-axis parabolic mirror 1 and then reflected to form parallel collimated light beams, and the collimated light beams are reflected by the self-adaptive mirror 2, the second off-axis parabolic mirror 3 and the off-axis hyperbolic mirror 4 in sequence to form focused light beams.
When the self-adaptive mirror 2 is not filled with gas, the mirror surface of the self-adaptive mirror 2 is a concave surface, the surface type of the mirror surface of the self-adaptive mirror 2 can be changed by inputting gas with different pressures, the adjustable transformation of the concave surface, the plane and the convex surface is realized, and the change of the focal length of the self-adaptive mirror from positive focus to negative focus is obtained.
When the mirror surface of the adaptive mirror 2 is a concave surface, the focal length is positive, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror 1 are reflected by the mirror surface of the adaptive mirror 2, the reflected light beams have certain convergence and are finally focused by the second off-axis parabolic mirror 3 and the off-axis hyperbolic mirror 4, the focus is deviated from a zero-focus position, positive defocusing adjustment is realized, and the light spot energy distribution of the adaptive mirror under the limit positive focus is referred to a left-side block diagram of fig. 2.
When the mirror surface of the adaptive mirror 2 is a plane, the focal length is infinite, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror 1 are reflected by the mirror surface of the adaptive mirror 2, the reflected light beams are still parallel light and are finally focused by the second off-axis parabolic mirror 3 and the off-axis hyperbolic mirror 4, the focus is at a zero-focus position, and the distribution of light spot energy at the zero-focus position refers to a block diagram in fig. 2.
When the mirror surface of the adaptive mirror 2 is a convex surface, the focal length is negative, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror 1 are reflected by the mirror surface of the adaptive mirror 2, reflected light beams have certain divergence and are finally focused by the second off-axis parabolic mirror 3 and the off-axis hyperbolic mirror 4, the focus is deviated from a zero-focus position, negative defocusing adjustment is realized, and the light spot energy distribution of the adaptive mirror under the limit negative focus is referred to the right block diagram of fig. 2.
The optical fiber laser cutting device is novel in structural design, based on the aberration eliminating characteristic of the off-axis parabolic mirror and the off-axis hyperboloid mirror on parallel incident light, based on the continuous adjustable focal length characteristic and the use characteristic of the adaptive mirror, based on the good heat conductivity and the direct water cooling effect of the metal reflector, the roundness of a focusing light spot, the energy distribution and the consistency of light beam quality in the whole process are guaranteed while the focal length of the focusing light beam is adjusted through the change of the focal length of the adaptive mirror, and the optical fiber laser cutting device has the advantages of high bearing power, good optical performance, direct water cooling and the like, and is particularly suitable for kilowatt and myriawatt high-power optical fiber laser cutting.
A reflective optical system based on adaptive mirror focusing comprises the following working methods:
A. the fiber laser emits divergent light, the divergent light is incident on the surface of the first off-axis parabolic mirror 1 and then reflected to form parallel collimated light beams, and the collimated light beams are reflected by the adaptive mirror 2, the second off-axis parabolic mirror 3 and the off-axis hyperbolic mirror 4 in sequence to form focused light beams;
B. when the self-adaptive mirror 2 is not filled with gas, the mirror surface of the self-adaptive mirror 2 is a concave surface, and the shape of the mirror surface of the self-adaptive mirror 2 can be changed by inputting gas with different pressures, so that the adjustable conversion of the concave surface, the plane and the convex surface is realized, and the change of the focal length of the self-adaptive mirror from positive focus to negative focus is obtained;
C. when the mirror surface of the adaptive mirror 2 is a concave surface, the focal length is positive, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror 1 are reflected by the mirror surface of the adaptive mirror 2, reflected light beams have certain convergence, and are finally focused by the second off-axis parabolic mirror 3 and the off-axis hyperbolic mirror 4;
D. when the mirror surface of the adaptive mirror 2 is a plane, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror 1 are reflected by the mirror surface of the adaptive mirror 2, the reflected light beams are still parallel light and are finally focused by the second off-axis parabolic mirror 3 and the off-axis hyperbolic mirror 4, and the focus is in a zero-focus position;
E. when the mirror surface of the adaptive mirror 2 is a convex surface, the focal length is negative, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror 1 are reflected by the mirror surface of the adaptive mirror 2 and are finally focused by the second off-axis parabolic mirror 3 and the off-axis hyperboloid mirror 4, the focus deviates from a zero-focus position, and negative defocusing adjustment is realized.
The invention has the beneficial effects that:
the optical fiber laser cutting device is novel in structural design, based on the aberration eliminating characteristic of the off-axis parabolic mirror and the off-axis hyperboloid mirror on parallel incident light, based on the continuous adjustable focal length characteristic and the use characteristic of the adaptive mirror, based on the good heat conductivity and the direct water cooling effect of the metal reflector, the roundness of a focusing light spot, the energy distribution and the consistency of light beam quality in the whole process are guaranteed while the focal length of the focusing light beam is adjusted through the change of the focal length of the adaptive mirror, and the optical fiber laser cutting device has the advantages of high bearing power, good optical performance, direct water cooling and the like, and is particularly suitable for kilowatt and myriawatt high-power optical fiber laser cutting;
the first off-axis parabolic mirror, the adaptive mirror, the second off-axis parabolic mirror and the off-axis hyperboloid mirror are all metal lenses, cooling water channels are arranged inside the metal lenses, the direct water cooling effect is achieved, the heat conductivity is good, the laser power borne by the lenses can be greatly improved, the thermal lens effect is eliminated, and the lenses can be safely used;
the invention adopts the self-adaptive lens for focusing, reduces the design difficulty of a mechanical structure, simultaneously is matched with the long-focusing light path system, can realize larger focus focusing amount, completely meets the cutting requirement of a thick plate with ten-kilowatt-level large focusing amount, simultaneously ensures the roundness of light spots, energy distribution and light beam quality in the whole adjusting process and has the most basic guarantee for the cutting section quality of the medium-thick plate.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (4)

1. A focusing reflective optical system based on an adaptive mirror comprises a first off-axis parabolic mirror (1), the adaptive mirror (2), a second off-axis parabolic mirror (3) and an off-axis hyperboloid mirror (4), and is characterized in that the first off-axis parabolic mirror (1), the second off-axis parabolic mirror (3) and the off-axis hyperboloid mirror (4) on the focusing reflective optical system are cylindrical inclined plane reflectors;
the adaptive mirror (2) is an elliptic cylindrical reflector with an elliptic major-minor axis ratio of
The off-axis parabolic mirror comprises a first off-axis parabolic mirror (1), a self-adaptive mirror (2), a second off-axis parabolic mirror (3), an off-axis hyperboloid mirror (4) and a single gas channel, wherein the off-axis hyperboloid mirror is a metal reflector, common materials comprise copper and aluminum alloy which are all provided with cooling water channels, and the self-adaptive mirror (2) is also provided with the single gas channel;
the first off-axis parabolic mirror (1), the adaptive mirror (2), the second off-axis parabolic mirror (3) and the off-axis hyperbolic mirror (4) are all beam deflection angles of 90 degrees;
the central symmetry plane of the off-axis hyperboloid mirror (4) is coplanar with the central symmetry plane of the adaptive mirror (2) in the long axis direction;
the center normal of the first off-axis parabolic mirror (1) is parallel to the center normal of the off-axis hyperboloid mirror (4), the center normal of the adaptive mirror (2) is parallel to the center normal of the second off-axis parabolic mirror (3), and the center normal of the first off-axis parabolic mirror (1) is perpendicular to the center normal of the adaptive mirror (2).
2. The adaptive mirror based focusing reflective optical system of claim 1, wherein: the adaptive mirror (2) changes the concave-convex characteristic of the mirror surface by inputting different gas pressures, and realizes the self focal length change adjustment.
3. The adaptive mirror based focusing reflective optical system of claim 1, wherein: the off-axis hyperboloid mirror (4) comprises a near focus and a far focus, the reflecting surface reflects the corresponding focus to be the near focus, and the far focus is superposed with the focus of the second off-axis parabolic mirror (3).
4. The adaptive mirror focusing based reflective optical system is realized according to claim 1, and the working method comprises the following steps:
A. divergent light is emitted from the fiber laser, and is reflected to form parallel collimated light beams after being incident to the surface of the first off-axis parabolic mirror 1, and the collimated light beams sequentially pass through the adaptive mirror (2), and are reflected by the second off-axis parabolic mirror (3) and the off-axis hyperbolic mirror (4) to form focused light beams;
B. when the self-adaptive mirror (2) is not filled with gas, the mirror surface of the self-adaptive mirror (2) is a concave surface, and the surface type of the mirror surface of the self-adaptive mirror (2) can be changed by inputting gas with different pressures, so that the adjustable transformation of the concave surface, the plane and the convex surface is realized, and the change of the focal length of the self-adaptive mirror from positive focus to negative focus is obtained;
C. when the mirror surface of the adaptive mirror (2) is a concave surface, the focal length is positive, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror (1) are reflected by the mirror surface of the adaptive mirror (2), reflected light beams have certain convergence, and are finally focused by the second off-axis parabolic mirror (3) and the off-axis hyperboloid mirror (4);
D. when the mirror surface of the adaptive mirror (2) is a plane, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror (1) are reflected by the mirror surface of the adaptive mirror (2), reflected light beams are still parallel light and are finally focused by the second off-axis parabolic mirror (3) and the off-axis hyperbolic mirror (4), and the focus is in a zero-focus position;
E. when the mirror surface of the adaptive mirror (2) is a convex surface, the focal length is negative, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror (1) are reflected by the mirror surface of the adaptive mirror (2) and are finally focused by the second off-axis parabolic mirror (3) and the off-axis hyperboloid mirror (4), the focus deviates from a zero-focus position, and negative defocusing adjustment is realized.
CN201911029660.1A 2019-10-28 2019-10-28 Reflective optical system based on adaptive mirror focusing and working method thereof Withdrawn CN110614430A (en)

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Application publication date: 20191227