CN101859025A - High-power semiconductor laser optical output module capable of being reused - Google Patents
High-power semiconductor laser optical output module capable of being reused Download PDFInfo
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Abstract
The invention relates to the laser field, in particular to a high-power semiconductor laser optical output module capable of being reused. The invention comprises a laser beam reshaping system, a focusing system, an upper ladder base and a lower ladder base. The upper ladder base and the lower ladder base are buttoned together through a respective upper end plane. The laser beam reshaping system is arranged on the steps of the upper ladder base and the lower ladder base. The focusing system is located in the emergent light direction outside the upper ladder base and the lower ladder base. The steps on the lower ladder base are staggered. The contact faces of the steps at different sides in the middle of the lower ladder base present a V shape. The whole step contact face presents V-shaped waves. The structures of the upper ladder base and the lower ladder base are the same. The invention can be reused, has no water cooling and small size and can realize high-power high-light output.
Description
Technical field
The present invention relates to field of lasers, particularly reusable high power semiconductor lasers optical fiber output module.
Background technology
Semiconductor laser is little, in light weight and conversion efficiency advantages of higher with its volume, is applied to industry and military various aspects.But because the semiconductor laser self-defect, the beam quality of slow-axis direction far is worse than quick shaft direction, and output facula is asymmetric hot spot, and energy distribution is inhomogeneous, limited it at some to the have relatively high expectations application of occasion of beam quality.Light by optical fiber output has the hot spot sphering, the energy distribution advantage of uniform, simultaneously it also can realize arbitrarily angled, the transmission of longer distance, therefore the light by optical fiber output can apply to aspects such as cut in the industrial processes and laser boring well.Simultaneously as pumping source, the light of optical fiber output is direct input optical fibre laser instrument also, the pumping of realization high-level efficiency.Therefore the research of semiconductor laser coupled fiber export technique becomes an important directions of laser applied research.Along with industrial expansion, people are more and more higher to the requirement of solid and fiber laser output power and efficient, and this is just to also more and more higher as the requirement of the semiconductor laser output power of pumping source and beam quality.In a word, the demand to the semiconductor laser module of output high-power in the single fiber is more and more urgent.
At present, single fiber realizes that mainly there is the problem of following several respects in the semiconductor laser module of high power output: 1) asymmetric as the semiconductor laser Bar bar hot spot of coupling unit, can not directly advance optical fiber, need beam shaping system that the light cutting is reset, because beam shaping system involves great expense, debugs complexity, this has increased the cost and the debugging difficulty of system undoubtedly; 2) power all needs water-cooling system to cool off above the laser instrument of 60W, and this makes the volume of total system increase, and weight strengthens, the practical application inconvenience; 3) although semiconductor laser has the long-life, unavoidably second-rate laser instrument can appear also, and general system is not easy to change laser instrument, in case occur laser instrument inferior in the system, this will cause the performance of total system to descend.At present, United States Patent (USP) " semiconductor diode lasers with a specificgeometry, US6124973, Frannhofer, 2000; Modular diode laser assembly, US0268946, nlight, 2007; Diode laser arrangement with a plurality of diode laser arrays, US689822, Jenoptik Laserdiode GmbH, 2005 " in have only a base, have only row's laser instrument to swash on the base and penetrate, power is lower.
Therefore, develop a kind of a plurality of semiconductor lasers space coupling single fiber and realize high-power output, no water-cooled, the laser module that can reuse is imperative.
Summary of the invention
At above-mentioned situation, for solving the defective of prior art, purpose of the present invention just is to propose a kind of water-cooled that reuse, no, small size, multi-laser and is coupled into an optical fiber, can realize the semiconductor laser module of high power high luminance output, to be applied to some occasions higher to light source volume, beam quality and power requirement.
The technical scheme that technical solution problem of the present invention is adopted is, reusable high power semiconductor lasers optical fiber output module comprises the laser beam shaping system, focusing system, last ladder base, the downstairs base, last ladder base and downstairs base are interlocked by upper surface each other, the laser beam shaping system is installed in, on the step of downstairs base, focusing system is positioned at, on the outgoing direction of light outside the downstairs base, step on the said downstairs base is interspersed, the step of homonymy is not V-shaped at the middle surface of contact each other of downstairs base, the whole step surface of contact wave that is in the shape of the letter V, said to go up the ladder base identical with the downstairs understructure.
Beneficial effect of the present invention: the present invention can reuse, not have water-cooled, volume little, can realize high power high luminance output, to be applied to some occasions higher to light source volume, beam quality and power requirement.Adopt a plurality of semiconductor laser single tube couplings, the cutting of light requirement bundle is not reset, and can directly advance optical fiber, well the problem of resolved beam transformation system; Adopt the laser instrument of C-Mount encapsulation, removed extremely not convenient water-cooling system, also reduced the volume and weight of system simultaneously; The total system laser instrument adopts the zero lap combination, can arbitrarily change laser instrument, and not influence other, has guaranteed the overall performance of system; This module can realize reusing simultaneously, has increased serviceable life; Four row's laser instruments are arranged, power has improved four times, in this four rows laser instrument, the laser instrument that any row is adjacent is staggered, be symmetric offset spread with the laser instrument on its diagonal line, this arrangement makes one-piece construction become very compact, reduces light path, the spread heat that each laser instrument is produced is convenient to heat radiation.
Description of drawings
Fig. 1 is the one-piece construction figure of reusable high power semiconductor lasers optical fiber output module of the present invention.
Fig. 2 is a semiconductor laser single tube synoptic diagram of the present invention.
Fig. 3 is a same base homonymy laser instrument placement location synoptic diagram of the present invention.
Fig. 4 is that single laser instrument output fast and slow axis collimation of the present invention is after the light path of right-angle prism deflection optical axis is propagated synoptic diagram.
Fig. 5 is a ladder base synoptic diagram of the present invention.
Fig. 6 is the installation site synoptic diagram of the laser beam shaping system of same ladder base of the present invention.
Fig. 7 is the position view that two ladders of the present invention fasten back homonymy laser instrument.
Among the figure, 1, the semiconductor laser single tube, 2, the fast axis collimation mirror, 3, slow axis collimating mirror, 4, right-angle prism, 5, the laser light velocity, 6, fast axle focus lamp, 7, the slow axis focus lamp, 8, optical fiber, 9, downstairs base, 10, go up the ladder base, 11, heat sink, 12, laser instrument single tube, 13, step, 14, slow axis goes out plain edge, 15, fast axle goes out plain edge, and 16, slow axis goes into plain edge, 17, go into plain edge.
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present invention is elaborated.
Shown in Fig. 1-7, the present invention includes and comprise the laser beam shaping system, focusing system, last ladder base 10, downstairs base 9, last ladder base 10 and downstairs base 9 are interlocked by upper surface each other, the laser beam shaping system is installed in, on the step 13 of downstairs base, focusing system is positioned at, on the outgoing direction of light outside the downstairs base, step 13 on the said downstairs base 9 is interspersed, the step 13 of homonymy is not V-shaped at downstairs base 9 middle surface of contact each other, the whole step 13 surface of contact wave that is in the shape of the letter V, said to go up ladder base 10 identical with downstairs base 9 structures.
By shown in Figure 5, said focusing system comprises fast axle focus lamp 6, slow axis focus lamp 7 and optical fiber 8, the back focus of fast axle focus lamp 6 and slow axis focus lamp 7 overlaps with the center of optical fiber 8 end faces, and fast axle focus lamp 6, slow axis focus lamp 7 and optical fiber 8 end faces are coaxial optical systems.
By Fig. 2, shown in 6, said laser beam shaping system comprises semiconductor laser single tube 1, fast axis collimation mirror 2, slow axis collimating mirror 3 and right-angle prism 4, fast axis collimation mirror 2, slow axis collimating mirror 3, right-angle prism 4 is installed on the step 13 of ladder base, two base angles of right-angle prism are 45 °, right-angle prism 4 hypotenuses are parallel to step 13V font surface of contact, it is corresponding with right-angle side on the right-angle prism 4Z direction that the slow axis of slow axis collimating mirror 3 goes out plain edge 14, the fast axle of fast axis collimation mirror 2 goes out plain edge 15 and the slow axis of slow axis collimating mirror 3, and to go into plain edge 16 corresponding, semiconductor laser single tube 1 is installed in the side of ladder base 10 or downstairs base 9, said semiconductor laser single tube 1 comprises laser instrument single tube 12 and heat sink 11, laser instrument single tube 12 is installed on heat sink 11 the side, laser instrument single tube 12 go out the corresponding fast axis collimation mirror of luminous point go into plain edge 17, fast axis collimation mirror 2 and slow axis collimating mirror 3 common optical axis, the mid point that goes out the right-angle side on luminous point and the right-angle prism 4Z direction of laser instrument single tube 12 is on the optical axis of fast axis collimation mirror 2 and slow axis collimating mirror 3.
By shown in Figure 3, not overlapping between the said semiconductor laser single tube 1, the placement of being separated by.
By shown in Figure 6, said step 13 height are consistent with overall with on the slow axis collimating mirror 3 output beam Y directions, step 13 width and 1 of same ladder base homonymy adjacent semiconductor laser instrument single tube apart from consistent; Adjacent step 13 length overalls of the heteropleural that is interlocked are both sides semiconductor laser single tube 1 to the mid point of the hypotenuse of middle right-angle prism 4 apart from sum.
The light refraction face of said fast axle focus lamp 6, slow axis focus lamp 7, optical fiber 8 end faces, fast axis collimation mirror 2, slow axis collimating mirror 3 and right-angle prism 4 all is coated with anti-reflection film.
Said ladder base adopts high thermal conductivity material to make.
The present invention relates to a kind of by the module of a plurality of semiconductor laser single tube couplings through optical fiber output, this module comprises the semiconductor laser single tube of n C-Mount encapsulation, fast axis collimation mirror, slow axis collimating mirror, right-angle prism, fast axle focus lamp, slow axis focus lamp, optical fiber, downstairs base and last ladder base.The light that is placed on each the semiconductor laser single tube output on the ladder base is earlier by fast axis collimation mirror and slow axis collimating mirror collimation, again through corresponding with it right-angle prism reflection, with 90 ° of the optical axis deflections of every Shu Guang, all light superpose on Y and form light beam then, with fast axle focus lamp and slow axis focus lamp hot spot is focused on same point respectively again, an end face of optical fiber is placed on the common focus of two focus lamps, and last light is exported from the optical fiber other end.
Described laser instrument is placed on the side end face of base, do not superpose mutually between each laser instrument, laser instrument adopts the dismountable mode of not damaged to combine with the combination of base, can be under situation about being independent of each other, change inappropriate laser instrument, to improve the performance of system.
Described ladder base bench height and step width are respectively by the determining positions of the width of light beam of the quick shaft direction behind the laser instrument collimation and laser instrument.In order to obtain high optical power density, light beam will superpose no compartment of terrain on quick shaft direction, and the height of each step is consistent with the width of collimation back quick shaft direction, and like this, it is just in time continuously every stack that the two-beam of adjacent step just is equivalent at quick shaft direction.Because laser module will be realized zero lap ground coupled laser, so the width of step just in time is the distance of the adjacent laser instrument of same base homonymy.For the ease of heat radiation, whole ladder base adopts the high material of thermal conductivity to make.
Described right-angle prism is placed on the centre of step base, and the reflection hypotenuse can be coated with high reflection film, also can not plate high reflection film, and the internal reflection by right-angle prism directly changes light path.Each laser instrument swashs the light of ejaculation behind the fast and slow axis collimation, by the right-angle prism of centre with 90 ° of optical axis deviations, make each laser instrument and collimating element not with the optical axis coincidence of coupling back light, physical characteristics (size and position) to each laser instrument and collimating element has reduced requirement like this, as long as satisfy this light path condition, the installation and the debugging requirement of system have been reduced.During each light path aplanatism of some special circumstances such as needs, the deviation light path can allow laser instrument and collimating element move on directions X, satisfies the aplanatism requirement well.On the contrary, if adopt not deviation optical axis system, light beam after laser instrument and collimating element and the coupling is coaxial, do not influence each other in order to make between each light path, must do very accurate in locating to the position of each laser instrument, the size of each collimating element also has strict demand, can not the light of other laser instrument outputs be exerted an influence, as be in the light or deviation light, this has just increased the difficulty of system.
Described type of focusing employing fast and slow axis method of focusing is respectively gone into optical fiber.Through the coupling after gloss with simple fast and slow axis respectively method of focusing enter optical fiber, this can make system reduce light loss, it is simple that structure also becomes.Because the beam divergence angle after the coupling is very little, hot spot is very big, is not suitable for directly advancing optical fiber, needs balanced beam divergence angle of focus lamp and spot size.Its focus method generally has two kinds: the one, and through expanding bundle or compression, light beam is all equated in the axial angle of divergence of speed earlier, focus on a focus lamp then; The one, with two focus lamps the fast and slow axis direction is focused on respectively, its principle such as fast and slow axis collimate.The former used lens are many, can cause light loss big, consider the simplicity of system simultaneously, select method of focusing respectively for use.In order to make the beam focus position consistency that focuses on each bore of back, focus lamp is selected the little lens type of spherical aberration for use.
Estimate the parameter of semiconductor laser output beam quality, generally with optical parameter long-pending (BPP):
BPP=w
0θ, wherein w
0Be the radius of beam waist, θ is the half-angle of far-field divergence angle.
Then the optical parameter of optical fiber is amassed BPP
Fiber=d
0/ 2NA, d
0The diameter of optical fiber core diameter, NA are numerical aperture.
A branch of light will enter optical fiber fully, and must satisfy three conditions: the section radius of light beam is less than the radius of fiber core; The half-angle of the angle of divergence of light beam is less than the numerical aperture of optical fiber; The long-pending BPP of optical parameter of stack back light beam
TotalLess than the long-pending BPP of the optical parameter of optical fiber
Fiber
Because the hot spot of semiconductor laser is a rectangle, enter optical fiber must satisfy
In order to make incident light maximum ratio ground occupy fiber core, should satisfy as far as possible
After an optical fiber was determined, the optical parameter of its slow-axis direction and quick shaft direction is long-pending just roughly to have been determined.The optical parameter of slow axis is amassed BPP
SlowMuch larger than the long-pending BPP of the optical parameter of fast axle
Fast, for the light beam conversion element that does not use complex and expensive carries out light beam cutting and rearrangement, the BPP maximum of slow-axis direction is got
And the BPP of single laser instrument quick shaft direction is very little, and general light by a plurality of laser instruments is formed by stacking on quick shaft direction, and in order to make the axial hot spot equilibrium of speed, fast axle stack both BPP of back should equate as far as possible, so N=BPP
Slow/ BPP
Fast, the stackable laser instrument number of quick shaft direction is the integer less than N.During practice, because there is aberration in each lens in coupling process, the beam parameter product of fast and slow axis can become greatly, and therefore when initial value was selected, fast and slow axis was all got and is slightly smaller than above-mentioned value.
From as can be known above-mentioned, the coupling essence of light beam is exactly the stack of light beam at quick shaft direction, overlaps at slow-axis direction.In order to realize that light beam superposes on quick shaft direction, under the situation that does not change the quick shaft direction light path, just should there be a difference in height in the luminous point of adjacent laser instrument on quick shaft direction.In order to make optical power density bigger, this difference in height should equal to collimate the overall with on the quick shaft direction of back.Consider that from the angle that reduces energy loss trying one's best to lack changes light path with optical element, therefore on its physical location, produce such difference in height.The consideration of comprehensive various aspects is placed on laser instrument on the step-like base, is one and selects preferably.
From the effect of coupling, when the light path of each light path is little, during equivalent optical path between the light path, beam divergence is little, and coupling hot spot energy distribution is even, and the quality of coupling is good.Therefore at the laser instrument number of the same quantity of coupling, the position of reasonably arranging laser instrument can make the effect of coupling improve.
Because the angle of divergence of semiconductor laser output light is bigger, can not directly transmit, and must reduce with the angle of divergence of fast and slow axis collimating mirror with light beam earlier, the constant principle of BPP before and after its collimation is deferred to and collimated, when promptly beam divergence angle reduced, it is big that the hot spot live width becomes.And because the axial BPP of speed differs greatly, can not collimate simultaneously both direction with a collimating mirror, therefore adopt the perpendicular post lens of two buses that the fast and slow axis direction of light beam is collimated respectively.
In order to allow system be convenient to install and debugging, adopt right-angle prism that light path is carried out 90 ° of deviations.Behind the deflection optical axis, the requirement of laser instrument and fast and slow axis collimating mirror physical characteristics (position and size) reduces, be convenient to device screening and system debug, it need only consider whether device is fit to this light path, and do not worry influence to other light paths, too greatly deviation etc. are in the light in other light paths generations as device size.The selection of right-angle prism size is based on two principles: quick shaft direction is as far as possible little, and is suitably big on the slow-axis direction.The overall with of the beam fast axis direction after the thickness of catoptron just equals to collimate, the distance of adjacent mirror is a catoptron thickness, promptly be spaced apart zero, so both can guarantee that catoptron was not in the light, can make the concentration of energy of stack back quick shaft direction again, the right-angle side of right-angle prism greater than the overall with of slow-axis direction after the beam collimation, can reduce the loss of slow-axis direction energy approximately, obtains high efficient.The selection of right-angle prism position is based on the equivalent optical path principle of the relative laser instrument in same substrate both sides, so it is positioned at the middle of two relative laser instruments.Light beam can superpose on quick shaft direction after the reflection of middle straight angle prism effectively.
The hot spot fast and slow axis angle of divergence after the stack is generally different, the rectangular distribution of hot spot.With compare with the hot spot of optical fiber coupling, this moment, the angle of divergence of hot spot fast and slow axis was too little, and hot spot is too big, can not directly enter optical fiber, therefore needs to come with focus lamp the size of the balanced angle of divergence and hot spot, it follows the BPP principle of invariance.According to the angle of divergence and the size of NA and the fiber core radius and the current hot spot of the optical fiber that will enter, screen focus lamp, the size and the angle of divergence that focus on the back hot spot all are less than the optical fiber relevant parameters.The method that enters optical fiber generally has two kinds: the one, expand bundle with telescopic system earlier, and focus on a focus lamp again; The one, directly fast and slow axis is focused on respectively with two focus lamps.Consider the compactedness of this structure, adopt fast and slow axis to focus on respectively at this.
In order to make purpose of the present invention, technical scheme and advantage clearer, below in conjunction with embodiment, the present invention is further elaborated, should be appreciated that specific embodiment described herein only in order to explanation the present invention, and be not used in qualification the present invention.
Embodiment is that 16 semiconductor single tube laser instruments are coupled in the optical fiber that fiber core radius is 100um, NA0.22.
If heat sink (11) of the semiconductor laser single tube that the C-mount encapsulation is installed are of a size of 7mm * 7mm * 2mm, laser instrument single tube (12) weldering seated position as shown in Figure 2.For the ease of changing, the laser instrument of same base homonymy can not be overlapping, and therefore the interval of adjacent laser instrument is taken as 8mm on the Z direction, and its installation site as shown in Figure 3.The semiconductor laser single tube detachably is placed on the both sides of up/down steps base with no damage.
The initial value of laser instrument single tube is made as: the single tube output power is made as 5W; Wavelength is 808nm; Quick shaft direction live width (half-breadth) is 0.5um, and the angle of divergence (half-angle) is 30 °; The slow-axis direction live width is 0.1mm, and the angle of divergence is 4.5 °.Determine single tube laser instrument slow-axis direction BPP
Slow=7.875mm.mrad, quick shaft direction BPP
Fast=0.2625mm.mrad, stackable 30 single tubes on quick shaft direction enter BPP in theory
FiberThe optical fiber of=11.137mm.mrad, promptly fiber core radius is that 51um, NA are 0.22 optical fiber.
At first select the fast axis collimation mirror (2) and the slow axis collimating mirror (3) of suitable focal length that light beam is collimated.Selecting focal length in this example for use is that the aspheric surface post mirror of 0.9mm collimates to quick shaft direction, and the half-breadth behind the collimation is about 0.2mm, and angle of divergence half-angle is 0.2 °.The focal length of the collimating mirror of slow-axis direction is selected 12mm for use, and the half-breadth behind the collimation is about 1mm, and angle of divergence half-angle is 0.55 °.Because the influence of aberration, the optical parameter of collimation back fast and slow axis is long-pending all to be increased to some extent.
In order not influence the bee-line of fast and slow axis collimation effect, laser instrument is selected 15mm to the distance of right-angle prism for use at this.The light beam of the size of right-angle prism after by collimation determine, so its thickness elects 0.4mm as, and its right-angle side is elected 4mm as.The synoptic diagram of the light that single tube sends behind fast and slow axis collimation and catoptron deviation as shown in Figure 5.More intensive for what light can be superposeed on quick shaft direction, ignore the influence of the quick shaft direction angle of divergence, on Y direction, being spaced apart of each adjacent straight corner reflector is zero, the center is at a distance of being 0.4mm, and promptly theoretical glazing is realized seamless stack in Y direction (quick shaft direction).
For under the laser instrument coupling situation of same quantity, obtain compact structure and more rational light path more, place semiconductor laser simultaneously step base both sides, the shape of ladder base is as shown in Figure 5.Determine the size of step base: bench height is the overall with of collimation back quick shaft direction, therefore is taken as 0.4mm; Step width is the distance of the adjacent laser instrument of the same base of homonymy, is taken as 8mm at this; The step base should be the both sides laser instrument to mirror reflection surface centre distance sum in the length of directions X, is taken as 34mm; The step base is decided by actual conditions in the length of Y direction and Z direction.
The synoptic diagram that places semiconductor laser, fast and slow axis collimating mirror and right-angle prism on a ladder base as shown in Figure 6, the hypotenuse of right-angle prism and step surface of contact are separated by a distance, adopt internal reflection deviation light path, the fast axis collimation mirror can directly be bonded on the laser instrument single tube, thus make debug easy.Consider when adopting two same ladder bases to fasten, divide be on two bases adjacent nearest light path at quick shaft direction continuously every stack, in order to make the light path symmetry, a right-angle side of the right-angle prism in the middle of these two light paths overlaps, and hypotenuse is vertical.Respective optical path face on each base does not have a side of light path to etch away a part, so that can hold the corresponding collimating mirror of another base.Fig. 7 is the arrangement mode of laser instrument when adopting two ladders to fasten.
The light of each laser instrument superposes on quick shaft direction after the intermediate mirrors reflection.Because the influence of each lens aberration, after adopting 16 laser instrument single tube couplings, its quick shaft direction live width is about 3.5mm, and angle of divergence half-angle is 0.22 °, and the slow-axis direction live width is about 1.2mm, and angle of divergence half-angle is 0.55 °.Corresponding optical parameter is long-pending: the BPP1=13.2825mm.mrad of quick shaft direction, and the BPP2=11.55mm.mrad of slow-axis direction, as can be seen, both equate basically.
In order to advance NA is 0.22 optical fiber, and then after fast and slow axis focused on, the angle of divergence half-angle of both direction was all smaller or equal to arcsin (0.22)=12.7 °.The focal length that calculates fast axle focus lamp and slow axis focus lamp thus respectively is respectively: quick shaft direction f1=3.45/tan (12.7 °)=15.31mm, its in theory the focal beam spot radius be 0.05344mm; Slow-axis direction f2=1.45/tan (12.7 °)=6.434mm, its in theory the focal beam spot radius be 0.05615mm.Owing to there is the influence of aberration, the parameter that focuses on the back hot spot is: the quick shaft direction live width is 0.08mm, and angle of divergence half-angle is 12.45 °; The slow-axis direction live width is 0.06mm, and the angle of divergence is 12.6 °.The BPP of quick shaft direction
Fast=17.43mm.mrad, the BPP of slow-axis direction
Slow=13.23mm.mrad, then BPP
Total=21.88mm.mrad.And radius is 100um, NA is the BPP of 0.22 optical fiber
Fiber=22mm.mrad.Can find out BPP
Total＜BPP
Fiber, satisfying into three conditions of optical fiber, these 16 single tube coupled light beam can enter in the optical fiber of this 200um just, and output power is 79.724W, and by the Zemax simulation, its conversion efficiency reaches more than 99%.
Claims (6)
1. reusable high power semiconductor lasers optical fiber output module, it is characterized in that, comprise the laser beam shaping system, focusing system, last ladder base (10), downstairs base (9), last ladder base (10) and downstairs base (9) are interlocked by upper surface each other, the laser beam shaping system is installed in, on the step of downstairs base (13), focusing system is positioned at, on the outgoing direction of light outside the downstairs base, step (13) on the said downstairs base (9) is interspersed, the step of homonymy (13) is not V-shaped at the middle surface of contact each other of downstairs base (9), whole step (13) the surface of contact wave that is in the shape of the letter V, said to go up ladder base (10) identical with downstairs base (9) structure.
2. reusable high power semiconductor lasers optical fiber output module according to claim 1, it is characterized in that, said focusing system comprises fast axle focus lamp (6), slow axis focus lamp (7) and optical fiber (8), the back focus of fast axle focus lamp (6) and slow axis focus lamp (7) overlaps with the center of optical fiber (8) end face, and fast axle focus lamp (6), slow axis focus lamp (7) and optical fiber (8) end face are coaxial optical systems.
3. reusable high power semiconductor lasers optical fiber output module according to claim 1 and 2, it is characterized in that, said laser beam shaping system comprises semiconductor laser single tube (1), fast axis collimation mirror (2), slow axis collimating mirror (3) and right-angle prism (4), fast axis collimation mirror (2), slow axis collimating mirror (3), right-angle prism (4) is installed on the step (13) of ladder base, two base angles of right-angle prism are 45 °, right-angle prism (4) hypotenuse is parallel to step (13) V font surface of contact, it is corresponding with right-angle side on right-angle prism (4) the Z direction that the slow axis of slow axis collimating mirror (3) goes out plain edge (14), the fast axle of fast axis collimation mirror (2) goes out plain edge (15) and the slow axis of slow axis collimating mirror (3), and to go into plain edge (16) corresponding, semiconductor laser single tube (1) is installed in the side of ladder base (10) or downstairs base (9), said semiconductor laser single tube (1) comprises laser instrument single tube (12) and heat sink (11), laser instrument single tube (12) is installed on the side of heat sink (11), laser instrument single tube (12) go out the corresponding fast axis collimation mirror of luminous point go into plain edge (17), laser instrument single tube (12), fast axis collimation mirror (2), right-angle side on slow axis collimating mirror (3) and right-angle prism (4) the Z direction is a coaxial optical system.
4. reusable high power semiconductor lasers optical fiber output module according to claim 3 is characterized in that, and is not overlapping between the said semiconductor laser single tube (1), the placement of being separated by.
5. reusable high power semiconductor lasers optical fiber output module according to claim 3, it is characterized in that, said step (13) height is consistent with overall with on slow axis collimating mirror (3) the output beam Y direction, between step (13) width and same ladder base homonymy adjacent semiconductor laser instrument single tube (1) apart from consistent; The adjacent step of the heteropleural that is interlocked (13) length overall is both sides semiconductor laser single tubes (1) to the mid point of the hypotenuse of middle right-angle prism (4) apart from sum.
6. reusable high power semiconductor lasers optical fiber output module according to claim 1, it is characterized in that the light refraction face of said fast axle focus lamp (6), slow axis focus lamp (7), optical fiber (8) end face, fast axis collimation mirror (2), slow axis collimating mirror (3) and right-angle prism (4) all is coated with anti-reflection film.
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| CN102809822A (en) * | 2012-08-22 | 2012-12-05 | 温州泛波激光有限公司 | Beam coupling and focusing device for laser diode array |
| CN104538845A (en) * | 2014-12-30 | 2015-04-22 | 深圳市博锐浦科技有限公司 | Multi-single-tube-semiconductor laser optical fiber coupling packaging device |
| CN107078463A (en) * | 2014-09-12 | 2017-08-18 | 株式会社藤仓 | LD modules |
| CN108549156A (en) * | 2018-04-01 | 2018-09-18 | 额尔德尼毕利格 | Semiconductor laser device |
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| CN112636158A (en) * | 2021-03-05 | 2021-04-09 | 深圳市星汉激光科技股份有限公司 | Semiconductor laser with double-layer optical path |
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| CN114678774A (en) * | 2022-05-24 | 2022-06-28 | 江苏镭创高科光电科技有限公司 | Laser array coupling system with light beam correction function |
| CN114678774B (en) * | 2022-05-24 | 2022-08-09 | 江苏镭创高科光电科技有限公司 | Laser array coupling system with light beam correction function |
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