CN1218193A - Laser length-varying linear scanning system - Google Patents
Laser length-varying linear scanning system Download PDFInfo
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- CN1218193A CN1218193A CN 97122130 CN97122130A CN1218193A CN 1218193 A CN1218193 A CN 1218193A CN 97122130 CN97122130 CN 97122130 CN 97122130 A CN97122130 A CN 97122130A CN 1218193 A CN1218193 A CN 1218193A
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- laser
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- light beam
- scanning system
- linear scanning
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Abstract
A laser-line scan system is composed of laser unit, collimation diffusion unit, optical scanner, light beam deformation unit and barrier. The collimation diffusion unit is arranged after the laser unit. The optical scanner is arranged between collimation diffusion unit and light beam deformation unit. The barrier is arranged on working plane. Its advantages are simple structure, easy manufacture, high shaping speed and high quality of product.
Description
The present invention relates to a kind of laser length-varying linear scanning system, it is mainly used in the laser sintered length-varying linear scanning rapidform machine, also can be used for other Laser Processing or laser intelligence treatment technology.
Existing laser is made the rapidform machine of energy source, all is to adopt the laser spots method for scanning, with condenser laser beam is focused into a little, and focal point acts on the workplace so that processing parts.The laser spots scanning system generally has two kinds of patterns, and a kind of pattern is that scanning promptly is provided with optical scanner behind the lens behind condenser; Another kind of pattern is that scanning promptly is provided with optical scanner before the lens before condenser.The condenser of scanning (see figure 1) is positioned at paraxial light under work behind the lens, so its bore can do very for a short time, structure and process all very easy.But the track while scan of its focus point is a circular arc, track edges A ' locate with workplace A place from very far away, only could overlap with workplace, and sweep radius is more little at track center C place, this from big more, have a strong impact on the quality that workpiece quality or follow-up are handled.
(see figure 2) in the scanning before lens, track while scan is a straight line, can overlap fully with workplace, quality of scanning is good.But condenser has not been at paraxial light but has worked under big visual field, so the bore of condenser unit is bigger.For the crystalline material of making condenser, bore is big more, and the blank quality of this crystalline material be cannot say for sure card more, in case have some impurity or small defect in the material, all might cause the local accumulation of laser energy and causes that material bursts.In addition, because scanning increases the working field of view of condenser unit before the lens, for its visual field aberration is proofreaied and correct, must cause the condenser cellular construction complicated, originally the condenser unit that can be made up of lens just can achieve the goal with two even three lens possibly.Because bore strengthens, also cause the difficulty of optics processing simultaneously.
The purpose of this invention is to provide a kind of select for use light beam deformation unit bore little, simple in structure, easy to process, and can improve the laser length-varying linear scanning system of shaping speed and quantity of sintered parts.
Task of the present invention is achieved in that this laser length-varying linear scanning system comprises laser instrument, collimator and extender unit, optical scanner, light beam deformation unit and baffle plate, the collimator and extender unit is located at after the laser instrument, optical scanner is located between collimator and extender unit and the light beam deformation unit, and baffle plate is located on the workplace.
Above-mentioned laser instrument is to include the CO that points to semiconductor laser
2Laser instrument, other gas lasers, solid state laser or semiconductor laser.
Above-mentioned collimator and extender unit is made up of an inverted Galileo telescope, determines its multiplying power according to collimation and the specific requirement of expanding bundle.Galileo the simplest telescopical form is made up of a negative concave-sphere and a normal position of spherical lens, and the ratio of two mirror focal lengths equals the collimator and extender multiplying power.
Above-mentioned optical scanner is guide tracked optical scanner or rotary mirror type optical scanning device.Guide tracked optical scanner is made up of two or more optical mirrors and guide rail and motor, and optical mirror is contained on the guide rail, and the guide rails of two cover quadrature settings are moving in the x-y plane under the driving of motor.The rotary mirror type optical scanning device is made up of two cover optical mirrors and positioning motors, and this two overlaps optical mirror and the setting of positioning motor quadrature so that be implemented in two-dimensional scan in the x-y plane.
Above-mentioned light beam deformation unit makes the light beam that sends from laser instrument become a wire harness by the glued together or closely-spaced configuration of aspheric surface refraction optical element that one positive one negative two focal power opposite in signs, numerical value do not wait; The focal length by changing the positive light coke element in the light beam deformation unit and the width of aperture diaphragm size Control wire harness, the length of the focus controlling wire harness by changing the negative power element in the light beam deformation unit.
Negative power element in the above-mentioned light beam deformation unit can substitute with a zoom unit of being made up of one positive one negative two thin aspheric surface refracting elements, continuously change the interval of two aspheric surface refracting elements, make zooming range from negative value to zero again on the occasion of, thereby realize from putting elongated continuously in a certain line length scope.
One side sets up a negative concave-sphere in the output of light beam deformation unit, its back focus is overlapped with the back focus of positive light coke element in the light beam deformation unit, form a telescope unit, then the constant thin parallel beam of exportable live width in this meridian ellipse can obtain different line lengths on the diverse location in another perpendicular meridian ellipse.Mobile telescope unit changes operating distance can realize that wire harness is elongated continuously.
For improving the homogeneity of laser rays beam energy density, the wire harness of two or more that will be obtained by a few cover optical systems overlaps mutually, gets the equally distributed part of energy density in the middle of it, and the part that the both sides energy density is low uses baffle plate to keep off.
Because the present invention has adopted technique scheme, therefore compared with prior art, have following advantage:
1, because the bore of light beam deformation unit is little, so can select the material of the crystalline material of less diameter as light beam deformation unit crystal for use, diameter is less than 25mm;
2, the light beam deformation unit is simple in structure, can constitute by lens, and easy to process;
3, improved the speed of moulding;
4, improve the quality of profiled member, particularly improved the crudy of big workpiece.
The present invention is described in further detail below in conjunction with drawings and Examples.
Fig. 1 scans synoptic diagram behind the lens;
Fig. 2 is a scanning synoptic diagram before the lens;
Fig. 3 is guide tracked laser length-varying linear scanning system synoptic diagram;
Fig. 4 is a light beam deformation unit synoptic diagram;
Fig. 5 is the synoptic diagram that the wire harness overlap joint improves energy distribution uniformity;
Fig. 6 is a rotary mirror type laser length-varying linear scanning system synoptic diagram;
Fig. 7 is the light beam deformation unit synoptic diagram that contains zoom function;
Fig. 8 is the synoptic diagram that the zoom unit continuously changes line length;
Fig. 9 is φ-d graph of relation;
Figure 10 is that live width is constant, line length continually varying telescope unit synoptic diagram.
Fig. 3 is the synoptic diagram of one embodiment of the present of invention.Present embodiment is guide tracked laser length-varying linear scanning system, and this system is by including the CO that points to semiconductor laser
2Laser instrument 1, collimator and extender unit 2, reflective mirror 3, guide tracked optical scanner 4 and 5, light beam deformation unit 6 and two baffle plates 7 constitute.Collimator and extender unit 2 is located at CO
2After the laser instrument 1, guide tracked optical scanner 4 and 5 is located between collimator and extender unit 2 and the light beam deformation unit 6, and baffle plate 7 is located on the workplace P, laser wire harness S.Reflective mirror 3 is located between collimator and extender unit 2 and the guide tracked optical scanner 4.Guide tracked optical scanner is made up of two optical mirrors and guide rail and motor, and optical mirror is contained on the guide rail, and the guide rails of two cover quadrature settings are moving in the x-y plane under the driving of motor.
By CO
2The quasi-parallel circle light beam that laser instrument 1 sends further collimates behind collimator and extender unit 2 and expands bundle, through being folded to behind the reflective mirror 3 on guide tracked optical scanner 4 and 5, is contained in the optical scanner 4 and 5 on the guide rail, realizes x axle and the axial scanning of y by translation.Laser beam by optical scanner forms a not only thin but also long laser rays S through light beam deformation unit 6 again on workplace P.When optical scanner 5, light beam deformation unit 6 and baffle plate 7 were mobile along the x axle, laser rays was just at the x of workplace P axial scan.When optical scanner 4 and 5 and light beam deformation unit 6 and baffle plate 7 along the y axle when mobile, laser rays is just at the y of workplace P axial scan.Baffle plate 7 realizes that by computer control workplace P goes up the elongated of laser rays.CO
2The semiconductor laser that laser instrument contains sends red light beam and and the CO of pointing to
2The infrared laser beam that laser instrument sends is exported with light path.This redness also is a wire harness when pointing to light arrival workplace, and and CO
2Laser beam overlaps, and plays the effect of indication laser wire harness position when device is debug and move.
Above-mentioned CO
2Laser instrument can also be replaced by other gas lasers, solid state laser or semiconductor laser.
Above-mentioned collimator and extender unit is made up of an inverted Galileo telescope, determines its multiplying power according to collimation and the specific requirement of expanding bundle.Its simplest form is made up of a negative concave-sphere and a normal position of spherical lens, and the ratio of two mirror focal lengths equals the collimator and extender multiplying power.
Glued together or the closely-spaced configuration (see figure 4) of aspheric surface refraction optical element that above-mentioned light beam deformation unit is not waited by one positive one negative two focal power opposite in signs, numerical value.In Fig. 4,9-negative power aspheric surface refraction optical element; 10-positive light coke aspheric surface refraction optical element; E-plane wave wave front, 6-light beam deformation unit.Be provided with a branch of directional light, send nine light, behind the light beam deformation unit 6 of positive light coke aspheric surface refraction optical element 10 and two aspheric surface refraction optical elements of negative power, 9 compositions, in a meridian ellipse, beam convergence is become line, in another perpendicular meridian ellipse,, form desired not only thin but also long laser wire harness with beam broadening growth line S.
The width of wire harness
After selected laser wavelength lambda, rationally change aperture diaphragm size b and positive light coke element focal distance f '
Just, just can obtain desired live width.
The length of wire harness
When definite input laser beam bore a and work behind l, rationally change negative power element focal distance f '
Negative, just can obtain different line lengths.
Consider CO
2Laser instrument output Gaussian beam still is Gaussian distribution behind the generate wire harness, and energy distribution is uneven on the then online length direction, for improving the homogeneity of energy density; Can use two covers or above laser instrument and the optical system of two covers, obtain two or more laser rays, then they be overlapped (see figure 5).The energy distribution of a-Laser Output Beam among Fig. 5-1, the energy distribution behind the b-generate line.Fig. 5-2 is three energy distribution behind the line overlap joint, and wherein flat c is the part that energy even distributes, and the part that the both sides energy density is low uses baffle plate to keep off.It is consistent as far as possible that the laser rays overlap joint requires respectively to overlap optical component parameter, and guaranteeing has identical live width, and through fine adjustment, each bar laser rays is located along the same line.
Fig. 6 is the synoptic diagram of rotary mirror type laser length-varying linear scanning system embodiment.As shown in Figure 6, this scanning system is made of laser instrument 1, collimator and extender unit 2, rotary mirror type optical scanning device 8, light beam deformation unit 6 and two baffle plates 7.Rotary mirror type optical scanning device 8 is located between collimator and extender unit 2 and the light beam deformation unit 6, and all the other structures are identical with guide tracked scanning system.Rotary mirror type optical scanning device 8 is made up of two cover optical mirrors and positioning motor, and this two cover optical mirror and the setting of positioning motor quadrature are so that be implemented in the two-dimensional scan on x-y plane.P-workplace among Fig. 6, S-laser wire harness.The rotary mirror type optical scanning device is when the interscan of x-y plane, and laser wire harness S also does the x-y two-dimensional scan on workplace P.The scan angle of scanner is α, and the incident field angle of light beam deformation unit is 2 α, and they are decided by the processing dimension of workpiece.The elongated of laser wire harness also realized by computer control by two baffle plates.
The elongated of laser rays among above-mentioned two embodiment all need be finished by two baffle plates.These two baffle plates are positioned at the workplace top, as far as possible near workplace.By motor-driven, the folding amount of movement is respectively processed the geometry information of aspect by computer control according to workpiece to their opening and closing movement on guide rail.Though use baffle plate can realize the elongated of laser wire harness, the structure of further simplified apparatus, the negative power element in the light beam deformation unit can be substituted (see figure 7) with a zoom unit of being made up of one positive one negative two thin aspheric surface refracting elements.As shown in Figure 7, zoom unit in the light beam deformation unit is made up of a positive aspheric surface refracting element 12 and a negative aspheric surface refracting element 11, d is the interval of two elements among the figure, continuously change this interval d, can make zooming range from negative value to zero again on the occasion of, thereby realize to save the baffle element among above-mentioned two embodiment from putting elongated continuously in a certain line length scope.
In this zoom unit, total focal power φ=φ
1+ φ
2-d φ
1φ
2, φ wherein
1Be negative power element focal power, φ
2Be positive light coke element focal power, d is the interval of two mirrors.Work as φ
1, φ
2After determining, φ and d are linear.F '=l/ φ, f ' and d are non-linear.Fig. 9 has represented the relation curve of φ and d.
Fig. 8 utilizes the zoom unit to continuously change the synoptic diagram of line length.The process and and the elongated relation of laser wire harness of zoom are described below in conjunction with Fig. 8.Fig. 8 (a) is positioned at a certain meridian ellipse, and the zoom unit is equivalent to a level crossing in this meridian ellipse, focuses on after the directional light incident on positive light coke element 10 focal planes in the light beam deformation unit (being workplace HH ').Fig. 8 (b), Fig. 8 (c) and Fig. 8 (d) are positioned at and the perpendicular meridian ellipse of Fig. 8 (a), this moment, the positive light coke element 10 of light beam deformation unit was equivalent to a level crossing, and total focal power of the zoom unit of being made up of a positive aspheric surface refracting element 12 and negative aspheric surface refracting element 11 is just becoming (d) again by negative (b) vanishing (c).Their line lengths on workplace are represented by thick line.Continue development by Fig. 8 (d), when the focal power of positive light coke element in the light beam deformation unit among total focal power and Fig. 8 of zoom unit (a) equates, just on workplace, form a point.Like this, just realized from putting elongated continuously in a certain line length scope.
As shown in figure 10, one side sets up a negative concave-sphere 13 in light beam deformation unit (Fig. 4) output, its back focus is overlapped with the back focus of positive light coke element 10 in the light beam deformation unit, form a telescope unit, the constant thin parallel beam of exportable live width in this meridian ellipse then, and can obtain different line lengths on the diverse location in another perpendicular meridian ellipse.Mobile telescope unit changes operating distance can realize that wire harness is elongated continuously.Use this light beam deformation unit can obtain and use baffle plate to change the purpose of line length and use zoom unit change line length equally.
Claims (12)
1, a kind of laser length-varying linear scanning system, it is characterized in that: it comprises laser instrument, collimator and extender unit, optical scanner, light beam deformation unit and baffle plate, the collimator and extender unit is located at after the laser instrument, optical scanner is located between collimator and extender unit and the light beam deformation unit, and baffle plate is located on the workplace.
2, laser length-varying linear scanning system according to claim 1 is characterized in that: described laser instrument is to include the CO that points to semiconductor laser
2Laser instrument, other gas lasers, solid state laser or semiconductor laser.
3, laser length-varying linear scanning system according to claim 1 is characterized in that: described collimator and extender unit is made up of an inverted Galileo telescope, determines its multiplying power according to collimation and the specific requirement of expanding bundle.
4, laser length-varying linear scanning system according to claim 3 is characterized in that: described Galileo the simplest telescopical form is made up of a negative concave-sphere and a normal position of spherical lens, and the ratio of two mirror focal lengths equals the collimator and extender multiplying power.
5, laser length-varying linear scanning system according to claim 1 is characterized in that: described optical scanner is guide tracked optical scanner or rotary mirror type optical scanning device.
6, laser length-varying linear scanning system according to claim 5, it is characterized in that: described guide tracked optical scanner is made up of two or more optical mirrors and guide rail and motor, optical mirror is contained on the guide rail, and the guide rail of two cover quadrature settings is moving in the x-y plane under the driving of motor.
7, laser length-varying linear scanning system according to claim 5, it is characterized in that: described rotary mirror type optical scanning device is made up of two cover optical mirrors and positioning motors, and this two overlaps optical mirror and the setting of positioning motor quadrature so that be implemented in two-dimensional scan in the x-y plane.
8, laser length-varying linear scanning system according to claim 1, it is characterized in that: described light beam deformation unit makes the light beam that sends from laser instrument become a wire harness by the glued together or closely-spaced configuration of aspheric surface refraction optical element that one positive one negative two focal power opposite in signs, numerical value do not wait; The focal length by changing the positive light coke element in the light beam deformation unit and the width of aperture diaphragm size Control wire harness, the length of the focus controlling wire harness by changing the negative power element in the light beam deformation unit.
9, laser length-varying linear scanning system according to claim 8, it is characterized in that: the negative power element in the described light beam deformation unit can substitute with a zoom unit of being made up of one positive one negative two thin aspheric surface refracting elements, continuously change the interval of two aspheric surface refracting elements, make zooming range from negative value to zero again on the occasion of, thereby realize from putting elongated continuously in a certain line length scope.
10, laser length-varying linear scanning system according to claim 8, it is characterized in that: one side sets up a negative concave-sphere in the output of light beam deformation unit, its back focus is overlapped with the back focus of positive light coke element in the light beam deformation unit, form a telescope unit, then the constant thin parallel beam of exportable live width in this meridian ellipse can obtain different line lengths on the diverse location in another perpendicular meridian ellipse.
11, laser length-varying linear scanning system according to claim 10 is characterized in that: mobile telescope unit changes operating distance can realize that wire harness is elongated continuously.
12, laser length-varying linear scanning system according to claim 1, it is characterized in that: for improving the homogeneity of laser rays beam energy density, the wire harness of two or more that will be obtained by a few cover optical systems overlaps mutually, get the equally distributed part of its middle energy density, the part that the both sides energy density is low uses baffle plate to keep off.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97122130 CN1049740C (en) | 1997-11-24 | 1997-11-24 | Laser length-varying linear scanning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97122130 CN1049740C (en) | 1997-11-24 | 1997-11-24 | Laser length-varying linear scanning system |
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| Publication Number | Publication Date |
|---|---|
| CN1218193A true CN1218193A (en) | 1999-06-02 |
| CN1049740C CN1049740C (en) | 2000-02-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 97122130 Expired - Fee Related CN1049740C (en) | 1997-11-24 | 1997-11-24 | Laser length-varying linear scanning system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102759267A (en) * | 2011-06-27 | 2012-10-31 | 武汉晶石光电技术有限公司 | Metal sealed radio frequency carbon dioxide laser dryer |
| CN103917861A (en) * | 2011-09-15 | 2014-07-09 | 卡尔蔡司Smt有限责任公司 | Devices for determining layer thickness and/or contamination level of a belt |
| CN104898273A (en) * | 2015-05-27 | 2015-09-09 | 四川飞阳科技有限公司 | Optical scanning recognition system |
| CN106773025A (en) * | 2015-11-24 | 2017-05-31 | 深圳先进技术研究院 | Focusing lens and lens vibrating type laser scanning system |
-
1997
- 1997-11-24 CN CN 97122130 patent/CN1049740C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102759267A (en) * | 2011-06-27 | 2012-10-31 | 武汉晶石光电技术有限公司 | Metal sealed radio frequency carbon dioxide laser dryer |
| CN103917861A (en) * | 2011-09-15 | 2014-07-09 | 卡尔蔡司Smt有限责任公司 | Devices for determining layer thickness and/or contamination level of a belt |
| CN104898273A (en) * | 2015-05-27 | 2015-09-09 | 四川飞阳科技有限公司 | Optical scanning recognition system |
| CN104898273B (en) * | 2015-05-27 | 2017-12-26 | 四川飞阳科技有限公司 | Optical scanner identifying system |
| CN106773025A (en) * | 2015-11-24 | 2017-05-31 | 深圳先进技术研究院 | Focusing lens and lens vibrating type laser scanning system |
| CN106773025B (en) * | 2015-11-24 | 2019-07-16 | 深圳先进技术研究院 | Focusing lens and lens vibrating type laser scanning system |
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| Publication number | Publication date |
|---|---|
| CN1049740C (en) | 2000-02-23 |
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