CN112859354A - Laser cleaning device based on light field regulation and control technology - Google Patents
Laser cleaning device based on light field regulation and control technology Download PDFInfo
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- CN112859354A CN112859354A CN202110223781.0A CN202110223781A CN112859354A CN 112859354 A CN112859354 A CN 112859354A CN 202110223781 A CN202110223781 A CN 202110223781A CN 112859354 A CN112859354 A CN 112859354A
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- 230000033228 biological regulation Effects 0.000 title claims abstract description 27
- 238000004140 cleaning Methods 0.000 title claims abstract description 23
- 238000005516 engineering process Methods 0.000 title claims abstract description 19
- 230000001105 regulatory effect Effects 0.000 description 14
- 230000001276 controlling effect Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 230000010287 polarization Effects 0.000 description 5
- 238000007493 shaping process Methods 0.000 description 5
- 241001270131 Agaricus moelleri Species 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
Abstract
本发明公开了一种基于光场调控技术的激光清洗装置，包括依次设置的激光器、扩束准直系统、光场调控镜组和动态聚焦镜组，所述的激光器经过扩束准直系统后入射到光场调控镜组，所述的光场调控镜组将激光器输出的高斯光束整形为贝塞尔高斯光束、涡旋光束、径向偏振光束、角向偏振光束，之后经过动态聚焦镜组实现长焦深聚焦。本发明采用光场调控技术，将高斯光束整形为贝塞尔光束、涡旋光束、径向偏振光束、角向偏振光束，易于实现超长焦深的聚焦，避免了平顶光束或矩形光斑聚焦场光场强度的空间分布敏感、在焦平面前后易发生较大的畸变、不利于长焦深聚焦场实现的缺点，可以显著降低激光清洗加工材料表面的热影响，降低加工材料表面的粗糙度。
The invention discloses a laser cleaning device based on light field regulation technology, comprising a laser, a beam expansion collimation system, a light field regulation mirror group and a dynamic focusing mirror group arranged in sequence. Incident to the light field control mirror group, the light field control mirror group shapes the Gaussian beam output by the laser into a Bessel Gaussian beam, a vortex beam, a radially polarized beam, and an angularly polarized beam, and then passes through the dynamic focusing mirror group. Achieve long focal depth focus. The invention adopts the light field control technology to shape the Gaussian beam into Bessel beam, vortex beam, radially polarized beam and angularly polarized beam, which is easy to realize the focusing of ultra-long focal depth, and avoids the focusing of flat top beam or rectangular spot. The spatial distribution of the field intensity is sensitive, and it is prone to large distortion before and after the focal plane, which is not conducive to the realization of a long focal depth focusing field. .
Description
Technical Field
The invention relates to a laser cleaning device, in particular to a laser cleaning device based on a light field regulation and control technology.
Background
The principle of the laser cleaning device is to focus laser on the surface of a material to realize the stripping of rust layers, oil stains and the like. However, the output light beam of the laser is mostly gaussian light beam, and the central light intensity of the gaussian light beam is greater than the edge light intensity, so that the edge light intensity is difficult to reach the laser cleaning threshold value in the laser cleaning process, and the heat effect is generated, thereby increasing the roughness of the laser cleaning surface. Although some manufacturers shape the round Gaussian beam through the beam, the round flat-top beam or the rectangular light spot is obtained through beam shaping, so that the thermal influence of laser cleaning is reduced, and the scanning speed of the laser cleaning is increased. However, the flat-top light beam or the rectangular light spot obtained by shaping the diffractive optical element has very sensitive spatial distribution of the light field intensity of the focusing field, is easy to generate larger distortion in front of and behind the focal plane, and is not beneficial to realizing the long-focus-depth focusing field.
Disclosure of Invention
The purpose of the invention is as follows: the invention aims to provide a laser cleaning device based on a light field regulation and control technology, which reduces the heat influence of the laser cleaning of the surface of a processed material, improves the processing speed and reduces the roughness of the surface of the processed material.
The technical scheme is as follows: the laser focusing system comprises a laser, a beam expanding and collimating system, a light field regulating lens group and a dynamic focusing lens group which are sequentially arranged, wherein the laser passes through the beam expanding and collimating system and then enters the light field regulating lens group, and the light field regulating lens group shapes Gaussian beams output by the laser and then passes through the dynamic focusing lens group to realize long-focus depth focusing.
The light field regulating and controlling mirror group shapes the Gaussian beam output by the laser into a Bessel Gaussian beam, a vortex beam, a radial polarized beam and an angular polarized beam.
The light field regulating and controlling mirror group adopts an axicon, a wave plate or a variable vortex wave plate.
The wave plate comprises a quarter wave plate and a half wave plate.
The light field regulating and controlling mirror group adopts an axicon to shape the Gaussian beam into a Bessel beam.
The light field regulating and controlling mirror group adopts a quarter wave plate and a variable vortex wave plate to shape a Gaussian beam into a vortex beam.
The light field regulating and controlling mirror group adopts a half wave plate and a variable vortex wave plate to shape the Gaussian beam into a radial polarized beam or an angular polarized beam.
And a movable working table is arranged behind the light field regulating lens group, and a material to be cleaned is placed on the movable working table.
The dynamic focusing lens group comprises a plurality of lenses, and dynamic changes of the size of a light spot and the focal length can be realized at the same time.
Has the advantages that: the invention adopts the light field regulation and control technology to shape the Gaussian beam into the Bessel beam, the vortex beam, the radial polarized beam and the angular polarized beam, is easy to realize the focusing of the ultralong focal depth, avoids the defects that the spatial distribution of the light field intensity of a flat-top beam or a rectangular light spot focusing field is sensitive, large distortion is easy to occur in front of and behind a focal plane and the realization of the long focal depth focusing field is not facilitated, can obviously reduce the heat influence of the laser on the surface of a processing material and reduce the roughness of the surface of the processing material.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a light field regulating mirror group for shaping Gaussian beams into Bessel beams according to the present invention;
FIG. 3 is a light field regulating lens group for shaping Gaussian beams into vortex beams according to the invention;
FIG. 4 is a light field regulating lens group for shaping Gaussian beams into radial and angular polarized beams.
Detailed Description
The invention will be further explained with reference to the drawings.
As shown in fig. 1, the present invention includes a laser 1, a beam expanding collimation system 8, a light field regulating lens group 3, a dynamic focusing lens group 4 and a movable worktable 7, which are sequentially arranged, wherein the dynamic focusing lens group 4 is composed of two lenses, dynamic focusing of the focusing lens group is realized through displacement of the lenses, dynamic changes of spot size and focal length can be simultaneously realized, the spot range is 50-80 μm, the focal length change range is 300-1000mm, and a material to be cleaned is placed on the movable worktable 7. The laser 1 is incident to the light field regulating and controlling mirror group 3 after passing through the beam expanding and collimating system 8, the laser beam is shaped into a Bessel beam 41, a vortex beam 61, a radial polarized beam 62 and an angular polarized beam 63 from a Gaussian beam 2 through a simple optical mirror group (such as an axicon 31, a wave plate, a variable vortex wave plate 5 and the like), and then the long-focus deep focusing is realized through the dynamic focusing mirror group 4, so that the laser cleaning effect is improved. Wherein, the axicon 31 is adopted to integrate the Gaussian beam 2 into a Bessel beam 41; the quarter-wave plate 32 is adopted to convert the linear polarization Gaussian beam into a circular polarization Gaussian beam, and the circularly polarized light 42 is shaped into a vortex beam 61 after passing through the variable vortex wave plate 5; and a half wave plate 33 is adopted to adjust the polarization direction of the Gaussian beam 2 and the direction angle of the surface fast axis distribution of the variable vortex wave plate 5 to obtain radial and angular polarization beams.
As shown in fig. 2, the gaussian beam 2 coaxial with the optical axis 11 passes through the axicon 31 and is integrated into a bessel beam 41, and the bessel beam 41 is incident on the dynamic focusing system 4 to realize dynamic focusing.
As shown in fig. 3, the gaussian beam 2 coaxial with the optical axis 11 is converted into circularly polarized light 42 after passing through the quarter-wave plate 32, the circularly polarized light 42 is shaped into a vortex beam 61 after passing through the variable vortex wave plate 5, and the vortex beam 61 is incident on the dynamic focusing system 4 to realize dynamic focusing.
As shown in fig. 4, the gaussian beam 2 coaxial with the optical axis 11 passes through the half-wave plate 33, the polarization direction of the gaussian beam 2 is adjusted to obtain the gaussian beam 2, and then the radial polarized beam 62 or the angular polarized beam 63 can be obtained by adjusting the direction angle of the fast axis distribution of the surface of the variable vortex wave plate 5 and the gaussian beam 2, and the beams are incident on the dynamic focusing system 4 to realize dynamic focusing.
The invention combines the light field regulation and control technology and the dynamic focusing technology to realize the focusing of long focal depth. By adopting a light field regulation and control technology, the Gaussian beam output by the laser source is shaped by a simple optical lens group (such as an axicon, a variable vortex wave plate and the like) to obtain a Bessel Gaussian beam, a vortex beam, a radial polarized beam, an angular polarized beam and the like. Researches show that the Bessel Gaussian beam is easy to realize the focusing of the ultra-long focal depth, vector beams such as vortex beams, radial polarized beams and angular polarized beams have the characteristic of annular light intensity distribution, the focusing of the long focal depth can be realized, the effect of the beam in laser processing is equivalent to that of a flat-top beam, the thermal influence of the laser on the surface of a processed material cleaned by the laser can be obviously reduced, the processing speed is improved, and the roughness of the surface of the processed material is reduced.
Claims (9)
1. The laser cleaning device based on the light field regulation and control technology is characterized by comprising a laser (1), a beam expanding and collimating system (8), a light field regulation and control lens group (3) and a dynamic focusing lens group (4) which are sequentially arranged, wherein the laser (1) is incident to the light field regulation and control lens group (3) after passing through the beam expanding and collimating system (8), and the light field regulation and control lens group (3) shapes a Gaussian beam (2) output by the laser (1) and then realizes long focal depth focusing through the dynamic focusing lens group (4).
2. The laser cleaning device based on the light field regulation and control technology according to claim 1, characterized in that the light field regulation and control lens group (3) shapes the Gaussian beam (2) output by the laser (1) into a Bessel Gaussian beam (41), a vortex beam (61), a radial polarized beam (62) and an angular polarized beam (63).
3. The laser cleaning device based on the light field regulation and control technology according to claim 1 or 2, characterized in that the light field regulation and control mirror group (3) adopts an axicon (31), a wave plate or a variable vortex wave plate (5).
4. The laser cleaning device based on the light field regulation technology as claimed in claim 3, wherein the wave plate comprises a quarter wave plate (32) and a half wave plate (33).
5. The laser cleaning device based on the light field regulation and control technology according to claim 3, characterized in that the light field regulation and control mirror group (3) adopts an axicon (31) to shape the Gaussian beam (2) into a Bessel beam (41).
6. The laser cleaning device based on the light field regulation and control technology according to claim 3, characterized in that the light field regulation and control mirror group (3) adopts a quarter wave plate (32) and a variable vortex wave plate (5) to shape the Gaussian beam (2) into a vortex beam (61).
7. The laser cleaning device based on the light field regulation and control technology according to claim 3, characterized in that the light field regulation and control lens group (3) adopts a half wave plate (33) and a variable vortex wave plate (5) to shape the Gaussian beam (2) into a radial polarized beam (62) or an angular polarized beam (63).
8. The laser cleaning device based on the light field regulation technology according to claim 3, characterized in that a movable worktable (7) is arranged behind the light field regulation mirror group (3), and a material to be cleaned is placed on the movable worktable (7).
9. The laser cleaning device based on the light field regulation and control technology as claimed in claim 1, characterized in that the dynamic focusing lens group (4) comprises a plurality of lenses, which can simultaneously realize dynamic changes of spot size and focal length.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110223781.0A CN112859354A (en) | 2021-03-01 | 2021-03-01 | Laser cleaning device based on light field regulation and control technology |
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| CN202110223781.0A CN112859354A (en) | 2021-03-01 | 2021-03-01 | Laser cleaning device based on light field regulation and control technology |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114850660A (en) * | 2022-06-01 | 2022-08-05 | 广东宏石激光技术股份有限公司 | Laser processing method of vortex light beam |
| CN114994929A (en) * | 2022-05-27 | 2022-09-02 | 湖北大学 | Device for generating circular flat-top light beam |
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Cited By (4)
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