CN105185736A - Full-automatic railboat feeding and blanking machine - Google Patents
Full-automatic railboat feeding and blanking machine Download PDFInfo
- Publication number
- CN105185736A CN105185736A CN201510513024.1A CN201510513024A CN105185736A CN 105185736 A CN105185736 A CN 105185736A CN 201510513024 A CN201510513024 A CN 201510513024A CN 105185736 A CN105185736 A CN 105185736A
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- China
- Prior art keywords
- quartz boat
- basket tool
- railboat
- sucker
- basket
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Specific Conveyance Elements (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a full-automatic railboat feeding and blanking machine, comprising a rack, a capture moving assembly, a railboat carrier sliding table mechanism, a basket belt conveyor line and a human-computer interface. The capture moving assembly comprises a double-sucker assembly, a sucker left-right moving mechanism, and a sucker up-down moving mechanism. The railboat carrier sliding table mechanism comprises a railboat carrier, and the railboat carrier is internally provided with a railboat silicon wafer correction device. The bottom of the railboat carrier sliding table mechanism is provided with a railboat upper sheet and lower sheet supporting mechanism. The bottom of the basket belt conveyor line is provided with a basket upper sheet and lower sheet supporting mechanism. The basket belt conveyor line is provided with a basket and a guiding device. The basket is internally provided with a basket silicon wafer correction device. A silicon wafer is attracted by a vacuum sucker, and the machine can perform feeding and blanking on a large quantity of silicon wafers, so working efficiency is improved, and high damage percentage caused by manual wafer insertion is reduced. The full-automatic railboat feeding and blanking machine can perform a plurality of procedures at the same time, and saves labor cost.
Description
Technical field
The present invention relates to a kind of solar cell manufacturing equipment, be specifically related to a kind of full-automatic quartz boat charging & discharging machine.
Background technology
In current solar cell manufacture process, include multiple operation, as Wafer Cleaning, making herbs into wool, diffusion etc., in above-mentioned operation, all need silicon chip to load in basket tool and in quartz boat mutually replace.In prior art, being all accustomed to adopting the mode of artificial inserted sheet to operate, easily there is the problems such as fragment rate is high, large to the pollution of silicon chip, efficiency is low in which.
Summary of the invention
(1) technical problem that will solve
In order to overcome prior art deficiency, now proposing a kind ofly automatically quartz boat and basket tool can be replaced load mutually, operating efficiency is high, automaticity is high, reduce the full-automatic quartz boat charging & discharging machine of fragment rate.
(2) technical scheme
Of the present inventionly to be achieved through the following technical solutions: the present invention proposes a kind of full-automatic quartz boat charging & discharging machine, comprise frame, capture moving assembly, quartz boat carrier slipway mechanism, basket tool belt conveyor line and man-machine interface, described crawl moving assembly comprises Double-sucker assembly, sucker left/right movement device and sucker reciprocating mechanism, described quartz boat carrier slipway mechanism includes a quartz boat carrier, quartz boat silicon chip means for correcting is provided with in described quartz boat carrier, quartz boat fluctuating plate supporting spring mechanism is provided with bottom described quartz boat carrier slipway mechanism, the bottom of described basket tool belt conveyor line is provided with basket tool fluctuating plate supporting spring mechanism, described basket tool belt conveyor line is provided with basket tool and guiding device simultaneously, basket tool silicon chip means for correcting is provided with in described basket tool.
Improve as one, described quartz boat carrier slipway mechanism and basket tool belt conveyor line are provided with detent mechanism, and described detent mechanism includes multiple cylinder and detecting sensor.
As further improvement, described basket tool belt conveyor line includes three sections of belt line, and every section is controlled separately by servomotor.
As further improvement, every section of belt line is provided with one group of basket tool detecting sensor.
As further improvement, described Double-sucker assembly is connected with vacuum system, and described Suction cup assembly includes two sucker groups controlled separately back-to-back.
(3) beneficial effect
The present invention, relative to prior art, has following beneficial effect:
The full-automatic quartz boat charging & discharging machine of the one that the present invention mentions, it adopts full-automatic mechanical operation, adopt vacuum cup absorption silicon chip, loading and unloading can be carried out to a large amount of silicon chip at every turn simultaneously, improve loading and unloading operating efficiency, reduce the high percentage of damage caused because of artificial inserted sheet, multiple operation can carry out by this full-automatic quartz boat charging & discharging machine simultaneously simultaneously, save cost of labor, be applicable to use of large-scale production.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is elastic holder skeleton schematic diagram.
Fig. 3 is elastic holder structural representation.
Fig. 4 is public pullover structural representation.
1-frame; 2-captures moving assembly; 3-quartz boat carrier slipway mechanism; 4-basket tool belt conveyor line; 5-man-machine interface; 6-detent mechanism; 21-Double-sucker assembly; 22-sucker left/right movement device; 23-sucker reciprocating mechanism; 31-quartz boat silicon chip means for correcting; 32-quartz boat fluctuating plate supporting spring mechanism; 41-basket tool fluctuating plate supporting spring mechanism; 42-basket tool and guiding device; 43-basket tool silicon chip means for correcting.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
The full-automatic quartz boat charging & discharging machine of one as shown in Figures 1 to 4, comprise frame 1, capture moving assembly 2, quartz boat carrier slipway mechanism 3, basket tool belt conveyor line 4 and man-machine interface 5, described crawl moving assembly 2 comprises Double-sucker assembly 21, sucker left/right movement device 22 and sucker reciprocating mechanism 23, described quartz boat carrier slipway mechanism 3 includes a quartz boat carrier, quartz boat silicon chip means for correcting 31 is provided with in described quartz boat carrier, quartz boat fluctuating plate supporting spring mechanism 32 is provided with bottom described quartz boat carrier slipway mechanism 3, the bottom of described basket tool belt conveyor line 4 is provided with basket tool fluctuating plate supporting spring mechanism 41, described basket tool belt conveyor line 4 is provided with basket tool and guiding device 42 simultaneously, basket tool silicon chip means for correcting 43 is provided with in described basket tool.
Wherein, described quartz boat carrier slipway mechanism 3 and basket tool belt conveyor line 4 are provided with detent mechanism 6, and described detent mechanism includes multiple cylinder and detecting sensor; Described basket tool belt conveyor line 4 includes three sections of belt line, and every section is controlled separately by servomotor; Every section of belt line is provided with one group of basket tool detecting sensor, whether arrives assigned address for detecting basket tool, providing a signal to next step action; Described Double-sucker assembly 21 is connected with vacuum system, and described Suction cup assembly 21 includes two sucker groups controlled separately back-to-back.
The full-automatic quartz boat charging & discharging machine of one that above specific embodiment is mentioned, it is when specifically using, for 100 silicon chips:
During blanking, the quartz boat of fully loaded 100 silicon chips is put on quartz boat carrier slipway mechanism 3 by the mode of artificial loading, after detent mechanism location, being sent to by servomotor captures below moving assembly 2, meanwhile manually empty basket tool is put into basket tool belt conveyor line 4 first paragraph belt conveyor line place, be sent to basket tool belt conveyor line 4 second segment pipeline by conveyer belt, basket tool detent mechanism 6 is located.Double-sucker assembly 21 runs to above quartz boat subsequently, and drive sucker reciprocating mechanism 23 by servomotor, after dropping to desired location, Suction cup assembly 21 vacuum system is started working, and draws silicon chip.After Suction cup assembly 21 rises to desired location, the desired location above basket tool belt conveyor line 4 second segment pipeline basket tool is run to by sucker left/right movement device 22, start to decline, decline process middle basket tool silicon chip means for correcting 43, basket tool fluctuating plate supporting spring mechanism 41 start working, silicon chip is put on basket tool, after vacuum breaker, rises to setting height.Basketful basket tool by basket tool belt conveyor line 4 the 3rd section of pipeline, is derived basketful silicon chip again.Periodic duty like this.
Suction cup assembly 21 comprises two sucker groups, the silicon chip back-to-back of every lattice is held by two suckers, hold latter two sucker servo to rise simultaneously, silicon chip is taken out in quartz boat, so latter two sucker group is separated in overhead, then each sucker group all there are 50 silicon chips, and two groups 50 silicon chips are oppositely arranged, so latter two sucker group moves to the top of plastic basket tool separately, silicon chip is slowly placed in edge on basket tool by the sucker group moved to directly over basket tool, left and right fork closes up, silicon chip is made to aim at the groove of basket tool, then sucker group continues to decline, silicon chip enters basket tool, basket tool fluctuating plate supporting spring mechanism 41 below basket tool rises and catches silicon chip, then sucker group release vacuum, silicon chip drops in basket tool fluctuating plate supporting spring mechanism 41, basket tool fluctuating plate supporting spring mechanism 41 slowly declines, until silicon chip falls within basket tool completely.So far, complete the process from quartz boat, silicon chip being imported plastic basket tool, the plastic basket tool of leading full silicon chip is delivered to basket tool belt conveyor line 4 the 3rd section of belt through conveyer belt, treats manually to take away.Circulate according to this, the silicon chip in 100 lattice quartz boats all takes out, and is filled altogether by 4 basket tools.
Material loading scheme is contrary with blanking scheme, during concrete enforcement, every basket 50 silicon chips are drawn respectively by Suction cup assembly 21 two sucker groups in basket tool, until time above sucker group to quartz boat carrier slipway mechanism 3, sucker combination is held together, two groups of 50 silicon chips close up 100 silicon chips put in form interval back-to-back, Suction cup assembly 21 starts to decline, in decline process, quartz boat silicon chip means for correcting 31, quartz boat fluctuating plate supporting spring mechanism 32 start working, silicon chip is put in quartz boat, completes feeding process.
Embodiment recited above is only be described the preferred embodiment of the present invention, not limits the spirit and scope of the present invention.Under the prerequisite not departing from design concept of the present invention; the various modification that this area ordinary person makes technical scheme of the present invention and improvement; all should drop into protection scope of the present invention, the technology contents of request protection of the present invention, all records in detail in the claims.
Claims (5)
1. a full-automatic quartz boat charging & discharging machine, comprise frame (1), capture moving assembly (2), quartz boat carrier slipway mechanism (3), basket tool belt conveyor line (4) and man-machine interface (5), it is characterized in that: described crawl moving assembly (2) comprises Double-sucker assembly (21), sucker left/right movement device (22) and sucker reciprocating mechanism (23), described quartz boat carrier slipway mechanism (3) includes a quartz boat carrier, quartz boat silicon chip means for correcting (31) is provided with in described quartz boat carrier, described quartz boat carrier slipway mechanism (3) bottom is provided with quartz boat fluctuating plate supporting spring mechanism (32), the bottom of described basket tool belt conveyor line (4) is provided with basket tool fluctuating plate supporting spring mechanism (41), described basket tool belt conveyor line (4) is provided with basket tool and guiding device (42) simultaneously, basket tool silicon chip means for correcting (43) is provided with in described basket tool.
2. the full-automatic quartz boat charging & discharging machine of one according to claim 1, it is characterized in that: described quartz boat carrier slipway mechanism (3) and basket tool belt conveyor line (4) are provided with detent mechanism (6), and described detent mechanism includes multiple cylinder and detecting sensor.
3. the full-automatic quartz boat charging & discharging machine of one according to claim 1, is characterized in that: described basket tool belt conveyor line (4) includes three sections of belt line, and every section is controlled separately by servomotor.
4. the full-automatic quartz boat charging & discharging machine of one according to claim 3, is characterized in that: every section of belt line is provided with one group of basket tool detecting sensor.
5. the full-automatic quartz boat charging & discharging machine of one according to claim 1, is characterized in that: described Double-sucker assembly (21) is connected with vacuum system, and described Suction cup assembly (21) includes two sucker groups controlled separately back-to-back.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510513024.1A CN105185736B (en) | 2015-08-20 | 2015-08-20 | A kind of full-automatic quartz boat charging ＆ discharging machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510513024.1A CN105185736B (en) | 2015-08-20 | 2015-08-20 | A kind of full-automatic quartz boat charging ＆ discharging machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105185736A true CN105185736A (en) | 2015-12-23 |
| CN105185736B CN105185736B (en) | 2018-01-23 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510513024.1A Expired - Fee Related CN105185736B (en) | 2015-08-20 | 2015-08-20 | A kind of full-automatic quartz boat charging ＆ discharging machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105185736B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106129184A (en) * | 2016-08-23 | 2016-11-16 | 昊诚光电（太仓）有限公司 | A kind of PE spreads automatic loading and unloading device |
| CN107204390A (en) * | 2017-07-12 | 2017-09-26 | 无锡市瑞能科技有限公司 | Semi-automatic quartz boat guide card machine |
| CN107364719A (en) * | 2017-08-31 | 2017-11-21 | 东莞市李群自动化技术有限公司 | A kind of sheet glass feeding and conveying device |
| CN108364854A (en) * | 2018-02-11 | 2018-08-03 | 无锡先导智能装备股份有限公司 | The method that quartz boat moves back handling silicon chip after boat in photovoltaic diffusion or annealing operation |
| CN109556411A (en) * | 2017-09-26 | 2019-04-02 | 天津环鑫科技发展有限公司 | A kind of silicon wafer production furnace body automatic loading and unloading mechanism |
| CN111668146A (en) * | 2020-06-23 | 2020-09-15 | 无锡市江松科技有限公司 | Automatic working line for loading and unloading wafers of horizontal silicon wafer quartz boat |
| CN113437003A (en) * | 2021-04-02 | 2021-09-24 | 科尔迅智能科技(深圳)有限公司 | High-speed sheet arranging machine |
| CN116504696A (en) * | 2023-06-29 | 2023-07-28 | 苏州诚拓智能装备有限公司 | PECVD transfer device and transfer method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201663151U (en) * | 2009-03-06 | 2010-12-01 | 东莞市启天自动化设备有限公司 | Full automatic silicon chip loading and unloading machine |
| CN202736891U (en) * | 2012-05-19 | 2013-02-13 | 东莞市启天自动化设备有限公司 | Silicon wafer unloading machine |
| CN202736892U (en) * | 2012-05-19 | 2013-02-13 | 东莞市启天自动化设备有限公司 | Silicon wafer feeding machine |
-
2015
- 2015-08-20 CN CN201510513024.1A patent/CN105185736B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201663151U (en) * | 2009-03-06 | 2010-12-01 | 东莞市启天自动化设备有限公司 | Full automatic silicon chip loading and unloading machine |
| CN202736891U (en) * | 2012-05-19 | 2013-02-13 | 东莞市启天自动化设备有限公司 | Silicon wafer unloading machine |
| CN202736892U (en) * | 2012-05-19 | 2013-02-13 | 东莞市启天自动化设备有限公司 | Silicon wafer feeding machine |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106129184A (en) * | 2016-08-23 | 2016-11-16 | 昊诚光电（太仓）有限公司 | A kind of PE spreads automatic loading and unloading device |
| CN107204390A (en) * | 2017-07-12 | 2017-09-26 | 无锡市瑞能科技有限公司 | Semi-automatic quartz boat guide card machine |
| CN107364719A (en) * | 2017-08-31 | 2017-11-21 | 东莞市李群自动化技术有限公司 | A kind of sheet glass feeding and conveying device |
| CN109556411A (en) * | 2017-09-26 | 2019-04-02 | 天津环鑫科技发展有限公司 | A kind of silicon wafer production furnace body automatic loading and unloading mechanism |
| CN108364854A (en) * | 2018-02-11 | 2018-08-03 | 无锡先导智能装备股份有限公司 | The method that quartz boat moves back handling silicon chip after boat in photovoltaic diffusion or annealing operation |
| CN108364854B (en) * | 2018-02-11 | 2023-01-17 | 无锡先导智能装备股份有限公司 | Method for unloading silicon wafers after quartz boat retreating in photovoltaic diffusion or annealing process |
| CN111668146A (en) * | 2020-06-23 | 2020-09-15 | 无锡市江松科技有限公司 | Automatic working line for loading and unloading wafers of horizontal silicon wafer quartz boat |
| CN113437003A (en) * | 2021-04-02 | 2021-09-24 | 科尔迅智能科技(深圳)有限公司 | High-speed sheet arranging machine |
| CN113437003B (en) * | 2021-04-02 | 2022-04-01 | 科尔迅智能科技(深圳)有限公司 | High-speed sheet arranging machine |
| CN116504696A (en) * | 2023-06-29 | 2023-07-28 | 苏州诚拓智能装备有限公司 | PECVD transfer device and transfer method |
| CN116504696B (en) * | 2023-06-29 | 2023-09-15 | 苏州诚拓智能装备有限公司 | PECVD transfer device and transfer method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105185736B (en) | 2018-01-23 |
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Effective date of registration: 20200526 Address after: 523000 Room 101, building 2, No.1, Chibu Road, Zhangmutou town, Dongguan City, Guangdong Province Patentee after: GUANGDONG QITIAN AUTOMATIC INTELLIGENT EQUIPMENT Co.,Ltd. Address before: 523637, building 8, two bamboo street, Sassafras community, Zhangmutou town, Dongguan, Guangdong Patentee before: DONGGUAN QITIAN AUTOMATICAL EQUIPMENT Co.,Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180123 |