CN106129184A - A kind of PE spreads automatic loading and unloading device - Google Patents
A kind of PE spreads automatic loading and unloading device Download PDFInfo
- Publication number
- CN106129184A CN106129184A CN201610707227.9A CN201610707227A CN106129184A CN 106129184 A CN106129184 A CN 106129184A CN 201610707227 A CN201610707227 A CN 201610707227A CN 106129184 A CN106129184 A CN 106129184A
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- mechanical arm
- positioner
- arm
- tablet
- posting
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- 230000003028 elevating effect Effects 0.000 claims abstract description 32
- 238000009792 diffusion process Methods 0.000 claims abstract description 12
- 230000005540 biological transmission Effects 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 7
- 230000033001 locomotion Effects 0.000 claims description 6
- 210000003437 trachea Anatomy 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 2
- 241000252254 Catostomidae Species 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000009434 installation Methods 0.000 abstract description 2
- 239000004698 Polyethylene Substances 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 244000126211 Hericium coralloides Species 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Manipulator (AREA)
Abstract
The invention provides a kind of PE and spread automatic loading and unloading device, it is characterized in that: this PE diffusion automatic loading and unloading device includes workbench, it is provided with transporting rail on described workbench, one end of described transmission rail is provided with positioner, non-contacting above described positioner support is installed, elevating lever is connected with described support vertical, and the upper surface of described elevating lever is provided with mechanical arm, and the bottom of described elevating lever is provided with the horizontal rail paralleled with described support；Without artificial inserted sheet, whole production line designs automatic alarm, is automatically stopped information, it is achieved Automated condtrol, after design determines, Parts Purchasing, installation and debugging, operational approach determines, is used for producing.
Description
Technical field
The present invention relates to field of machinery automation, in particular it relates to a kind of PE spreads automatic loading and unloading device.
Background technology
Solar battery sheet production needs diffusion and PE (polyethylene) plated film after silicon chip surface corrosion making herbs into wool again, diffusion
System knot is to be placed in the quartz container of tubular diffusion furnace by silicon chip, and every silicon chip need to be put on the carrier of quartz boat by this process；
PE plated film is that at plasma chemical vapor deposition equipment (contracting claims PECVD), silicon chip is passed through proper amount of gas, and gas is through a series ofization
Learn reaction and plasma reaction, form solid film at silicon chip surface.Need silicon chip is repeatedly proceeded to difference during these two
Carrier.Existing production line is by entering next procedure after artificial inserted sheet, unloading piece, along with single after the increase of wafer size and process modification
Boat loads the increase of number of wafers, and production process needs a large amount of human users, and labor strength increases.
Summary of the invention
Present invention aims to above-mentioned the deficiencies in the prior art, it is provided that a kind of PE diffusion automatic loading/unloading dress
Put.
For achieving the above object, present invention employs following technical scheme:
A kind of PE spreads automatic loading and unloading device, and this PE diffusion automatic loading and unloading device includes workbench, described workbench
On be provided with transporting rail, one end of described transmission rail is provided with positioner, installs non-contactly above described positioner
Having support, elevating lever to be connected with described support vertical, the upper surface of described elevating lever is provided with mechanical arm, described elevating lever
Bottom is provided with the horizontal rail paralleled with described support.
Further, described transporting rail has three, and every described transporting rail is parallel to each other.
Further, described positioner is three, is separately fixed on three transporting rails；The most each described location dress
Putting and include front jig arm, rear jig arm and posting, described front jig arm and described rear jig arm are arranged on the two of every described transporting rail
Side, described posting is arranged on every described transporting rail.
Further, described elevating lever is two, and said two elevating lever phase on the length direction of described horizontal rail
Be arrangeding in parallel mutually, described mechanical arm is two, and each described elevating lever is respectively provided with a described mechanical arm.
Further, each described mechanical arm includes base, and the vertical lower end of described base is sequentially installed with connector and grabs
Arm, described base and described connector are provided with trachea.
Further, described gripping arm is provided with multiple comb arranged in parallel, the plurality of comb vertically with described company
Fitting is connected.
Further, each described comb is provided with multiple sucker.
The present invention also provides for a kind of method using above-mentioned PE diffusion automatic loading and unloading device to carry out loading and unloading, including following
Step:
1) under the drive of the first transporting rail and the second transporting rail, the first material distributing rest is towards the first positioner and second
The direction motion of positioner, when the first material distributing rest moves on the first posting and the second posting respectively, the first fore-clamp
After arm and first, jig arm clamps the tablet on the first posting, and before second, after jig arm and second, jig arm is clamped on the second posting
Tablet；
2) opening air pump, the sucker on the first mechanical arm holds the tablet on the first posting, on the second mechanical arm
Sucker holds the tablet on the second posting, the first mechanical arm and the second mechanical arm under the control of PLC, along horizontal rail
Length direction, moves to the top of the 3rd positioner, the first mechanical arm and the second mechanical arm and tablet is put into the 3rd calmly simultaneously
In the frame of position, closing air pump, the sucker on the first mechanical arm and the second mechanical arm lays down suction, presss from both sides before the 3rd after jig arm and the 3rd
Arm fixes tablet, completes to close material step；
3) under the drive of the 3rd transporting rail, the second material distributing rest moves, when second point towards the direction of the 3rd positioner
When bin moves on the 3rd positioner, before the 3rd, after jig arm and the 3rd, jig arm clamps the tablet on the second material distributing rest；
4) opening air pump, the sucker on the first mechanical arm and the second mechanical arm holds the material on the 3rd positioner simultaneously
Sheet, under the control of PLC, the first mechanical arm and the second mechanical arm, along the length direction of horizontal rail, move to first respectively
Positioner and the top of the second positioner, the tablet that sucker is inhaled by the first mechanical arm is put in the first positioner, the
The tablet that sucker is inhaled by two mechanical arms is put in the second positioner, closes air pump, lays down suction, complete sub-material step.
The invention have the benefit that and make diffusion plated film silicon chip in polysilicon solar battery slice production line the most upper and lower
Material, it is not necessary to artificial inserted sheet, whole production line designs automatic alarm, is automatically stopped information, it is achieved Automated condtrol, reduces operator
Member, improves production efficiency, reduces artificial fragmentation probability simultaneously, improves product quality, reduces production cost, produces for industrialization and carries
Supply advantage.
Accompanying drawing explanation
Fig. 1 is the plan structure schematic diagram of a kind of PE of present invention diffusion automatic loading and unloading device；
Fig. 2 is positioning device structure schematic diagram in the embodiment of the present invention；
Fig. 3 is mechanical arm structural representation in the embodiment of the present invention；
Fig. 4 is the enlarged diagram of circle frame A in Fig. 3；
Fig. 5 is comb and the enlarged diagram of connector in the embodiment of the present invention.
Wherein, 1, workbench；2, support；3, horizontal rail；4-1, the first elevating lever；4-2, the second elevating lever；5-1,
One base；6-1, the first mechanical arm；6-2, the second mechanical arm；7-1, the first connector；8-1, the first gripping arm；9-1, the first comb
Tooth；10, sucker；11-1, the first trachea；13, the first positioner；13-1, jig arm before first；13-2, jig arm after first；13-
3, the first posting；14, the second positioner；14-1, jig arm before second；14-2, jig arm after second；14-3, the second posting；
15, the 3rd positioner；15-1, jig arm before the 3rd；15-2, jig arm after the 3rd；15-3, the 3rd posting；12-1, the first transmission
Track；12-2, the second transporting rail；12-3, the 3rd transporting rail；16-1, the first material distributing rest；16-2, the second material distributing rest.
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with the accompanying drawings and embodiment, right
The present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, not
For limiting the present invention.
As it is shown in figure 1, the PE in an embodiment spreads automatic loading and unloading device, it is provided with first including on workbench 1
Transporting rail 12-1, the second transporting rail 12-2 and the 3rd transporting rail 12-3, these three transporting rails on workbench 1, edge
Length direction the column distribution of workbench 1, and the most parallel.It is fixed that one end of first transporting rail 12-1 is provided with first
Position device 13, is provided with three the first material distributing rest 16-1, these three the first material distributing rest 16-1 edges on the first transporting rail 12-1
The first the most non-contacting arrangement of positioner 13.
One end of second transporting rail 12-2 is provided with the second positioner 14, is provided with three on the second transporting rail
First material distributing rest 16-1, these three the first material distributing rest 16-1, on the second transporting rail 12-2, depend on away from the second positioner 14
Secondary non-contacting arrangement.
3rd transporting rail 12-3 one end is provided with the 3rd positioner 15, is provided with two on the 3rd transporting rail
Two material distributing rest 16-2, these two the second material distributing rest 16-2, on the 3rd transporting rail 12-3, away from the 3rd positioner 15 successively
Non-contacting arrangement,
Wherein, the length of the second sub-material 16-2 more than the length of the first sub-material 16-1, therefore the first transporting rail 12-1 and
Second transporting rail 12-2 is a point track, and the 3rd transporting rail 12-3 is for closing rail track.
Above first positioner the 13, second positioner 14 and the 3rd positioner 15, support 2 is installed non-contactly,
I.e. first positioner the 13, second positioner 14 and the 3rd positioner 15 distance bracket 2 have certain space length, and prop up
Frame 2 is paralleled with the width of workbench 1.
The first elevating lever 4-1 and the second elevating lever 4-2, the first elevating lever 4-1 and the second elevating lever 4-it is fixed with on support 2
2 are vertically connected with support 2 and to connect, and the first elevating lever 4-1 and the second elevating lever 4-2 is along the length direction of support 2, noncontact
Ground is arranged in parallel.
The first mechanical arm 6-1 and second machinery it is separately installed with above the first elevating lever 4-1 and the second elevating lever 4-2
Arm 6-2, horizontal rail 3 through the first elevating lever 4-1 and the second elevating lever 4-2, the first elevating lever 4-1, the second elevating lever 4-2 and
Horizontal rail 3, under the control of PLC (programmable logic controller (PLC)), drives the first elevating lever 4-1, the second lifting by electromagnetic valve
Bar 4-2 and horizontal rail 3 are moved, under the drive of the first elevating lever 4-1, the second elevating lever 4-2 and horizontal rail 3, and the first machine
Mechanical arm 6-1 and the second mechanical arm 6-2 just can realize motion horizontally and vertically.
As in figure 2 it is shown, the first positioner 13 includes front jig arm 13-1, rear jig arm 13-2 and posting 13-3, Qi Zhongding
Position frame 13-3 is arranged on the first transporting rail 12-1, and front jig arm 13-1 and rear jig arm 13-2 are arranged on above posting 13-3
Both sides, but do not contact with posting 13-3, when after web transportation to the first positioner 13, the aspect ratio posting of tablet
13 is high, and the part exceeded can be clamped from both sides by front jig arm 13-1 and rear jig arm 13-2, thus be fixed tablet.Second location
The structure of device the 14, the 3rd positioner 15 is identical with the first positioner with installation principle, therefore repeats no more.First location dress
Put the 13, second positioner 14 and the 3rd positioner 15 can be respectively to the first transporting rail 12-1, the second transporting rail 12-2
The tablet next with the 3rd transporting rail 13-3 transmission carries out position to be fixed.First mechanical arm 6-1 and the second mechanical arm 6-2 matches
Tablet can be carried out a deciliter process.
As it is shown on figure 3, the first mechanical arm 6-1 includes the first base 5-1, wherein the first base 5-1 is arranged on the first lifting
On bar 4-1, the lower end of the first base 5-1 is vertically installed with the first connector 7-1 and the first gripping arm 8-1, the first connector successively
7-1 and the first base 5-1 is connected by the first trachea 11-1.Multiple first comb 9-1 is installed on the first gripping arm 8-1, each
Vertical being connected with the first connector 7-1 in one end of the first comb 9-1, each first comb 9-1 is parallel to each other, and the most not
The tight distribution of contact.As shown in Figure 4, each first comb 9-1 is fitted with multiple sucker 10, in the drive of air pump
Under, by the first trachea 11-1, each sucker 10 produces suction, when sucker 10 contacts with tablet, sucker 10 has suction,
I.e. first mechanical arm 6-1 can drive tablet to move by the suction in sucker 10, thus realization deciliter.Second mechanical arm 6-2
Structure with to install principle identical with the first mechanical arm 6-1, therefore repeat no more.
As it is shown in figure 5, the first mechanical arm 6-1 is by air pump, the sucker 10 on the first comb 9-1 produces suction,
Thus holding the tablet on the first transporting rail 12-1, the second mechanical arm 6-2 is also by air pump, at the second comb (in figure not
Illustrate) on sucker 10 on produce suction, thus hold the tablet on the second transporting rail 12-2, then the first mechanical arm 6-1
With the second mechanical arm 6-2 relative movement, thus combine, the tablet on the i.e. first mechanical arm 6-1 and the second mechanical arm 6-2
On tablet combine, then the first mechanical arm 6-1 together with the second mechanical arm 6-2 to the side of the 3rd transporting rail 12-3
To motion, and the tablet that will combine, put into the 3rd positioner 15 of the 3rd transporting rail 12-3, closedown is bled
There is no suction on pump, the first mechanical arm 6-1 and the second mechanical arm 6-2, thus complete the merging of tablet.
A kind of method using PE diffusion automatic loading and unloading device, comprises the following steps:
1) under the drive of the first transporting rail 12-1 and the second transporting rail 12-2, the first material distributing rest 16-1 is fixed towards first
Position device 13 and the second positioner 14 direction motion, when the first material distributing rest 16-1 move to respectively the first posting 13-3 and
Time on second posting 14-3, before first, after jig arm 13-1 and first, jig arm 13-2 clamps the tablet on the first posting 13-3,
Before second, after jig arm 14-1 and second, jig arm 14-2 clamps the tablet on the second posting 14-3；
2) opening air pump, the sucker 10 on the first mechanical arm 6-1 holds the tablet on the first posting 13-3, the second machine
Sucker 10 in mechanical arm 6-2 holds the tablet on the second posting 14-3, the first mechanical arm 6-1 and the second mechanical arm 6-2 at PLC
Control under, along the length direction of horizontal rail 3, move to the top of the 3rd positioner 15, the first mechanical arm 6-1 and
Tablet is put in the 3rd posting 15-3 by two mechanical arm 6-2 simultaneously, closes air pump, the first mechanical arm 6-1 and second machinery
Sucker 10 on arm 6-2 lays down suction, and before the 3rd, after jig arm 15-1 and the 3rd, jig arm 15-2 fixes tablet, completes to close material step
Suddenly；
3) under the drive of the 3rd transporting rail 12-3, the second material distributing rest 16-2 transports towards the direction of the 3rd positioner 15
Dynamic, when the second material distributing rest 16-2 moves on the 3rd positioner 15, jig arm 15-2 folder after jig arm 15-1 and the 3rd before the 3rd
Live the tablet on the second material distributing rest 16-2；
4) opening air pump, the sucker 10 on the first mechanical arm 6-1 and the second mechanical arm 6-2 holds the 3rd location dress simultaneously
Putting the tablet on 15, under the control of PLC, the first mechanical arm 6-1 and the second mechanical arm 6-2 is along the length side of horizontal rail 3
To, moving to the first positioner 13 and top of the second positioner 14 respectively, sucker 10 is inhaled by the first mechanical arm 6-1
Tablet is put in the first positioner 13, and the tablet that sucker 10 is inhaled is put in the second positioner 14 by the second mechanical arm 6-2,
Close air pump, lay down suction, complete sub-material step.
Embodiment described above only have expressed embodiments of the present invention, and it describes more concrete and detailed, but can not
Therefore the restriction to the scope of the claims of the present invention it is interpreted as.It should be pointed out that, for the person of ordinary skill of the art,
Without departing from the inventive concept of the premise, it is also possible to make some deformation and improvement, these broadly fall into the protection model of the present invention
Enclose.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (8)
1. a PE spreads automatic loading and unloading device, it is characterised in that: this PE diffusion automatic loading and unloading device includes workbench, institute
Stating and be provided with transporting rail on workbench, one end of described transmission rail is provided with positioner, non-above described positioner connects
Contacting to earth and be provided with support, elevating lever is connected with described support vertical, and the upper surface of described elevating lever is provided with mechanical arm, described
The bottom of elevating lever is provided with the horizontal rail paralleled with described support.
PE the most according to claim 1 spreads automatic loading and unloading device, it is characterised in that: described transporting rail has three,
And every described transporting rail is parallel to each other.
PE the most according to claim 2 spreads automatic loading and unloading device, it is characterised in that: described positioner is three,
It is separately fixed on three transporting rails；The most each described positioner includes front jig arm, rear jig arm and posting, described before
Jig arm and described rear jig arm are arranged on the both sides of every described transporting rail, and described posting is arranged on every described transporting rail
On.
PE the most according to claim 1 spreads automatic loading and unloading device, it is characterised in that: described elevating lever is two, and
Said two elevating lever is arranged in parallel on the length direction of support, and described mechanical arm is two, each described elevating lever
On a described mechanical arm is respectively installed.
PE the most according to claim 1 spreads automatic loading and unloading device, it is characterised in that: each described mechanical arm includes the end
Seat, the vertical lower end of described base is sequentially installed with connector and gripping arm, described base and described connector and is provided with trachea.
PE the most according to claim 5 spreads automatic loading and unloading device, it is characterised in that: it is provided with multiple in described gripping arm
Comb arranged in parallel, the plurality of comb is vertically connected with described connector.
PE the most according to claim 6 spreads automatic loading and unloading device, it is characterised in that: it is provided with on each described comb
Multiple suckers.
8. the PE diffusion automatic loading and unloading device that a kind uses as according to any one of claim 1～7 carries out the side of loading and unloading
Method, it is characterised in that comprise the following steps:
1) under the drive of the first transporting rail and the second transporting rail, the first material distributing rest is towards the first positioner and the second location
Device direction motion, when the first material distributing rest moves on the first posting and the second posting respectively, before first jig arm and
After first, jig arm clamps the tablet on the first posting, and before second, after jig arm and second, jig arm clamps the material on the second posting
Sheet；
2) opening air pump, the sucker on the first mechanical arm holds the tablet on the first posting, the sucker on the second mechanical arm
Hold the tablet on the second posting, the first mechanical arm and the second mechanical arm under the control of PLC, along the length of horizontal rail
Direction, moves to the top of the 3rd positioner, the first mechanical arm and the second mechanical arm and tablet is put into the 3rd posting simultaneously
In, close air pump, the sucker on the first mechanical arm and the second mechanical arm lays down suction, and before the 3rd, after jig arm and the 3rd, jig arm is solid
Surely live tablet, complete to close material step；
3) under the drive of the 3rd transporting rail, the second material distributing rest moves, when the second material distributing rest towards the direction of the 3rd positioner
When moving on the 3rd positioner, before the 3rd, after jig arm and the 3rd, jig arm clamps the tablet on the second material distributing rest；
4) opening air pump, the sucker on the first mechanical arm and the second mechanical arm holds the tablet on the 3rd positioner simultaneously,
Under the control of PLC, the first mechanical arm and the second mechanical arm, along the length direction of horizontal rail, move to the first location respectively
Device and the top of the second positioner, the tablet that sucker is inhaled by the first mechanical arm is put in the first positioner, the second machine
The tablet that sucker is inhaled by mechanical arm is put in the second positioner, closes air pump, lays down suction, complete sub-material step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610707227.9A CN106129184B (en) | 2016-08-23 | 2016-08-23 | A kind of PE spreads automatic loading and unloading device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610707227.9A CN106129184B (en) | 2016-08-23 | 2016-08-23 | A kind of PE spreads automatic loading and unloading device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106129184A true CN106129184A (en) | 2016-11-16 |
| CN106129184B CN106129184B (en) | 2018-05-25 |
Family
ID=57274801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610707227.9A Expired - Fee Related CN106129184B (en) | 2016-08-23 | 2016-08-23 | A kind of PE spreads automatic loading and unloading device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106129184B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201655771U (en) * | 2009-12-24 | 2010-11-24 | 徐竹林 | Fully-automatic silicon slice loading and unloading machine |
| CN102723302A (en) * | 2012-04-23 | 2012-10-10 | 吴周令 | Fully-automatic loading and unloading device used in processing semiconductor chips by laser and application method thereof |
| CN104377154A (en) * | 2014-11-03 | 2015-02-25 | 江阴方艾机器人有限公司 | Pipe-type PECVD graphite boat assembling and disassembling piece system and process |
| CN105185736A (en) * | 2015-08-20 | 2015-12-23 | 东莞市启天自动化设备有限公司 | Full-automatic railboat feeding and blanking machine |
-
2016
- 2016-08-23 CN CN201610707227.9A patent/CN106129184B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201655771U (en) * | 2009-12-24 | 2010-11-24 | 徐竹林 | Fully-automatic silicon slice loading and unloading machine |
| CN102723302A (en) * | 2012-04-23 | 2012-10-10 | 吴周令 | Fully-automatic loading and unloading device used in processing semiconductor chips by laser and application method thereof |
| CN104377154A (en) * | 2014-11-03 | 2015-02-25 | 江阴方艾机器人有限公司 | Pipe-type PECVD graphite boat assembling and disassembling piece system and process |
| CN105185736A (en) * | 2015-08-20 | 2015-12-23 | 东莞市启天自动化设备有限公司 | Full-automatic railboat feeding and blanking machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106129184B (en) | 2018-05-25 |
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