CN107204390A - Semi-automatic quartz boat guide card machine - Google Patents
Semi-automatic quartz boat guide card machine Download PDFInfo
- Publication number
- CN107204390A CN107204390A CN201710563752.2A CN201710563752A CN107204390A CN 107204390 A CN107204390 A CN 107204390A CN 201710563752 A CN201710563752 A CN 201710563752A CN 107204390 A CN107204390 A CN 107204390A
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- China
- Prior art keywords
- pair
- input
- guide
- output
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 230000007246 mechanism Effects 0.000 claims abstract description 44
- 230000006835 compression Effects 0.000 claims description 37
- 238000007906 compression Methods 0.000 claims description 37
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 30
- 230000007306 turnover Effects 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 239000012634 fragment Substances 0.000 abstract description 4
- 230000007613 environmental effect Effects 0.000 abstract 1
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of semi-automatic quartz boat guide card machine, including frame, pushing mechanism, output precision, guiding mechanism, input module；Wherein, pushing mechanism is installed in the frame, between frame front dead center, output precision is installed on the rear of pushing mechanism, and the front of input module, guiding mechanism is arranged on the both sides of frame, positioned at the centre of output precision and input module, input module is installed on the rear of output precision.The present invention realizes the semi-automation that solar battery sheet is imported from 100 plastic baskets tool in quartz boat basket tool, and it is low to solve manual quartz boat guide card efficiency, the problems such as rupture diaphragm, and with compact conformation, high production capacity, environmental protection, the low feature of fragment rate.
Description
Technical field
The present invention relates to solar battery sheet automation equipment field, more particularly to a kind of semi-automatic quartz boat guide card machine.
For solar cell manufacturing, it is easy to cell piece to complete whole process.
Background technology
Solar cell has increasingly been paid close attention to as reproducible eco-friendly power source by people, world's solar cell
In recent years year sales growth rate more than 40%；Manufacture of solar cells line equipment turns into main flow；At present, solar cell
Manufacturing firm has that fragment rate is high, production capacity is low, pollute big etc. to cell piece still using the cell piece of online equipment is taken by hand
Problem；And it is external for online guide card equipment, continuity is not strong, and cost is high, and production capacity is low.
The technical scheme that the present invention is provided overcomes technical barrier, realizes solar battery sheet and is led from 100 common basket tools
Enter the semi-automation of quartz boat basket tool, effectively raise guide card efficiency, reduction fragment rate and cost.
The content of the invention
The present invention provides semi-automatic quartz boat guide card machine, and compact conformation, production capacity are high, integrated level is high, modularization；Greatly carry
High production efficiency, and cell piece fragment rate is reduced, effectively reduce cost.
The technical solution adopted for the present invention to solve the technical problems is：A kind of semi-automatic quartz boat guide card of the present invention
Machine, including frame, pushing mechanism, output precision, guiding mechanism, input module.
According to one embodiment of the present invention, the pushing mechanism is arranged in frame, positioned at the front of output precision,
Including push jack profile base, push jack upper plate, push jack supporting plate, a pair of linear bearings, a pair of the axis of guides, a pair of push plates, push rods；Push away
Piece profile base is arranged in frame, and push jack upper plate is arranged on above push jack profile base, and push jack supporting plate is arranged on push jack type
Material pedestal side is simultaneously connected with push jack upper plate, and a pair of linear bearings are arranged in push jack supporting plate, and the axis of guide is applied in linear axis
In holding, the rear end of a pair of axis of guides connects a push pedal respectively, and front end is connected with push rod.
According to one embodiment of the present invention, the output precision is arranged in frame, positioned at the rear of pushing mechanism,
The front of input module, including output lifting base, output lifting motor, output lifting straight-line mechanism, output basket tool base
Seat, a pair of basket tool positioning strips；Output lifting base is fixed in frame, and output lifting motor is arranged on output lifting straight line
The bottom of mechanism, output basket tool pedestal is fixed on the actuating station of output lifting straight-line mechanism, and a pair of basket tool positioning strips are arranged on defeated
Going out the upper surface of basket tool pedestal is used to position basket tool.
According to one embodiment of the present invention, the guiding mechanism is arranged on the both sides of frame, positioned at output precision and
The centre of input module, including a pair of guide profile pedestals, a pair of guide cylinder plates, a pair of guide cylinders, two groups of guiding connections
Plate, two groups of guide plates；A pair of guide profile pedestals are fixed on frame both sides, and a pair of guide cylinder plates are separately mounted to a pair of guiding
The top of profile base, a pair of guide cylinders are separately mounted on a pair of guide cylinder plates, and two groups of guiding connecting plates are fixed respectively
In the actuating station of a pair of guide cylinders, two groups of guide plates are separately mounted on two groups of guiding connecting plates.
According to one embodiment of the present invention, the input module is arranged in frame, positioned at the rear of output precision,
Including input lifting base, input lifting motor, input lifting straight-line mechanism, input basket tool pedestal, a pair of trip shaft branch
Support seat, trip shaft, input upset riser, input turnover board, compression cylinder installing plate, compression cylinder, compression cylinder connecting plate,
A pair of compression cylinder connection boards, a pair of pressure strips, a pair of locating pieces, gas support installing plate, gas supports；Input lifting base is fixed on
In frame, input lifting motor is arranged on the bottom of input lifting straight-line mechanism, and input basket tool pedestal is fixed on input and risen
The actuating station of straight-line mechanism is dropped, and a pair of trip shaft support bases are symmetrically mounted on input basket tool pedestal, and trip shaft is through a pair
In trip shaft support base, and it is connected with the back of input upset riser, input turnover board is vertically fixed on input upset riser
Front end, compression cylinder installing plate be vertically mounted on input turnover board lower section, compression cylinder be arranged on compression cylinder installation
On plate, compression cylinder connecting plate is fixed on the actuating station of compression cylinder, and a pair of compression cylinder connection boards are arranged on compression cylinder
The two ends of connecting plate, a pair of pressure strips are separately fixed on a pair of compression cylinder connection boards, and a pair of locating pieces are arranged on input
The upper surface of turnover board is used to position basket tool, and gas support installing plate is fixed on input basket tool pedestal, and gas support upper end is fixed on defeated
Enter to overturn the back of riser, lower end is fixed on gas support installing plate.
Brief description of the drawings
Fig. 1 is the structural representation of the general structure of the present invention.
Fig. 2 is the structural representation of the pushing mechanism of the present invention.
Fig. 3 is the structural representation of the output precision of the present invention.
Fig. 4 is the structural representation of the guiding mechanism of the present invention.
Fig. 5 is the structural representation of the input module of the present invention.
Embodiment
Describe the embodiment of the present invention in detail below in conjunction with the accompanying drawings.
A kind of semi-automatic quartz boat guide card machine, including frame 1, pushing mechanism 2, output precision 3, guiding mechanism 4, input group
Part 5.
The pushing mechanism 2 is arranged in frame 1, positioned at the front of output precision 3, including push jack profile base 6, push jack
Upper plate 7, push jack supporting plate 8, a pair of linear bearings 9, a pair of the axis of guides 10, a pair of push plates 11, push rods 12；Push jack profile base 6
In frame 1, push jack upper plate 7 is arranged on the top of push jack profile base 6, and push jack supporting plate 8 is arranged on push jack profile base 6
Side is simultaneously connected with push jack upper plate 7, and a pair of linear bearings 9 are arranged in push jack supporting plate 8, and the axis of guide 10 is applied in linear bearing
In 9, the rear end of a pair of axis of guides 10 connects a push pedal 11 respectively, and front end is connected with push rod 12.
The output precision 3 is arranged in frame 1, positioned at the rear of pushing mechanism 2, the front of input module 5, including defeated
Go out lifting base 13, output lifting motor 14, output lifting straight-line mechanism 15, output basket tool pedestal 16, a pair of basket tools fixed
Position bar 17；Output lifting base 13 is fixed in frame 1, and output lifting motor 14 is arranged on output lifting straight-line mechanism 15
Bottom, output basket tool pedestal 16 is fixed on the actuating station of output lifting straight-line mechanism 15, and a pair of baskets tool positioning strips 17 are arranged on
The upper surface of output basket tool pedestal 16 is used to position basket tool.
The guiding mechanism 4 is arranged on the both sides of frame 1, positioned at the centre of output precision 3 and input module 5, including one
To guide profile pedestal 18, a pair of guide cylinder plates 19, a pair of guide cylinders 20, two groups of guiding connecting plates 21, two groups of guide plates
22；A pair of guide profile pedestals 18 are fixed on the both sides of frame 1, and a pair of guide cylinder plates 19 are separately mounted to a pair of guide profile bases
The top of seat 18, a pair of guide cylinders 20 are separately mounted on a pair of guide cylinder plates 19, and two groups of guiding connecting plates 21 are solid respectively
The actuating station of a pair of guide cylinders 20 is scheduled on, two groups of guide plates 22 are separately mounted on two groups of guiding connecting plates 21.
The input module 5 is arranged in frame 1, positioned at the rear of output precision 3, including input lifting base 23, defeated
Enter to lift motor 24, input lifting straight-line mechanism 25, input basket tool pedestal 26, a pair of trip shaft support bases 27, trip shafts
28th, input upset riser 29, input turnover board 30, compression cylinder installing plate 31, compression cylinder 32, compression cylinder connecting plate
33rd, a pair of compression cylinder connection boards 34, a pair of pressure strips 35, a pair of locating pieces 36, gas support installing plate 37, gas supports 38；Input
Lifting base 23 is fixed in frame 1, and input lifting motor 24 is arranged on the bottom of input lifting straight-line mechanism 25, input
Basket tool pedestal 26 is fixed on the actuating station of input lifting straight-line mechanism 25, and a pair of trip shaft support bases 27 are symmetrically mounted on input basket
Have on pedestal 26, trip shaft 28 is connected with the back of input upset riser 29 through in a pair of trip shaft support bases 27, defeated
Enter the front end that turnover board 30 is vertically fixed on input upset riser 29, compression cylinder installing plate 31 is vertically mounted on input upset
The lower section of bottom plate 30, compression cylinder 32 is arranged on compression cylinder installing plate 31, and compression cylinder connecting plate 33 is fixed on compression gas
The actuating station of cylinder 32, a pair of compression cylinder connection boards 34 are arranged on the two ends of compression cylinder connecting plate 33, a pair of pressure strips 35
It is separately fixed on a pair of compression cylinder connection boards 34, the upper surface that a pair of locating pieces 36 are arranged on input turnover board 30 is used
In positioning basket tool, gas support installing plate 37 is fixed on input basket tool pedestal 26, and gas supports 38 upper ends and is fixed on input upset riser 29
Back, lower end be fixed on gas support installing plate 37 on.
During work, 100 plastic basket tools are put on the output basket of output precision 3 tool pedestal 16, manually by input module 5
In gas support 38 leave behind, then quartz boat basket tool is put on input basket tool pedestal 26, the button of equipment is pressed by PLC controls
Button, the driving pressure strip 35 of compression cylinder 32 is worked, and quartz boat basket is had and compressed, and is then slowly boosted gas support 38, is made input
Component 5 returns to initial position, presses a pair of guide cylinders 20 in button, guiding mechanism 4 and drives two groups of guide plates 22 to stretch out,
Now the groove cell piece of lower floor 50 in 100 plastic baskets tool is slowly pushed into quartz boat basket tool manually, after having pushed away, press by
Output lifting motor 14 driving output lifting straight-line mechanism 15 drives 100 plastic baskets to have to moving down in button, output precision 3
Then 100 plastic baskets are had the groove cell piece of upper strata 50 manually and are slowly pushed into quartz boat basket tool by dynamic certain distance；Press again
Button, output precision 3 returns to output initial position, and 100 empty plastic baskets are had and taken out, and changes full 100 plastic baskets tool,
Guide cylinder 20 drives two groups of guide plates 22 to retract simultaneously, input lifting motor 24 driving input lifting in input module 5
Straight-line mechanism 25 drives quartz boat basket tool to move down a certain distance, repeats above step until full being led in quartz boat basket tool
Cell piece；After treating that quartz boat basket tool is led completely, button is pressed, the guide cylinder 20 of guiding mechanism 4 is retracted, will and compressed manually
Cylinder 29 is retracted, and the gas support 38 in input module 5 is left behind manually, and pressing button makes compression cylinder 32 unclamp quartz boat basket tool,
Full quartz boat basket tool is taken out, the guide card of next basket can be carried out by changing the quartz boat basket tool of sky.
Above example is only the exemplary embodiment of the present invention, is not used in the combination between the limitation present invention, each module
It is considered as protection scope of the present invention, specific protection domain of the invention has appended claims restriction.People in the art
Member can make various modifications or equivalent substitution, this modification or equivalent to the present invention in the essential scope of the present invention
Replacement also should be regarded as being within the scope of the present invention.
Claims (5)
1. a kind of semi-automatic quartz boat guide card machine, including frame (1), pushing mechanism (2), output precision (3), guiding mechanism (4),
Input module (5).
2. semi-automatic quartz boat guide card machine as claimed in claim 1, it is characterised in that：The pushing mechanism (2) is arranged on machine
On frame (1), the front positioned at output precision (3), including push jack profile base (6), push jack upper plate (7), push jack supporting plate (8),
A pair of linear bearings (9), a pair of the axis of guides (10), a pair of push plates (11), push rods (12)；Push jack profile base (6) is arranged on machine
On frame (1), push jack upper plate (7) is arranged on above push jack profile base (6), and push jack supporting plate (8) is arranged on push jack profile base
(6) side and be connected with push jack upper plate (7), a pair of linear bearings (9) are in push jack supporting plate (8), and the axis of guide (10) is passed through
It is through in linear bearing (9), the rear end of a pair of axis of guides (10) connects a push pedal (11) respectively, and front end connects with push rod (12)
Connect.
3. semi-automatic quartz boat guide card machine as claimed in claim 1, it is characterised in that：The output precision (3) is arranged on machine
On frame (1), the rear positioned at pushing mechanism (2), the front of input module (5), including output lifting base (13), output lifting
Motor (14), output lifting straight-line mechanism (15), output basket tool pedestal (16), a pair of basket tool positioning strips (17)；Output rises
Drop pedestal (13) is fixed in frame (1), and output lifting motor (14) is arranged on the bottom of output lifting straight-line mechanism (15)
Portion, output basket tool pedestal (16) is fixed on the actuating station of output lifting straight-line mechanism (15), and a pair of basket tool positioning strips (17) are installed
It is used to position basket tool in the upper surface of output basket tool pedestal (16).
4. semi-automatic quartz boat guide card machine as claimed in claim 1, it is characterised in that：The guiding mechanism (4) is arranged on machine
The both sides of frame (1), positioned at the centre of output precision (3) and input module (5), including a pair of guide profile pedestals (18), a pair
Guide cylinder plate (19), a pair of guide cylinders (20), two groups of guiding connecting plates (21), two groups of guide plates (22)；A pair of guidance types
Material pedestal (18) is fixed on frame (1) both sides, and a pair of guide cylinder plates (19) are separately mounted to a pair of guide profile pedestals (18)
Top, a pair of guide cylinders (20) are separately mounted on a pair of guide cylinder plates (19), and two groups of guiding connecting plates (21) are respectively
The actuating station of a pair of guide cylinders (20) is fixed on, two groups of guide plates (22) are separately mounted on two groups of guiding connecting plates (21).
5. semi-automatic quartz boat guide card machine as claimed in claim 1, it is characterised in that：The input module (5) is arranged on machine
On frame (1), the rear positioned at output precision (3), including input lifting base (23), input lifting motor (24), input
Lifting straight-line mechanism (25), input basket tool pedestal (26), a pair of trip shaft support bases (27), trip shaft (28), input upsets are stood
Plate (29), input turnover board (30), compression cylinder installing plate (31), compression cylinder (32), compression cylinder connecting plate (33), one
To compression cylinder connection board (34), a pair of pressure strips (35), a pair of locating pieces (36), gas support installing plate (37), gas supports (38)；
Input lifting base (23) is fixed in frame (1), and input lifting motor (24) is arranged on input lifting straight-line mechanism
(25) bottom, input basket tool pedestal (26) is fixed on the actuating station of input lifting straight-line mechanism (25), a pair of trip shaft supports
Seat (27) is symmetrically mounted on input basket tool pedestal (26), trip shaft (28) through in a pair of trip shaft support bases (27), and
It is connected with the back of input upset riser (29), input turnover board (30) is vertically fixed on before input upset riser (29)
End, compression cylinder installing plate (31) is vertically mounted on the lower section of input turnover board (30), and compression cylinder (32), which is arranged on, to be compressed
On cylinder mounting plate (31), compression cylinder connecting plate (33) is fixed on the actuating station of compression cylinder (32), and a pair of compression cylinders connect
The two ends that riser (34) is arranged on compression cylinder connecting plate (33) are connect, a pair of pressure strips (35) are separately fixed at a pair of compression cylinders
On connection board (34), the upper surface that a pair of locating pieces (36) are arranged on input turnover board (30) is used to position basket tool, gas support
Installing plate (37) is fixed on input basket tool pedestal (26), and gas support (38) upper end is fixed on the back of input upset riser (29),
Lower end is fixed on gas support installing plate (37).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710563752.2A CN107204390A (en) | 2017-07-12 | 2017-07-12 | Semi-automatic quartz boat guide card machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710563752.2A CN107204390A (en) | 2017-07-12 | 2017-07-12 | Semi-automatic quartz boat guide card machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107204390A true CN107204390A (en) | 2017-09-26 |
Family
ID=59911155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710563752.2A Pending CN107204390A (en) | 2017-07-12 | 2017-07-12 | Semi-automatic quartz boat guide card machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107204390A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112331602A (en) * | 2020-10-23 | 2021-02-05 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and sheet pushing device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201756346U (en) * | 2010-08-13 | 2011-03-09 | 深圳市捷佳伟创微电子设备有限公司 | Automatic loading and unloading boat device |
| CN202076306U (en) * | 2011-05-16 | 2011-12-14 | 东莞市启天自动化设备有限公司 | Automatic silicon overturn and folding double-sheet inserting machine |
| CN204243019U (en) * | 2014-11-05 | 2015-04-01 | 江阴方艾机器人有限公司 | In photovoltaic diffusing procedure, quartz boat loads and uses guide card machine |
| CN105185736A (en) * | 2015-08-20 | 2015-12-23 | 东莞市启天自动化设备有限公司 | Full-automatic railboat feeding and blanking machine |
-
2017
- 2017-07-12 CN CN201710563752.2A patent/CN107204390A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201756346U (en) * | 2010-08-13 | 2011-03-09 | 深圳市捷佳伟创微电子设备有限公司 | Automatic loading and unloading boat device |
| CN202076306U (en) * | 2011-05-16 | 2011-12-14 | 东莞市启天自动化设备有限公司 | Automatic silicon overturn and folding double-sheet inserting machine |
| CN204243019U (en) * | 2014-11-05 | 2015-04-01 | 江阴方艾机器人有限公司 | In photovoltaic diffusing procedure, quartz boat loads and uses guide card machine |
| CN105185736A (en) * | 2015-08-20 | 2015-12-23 | 东莞市启天自动化设备有限公司 | Full-automatic railboat feeding and blanking machine |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112331602A (en) * | 2020-10-23 | 2021-02-05 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and sheet pushing device |
| CN112331602B (en) * | 2020-10-23 | 2024-03-26 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and pushing piece device |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170926 |
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| WD01 | Invention patent application deemed withdrawn after publication |