CN201756346U - Automatic loading and unloading boat device - Google Patents

Automatic loading and unloading boat device Download PDF

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Publication number
CN201756346U
CN201756346U CN2010202919111U CN201020291911U CN201756346U CN 201756346 U CN201756346 U CN 201756346U CN 2010202919111 U CN2010202919111 U CN 2010202919111U CN 201020291911 U CN201020291911 U CN 201020291911U CN 201756346 U CN201756346 U CN 201756346U
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CN
China
Prior art keywords
mechanical arm
vertical axes
automatic loading
mechanical
boat
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Expired - Lifetime
Application number
CN2010202919111U
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Chinese (zh)
Inventor
伍波
张勇
李果山
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Shenzhen S. C New Energy Equipment Co., Ltd.
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SHENZHEN JIEJIACHUANG MICROELECTRONIC EQUIPMENT CO Ltd
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Priority to CN2010202919111U priority Critical patent/CN201756346U/en
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Publication of CN201756346U publication Critical patent/CN201756346U/en
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Abstract

The utility model discloses an automatic loading and unloading boat device which comprises a vertical shaft along the axis Z, a horizontal shaft connected with the vertical shaft in an up-and-down motion manner and along the axis Y, a manipulator arm connected with the horizontal shaft in a forward-backward motion manner, a manipulator claw connected with the manipulator arm in a forward-backward motion manner, and a control system controlling the motion of the horizontal shaft, the manipulator arm, and the manipulator claw. The automatic loading and unloading boat provided by the utility model is used for automatic quartz boat loading and unloading in diffusion technology.

Description

A kind of automatic loading and unloading boat device
Technical field
The utility model relates to the loading attachment of the quartz boat that is used for semiconductor technology, especially relates to a kind of automatic loading and unloading boat device.
Background technology
Diffusion furnace is a kind of semiconductor manufacturing equipment, is mainly used in doping process, and in crystal silicon solar energy battery was produced, diffusion furnace was unique implantation equipment, is in the manufacturing process generation of PN junction, the raising of conversion efficiency to be played conclusive key equipment especially.But traditional diffusion furnace, the entire exercise of when dress is loaded into quartz boat during boat the entire exercise of station and unloads boat the quartz boat on the station of coming out of the stove being taken out all must be by manually finishing, therefore, in the use of equipment, need a large amount of manpowers, degree of automation is lower, and manually-operated randomness will inevitably produce harmful effect to technology, has influence on processing quality.Therefore, a kind of degree of automation height of necessary exploitation, do not influence the loading boat device of processing quality to replace traditional manual operations.
The utility model content
The utility model is in order to solve prior art artificial loading quartz boat, and degree of automation is not high and influence the technical matters of processing quality, and a kind of automatic loading and unloading boat device is provided.
For solving the problems of the technologies described above, the technical solution adopted in the utility model comprises a vertical axes along Z-direction for a kind of automatic loading and unloading boat device of design; But be connected with the vertical axes up-and-down movement and along the horizontal shaft of Y direction; With the horizontal shaft bonded assembly mechanical arm that can seesaw; With the mechanical arm bonded assembly mechanical paw that can seesaw; The control system of the described horizontal shaft of one control, mechanical arm and mechanical paw motion.
Be connected by a lead screw transmission mechanism between described vertical axes and the horizontal shaft, between horizontal shaft and the mechanical arm, be connected by a tape handler between mechanical arm and the mechanical paw, and described lead screw transmission mechanism all links to each other with control system with tape handler and the control of controlled system.
Described vertical axes comprises first vertical axes and second vertical axes that is oppositely arranged; Described mechanical arm comprises and described first vertical axes and second vertical axes difference bonded assembly first mechanical arm and second mechanical arm, is connected with a mechanical arm adapter shaft between first mechanical arm and second mechanical arm; Described mechanical paw comprises first mechanical paw and second mechanical paw that is oppositely arranged.
Described first mechanical paw all becomes " L " type with second mechanical paw and is oppositely arranged on the bottom of mechanical arm.
The inboard of described first vertical axes and second vertical axes also is arranged with respectively inwardly extends the quartz boat working area that forms earlier more forward, and the inboard in described quartz boat working area is provided with two to projecting inward cylinder.
Described automatic loading and unloading boat device also comprises a feeding mechanism, and described feeding mechanism is provided with a charging transmission device that can seesaw along Y-axis, is fixedly connected with a loading bay on the charging transmission device.
But the utility model automatic loading and unloading boat device is by the motion of horizontal shaft, the mechanical arm that can seesaw and the mechanical paw of control system control up-and-down movement, realization is to the automatic loading and unloading of quartz boat, and artificial compared to existing technology loading and unloading have the degree of automation height and can not influence the advantage of processing quality.
Description of drawings
Below in conjunction with embodiment and accompanying drawing the utility model is elaborated, wherein:
Fig. 1 is the utility model automatic loading and unloading boat structure drawing of device;
Constructional drawing when Fig. 2 is the work of the utility model automatic loading and unloading boat device.
The specific embodiment
See also Fig. 1.For ease of describing, in the present embodiment, as shown in the figure, the definition above-below direction is a Z-direction, and fore-and-aft direction is a Y direction, and left and right directions is an X-direction.
The utility model automatic loading and unloading boat device comprises vertical axes 1 along Z-direction, be connected the horizontal shaft 2 of vertical axes upper edge Y direction, be connected mechanical arm 3 on the horizontal shaft, be connected in mechanical paw 5 and control system on the mechanical arm.Wherein:
Vertical axes 1 comprises one first vertical axes 11 and second vertical axes 12, and links to each other with horizontal shaft 2 by a Z shaft transmission, and horizontal shaft 2 can be along the Z-direction up-and-down movement under the drive of Z shaft transmission.The inboard of first vertical axes 11 and second vertical axes 12 also is arranged with quartz boat working area 13 respectively, is used for temporarily placing oven-fresh quartz boat.The quantity in quartz boat working area is provided with a cover for each station correspondence.In this specific embodiment, quartz boat working area 13 cooperations that a cover symmetry is separately positioned on first vertical axes and second vertical axes are used to place quartz boat, and it is a rod shaped structure.The back temperature is higher because quartz boat is come out of the stove, and artificial loading and unloading have certain danger, and for multiple tube diffusion furnace, on to manage the position higher, manual operation is very inconvenient, also has certain danger.And the setting in quartz boat working area 13 can well address the above problem, and it can be placed on oven-fresh quartz boat on the quartz boat working area, by manipulator the quartz boat that cools off is placed on the loading bay automatically after treating fully to cool off again and takes away.
Horizontal shaft 2 comprise one first horizontal shaft 21 and second horizontal shaft, 22, the first horizontal shafts 21 and second horizontal shaft 22 by the Z shaft transmission respectively correspondence be connected on first vertical axes 11 and second vertical axes 12.Horizontal shaft 2 links to each other with mechanical arm 3 by a Y-axis transmission device, and mechanical arm 3 can seesaw along the Y direction at horizontal shaft 2 places under the drive of Y-axis transmission device.
Mechanical arm 3 comprise one first mechanical arm 31 and second mechanical arm, 32, the first mechanical arms 31 and second mechanical arm 32 by the Y-axis transmission device respectively correspondence be connected on first horizontal shaft and second horizontal shaft.Be fixedly connected with a mechanical arm adapter shaft 4 that is positioned at X-direction on the mechanical arm 3, when first mechanical arm when the drive lower edge of Y-axis transmission device Y direction seesaws, it is driven with identical speed and direction with first mechanical arm that this adapter shaft will drive second mechanical arm.
Mechanical arm 3 links to each other with mechanical paw 5 by a Y-axis transmission device, and mechanical paw can seesaw in the drive lower edge of Y-axis transmission device Y direction.
Mechanical paw 5 comprises that one first mechanical paw 51 and second mechanical paw, 52, the first mechanical paws 51 and second mechanical paw 52 all are " L " type, and is oppositely arranged on the bottom of mechanical arm.First mechanical paw 51 and 52 relative motions of second mechanical paw to the crawl position be the quartz boat two ends under the time, two paws vertically rise with identical speed simultaneously, and its relative horizontal ends cooperates quartz boat steadily to be held on horizontal ends and with mechanical arm device in time carries out level or up-and-down movement.
In the desired location of vertical axes and horizontal shaft the limit sensors that limits described drive mechanism operation can also be set.
Control system all links to each other with Z shaft transmission, Y-axis transmission device and mechanical paw 4 and controls described Z shaft transmission, Y-axis transmission device and mechanical paw work.
The Z shaft transmission is a lead screw transmission mechanism, comprises stepping motor, servomotor, guide rail and screw mandrel.The Y-axis transmission device is a tape handler, comprises stepping motor, guide rail and synchronous band.The utility model does not limit the structure of transmission device, can adopt any structure of prior art, but because lead screw transmission mechanism has higher precision, and can bear bigger weight and higher temperature, and the Z shaft transmission need drive whole robot device and the quartz boat that loads silicon chip carries out up-and-down movement, so the Z shaft transmission preferably adopts lead screw transmission mechanism.
For ease of Automatic feed, this automatic loading and unloading boat device also is provided with a feeding mechanism 6, and feeding mechanism 6 is arranged between first vertical axes and second vertical axes of this automatic loading and unloading boat device.Feeding mechanism 6 is provided with a charging transmission device (not shown) that can seesaw along Y-axis, is connected with a loading bay 61 that is used to place quartz boat on the charging transmission device.The charging transmission device is a tape handler, comprises a guide rail, stepping motor and synchronous band.The charging transmission device links to each other with control system, and the control of its controlled movement system system can accurately be sent to corresponding position with quartz boat.
Please in the lump referring to Fig. 2.Enter the place ahead that boat mechanism 7 is positioned at the Y direction of the utility model automatic loading and unloading boat device, which is provided with a SIC cantilever paddle 71, it is subjected to the drive of X-direction transmission device and moves in X-direction, the X-axis transmission device is a lead screw transmission mechanism, comprise guide rail, screw mandrel and stepping motor, the X-axis transmission device is controlled by described control system also can.On the loading bay 61 of feeding mechanism 6 by manually being placed with quartz boat 62.At this moment, automatic loading and unloading boat device is in the reference position of dress boat.The working process of the utility model automatic loading and unloading boat device is as follows: after control system receives the instruction of dress boat, loading bay 61 on the feeding mechanism 6 toward the 71 direction translation operations of SIC cantilever paddle, takes quartz boat on the feeding mechanism relevant position in the drive lower edge of charging transmission device Y-axis.Then drive horizontal shaft and move downward desired location along the Z-direction at vertical axes place by control system control Z shaft transmission, then, the Y-axis transmission device drives mechanical arm and moves to feeding mechanism 6 directions, when arriving quartz boat 62 positions on the feeding mechanism, control system control Y-axis transmission device drive two mechanical paws 5 along Y-axis with the speed of unanimity and direction move to the quartz boat two ends under after, the stop motion of Y-axis transmission device.Then drive horizontal shaft along the vertical axes upward movement by the Z shaft transmission, under the drive of horizontal shaft, the horizontal ends that two mechanical paws are relative cooperates steadily holds quartz boat on its horizontal ends, and moves straight up along the Z axle with horizontal shaft.The Z shaft transmission drives horizontal shaft moves upward to corresponding station along vertical axes the SIC cantilever paddle that enters boat mechanism 7 71 top station and stopping, then, the Y-axis transmission device drives mechanical arm and moves to SIC cantilever paddle 71 directions along Y direction, when being positioned at directly over the SIC cantilever paddle, mechanical paw and quartz boat stop the motion of Y-axis transmission device, Z shaft transmission drive horizontal shaft moves downward quartz boat steadily is placed on the SIC cantilever paddle then, and this moment, mechanical paw broke away from quartz boat.Y-axis transmission device drive mechanical arm and mechanical paw retreat to the clear space that pushes away boat mechanism rear along the Y direction level then.The quartz boat that will load silicon chip along the translation operation of X-axis guide rail with the laggard boat drive SIC of mechanism cantilever paddle is sent to the quartz tube catalyst chamber, when it arrives the translation final position, entering boat mechanism moves straight down along the Z axle again, retreat to the reference position of advancing the translation operation of boat mechanism along X-axis guide rail level after quartz boat steadily put into the quartz tube catalyst chamber, realize the soft landing of boat and quartz tube catalyst chamber.By the time technology finishes, advance after boat mechanism drives the SIC cantilever paddle quartz boat is taken out from catalyst chamber, automatic handling device is again along the path inverted running of dress during boat, quartz boat taken off from the SIC cantilever paddle be placed into the quartz boat working area that vertical axes is provided with, after treating that quartz boat fully cools off, take off on the loading bay 61 that is placed into feeding mechanism 6 from the quartz boat working area again.Loading bay 61 moves rearwards to the reference position of dress boat again along Y direction, by manually the quartz boat of cooling being taken away, and the injury of having avoided high quartz boat and eminence unloading quartz boat to cause human body.
The design unloads the boat device automatically, can pass through the independently working condition of online each station of detection of control system, in good time carry out X, Y, the motion of Z axle and feeding mechanism are placed processing, the boat that only needs during the dress boat manually to install sheet is placed on the feeding mechanism and the selective loading station, and automatic loading and unloading boat device will be finished the whole actions that are loaded into corresponding station automatically; Automatically unload the boat device when unloading boat and can automatically the quartz boat on the station of coming out of the stove be taken out and be placed on the quartz boat working area and be placed on again after cooling on the feeding mechanism, manually only need to take quartz boat away and get final product from feeding mechanism.Entire exercise is controlled by control system, and exercises cooperate automatically with guide rail by motor to be finished, and system can be by interlocking the safety of protection quartz boat and reaction sheet with each station field computer and limit sensors.In addition, manipulator paw is equipped with the protection quartz piece especially, can make the pollution away from impurity of quartz boat and silicon chip.
After automatic loading and unloading boat device of the present utility model is applied to diffusion furnace, improved the automation mechanized operation degree of diffusing procedure greatly, cooperate the automatic or S. A. loading and unloading sheet machinery of putting in addition, saving operation that can be a large amount of is required artificial, and the influence of having avoided manually-operated randomness that technology is produced, and can reduce the injury that human body is caused because of oven-fresh high quartz boat and eminence loading and unloading quartz boat.

Claims (6)

1. automatic loading and unloading boat device, it is characterized in that: described automatic loading and unloading boat device comprises a vertical axes along Z-direction; But be connected with the vertical axes up-and-down movement and along the horizontal shaft of Y direction; With the horizontal shaft bonded assembly mechanical arm that can seesaw; With the mechanical arm bonded assembly mechanical paw that can seesaw; The control system of the described horizontal shaft of one control, mechanical arm and mechanical paw motion.
2. automatic loading and unloading boat device according to claim 1, it is characterized in that: be connected by a lead screw transmission mechanism between described vertical axes and the horizontal shaft, between horizontal shaft and the mechanical arm, be connected by a tape handler between mechanical arm and the mechanical paw, and described lead screw transmission mechanism all links to each other with control system with tape handler and the control of controlled system.
3. automatic loading and unloading boat device according to claim 1 and 2 is characterized in that: described vertical axes comprises first vertical axes and second vertical axes that is oppositely arranged; Described mechanical arm comprises and described first vertical axes and second vertical axes difference bonded assembly first mechanical arm and second mechanical arm, is connected with a mechanical arm adapter shaft between first mechanical arm and second mechanical arm; Described mechanical paw comprises first mechanical paw and second mechanical paw that is oppositely arranged.
4. automatic loading and unloading boat device according to claim 3 is characterized in that: described first mechanical paw all becomes " L " type with second mechanical paw and is oppositely arranged on the bottom of mechanical arm.
5. automatic loading and unloading boat device according to claim 3, it is characterized in that: the inboard of described first vertical axes and second vertical axes also is arranged with respectively inwardly extends the quartz boat working area that forms earlier more forward, and the inboard in described quartz boat working area is provided with two to projecting inward cylinder.
6. automatic loading and unloading boat device according to claim 1, it is characterized in that: described automatic loading and unloading boat device also comprises a feeding mechanism, described feeding mechanism is provided with a charging transmission device that can seesaw along Y-axis, is fixedly connected with a loading bay on the charging transmission device.
CN2010202919111U 2010-08-13 2010-08-13 Automatic loading and unloading boat device Expired - Lifetime CN201756346U (en)

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Application Number Priority Date Filing Date Title
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102534553A (en) * 2011-12-08 2012-07-04 湖南红太阳光电科技有限公司 Automatic material loading and unloading system applied to multi-pipe plasma enhanced chemical vapor deposition (PECVD)
CN103831254A (en) * 2012-11-21 2014-06-04 泰克元有限公司 Pick and place apparatus for test handler
CN104377154A (en) * 2014-11-03 2015-02-25 江阴方艾机器人有限公司 Pipe-type PECVD graphite boat assembling and disassembling piece system and process
CN106128990A (en) * 2016-08-25 2016-11-16 深圳市捷佳伟创新能源装备股份有限公司 A kind of quartz boat connecting gear in diffusion furnace
CN107204390A (en) * 2017-07-12 2017-09-26 无锡市瑞能科技有限公司 Semi-automatic quartz boat guide card machine
CN107283402A (en) * 2017-08-04 2017-10-24 深圳市捷佳伟创新能源装备股份有限公司 Accurately control boat system on the manipulator and multitube reative cell of stroke
WO2018036488A1 (en) * 2016-08-25 2018-03-01 深圳市捷佳伟创新能源装备股份有限公司 Graphite boat transport mechanism used in pecvd apparatus
CN113479618A (en) * 2021-05-06 2021-10-08 北京北方华创微电子装备有限公司 Loading and unloading system and semiconductor process equipment

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102534553A (en) * 2011-12-08 2012-07-04 湖南红太阳光电科技有限公司 Automatic material loading and unloading system applied to multi-pipe plasma enhanced chemical vapor deposition (PECVD)
CN103831254A (en) * 2012-11-21 2014-06-04 泰克元有限公司 Pick and place apparatus for test handler
CN103831254B (en) * 2012-11-21 2016-06-29 泰克元有限公司 Pickup and apparatus for placing for testing, sorting machine
CN104377154A (en) * 2014-11-03 2015-02-25 江阴方艾机器人有限公司 Pipe-type PECVD graphite boat assembling and disassembling piece system and process
CN104377154B (en) * 2014-11-03 2017-11-10 江阴方艾机器人有限公司 Tubular type PECVD graphite boat loading-unloading plates system and its technique
CN106128990A (en) * 2016-08-25 2016-11-16 深圳市捷佳伟创新能源装备股份有限公司 A kind of quartz boat connecting gear in diffusion furnace
WO2018036488A1 (en) * 2016-08-25 2018-03-01 深圳市捷佳伟创新能源装备股份有限公司 Graphite boat transport mechanism used in pecvd apparatus
CN107204390A (en) * 2017-07-12 2017-09-26 无锡市瑞能科技有限公司 Semi-automatic quartz boat guide card machine
CN107283402A (en) * 2017-08-04 2017-10-24 深圳市捷佳伟创新能源装备股份有限公司 Accurately control boat system on the manipulator and multitube reative cell of stroke
CN107283402B (en) * 2017-08-04 2024-02-06 深圳市捷佳伟创新能源装备股份有限公司 Manipulator capable of accurately controlling expansion and contraction amount and boat loading system of multi-tube reaction chamber
CN113479618A (en) * 2021-05-06 2021-10-08 北京北方华创微电子装备有限公司 Loading and unloading system and semiconductor process equipment
CN113479618B (en) * 2021-05-06 2023-08-18 北京北方华创微电子装备有限公司 Loading and unloading system and semiconductor process equipment

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C14 Grant of patent or utility model
GR01 Patent grant
C56 Change in the name or address of the patentee

Owner name: SHENZHEN S.C NEW ENERGY TECHNOLOGY CORPORATION

Free format text: FORMER NAME: SHENZHEN JIEJIA WEICHUANG MICROELECTRONICS EQUIPMENT CO., LTD.

CP03 Change of name, title or address

Address after: 518000, Guangdong, Shenzhen province Baoan District manhole Street oyster four Lin slope pit Industrial Zone A4 and No. A6 workshop

Patentee after: Shenzhen S. C New Energy Equipment Co., Ltd.

Address before: 1, Shenzhen, Guangdong, Baoan District Province, oyster Town, four Lin Keng Hang industrial zone A4 building

Patentee before: Shenzhen Jiejiachuang Microelectronic Equipment Co., Ltd.

CX01 Expiry of patent term

Granted publication date: 20110309

CX01 Expiry of patent term