CN102534553A - Automatic material loading and unloading system applied to multi-pipe plasma enhanced chemical vapor deposition (PECVD) - Google Patents
Automatic material loading and unloading system applied to multi-pipe plasma enhanced chemical vapor deposition (PECVD) Download PDFInfo
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- CN102534553A CN102534553A CN2011104046015A CN201110404601A CN102534553A CN 102534553 A CN102534553 A CN 102534553A CN 2011104046015 A CN2011104046015 A CN 2011104046015A CN 201110404601 A CN201110404601 A CN 201110404601A CN 102534553 A CN102534553 A CN 102534553A
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Abstract
The invention relates to an automatic material loading and unloading system applied to multi-pipe plasma enhanced chemical vapor deposition (PECVD), which belongs to the field of automatic feeding and discharging systems and aims at solving the problems of low utilization rate of production fields, high cost, large labor strength, severe working environment and proneness to pollution and fragment of silicon slices due to the fact that the material loading and unloading of traditional PECVD process boats are manually finished. The automatic material loading and unloading system comprises a cart, a gantry lifter for conveying the process boats in the vertical direction and a manipulator installed on the gantry lifter and used for conveying the process boats in the horizontal direction. The cart is provided with a cart driving device for locking and releasing the cart. The automatic material loading and unloading system applied to the multi-pipe PECVD can satisfy full-automatic loading and unloading of the process boats in multi-pipe PECVD equipment and lays the foundation for full-automation of a solar cell production line.
Description
Technical field
The present invention is a kind of automatic loading and unloading system, is used for the full-automatic loading and unloading that multitube PECVD equipment is accomplished the technology boat, belongs to the photovoltaic solar apparatus field.
Background technology
The technology boat loading and unloading of traditional P ECVD are all accomplished by manual work; Increase along with single boat loaded with wafers quantity after the increase of wafer size and the process modification; The weight that causes having loaded the technology boat of wafer significantly increases; The increase of technology boat weight makes the structure of PECVD hindered to the height space development, has reduced the production capacity of equipment in the Clean room unit surface.The most important is that worker management and training cost are high in addition, and labour intensity is big, and work under bad environment is simultaneously because artificial factor causes the pollution of silicon chip and fragment problems also more outstanding.Adopt automatic loading and unloading device not only can equipment be increased to three pipes, four pipes from two original pipes on the contrary; Or even five the pipe; Thereby significantly improve the production efficiency of separate unit equipment; And can realize the robotization of equipping, and reduce operative employee's labour intensity and the floor space of practicing thrift shop equipment, be the inexorable trend of multitube PECVD Equipment Development therefore.
An outstanding feature of large-scale commercial prodn is exactly the increasingly automated of production process, and the realization of the automatic loading and unloading system of multitube PECVD will improve the automated operation degree of PECVD operation greatly.The employing of automatic loading and unloading system will bring the repeatability of process results height, the influence of having avoided manually-operated randomness that technology is produced.
Summary of the invention
Technology boat loading and unloading to traditional P ECVD are all accomplished by manual work, and this mode has restricted the spatial development of equipment, cause the utilization ratio of production site to reduce; Worker management and training cost are high; Labour intensity is big, and work under bad environment, artificial factor cause defectives such as pollution and the fragment of silicon chip; The present invention aims to provide a kind of automatic loading/unloading loading and unloading system that adapts to multitube PECVD, this loading and unloading loading and unloading system
To satisfy the full-automatic loading and unloading of technology boat in the multitube PECVD equipment, realize that the full-automation of solar cell slice assembly line lays the first stone.
To achieve these goals, the technical scheme that the present invention adopted is:
A kind of automatic loading/unloading loading and unloading system that adapts to multitube PECVD; Comprise go-cart; Its constructional feature is; Also comprise being contained in the arch type lifter that is used for transporting the technology boat in the go-cart, be contained in the mechanical manipulator that is used for transporting in the horizontal direction the technology boat on the arch type lifter, the go-cart drive unit of locking or release go-cart is housed in the said go-cart at vertical direction.
The structure of said arch type lifter does, comprises that two vertically are contained in the go-cart as the vertical beam of slide unit, are equipped with the drive-motor of strap brake device on this vertical beam.Because but vertical beam is made up of the slide unit of two self-movements; Electric motor driving through diverter with the motion evenly distribute to every axle of vertical beam; Realize being synchronized with the movement of two vertical beams, drive-motor is furnished with braking devices, can guarantee under off working state; The slide block mechanism self-locking guarantees the safety of technology boat under power-down state.
Said mechanical manipulator has two, and a mechanical manipulator is housed on the every vertical beam, and two mechanical manipulators that link to each other through synchronizing shaft are by an electric motor driving.Design two in the horizontal direction and get the boat mechanical manipulator, be separately fixed on two slide units of vertical beam, left and right sides mechanical manipulator adopts same electric motor driving, and middle the connection through synchronizing shaft guarantees that left and right sides manipulator behavior is consistent.
The cooling storage shelf of temporarily stored technology boat further, is housed on the said vertical beam.The cooling storage shelf is used for that thermal process boat to completion of processing cools off or is busy and when breaking down in processing, and the technology boat that aligns in transit stores.
The go-cart drive unit is used for jack-up and puts down through cylinder action, the effect of locking and release go-cart.
Nationality is by said structure, and the automatic loading and unloading system that adapts to multitube PECVD equipment adopts the arch type lifter structure in vertical direction, but vertical beam is the slide unit composition of two self-movements; Electric motor driving through diverter with the motion evenly distribute to every axle of vertical beam; Realize being synchronized with the movement of two vertical beams, drive-motor is furnished with braking devices, can guarantee under off working state; The slide block mechanism self-locking guarantees the safety of technology boat under power-down state.Simultaneously design two in the horizontal direction and get the boat mechanical manipulator, be separately fixed on two slide units of vertical beam, left and right sides mechanical manipulator adopts same electric motor driving, and middle the connection through synchronizing shaft guarantees that left and right sides manipulator behavior is consistent.Through the working condition of online each station of detection of system independently; About in good time the carrying out, translation and cooling storage shelf place and handle; Only need the artificial technology boat that will install sheet to be placed in the go-cart and the selective loading station during dress boat, mechanical manipulator will be accomplished the whole actions that are loaded into station automatically; Mechanical manipulator can take out the technology boat on the station of coming out of the stove and be placed on the chill station automatically when unloading boat, and artificial needs to take the technology boat away from chill station and get final product.
Entire exercise is controlled by the independent PLC of monitoring, and exercises cooperate with guide rail automatically through motor to be accomplished, and system interlocks to level sensor through reaching with supervisory computer, protects the safety of boat and technology sheet.
Below the present invention is done further description.
A kind of automatic loading and unloading system comprises: go-cart 1, arch type lifter 2, cooling storage shelf 3, go-cart drive unit 4, mechanical manipulator 5, technology boat 6.
Described go-cart 1: carry and transport the trolley platform of technology boat, the handled easily personnel carry out the operation of technology boat access device.In pecvd process, come manually processing in the technology boat immigration equipment, and after process finishing, the technology boat is shifted out equipment with a go-cart.
Described arch type lifter 2: arch type lifter is used for carrying out the motion of vertical direction, is responsible for the technology boat in go-cart, between each pipe of PECVD with the vertical movement of cooling storage shelf.
Described cooling storage shelf 3: be used for that thermal process boat to completion of processing cools off or busy and when breaking down in processing, the technology boat that aligns in transit stores.This system disposition two the cooling storage shelf.
Described go-cart drive unit 4: the go-cart drive unit is used for jack-up and puts down through cylinder action, the effect of locking and release go-cart.
Said mechanical manipulator 5: mechanical manipulator is used for go-cart, the extracting of the technology boat on cooling storage shelf and the equipment, and can move in the horizontal direction, cooperate arch type lifter to accomplish the loading and unloading of technology boat.
Described technology boat 6: the technology boat is used in the thermochemical processes process as the mechanical loader of silicon chip.
Compared with prior art, the invention has the beneficial effects as follows:
1. loading and unloading full process automatization helps to realize the robotization of whole line equipment;
2. mechanism kinematic interlocking, fault alarm is perfect, and the stoppage protection function is arranged;
3. system independently controls, and can adapt to sensing communication under the high-temperature severe environment;
4. the employing of the two-stage synchronous belt drive mechanism of arch type lifter structure and mechanical manipulator, it is reliable that compact construction, action are operated steadily, and SF is high.
Description of drawings
Fig. 1 is the structural representation of an embodiment of the present invention.
In the drawings:
The 1-go-cart; The 2-arch type lifter; 3-cools off storage shelf; 4-go-cart drive unit;
The 5-mechanical manipulator; 6-technology boat.
Embodiment
Below in conjunction with accompanying drawing 1 and specific embodiment the present invention is done further introduction, but not as to qualification of the present invention.
A kind of automatic loading and unloading system that adapts to multitube PECVD equipment; As shown in Figure 1; Comprise go-cart 1; Be contained in the arch type lifter 2 that is used for transporting technology boat 6 in the go-cart 1, be contained in the mechanical manipulator 5 that is used for transporting in the horizontal direction technology boat 6 on the arch type lifter 2, the go-cart drive unit 4 of locking or release go-cart 1 is housed in the said go-cart 1 at vertical direction.The structure of said arch type lifter 2 does, comprises that two vertically are contained in the go-cart 1 as the vertical beam of slide unit, are equipped with the drive-motor of strap brake device on this vertical beam.Said mechanical manipulator 5 has two, and a mechanical manipulator is housed on the every vertical beam, and two mechanical manipulators that link to each other through synchronizing shaft are by an electric motor driving.The cooling storage shelf 3 of temporarily stored technology boat 6 is housed on the said vertical beam.
During work, through the go-cart 1 puopulsion equipment interface of operator, when detecting go-cart 1 and putting in place with loading technique boat 6; Go-cart drive unit 4 is through go-cart 1 of cylinder action jack-up and locking, and the arch type lifter 2 of vertical direction moves to go-cart 1 position, and the mechanical manipulator 5 of horizontal direction is moved horizontally to technology boat 6 positions extracting technology boat 6 and leaves go-cart 1; The equipment of sending into carries out processes, and after machining, mechanical manipulator 5 stretches into equipment; The technology boat 6 that extracting machines; Through the motion of arch type lifter 2 and mechanical manipulator 5, the technology boat 6 after the processing is delivered to cooling storage shelf 3, after the completion to be cooled; Technology boat 6 through the motion of arch type lifter 2 and mechanical manipulator 5 will be cooled off on the storage shelf 3 is sent go-cart 1 back to, accomplishes all processes of whole automatic loading/unloading.
Specific embodiment of the present invention elaborates content of the present invention.As far as persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from spirit of the present invention, it being done all constitutes to infringement of the present invention, with corresponding legal responsibilities.
Claims (4)
1. automatic loading/unloading loading and unloading system that adapts to multitube PECVD; Comprise go-cart (1); It is characterized in that; Also comprise being contained in the arch type lifter (2) that is used for transporting technology boat (6) in the go-cart (1), be contained in the mechanical manipulator (5) that is used for transporting in the horizontal direction technology boat (6) on the arch type lifter (2), the go-cart drive unit (4) of locking or release go-cart (1) is housed in the said go-cart (1) at vertical direction.
2. the automatic loading/unloading loading and unloading system of adaptation multitube PECVD according to claim 1; It is characterized in that; The structure of said arch type lifter (2) is to comprise that two vertically are contained in go-cart (1) upward as the vertical beam of slide unit, are equipped with the drive-motor of strap brake device on this vertical beam.
3. the automatic loading/unloading loading and unloading system of adaptation multitube PECVD according to claim 1 is characterized in that, said mechanical manipulator (5) has two, and a mechanical manipulator is housed on the every vertical beam, and two mechanical manipulators that link to each other through synchronizing shaft are by an electric motor driving.
4. according to the automatic loading/unloading loading and unloading system of the described adaptation multitube of one of claim 2～3 PECVD, it is characterized in that, the cooling storage shelf (3) of temporarily stored technology boat (6) is housed on the said vertical beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104046015A CN102534553A (en) | 2011-12-08 | 2011-12-08 | Automatic material loading and unloading system applied to multi-pipe plasma enhanced chemical vapor deposition (PECVD) |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104046015A CN102534553A (en) | 2011-12-08 | 2011-12-08 | Automatic material loading and unloading system applied to multi-pipe plasma enhanced chemical vapor deposition (PECVD) |
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| CN102534553A true CN102534553A (en) | 2012-07-04 |
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| CN2011104046015A Pending CN102534553A (en) | 2011-12-08 | 2011-12-08 | Automatic material loading and unloading system applied to multi-pipe plasma enhanced chemical vapor deposition (PECVD) |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114717537A (en) * | 2022-03-23 | 2022-07-08 | 山西潞安太阳能科技有限责任公司 | PECVD graphite boat storage and blanking method |
| CN117902318A (en) * | 2024-03-19 | 2024-04-19 | 昆山科比精工设备有限公司 | Silicon wafer limiting hanging frame and silicon wafer loading and unloading device |
| CN117902318B (en) * | 2024-03-19 | 2024-05-24 | 昆山科比精工设备有限公司 | Silicon wafer limiting hanging frame and silicon wafer loading and unloading device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10278881A (en) * | 1997-04-08 | 1998-10-20 | Nissei Build Kogyo Co Ltd | Lifter for marine vessel transportation and multi parking device |
| CN201258359Y (en) * | 2008-09-12 | 2009-06-17 | 常州天合光能有限公司 | Conveying station at charging and discharging ends of PECVD equipment |
| CN201756346U (en) * | 2010-08-13 | 2011-03-09 | 深圳市捷佳伟创微电子设备有限公司 | Automatic loading and unloading boat device |
| CN201778110U (en) * | 2010-08-13 | 2011-03-30 | 深圳市捷佳伟创微电子设备有限公司 | Plasma enhanced chemical vapor deposition (PECVD) automatic loading and unloading boat device |
| CN202384309U (en) * | 2011-12-08 | 2012-08-15 | 湖南红太阳光电科技有限公司 | Automatic loading and unloading system adaptable to multi-tubular plasma enhanced chemical vapor deposition (PECVD) |
-
2011
- 2011-12-08 CN CN2011104046015A patent/CN102534553A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10278881A (en) * | 1997-04-08 | 1998-10-20 | Nissei Build Kogyo Co Ltd | Lifter for marine vessel transportation and multi parking device |
| CN201258359Y (en) * | 2008-09-12 | 2009-06-17 | 常州天合光能有限公司 | Conveying station at charging and discharging ends of PECVD equipment |
| CN201756346U (en) * | 2010-08-13 | 2011-03-09 | 深圳市捷佳伟创微电子设备有限公司 | Automatic loading and unloading boat device |
| CN201778110U (en) * | 2010-08-13 | 2011-03-30 | 深圳市捷佳伟创微电子设备有限公司 | Plasma enhanced chemical vapor deposition (PECVD) automatic loading and unloading boat device |
| CN202384309U (en) * | 2011-12-08 | 2012-08-15 | 湖南红太阳光电科技有限公司 | Automatic loading and unloading system adaptable to multi-tubular plasma enhanced chemical vapor deposition (PECVD) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114717537A (en) * | 2022-03-23 | 2022-07-08 | 山西潞安太阳能科技有限责任公司 | PECVD graphite boat storage and blanking method |
| CN114717537B (en) * | 2022-03-23 | 2023-08-22 | 山西潞安太阳能科技有限责任公司 | PECVD graphite boat storage and blanking method |
| CN117902318A (en) * | 2024-03-19 | 2024-04-19 | 昆山科比精工设备有限公司 | Silicon wafer limiting hanging frame and silicon wafer loading and unloading device |
| CN117902318B (en) * | 2024-03-19 | 2024-05-24 | 昆山科比精工设备有限公司 | Silicon wafer limiting hanging frame and silicon wafer loading and unloading device |
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Application publication date: 20120704 |
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