CN203159708U - Graphite boat automatic running system adapting to multi-pipe PECVD (Plasma Enhanced Chemical Vapor Deposition) device - Google Patents
Graphite boat automatic running system adapting to multi-pipe PECVD (Plasma Enhanced Chemical Vapor Deposition) device Download PDFInfo
- Publication number
- CN203159708U CN203159708U CN 201320058173 CN201320058173U CN203159708U CN 203159708 U CN203159708 U CN 203159708U CN 201320058173 CN201320058173 CN 201320058173 CN 201320058173 U CN201320058173 U CN 201320058173U CN 203159708 U CN203159708 U CN 203159708U
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- CN
- China
- Prior art keywords
- graphite boat
- cart
- pecvd
- multitube
- running system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a graphite boat automatic running system adapting to a multi-pipe PECVD (Plasma Enhanced Chemical Vapor Deposition) device. The graphite boat automatic running system comprises a cart, wherein a cart drive device for locking or unlocking the cart is arranged on the cart. The graphite boat automatic running system also comprises a base, wherein two uprights are arranged on the base, one sides of the two uprights are respectively provided with a manipulator used for conveying a graphite boat loaded by the cart in a horizontal direction, a gantry lifter used for conveying the graphite boat in the vertical direction is arranged on one side of the base, and a process paddle which is used for loading the graphite boat and is capable of moving in the vertical direction is arranged on the gantry lifter. According to the graphite boat automatic running system adapting to the multi-pipe PECVD device, only is one process paddle used, the automatic operation degree of the PECVD is greatly improved, the working efficiency is high, the production period is shortened, the working intensity of workers is lightened, and the equipment cost is effectively saved.
Description
Technical field
The utility model relates to the automatic operational system of a kind of graphite boat, is used for the fully automatic operation that multitube PECVD equipment is finished graphite boat, belongs to electronic industry equipment special field.
Background technology
The technology oar of traditional PECVD all is supporting with process duct, and equipment is increased to three pipes, four pipes from two original pipes, or even five pipes, and the technology oar is also from two original corresponding increases.The installation strength of equipment is big, and installation period is long, the mounting process complexity, and each technology oar needs two motors and driving governor thereof, and the many costs of Guan Yue are more high, and maintenance difficulties is more big.The most important is that intensity of workers is big in addition, and Working environment is strict, causes the artificial pollution to silicon chip or graphite boat, damage easily.
The trend in industrial production future is high mechanization, automatization, informationization, reduces and reduce as far as possible the interference of human factor.
Summary of the invention
Technical problem to be solved in the utility model is, at the prior art deficiency, provides a kind of automatic operational system of graphite boat that adapts to multitube PECVD equipment, makes technology oar of multitube PECVD device just just can realize the fully automatic operation of graphite boat.
For solving the problems of the technologies described above, the technical scheme that the utility model adopts is: a kind of automatic operational system of graphite boat that adapts to multitube PECVD equipment, comprise go-cart, the go-cart drive unit of locking or release go-cart is housed in the described go-cart, also comprise base, described base is provided with two root posts, and described two root posts, one side respectively is equipped with a mechanical manipulator that is used for transporting in the horizontal direction the graphite boat that is loaded by go-cart; Described base one side is equipped with for the arch type lifter that transports graphite boat at vertical direction, is equipped with on the described arch type lifter for carrying graphite boat and the technology oar that can move at vertical direction.
As preferred version, described arch type lifter comprises that two vertically are installed on the described base as the vertical beam of slide rail, are equipped with the drive-motor of strap brake device on the described vertical beam.
As preferred version, pass through two mechanical manipulators that synchronizing shaft links to each other by an electric motor driving on described two root posts.
As preferred version, described technology oar is embedded with by motor-driven worm and gear.
Described motor is connected with computer by PLC.
Compared with prior art, the beneficial effect that the utility model has is: the utility model multitube PECVD only need use a technology oar, the realization of the automatic operational system of graphite boat of multitube PECVD makes PECVD automated operation degree improve greatly, high efficiency, shortened the production cycle, alleviate staff's working strength, effectively saved equipment cost.
Description of drawings
Fig. 1 is the utility model one example structure synoptic diagram;
Fig. 2 picks and places boat process synoptic diagram for the utility model one embodiment device.
Embodiment
As shown in Figure 1, the utility model one embodiment comprises go-cart 5, the go-cart drive unit 6 of locking or release go-cart 5 is housed in the described go-cart 5, also comprise base 8, described base 8 is provided with two root posts 9, and described two root posts, 9 one sides respectively are equipped with a mechanical manipulator 2 that is used for transporting in the horizontal direction the graphite boat 4 that is loaded by go-cart 5; Described base 8 one sides are equipped with for the arch type lifter 1 that transports graphite boat 4 at vertical direction, be equipped with on the described arch type lifter 1 for carrying graphite boat 4 and the technology oar 3 that can move at vertical direction, technology oar 3 is embedded with by motor-driven worm and gear 7.
Motor is connected with computer by PLC, and entire exercise is controlled by PLC, and exercises cooperate with guide rail by each motor to be finished, and PLC is connected with computer.
Arch type lifter is used for carrying out the motion of vertical direction, is responsible for the vertical movement between each pipe of technology oar.
Mechanical manipulator can move in the horizontal direction, and the lifting of cooperation technology oar and the top of go-cart are put to finish and picked and placeed graphite boat.
The technology oar is used for laying the mechanical loader of graphite boat, and can move at vertical direction, cooperates arch type lifter to finish graphite boat each boiler tube of advancing and retreat.
Graphite boat is used in the thermochemical processes process as the mechanical loader of silicon chip.
Go-cart is carrying and the platform that transports graphite boat, and the handled easily personnel carry out the operation of graphite boat access device.In pecvd process, come manually will to process in the graphite boat immigration equipment with a go-cart, and after process finishing, graphite boat is shifted out equipment.
The go-cart drive unit utilizes pneumatic principle, can tightly lock and go-cart is put on the top.
Worm and gear links to each other with motor by reduction box, is embedded on the technology oar, realizes the advance and retreat of technology oar.
The automatic operational system of graphite boat that adapts to multitube PECVD equipment adopts the arch type lifter structure in the vertical direction, but vertical beam is the slide rail of two self-movements, motor with the motion evenly distribute to every axle of vertical beam, realize being synchronized with the movement of two vertical beams, drive-motor is furnished with braking devices, can guarantee that under off working state the slide block mechanism self-locking guarantees the safety of graphite boat under power-down state.The technology oar is installed on the worm and gear, realizes technology oar advance and retreat by a driven by motor worm and gear.When the dress boat, fixedly station is shifted in the go-cart that has graphite boat onto, cylinder locking and the jack-up go-cart of go-cart drive unit, the mechanical manipulator level run is to the go-cart position, at this moment, the cylinder that is used for the jack-up go-cart descends, mechanical manipulator is held the graphite boat tangential movement to specifying mechanical manipulator to pick and place the boat position, technology oar vertical uplift is held graphite boat, at this moment, the mechanical manipulator level is returned initial point (initial point is that program setting is in the mid-way of go-cart and technology oar), and the technology oar vertically runs to specifies boiler tube position and tangential movement under the drive of worm and gear, and graphite boat is put into boiler tube.When unloading boat, the technology oar vertically runs to specifies boiler tube that graphite boat is taken out, vertically run to mechanical manipulator again and pick and place the boat position, the mechanical manipulator level run is to this position, and the technology oar vertically descends, mechanical manipulator is held the graphite boat tangential movement to the go-cart position, at this moment, go-cart is held graphite boat by cylinder jack-up, and the mechanical manipulator level is returned initial point, descend and the release go-cart, get boat and finish.Pick and place the boat process as shown in Figure 2.
Claims (5)
1. automatic operational system of graphite boat that adapts to multitube PECVD equipment, comprise go-cart (5), the go-cart drive unit (6) of locking or release go-cart (5) is housed in the described go-cart (5), it is characterized in that, also comprise base (8), described base (8) is provided with two root posts (9), and described two root posts (9) one sides respectively are equipped with a mechanical manipulator (2) that is used for transporting in the horizontal direction the graphite boat (4) that is loaded by go-cart (5); Described base (8) one sides are equipped with for the arch type lifter (1) that transports graphite boat (4) at vertical direction, are equipped with on the described arch type lifter (1) for carrying graphite boat (4) and the technology oar (3) that can move at vertical direction.
2. the automatic operational system of graphite boat of adaptation multitube PECVD equipment according to claim 1, it is characterized in that, described arch type lifter (1) comprises that two vertically are installed in described base (8) upward as the vertical beam of slide rail, are equipped with the drive-motor of strap brake device on the described vertical beam.
3. the automatic operational system of graphite boat of adaptation multitube PECVD equipment according to claim 1 is characterized in that, passes through two mechanical manipulators (2) that synchronizing shaft links to each other by an electric motor driving on described two root posts (9).
4. the automatic operational system of graphite boat of adaptation multitube PECVD equipment according to claim 1 is characterized in that, described technology oar (3) is embedded with by motor-driven worm and gear (7).
5. according to the automatic operational system of graphite boat of the described adaptation multitube of one of claim 2 to 4 PECVD equipment, it is characterized in that described motor is connected with computer by PLC.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320058173 CN203159708U (en) | 2013-02-01 | 2013-02-01 | Graphite boat automatic running system adapting to multi-pipe PECVD (Plasma Enhanced Chemical Vapor Deposition) device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320058173 CN203159708U (en) | 2013-02-01 | 2013-02-01 | Graphite boat automatic running system adapting to multi-pipe PECVD (Plasma Enhanced Chemical Vapor Deposition) device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203159708U true CN203159708U (en) | 2013-08-28 |
Family
ID=49020907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320058173 Expired - Fee Related CN203159708U (en) | 2013-02-01 | 2013-02-01 | Graphite boat automatic running system adapting to multi-pipe PECVD (Plasma Enhanced Chemical Vapor Deposition) device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203159708U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109487241A (en) * | 2018-12-21 | 2019-03-19 | 无锡华源晶电科技有限公司 | A kind of high production capacity PECVD device of 8 pipes |
| CN110904439A (en) * | 2019-10-23 | 2020-03-24 | 深圳市拉普拉斯能源技术有限公司 | Novel boat transportation structure |
-
2013
- 2013-02-01 CN CN 201320058173 patent/CN203159708U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109487241A (en) * | 2018-12-21 | 2019-03-19 | 无锡华源晶电科技有限公司 | A kind of high production capacity PECVD device of 8 pipes |
| CN110904439A (en) * | 2019-10-23 | 2020-03-24 | 深圳市拉普拉斯能源技术有限公司 | Novel boat transportation structure |
| CN110904439B (en) * | 2019-10-23 | 2020-12-29 | 深圳市拉普拉斯能源技术有限公司 | Novel boat transportation structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130828 Termination date: 20180201 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |