CN103831254A - Pick and place apparatus for test handler - Google Patents
Pick and place apparatus for test handler Download PDFInfo
- Publication number
- CN103831254A CN103831254A CN201310573224.7A CN201310573224A CN103831254A CN 103831254 A CN103831254 A CN 103831254A CN 201310573224 A CN201310573224 A CN 201310573224A CN 103831254 A CN103831254 A CN 103831254A
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- pick
- module
- axis
- guide member
- guide rail
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67333—Trays for chips
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
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- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The invention discloses a pick and place apparatus for a test handler. The apparatus comprises a main body; an X-axis-direction guide rail; picker modules arranged in the X-axis direction,wherein each picker module is provided with pickers spaced from each other in the Y-axis direction; an X-axis-direction distance adjusting device used for adjusting the distance between the picker modules; and a Y-axis-direction distance adjusting device used for adjusting the distance between the pickers arranged in each picker module and located in the Y-axis direction. Each picker module comprises a first guide member capable of moving along the X-axis-direction guide rail, a Y-axis-direction guide rail arranged in the first guide member, and a second guide member capable of moving along the Y-axis-direction guide rail and connected to a Y-axis-direction moving guide member of the Y-axis-direction distance adjusting device so as to enable the Y-axis-direction moving guide member to move together with the second guide member.
Description
Technical field
The present invention relates to picking up and apparatus for placing for Test handler.
Background technology
For test electronic device (particularly semiconductor devices), need a kind of for testing the tester of electronic component and comprising for being electrically connected the Test handler of electronic device to the equipment of this tester.
Test handler comprises test pallet, is mounted with multiple semiconductor devices of matrix form and transmits all these semiconductor devices simultaneously on it.
After semiconductor devices is loaded on test pallet (being also referred to as " loading plate "), semiconductor devices is electrically connected to the test jack of tester.Therefore the distance, being loaded between the semiconductor devices on test pallet must be corresponding to the distance between the test jack of tester.
On the other hand, before offering Test handler, semiconductor devices to be tested is loaded on user tray.The expection object of user tray is to load and storing semiconductor device.Therefore,, in order to increase the delivered payload capability of user tray, the distance being loaded between the semiconductor devices on user tray can be less than the distance between the semiconductor devices being loaded on test pallet.
Test handler is provided with and picks up and apparatus for placing, and it transfers to test pallet by semiconductor devices to be tested from user tray, or the semiconductor devices of having tested on test pallet is transferred to user tray.In addition, because the distance being loaded between the semiconductor devices on user tray is different from the distance between the semiconductor devices being loaded on test pallet, so Test handler must be provided with the structure of the distance between adjustable semiconductor devices in the time of transferring semiconductor device between user tray and test pallet.
Fig. 1 is the schematic plan view illustrating according to the structure of the Test handler of conventional art.
With reference to Fig. 1, comprise test pallet TT, load to pick up with apparatus for placing LH, two assorting table STa and STb, classification and pick up with apparatus for placing SH and unloading and pick up and apparatus for placing UH according to the Test handler TH of conventional art.
Test pallet TT circulates in circulating path C, and this circulating path C starts from " loaded " position LP and extends to " loaded " position LP through test position TP and unloading position UP.
Loading picks up with apparatus for placing LH(and is also referred to as loader) for the semiconductor devices being loaded on user tray CT1 is loaded into the loading plate CB that is arranged on " loaded " position LP place.In order to increase processing speed, can be provided with multiple loadings and pick up and apparatus for placing LH.In the accompanying drawings, show and be provided with two loadings and pick up and apparatus for placing LH.
Each assorting table STa and STb can carry out step with respect to forward direction-backward direction (Y direction, other are same as described above) and back and forth operate, and with matrix form, multiple semiconductor devices are loaded thereon.
The classification that is called as classifier is picked up and with apparatus for placing SH, semiconductor devices is transferred to assorting table STa and STb is upper, and wherein this semiconductor devices has been loaded on test pallet TT also tested at unloading position UP place.Classification is picked up with apparatus for placing SH and is conventionally configured to only can in X-direction, move, and maybe can prevent and unload the operative interventions of picking up with apparatus for placing UH to improve its mobility to make it can reduce weight.In order more effectively to realize above-mentioned purpose, assorting table STa and STb can be configured to carry out step with respect to forward direction-backward direction and back and forth operate.
Unloading is picked up with apparatus for placing UH and is also referred to as unloader, and for the semiconductor devices being loaded on assorting table STa and STb is sent to concrete user tray CT2.
In above-mentioned Test handler TH, in order to ensure the speed of unloading operation, unload side part is subdivided into classification and picks up with apparatus for placing SH, assorting table STa and STb and unloading and pick up and apparatus for placing UH.The element of unload side part can carry out unloading operation by the division of labor more quickly.
On the other hand, the interval being loaded between the semiconductor devices on test pallet is determined by the distance between the test jack of tester.For example, as shown in Figure 2, semiconductor devices can a, b, a, b, a, b...(b>a) constant X axis interval t and the Y-axis of pattern be disposed on test pallet TT.On the other hand, as shown in Figure 3, the X axis interval s(s<t that semiconductor devices can be constant) and constant Y-axis interval u(2u=a) be arranged on assorting table STa or STb.
Therefore, be different from because be loaded in the interval of the semiconductor devices on test pallet TT the interval that is positioned at the semiconductor devices on assorting table STa or STb, so the classification that preferably semiconductor devices is transferred to assorting table STa or STb from test pallet TT is picked up and apparatus for placing SH is arranged so that the distance (each pick-up can capture a semiconductor devices) between pick-up can regulate with respect to X-direction and Y direction.
About this, in 10-2010-0079945 Korean unexamined patent open (patent document 1), propose to be configured in X-direction and Y direction, to regulate picking up and apparatus for placing of distance between pick-up.
Picking up with apparatus for placing of introducing in patent document 1 used lobe plate mobile pick-up in X-direction and Y direction.In this case, there is the problem of the overall dimensions increase of device and the mechanical realization complexity of device.
In addition, move with Y-axis and move because can not control separately X axis, so be difficult to this device to use in various situations.
On the other hand, another that has proposed to be configured to regulate distance between pick-up in 10-2011-0059086 Korean unexamined patent open (patent document 2) in X-direction and Y direction picks up and apparatus for placing.
In patent document 2, introduce pick up and X axis that apparatus for placing can be controlled separately pick-up moves with Y-axis and moves.But, because also use lobe plate in the mode identical with patent document 1, so still there is the problem of the relatively large and mechanical realization complexity of the overall dimensions of device.
In addition, move with Y-axis and move although can control separately the X axis of pick-up, displacement is unadjustable.Therefore, patent document 2 pick up with apparatus for placing with the picking up the mode identical with apparatus for placing and can not use in various situations of patent document 1.
[prior art file]
[patent document]
(patent document 1): 10-2010-0079945 Korean unexamined patent open (open day: on July 8th, 2010)
(patent document 2): 10-2011-0059086 Korean unexamined patent open (open day: on June 2nd, 2011)
Summary of the invention
Therefore, one object of the present invention is to provide a kind of for Test handler and have reduced size and the picking up and apparatus for placing of simple structure.
Another object of the present invention is to provide a kind of for the picking up and apparatus for placing of Test handler, it is configured to not only the X axis distance between adjustable pick-up and Y-axis distance, and the X axis displacement of adjustable pick-up and Y-axis displacement.
According to the preferred embodiment of the present invention, provide a kind of for the picking up and apparatus for placing of Test handler, it provides semiconductor devices to the second place from primary importance, is provided with and is arranged on the multiple pick-up modules in X-direction and comprises: main body; Be arranged on the X axis guide rail at main body place; Be arranged on main body place and be arranged on the multiple pick-up modules in X-direction, each pick-up module comprises the multiple pick-ups that are spaced apart from each other with respect to Y direction; Regulate the X axis distance adjustment equipment of the distance between the plurality of pick-up module; Adjusting is arranged on the Y-axis distance adjustment equipment of the distance between the described pick-up in each described pick-up module and in Y direction, and wherein each pick-up module comprises and is arranged to first guide member that can move along described X axis guide rail; Be arranged on the first guide member place and the Y-axis guide rail of definite length extended in Y direction; Be arranged to second guide member that can move along described Y-axis guide rail, its Y-axis that is connected to described Y-axis distance adjustment equipment moves guide member, can move together with described the second guide member to make described Y-axis move guide member.
Y-axis moves guide member place can be provided with auxiliary guide rail, and this auxiliary guide rail extends in X-direction, and can be provided with auxiliary guide rail connector on the second guide member, and this auxiliary guide rail connector is connected to auxiliary guide rail.
X axis distance adjustment equipment can comprise: from least one driving wheel of the first motor received energy; Be connected at least one band of at least one driving wheel; And at least one driven pulley interlocking by least one band and driving wheel.Y-axis distance adjustment equipment can comprise: by the ball-screw that rotates and extend in Y direction from the power of the second motor transmission; The ball nut that is attached to ball-screw and moves in Y direction.Y-axis moves guide member can be attached to ball nut.Y-axis moves guide member and can in Y direction, move together with ball nut.All pick-up modules or can be connected to respectively a band corresponding at least one band and move together with X axis guide rail is in X-direction except the residue pick-up module any in pick-up module.One of be arranged in each pick-up module in pick-up at least and can be connected to Y-axis and move guide member and move together with ball nut is in Y direction.
Driving wheel can comprise multiple driving driving wheels, and the plurality of driving wheel can have the diameter differing from one another.
The pick-up module that is not attached to band can be fastened to main body.
Driving wheel can comprise two driving wheels, and band can comprise two bands, and driven pulley can comprise two driven pulleys.The ratio of the diameter of two driving wheels can be 1:2.Pick-up module can comprise: be fastened to main body and be prevented from the second pick-up module mobile in X-direction; The first pick-up module, is arranged on a side of described the second pick-up module and is connected to a side of the band that is connected with the driving wheel with small diameter; The 3rd pick-up module, is arranged on the opposite side of the second pick-up module and is connected to the opposite side of the band that is connected with the driving wheel with small diameter; The 4th pick-up module, is arranged on the opposite side of the second pick-up module and is connected to a side that is connected with the band with larger-diameter driving wheel;
As mentioned above, the present invention can be provided for picking up of Test handler and apparatus for placing, and it has less and simple structure and is configured to X axis distance and the Y-axis distance between adjustable pick-up.
In addition, in the present invention, can easily regulate X axis displacement and the Y-axis displacement of pick-up, therefore make this pick up with apparatus for placing and can be used for various work.
Brief description of the drawings
In conjunction with the drawings with reference to the following description of preferred embodiment, above and other objects of the present invention and feature will be apparent, in the accompanying drawings:
Fig. 1 is the floor map illustrating according to the structure of the Test handler of conventional art;
Fig. 2 and Fig. 3 are the reference diagrams that the operation of the Test handler of Fig. 1 is shown;
Fig. 4 illustrates picking up and the stereogram of apparatus for placing according to Test handler of the present invention;
Fig. 5 is the picking up and the stereogram of apparatus for placing of Fig. 4 that has removed motor and sidewall;
Fig. 6 is picking up and the stereogram of the main body of apparatus for placing of Fig. 4;
Fig. 7 is picking up and the face upwarding stereogram of the main body of apparatus for placing of Fig. 6;
Fig. 8 shows the pick-up module of the Fig. 4 that is connected to guide rail;
Fig. 9 is the exploded perspective view of Fig. 8;
Figure 10 is the exploded perspective view of the first pick-up module of Fig. 9;
Figure 11 is the exploded perspective view of the Y-axis distance adjustment equipment of Fig. 9;
Figure 12 shows picking up with the X axis distance adjustment of apparatus for placing of Fig. 4 and operates; And
Figure 13 and Figure 14 show picking up with the Y-axis distance adjustment of apparatus for placing of Fig. 4 and operate.
Detailed description of the invention
Hereinafter, describe with reference to the accompanying drawings the preferred embodiment of the present invention in detail, so that it can easily be implemented by those skilled in the art.
If unnecessarily fuzzy purport of the present invention of the detailed description of known function or configuration, will omit this detailed description in description.
Fig. 4 is picking up and the stereogram of apparatus for placing 10 according to Test handler of the present invention.Fig. 5 is the picking up and the stereogram of apparatus for placing 10 of Fig. 4 that has removed motor and side.Fig. 6 is picking up and the stereogram of the main body 100 of apparatus for placing 10 of Fig. 4.Fig. 7 is the face upwarding stereogram of the main body 100 of Fig. 6.
With reference to Fig. 4 to Fig. 7, comprise multiple pick-up module PM according to picking up of the Test handler of an embodiment of the invention and apparatus for placing 10, the plurality of pick-up module PM is arranged in X-direction and is arranged to parallel to each other.Semiconductor devices is remained on primary importance place by pick-up module, and semiconductor devices is transferred to the second place, and discharge these semiconductor devices in the second place.At length, pick up with apparatus for placing 10 and comprise main body 100, pick-up module PM, X axis distance adjustment equipment 200 and Y-axis distance adjustment equipment 300.Pick-up module PM is arranged on main body 100 and sentences just and can in X-direction, move, and pick-up module PM has multiple pick-up P1 to P8.X axis distance adjustment equipment 200 regulates the distance between pick-up module PM.The distance that Y-axis distance adjustment equipment 300 regulates between the multiple pick-ups that are separately positioned in pick-up module 600,700,800 and 900.
Pick up with apparatus for placing 10 and be arranged in Test handler (not shown).According to application target, pick up with apparatus for placing 10 and be arranged to move in a predetermined direction.As shown in drawings, pick up with apparatus for placing 10 and can be configured to only have a main body 100, or alternately, it is integrated and move together each other that it can be configured to multiple main bodys 100.
Some pick-up modules 600,800 and 900 in pick-up module PM are arranged in X-direction, to move along the X axis guide rail of main body 100 112 and 114, and another pick-up module 700 is firmly fastened to main body 100.For example, the second pick-up module 700 can be fastened to base portion 110.But this structure is only exemplary, all pick-up module PM can be arranged in X-direction, to move.
In addition, in this embodiment, although four pick-up modules 600,700,800 and 900 are illustrated as being arranged in main body 100, the present invention is not limited to this embodiment.Here,, along X-direction, pick-up module is called as respectively the first pick-up module 600, the second pick-up module 700, the three pick-up modules 800 and the 4th pick-up modules 900.
These pick-up modules PM comprises respectively a pair of pick-up P1 and P5, a pair of pick-up P2 and P6, a pair of pick-up P3 and P7 and a pair of pick-up P4 and P8.By the distance between the adjustable every pair of pick-up of Y-axis distance adjustment equipment 300.At length, the first pick-up P1 and the 5th pick-up P5 are connected to the first pick-up module 600.The second pick-up P2 and the 6th pick-up P6 are connected to the second pick-up module 700.The 3rd pick-up P3 and the 7th pick-up P7 are connected to the 3rd pick-up module 800.The 4th pick-up P4 and the 8th pick-up P8 are connected to the 4th pick-up module 900.Distance between pick-up P1, P2, P3, P4 and pick-up P5, P6, P7, P8 can regulate by Y-axis distance adjustment equipment 300, wherein, pick-up P1, P2, P3, P4 are arranged on a side of the first pick-up P1, and pick-up P5, P6, P7, P8 are arranged on a side of the 5th pick-up P5.
In this embodiment, be shown and be arranged so that two pick-ups that are spaced apart from each other with respect to Y direction are arranged in pick-up module PM although pick up with apparatus for placing, spirit of the present invention is not limited to this embodiment.For example, three or more pick-ups can be set.
By being connected with external power source (not shown), pick-up P1 to P8 keeps semiconductor devices or exhaust to discharge semiconductor devices with suction.For example, the upper end of each pick-up is connected to power source.In this embodiment, be provided with eight pick-ups altogether although pick up the mode being shown by two pick-ups are installed in each pick-up module with apparatus for placing 10, the number or the sum that are mounted in the pick-up in each pick-up module can carry out multiple change.Spirit of the present invention should not limited by the number of pick-up.
X axis distance adjustment equipment 200 comprise produce driving force the first motor M1, be connected to the first driving wheel 211 of the first motor M1, by first with B1 from the first driven pulley 212 of the first driving wheel 211 received energies and be connected to the first axle S1 of the first driven pulley 212.X axis distance adjustment equipment 200 also comprise be attached to the first axle S1 the second driving wheel 213 by the first axle S1 rotation and the 3rd driving wheel 214, by second with B2 from the second driven pulley 215 of the second driving wheel 213 received energies, by the 3rd with B3 from the 3rd driven pulley 216 of the 3rd driving wheel 214 received energies and be attached to the second driven pulley 215 and the second axle S2 of the 3rd driven pulley 216.
The first motor M1 is fastened to main body 100 by the first bearing support 122.At length, the first bearing support 122 is attached to the cardinal principle middle body of the first side wall 120, so that the first motor M1 is arranged on main body 100.
The first motor M1 provides energy to regulate the distance between pick-up module PM.For this reason, for the first motor M1, the first driving wheel 211, the first band B1 and the first driven pulley 212 rotate the first axle S1.The first driving wheel 211, first is arranged on the outside of main body 100 with B1 and the first driven pulley 212.
The second driving wheel 213 and the 3rd driving wheel 214 by the rotation of the first axle S1 together with rotation.The second driving wheel 213 and the 3rd driving wheel 214 have different diameters.For example, the diameter of the second driving wheel 213 can be the twice of the diameter of the 3rd driving wheel 214.Therefore between the pick-up module PM, changing by the rotation of the second driving wheel 213 and the 3rd driving wheel 214, distance can be equal to each other.
The second driven pulley 215 and the 3rd driven pulley 216 have identical diameter with corresponding the second driving wheel 213 and the 3rd driving wheel 214, therefore second can be parallel to base portion 110(in more detail, guide rail 112 and 114 with B2 and the 3rd with the part being suspended between wheel of B3) move.
In the time of rotation the second driving wheel 213 and the 3rd driving wheel 214, second moves up with B2 and the 3rd side rotating at the second driving wheel 213 and the 3rd driving wheel 214 by the second driving wheel 213 and the 3rd driving wheel 214 with B3.Thereby the band connector 650,850 with B3 can move together with the 3rd band B3 with the 2nd B2 with 950 in X-direction with the 3rd with B2 to be attached to second.The band connector 850 with connector 650 and the 3rd pick-up module 800 of the first pick-up module 600 is connected to the 3rd band B3, and moves together with the 3rd band B3.The band connector 950 of the 4th pick-up module 900 is connected to the second band B2, and moves together with the second band B2.Correlative detail is below described with reference to the accompanying drawings.
The first axle S1 passes the first side wall 120 and extends in the inner space of main body 100.The second driving wheel 213, the 3rd driving wheel 214, second are arranged in the inner space of main body 100 with B3, the second driven pulley 215 and the 3rd driven pulley 216 with B2, the 3rd, are namely arranged in the space between the first side wall 120 and the second sidewall 130.It is upper upper with the second axle S2 that bearing 217 and 218 is separately positioned on the first axle S1, so that the first axle S1 and the second axle S2 are rotatably attached to the first side wall 120 and the second sidewall 130 by bearing 217 and 218.
Although being shown, this embodiment is configured to make the second driving wheel 213 and the 3rd driving wheel 214 to be attached to independently the first axle S1, and the second driven pulley 215 and the 3rd driven pulley 216 are attached to the second axle S2 independently, but spirit of the present invention is not limited to this structure.For example, the second driving wheel 213 and the 3rd driving wheel 214 can be arranged to integrated to have single-wheel structure each other, and this single-wheel structure has two and ushers to seat.Alternately, the second driving wheel 213 and the 3rd driving wheel 214 can have different rotating shafts, and this different rotating shaft is by power delivery parts (as gear etc.) interconnection therefore rotation simultaneously each other.
Y-axis distance adjustment equipment 300 comprise produce driving force the second motor M2, be connected to the 4 wheel driven driving wheel 311 of the second motor M2 and by four-tape B4 from the 4th driven pulley 312 of 4 wheel driven driving wheel 311 received energies.This Y-axis distance adjustment equipment 300 also comprise be connected to the 4th driven pulley 312 ball-screw 320, be arranged on ball-screw 320 around and the ball nut 330 moving by ball-screw 320 and at the ball-screw supporting member 340 of main body 100 upper support ball-screws 320.In addition, this Y-axis distance adjustment equipment 300 also comprises that the bracket 350 that is attached to ball nut 330 and move together with ball nut 300, the Y-axis that is connected to bracket 350 move guide member 360 and be connected to Y-axis the auxiliary guide rail 370 that moves guide member 360.
By the mode identical with the first motor M1, the second motor M2 is fastened to the first side wall 120 by the second bearing support 124.The second motor M2 is arranged to be parallel to the first motor M1.
The second motor M2 provides energy to regulate the Y-axis distance between pick-up.The second motor M2 utilizes 4 wheel driven driving wheel 311, four-tape B4 and the 4th driven pulley 312 that ball-screw 320 is rotated.4 wheel driven driving wheel 311, four-tape B4 and the 4th driven pulley 312 are arranged on the outside of main body 100.
Rotatablely moving of the 4th driven pulley 312 is converted to linear movement by ball-screw 320 and ball nut 330.Ball-screw 320 definite length extended in Y direction can move so that Y-axis moves guide member 360 in Y direction.
In this embodiment, be attached to base portion 110 with rotating bearing ball leading screw 320 although ball-screw supporting member 340 is shown, spirit of the present invention is not limited to this structure.For example, ball-screw supporting member 340 can be fastened to header board 140.
Y-axis moves guide member 360 and moves linearly by the movement of ball nut 330, has wherein caused the movement of ball nut 330 by the rotation of ball-screw 320.Y-axis moves guide member 360 and is attached to the second guide member 620 of pick-up module PM.Move guide member 360, the second guide members 620 by Y-axis and move in Y direction, to can regulate the Y-axis distance between pick-up.Correlative detail is below described with reference to the accompanying drawings.
Fig. 8 shows the pick-up module PM of the Fig. 4 that is connected to guide rail 112 and 114.Fig. 9 is the exploded perspective view of Fig. 8.Figure 10 is the exploded perspective view of the pick-up module 600 of Fig. 9.Figure 11 is the exploded perspective view of the Y-axis distance adjustment equipment of Fig. 9.
With reference to Fig. 8 to Figure 11, pick-up module PM is assemblied on the X axis guide rail 112 and 114 being arranged on base portion 110.For the ease of explaining, Fig. 8 shows on base portion 110 picking up and apparatus for placing of Fig. 4 that the structure that arranges and base portion 110 be removed.
The first pick-up module 600, the 3rd pick-up module 800 and the 4th pick-up module 900 are connected to X axis guide rail 112 and 114 movably.But the second pick-up module 700 is also connected to X axis guide rail 112 and 114 is fixed to base portion 110, and therefore it can not move in X-direction.
The first pick-up module 600 be included in Y direction the first guide member 610 of extending and move along X axis guide rail 112 and 114 in X-direction, by the first guide member 610 be connected to X axis guide rail 112 and 114 a pair of X axis guide- rail coupling member 612 and 614, be fixed to the first guide member 610 and be provided with the first arm 642 of the first pick-up P1 and be arranged on the first guide member 610 and the Y-axis guide rail 630 extending in Y direction.The first pick-up module 600 also comprises the second guide member 620 of being arranged to move along Y-axis guide rail 630 in Y direction, is fixed to the second guide member 620 and is provided with the second arm 644 of the 5th pick-up P5, the second guide member 620 is connected to the Y-axis guide-rail coupling member 622 of Y-axis guide rail 630 and the second guide member 620 is connected to the auxiliary guide rail connector 624 of auxiliary guide rail 370.
One end of the first guide member 610 is bent downwardly and to downward-extension.The first arm 642 is attached to the part to downward-extension of the first guide member 610.The first arm 642 and the second arm 644 are arranged to face with each other.The first arm 642 and the second arm 644 are received the first pick-up P1 and the 5th pick-up P5 therein respectively.
X axis guide- rail coupling member 612 and 614 is attached to the first guide member 610, and it can arrange integratedly with the first guide member 610 as required.X axis guide- rail coupling member 612 and 614 moves and the first guide member 610 can be suspended from X axis guide rail 112 and 114 for guiding the X axis of the first guide member 610.For this reason, the projection corresponding to each other and groove are respectively formed in X axis guide rail 112,114 and X axis guide-rail coupling member 612,614.In this way, the first guide member 610 is arranged in main body 100 movably by X axis guide-rail coupling member 612,614.Thereby the first pick-up module 600 can be connected to main body 100.
The Y-axis that Y-axis guide rail 630 is attached to the lower surface of the first guide member 610 and guides the second guide member 620 moves.Consider the adjusting of Y-axis distance, Y-axis guide rail 630 has suitable length, and Y-axis guide rail 630 extends towards the other end of the first guide member 610, and this other end is contrary with bending one end of the first guide member 610.
Be arranged to second guide member 620 one end contrary with bending one end of the first guide member 610 and be bent downwardly also definite length extended.The second arm 644 is attached to one end to downward-extension of the second guide member 620.
Y-axis guide-rail coupling member 622 is attached to the top of the second guide member 620, can be attached to integratedly the second guide member 620 and if need.In addition, auxiliary guide rail connector 624 is attached to the bottom of the second guide member 620, can arrange integratedly with the second guide member 620 and if need.
Y-axis guide-rail coupling member 622 moves and makes the second guide member 620 can hang over Y-axis guide rail 630 for guiding the Y-axis of the second guide member 620.For this reason, the projection corresponding to each other and groove are respectively formed in Y-axis guide rail 630 and Y-axis guide-rail coupling member 622.
Auxiliary guide rail connector 624 is configured to make the auxiliary guide rail 370 of Y-axis distance adjustment equipment 300 can be plugged in auxiliary guide rail connector 624.Auxiliary guide rail connector 624 is for moving Y-axis Mobile Transmission to the second guide member 620 of guide member 360.At length, move in Y direction if Y-axis moves guide member 360, auxiliary guide rail moves together with moving guide member 360 with Y-axis.In the time that auxiliary guide rail 370 moves, auxiliary guide rail connector 624 moves together with auxiliary guide rail 370.Therefore, the second guide member 620 also moves in Y direction.
X axis guide-rail coupling member 612,614 and auxiliary guide rail connector 624 have groove, and these grooves are configured to guide in the same direction corresponding guide rail.Y-axis guide-rail coupling member 622 has groove, and this groove is perpendicular to the groove of connector 612, connector 614 and connector 624.
The band connector 650 of the first guide member 610 comprises linking arm 651 and covering 652.Linking arm 651 extends to the 3rd lower surface with B3 top from the first guide member 610, and covering 652 is arranged on the 3rd upper surface with B3 top and is attached to linking arm 651 linking arm 651 is fastened to the 3rd band B3.Linking arm 651 extends to the 3rd band B3 from the first guide member 610 through the hole 116 of base portion 110.Consider the 3rd position with B3 and the first guide member 610 and with the interference of part around, linking arm 651 has suitable geometry.
Be respectively formed in the upper part of linking arm 651 and the bottom of covering 652 with groove corresponding to B3 shape with the 3rd, to make the 3rd band B3 in groove.The 3rd with B3 and connection with between connector 650 can be by assembling, the connection power providing such as be connected in conjunction with, bolt and realize.
The second pick-up module 700, the 3rd pick-up module 800 are identical with the structure of the first pick-up module 600 with total structure each in the 4th pick-up module 900.Hereinafter, for the ease of explaining, to omit Reference numeral and the detailed description of element of second, third identical with the element of the first pick-up module 600, the 4th pick-up module 700,800,900, and the description element different from the first pick-up module 600 only.For the Reference numeral of the element of second, third corresponding with the element of the first pick-up module 600, the 4th pick-up module 700,800,900, be only to make three-figure hundred bit digital into the numeral corresponding with each pick-up module.That is to say, the first guide member of the second pick-up module 700 represents by Reference numeral 710, and the first guide member of the 3rd pick-up module 800 is represented by Reference numeral 810, and the first guide member of the 4th pick-up module is represented by Reference numeral 910.
The first guide member 710 of the second pick-up module 700 is assemblied in and on X axis guide rail 112 and 114 and in pre-position, is fixed to base portion 110.X axis guide-rail coupling member 712 and 714 is arranged on the first guide member 710.The connection holes 716 corresponding with each pick-up module fastening part 115 of base portion 110 is respectively formed in X axis guide-rail coupling member 712 and 714.Connection holes 716 and pick-up module fastening part 115 can be by secured to one another such as the clamp structure (not shown) of bolt.Thereby the second pick-up module 700 can be fixed to base portion 110, and does not move in X-direction.Although being shown, this embodiment is provided with X axis guide-rail coupling member 712,714, and the first guide member 710 is attached to X axis guide rail 112 and 114 by X axis guide-rail coupling member 712,714, but the second pick-up module 700 can be arranged to not have X axis guide-rail coupling member 712 and 714, this is because the second pick-up module 700 need to not move in X-direction.
In addition, because the second guide member 720 of the second pick-up module 700 need to not move in X-direction, so also can omit element corresponding with the auxiliary guide rail connector 624 of the first pick-up module 600 in the second pick-up module 700.On the contrary, for the second guide member 720 is moved in Y direction, the bottom of the second guide member 720 is attached directly to Y-axis and moves guide member 360.For this reason, the second pick-up module fastening part 364 is arranged on Y-axis and moves position corresponding with the second guide member 720 of the second pick-up module 700 on guide member 360.
Except band connector 850 or 950, the total structure of the 3rd pick-up module 800 or the 4th pick-up module 900 is identical with the first pick-up module 600.
The band connector 850 of the 3rd pick-up module 800 extends with reservation shape, to make it can be connected to the 3rd bottom with B3.The first pick-up module 600 be connected to identical the 3rd band B3 with connector 650 and the 3rd pick-up module 800 with connector 850.Be connected to respectively the 3rd upper and lower with B3 with connector 650 with connector 850.Therefore,, in the time of rotation the 3rd band B3, band connector 650 and band connector 850 move in the opposite direction.Here, the displacement of the first pick-up module 600 is identical with the displacement of the 3rd pick-up module 800.
The band connector 950 of the 4th pick-up module 900 extends with reservation shape, to make it can be connected to the second bottom with B3.Because make the diameter of the second the second driving wheel 213 moving with B2 be different from the diameter that makes the 3rd the 3rd driving wheel 214 moving with B3, the amount of movement of the 4th pick-up module 900 is different from the amount of movement of the first pick-up module 600 or the 3rd pick-up module 700.In this embodiment, the second driving wheel 213 diameters are the twice of the 3rd driving wheel 214 diameters, so the 4th pick-up module 900 amount of movements are also the twices of the first pick-up module 600 or the 3rd pick-up module 700 amount of movements.
On the other hand, the ball-screw supporting member 340 of Y-axis distance adjustment equipment 300 is fixed to base portion 110, so that ball-screw 320 can be rotated reliably.
The Y-axis that is fixed on auxiliary guide rail 370 moves in the X-direction of extending on guide member 360 tops and at X axis guide rail 112,114 extends.Auxiliary guide rail 370 is connected to auxiliary guide rail connector 624, the auxiliary guide rail connector 824 of the 3rd pick-up module 800 and the auxiliary guide rail connector 924 of the 4th pick-up module 900 of the first pick-up module 600.Therefore, in the time that Y-axis moves guide member 360 and moves in Y direction, the second guide member 620, the second guide member 820 of the 3rd pick-up module 800 and second guide member 920 of the 4th pick-up module 900 of the first pick-up module 600 moves together with moving guide member 360 with Y-axis in Y direction.
In this embodiment, although the second pick-up module 700 is shown and is connected directly to Y-axis and moves guide member 360 and be not attached to auxiliary guide rail 370, spirit of the present invention is not limited to this structure.The second pick-up module 700 also can be provided with auxiliary guide rail connector, and the second pick-up module 700 is connected to auxiliary guide rail 370 by this auxiliary guide rail connector.
Hereinafter, describe with reference to the accompanying drawings and there is picking up and the operation of apparatus for placing 100 of said structure according to embodiment of the present invention.
Figure 12 shows picking up and the adjustment operation of the X axis distance of apparatus for placing of Fig. 4.
With reference to Figure 12, when the first motor M1 is from power feeding mechanism (not shown) received power and while rotating its output shaft, driving force transfers to the first driven pulley 212 from the first driving wheel 211 through the first band B1.Thereby, be connected to the first axle S1 rotation of the first driven pulley 212.
In the time of rotation the first axle S1, the 3rd driving wheel 214 and the second driving wheel 213 that are connected to the first axle S1 rotate with same angular velocity.Then the second driven pulley 215 and the 3rd driven pulley 216 that, are connected to respectively the second driving wheel 213 and the 3rd driving wheel 214 are also with B3 to be rotated by the second band B2 and the 3rd.Second moves up in the side corresponding with the direction of the first axle S1 rotation (the first motor M1's is normal/counter-rotate direction) with B3 with B2 and the 3rd.Here, because the second driving wheel 213 diameters are the twice of the 3rd driving wheel 214 diameters, so second be also the 3rd twice with B3 amount of movement with B2 amount of movement.
In addition, because the first axle S1 is arranged in same level with the second axle S2 and the second driven pulley 215 and the 3rd driven pulley 216 have respectively the diameter identical with respective drive wheel, so second with B2 and the 3rd, the mid portion with B3 can maintenance level in the time that second moves with B3 with B2 and the 3rd.
In the time that the second band B2 moves, the second band connector 950 with B2 that is fixed to of the 4th pick-up module 400 moves by the second band B2, and therefore the 4th pick-up module 400 moves in X-direction.In addition,, when the 3rd band B3 is while moving, the band connector 850 with connector 650 and the 3rd pick-up module 800 that is all fixed to the 3rd the first pick-up module 600 with B3 moves by the 3rd band B3.Therefore, the first pick-up module 600 and the 3rd pick-up module 800 move in X-direction.
The first pick-up module 600, the 3rd pick-up module 800 and the 4th pick-up module 900 move through X axis guide rail 112 and 114 and auxiliary guide rail 370 guide.
As shown in figure 12, in the time that the first axle S1 rotates in the clockwise direction, be connected to the 3rd the first pick-up module 600 with B3 top in the direction of X-axis (towards Figure 12 right-hand) mobile.Be connected to the 3rd the 3rd pick-up module 800 with B3 bottom and be connected to the second the 4th pick-up module 900 (towards left of Figure 12) in the negative sense direction of X-axis with B2 bottom mobile.In the time that the first axle S1 rotates in the counterclockwise direction, the moving direction of the first pick-up module 600, the 3rd pick-up module 800 and the 4th pick-up module 900 changes.
In said process, because the second pick-up module 700 is fixed to base portion 110, so the second pick-up module 700 does not move.Due to the above-mentioned setting with connector 650,850,950, the first pick-up module 600, the 3rd pick-up module 800 and the 4th pick-up module 900 can be drawn close or disperse based on the second pick-up module 700.
Distance between pick-up module is made as the original state of a, if the 3rd with B3 by the mobile d of turning clockwise of the first axle S1, the first pick-up module 600 mobile d in the direction of X-axis, the 3rd pick-up module 800 negative sense sides in the X-axis d that moves up, and the 4th pick-up module 900 negative sense sides in the X-axis 2d that moves up.Therefore, the distance between adjacent pick-up module all becomes identical a-d.
On the other hand, in this embodiment, be provided with four pick-up modules although shown, spirit of the present invention is not limited to this structure.If needed, can increase or reduce the number of pick-up module.In this case, the number of driving wheel and band also changes corresponding to the number of pick-up module, to can regulate the distance between all pick-up modules.
In addition, in this embodiment, be fixed to base portion 110 although shown the second pick-up module 700, spirit of the present invention is not limited to this structure.For example, the second pick-up module 700 can be configured to be connected to band and can be moved.In this case, the first pick-up module 600 and the 4th pick-up module 900 are connected to the second band B2 with larger turning radius.The second pick-up module 700 and the 3rd pick-up module 800 are connected to the 3rd band B3 with less turning radius.In addition, by device is arranged, make the distance between pick-up module can keep being equal to each other, such the second driving wheel 213 diameters are three times of the 3rd driving wheel 214 diameters.
Spirit of the present invention is to manufacture such device, and in this device, pick-up module is optionally connected to the band moving by driving wheel, therefore the X axis distance between adjustable pick-up module.Those skilled in the art can use simple mathematical formulae to realize easily above-mentioned amendment, as changed number or the no fixing pick-up module etc. of pick-up module.And this amendment also falls into scope of the present invention.
Figure 13 and Figure 14 show picking up and the adjustment operation of the Y-axis distance of apparatus for placing of Fig. 4.
With reference to Figure 13 and Figure 14, when the second motor M2 is from power feeding mechanism (not shown) received power and while making the rotation of its output shaft, driving force transfers to the 4th driven pulley 312 from 4 wheel driven driving wheel 311 through four-tape B4.Thereby, the ball-screw 320 that rotation is connected with the 4th driven pulley 312.
In the time of swing roller leading screw 320, ball nut 330 moves in Y direction.Then auxiliary guide rail 370, the Y-axis, connecting with ball nut 330 moves guide member 360 and in Y direction, moves together with bracket 350.
Because the first pick-up module 600, the 3rd pick-up module 800 and the 4th pick-up module 900 are connected to auxiliary guide rail 370 by auxiliary guide rail connector 624,824 and 924, so they can be moved together with auxiliary guide rail 370 and be moved by the Y-axis of ball nut 330.Because the second guide member 720 is fixed to Y-axis and moves guide member 360, so the second pick-up module 700 is moved together with moving guide member 360 with Y-axis and moved in Y direction by the Y-axis of ball nut 330.Finally, all pick-up module PM are moved and are moved in Y direction by the Y-axis of ball nut 330.
Along with Y-axis moves guide member 360 and auxiliary guide rail 370, the second guide member 620,720,820,920 of pick-up module moves in Y direction by the guiding of the Y-axis guide rail 630,730,830,930 on the first guide member 610,710,810,910.
In this embodiment, although this device has been shown and has been configured to each pick-up module and is provided with the first guide member and the second guide member and a pair of pick-up and is connected to respectively the first guide member and the second guide member, the present invention is not limited to this.For example, each pick-up module can comprise the three or more pick-ups that are successively set in Y direction, and pick-up is connected with each other and be fastened to the guide member that can move in Y direction scalably.In this case, guide member is connected to Y-axis distance adjustment equipment, so that the Y-axis distance between pick-up can be conditioned by moving of guide member.
As mentioned above, according to embodiment of the present invention pick up and apparatus for placing 10 can implement to regulate X axis distance between pick-up and the function of Y-axis distance reliably, and compared with conventional art, this picks up with apparatus for placing 10 has less and simple overall structure.
In addition can easily regulate, X axis displacement and the Y-axis displacement of pick-up.Therefore, of the present invention picking up with apparatus for placing 10 can be used for various work, for example, load, classify, unloading etc.
Although illustrated and described picking up and apparatus for placing according to embodiment of the present invention with reference to preferred embodiment, but it will be understood by those skilled in the art that, in the situation that not deviating from as defined by the appended claims the spirit and scope of the present invention, can carry out multiple change and amendment to the present invention.
Claims (6)
1. picking up and apparatus for placing for Test handler, described picking up with apparatus for placing transfers to the second place by semiconductor devices from primary importance, and described in pick up with apparatus for placing be provided with the multiple pick-up modules that arrange in X-direction, described in pick up with apparatus for placing and comprise:
Main body;
X axis guide rail, is arranged on described main body place;
Multiple pick-up modules, are arranged on described main body place and are arranged in X-direction, and each described pick-up module comprises the multiple pick-ups that are spaced apart from each other with respect to Y direction;
X axis distance adjustment equipment, regulates the distance between described multiple pick-up module; And
Y-axis distance adjustment equipment, is adjusted in and in Y direction, is arranged on the distance between the described multiple pick-ups in each described pick-up module,
Wherein, each described pick-up module comprises:
The first guide member, is arranged to move along described X axis guide rail;
Y-axis guide rail, is arranged on described the first guide member place and definite length extended in Y direction; And
The second guide member, is arranged to move along described Y-axis guide rail, and the Y-axis that described the second guide member is connected to described Y-axis distance adjustment equipment moves guide member, can move together with described the second guide member so that described Y-axis moves guide member.
2. according to claim 1 picking up and apparatus for placing, wherein
Described Y-axis moves guide member place and is provided with auxiliary guide rail, and described auxiliary guide rail extends in X-direction, and
Described the second guide member is provided with auxiliary guide rail connector, and described auxiliary guide rail connector is connected to described auxiliary guide rail.
3. according to claim 1 picking up and apparatus for placing, wherein,
Described X axis distance adjustment equipment comprises:
At least one driving wheel, from the first motor received power;
At least one band, is connected to described at least one driving wheel; And
At least one driven pulley, by described at least one band and described driving wheel interlocking, described Y-axis distance adjustment equipment comprises:
Ball-screw, by being rotated from the energy of the second motor transmission, described ball-screw extends in Y direction; And
Ball nut, is attached to described ball-screw, and described ball nut moves in Y direction,
Wherein, described Y-axis moves guide member and is attached to described ball nut, and described Y-axis moves guide member and moves together with described ball nut in Y direction,
All described pick-up modules or in described pick-up module all the other the pick-up modules any be connected to respectively a corresponding band in described at least one band, and move together with described X axis guide rail is in X-direction, and
At least one that is arranged on described multiple pick-ups in each described pick-up module is connected to described Y-axis and moves guide member and move together with described ball nut is in Y direction.
4. according to claim 3 picking up and apparatus for placing, wherein, described driving wheel comprises multiple driving wheels, and described multiple driving wheel has the diameter differing from one another.
5. according to claim 3 picking up and apparatus for placing, wherein, the described pick-up module not being connected with described band is fastened to described main body.
6. according to claim 3 picking up and apparatus for placing, wherein, described at least one driving wheel comprises two driving wheels, described at least one band comprises two bands, and described at least one driven pulley comprises two driven pulleys,
Wherein, the natural scale of described two driving wheels is 1:2, and
Described multiple pick-up module comprises:
The second pick-up module, is fastened to described main body and is stopped in X-direction and move;
The first pick-up module, is arranged on a side of described the second pick-up module and is connected to a side of described band, and a described side of described band is connected to the driving wheel with small diameter;
The 3rd pick-up module, is arranged on the opposite side of described the second pick-up module and is connected to the opposite side of described band, and the described opposite side of described band is connected to the driving wheel with described small diameter; And
The 4th pick-up module, the connection that is arranged on the opposite side of described the second pick-up module and is connected to described band has a side of larger-diameter driving wheel.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2012-0132177 | 2012-11-21 | ||
| KR1020120132177A KR101942062B1 (en) | 2012-11-21 | 2012-11-21 | Pick and place apparatus for test handler |
Publications (2)
| Publication Number | Publication Date |
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| CN103831254A true CN103831254A (en) | 2014-06-04 |
| CN103831254B CN103831254B (en) | 2016-06-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310573224.7A Active CN103831254B (en) | 2012-11-21 | 2013-11-15 | Pickup and apparatus for placing for testing, sorting machine |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101942062B1 (en) |
| CN (1) | CN103831254B (en) |
| TW (1) | TWI506285B (en) |
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| CN105312244A (en) * | 2014-07-23 | 2016-02-10 | 韩华泰科株式会社 | Part detection device, part detection classification device and method |
| US11245506B2 (en) | 2017-05-02 | 2022-02-08 | Guangdong Oppo Mobile Telecommunications Corp., Ltd. | Methods and apparatuses for detecting control channels in wireless communication systems |
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| TWI614432B (en) * | 2016-12-09 | 2018-02-11 | Linear motion driving device and its application pick and place unit, transfer operation equipment | |
| TWI615343B (en) * | 2017-05-26 | 2018-02-21 | Electronic component moving device and operation classification device thereof | |
| TWI658967B (en) * | 2017-12-15 | 2019-05-11 | 均華精密工業股份有限公司 | Automatic high speed filling machine |
| KR101987028B1 (en) * | 2018-02-21 | 2019-09-30 | (주)디이엔티 | A transport module and system for probe cards |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN103831254B (en) | 2016-06-29 |
| KR101942062B1 (en) | 2019-01-24 |
| TW201421046A (en) | 2014-06-01 |
| TWI506285B (en) | 2015-11-01 |
| KR20140066275A (en) | 2014-06-02 |
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