CN114684611B

CN114684611B - Detection device

Info

Publication number: CN114684611B
Application number: CN202210474503.7A
Authority: CN
Inventors: 林宜龙; 刘飞; 水清; 吴海裕
Original assignee: Shenzhen Gexin Integrated Circuit Equipment Co ltd
Current assignee: Shenzhen Gexin Integrated Circuit Equipment Co ltd
Priority date: 2022-04-29
Filing date: 2022-04-29
Publication date: 2023-04-25
Anticipated expiration: 2042-04-29
Also published as: CN114684611A

Abstract

The invention provides detection equipment which comprises a transfer mechanism, a first driving mechanism, a second driving mechanism and a third driving mechanism, wherein the transfer mechanism comprises a transfer driving assembly and a clamping piece, the transfer driving assembly drives the clamping piece to move along a preset path, and the clamping piece is used for clamping a piece to be detected; the first driving mechanism is used for driving the transfer mechanism to reciprocate in a first direction; the second driving mechanism is used for driving the transfer mechanism to reciprocate in a second direction; the third driving mechanism is used for driving the transfer mechanism to reciprocate in a third direction; the first direction, the second direction and the third direction are perpendicular to each other. The position of the detection part in a plurality of directions can be adjusted by arranging the driving mechanisms which are perpendicular to each other, so that the effects of calibrating the test position and conveying the part to be detected to the detection position are achieved, the detection position precision is high, and the detection is more accurate.

Description

Detection device

Technical Field

The invention relates to the technical field of detection, in particular to detection equipment.

Background

With the development of technology, various electronic products, especially handheld consumer electronic products such as mobile phones and tablet computers, have higher integration level, and area resources of circuit boards have become more precious, so that detection points have become smaller, and thus, the requirements on alignment precision of detection fixtures have become higher.

In the prior art, the inspection jigs are usually positioned by using structural cooperation between the product to be inspected and the jigs, for example, by using the process holes of the circuit board or the external shape of the electronic product itself. However, the positioning method has high requirements on detection points, and the requirements are difficult to meet.

Disclosure of Invention

The invention mainly aims to provide detection equipment, and aims to solve the problems of poor alignment precision and high measurement point area requirement of the existing detection equipment.

To achieve the above object, the present invention provides a detection apparatus comprising:

the transfer mechanism comprises a transfer driving assembly, a clamping piece and a bracket, wherein the transfer driving assembly is arranged on the bracket and drives the clamping piece to move along a preset path;

the first driving mechanism is used for driving the transfer mechanism to reciprocate in a first direction; the first driving mechanism comprises two groups of lifting assemblies, and the two groups of lifting assemblies are symmetrically arranged on two sides of the detection equipment;

the second driving mechanism is used for driving the transfer mechanism to reciprocate in a second direction;

the third driving mechanism is used for driving the transfer mechanism to reciprocate in a third direction; and

the fourth driving mechanism comprises a connecting seat and a base, and the base and the bracket are rotatably connected through the connecting seat; the fourth driving mechanism comprises a connecting seat, and the base and the bracket are rotatably connected through the connecting seat;

the first direction, the second direction and the third direction are perpendicular to each other;

the transfer mechanism further comprises a carrier plate assembly, wherein the carrier plate assembly comprises a carrier plate and induction pieces, and the induction pieces are arranged on the carrier plate at intervals along the second direction; the detection device further comprises a detection piece, wherein the detection piece is used for sensing the induction piece; the clamping piece is used for clamping the carrier plate and the moving; when the carrier driving assembly drives the carrier plate to move, the detection piece can detect the two induction pieces;

the second driving mechanism moves along the second direction, so that one sensing piece enters the shooting range of the detection piece, the detection piece shoots and records the position, and a first sensing point is obtained; then the second driving mechanism continues to move along the second direction, so that the other sensing piece enters the shooting range of the detecting piece, the detecting piece shoots and records the position, and a second sensing point is obtained; forming an actual position line according to the connecting line of the first sensing point and the second sensing point, and enabling the third driving mechanism to move along the third direction so as to enable the actual position line to coincide with the midpoint of a preset target position line; and obtaining an adjusting angle according to the included angle between the actual position line and a preset target datum line, and driving the carrier plate to rotate by the fourth driving mechanism so as to enable the actual position line to coincide with the preset target position line, thereby achieving the calibration of the position of the carrier plate.

As an alternative embodiment, the detection device comprises a first supporting table, and the transfer mechanism is positioned on the first supporting table;

the two groups of lifting assemblies are arranged at intervals and used for driving the first supporting table to reciprocate along the first direction.

As an alternative embodiment, the first driving mechanism further includes two lifting guide assemblies, the lifting guide assemblies are in one-to-one correspondence with the lifting assemblies, and the lifting guide assemblies extend along the first direction.

As an alternative embodiment, the first driving mechanism further comprises a synchronous driving assembly, and the synchronous driving assembly is used for driving the two lifting assemblies to synchronously and co-directionally move.

As an alternative embodiment, the lifting assembly comprises a lifting rotator and a lifting converter cooperating with the lifting rotator to convert rotation of the lifting rotator into reciprocal movement in the first direction;

the synchronous drive assembly comprises a lifting drive piece, a lifting transmission piece and a lifting synchronous piece, wherein the lifting drive piece drives the lifting transmission piece to rotate through the lifting synchronous piece, and the lifting transmission piece drives the lifting rotary piece to rotate.

As an alternative embodiment, one of the second driving mechanism and the third driving mechanism is connected to the first support table, the other is connected to the transfer mechanism, and the second driving mechanism and the third driving mechanism are connected.

As an alternative embodiment, the transfer mechanism includes an adaptive assembly, where the adaptive assembly includes a first connecting member, a second connecting member and a connecting shaft, the first connecting member is connected with the transfer driving assembly, the second connecting member is connected with the clamping member, the first connecting member and the second connecting member form rotatable connection through the connecting shaft, and the connecting shaft extends along the first direction.

As an alternative embodiment, the support is connected to the third driving mechanism, and the movement direction of the transfer driving assembly is consistent with the second direction.

As an alternative embodiment, the detection device comprises a second support table and a levitation support, the levitation support being arranged between the second support table and the stand.

As an optional implementation manner, the detection device further includes a controller, where the controller is respectively in communication connection with the detection element, the first driving mechanism, the second driving mechanism, the third driving mechanism, the fourth driving mechanism, and the transfer mechanism, and the controller controls the second driving mechanism, the third driving mechanism, and the fourth driving mechanism to work according to the positions of the two sensing elements detected by the detection element.

As an optional implementation manner, the controller controls the second driving mechanism to drive the carrier plate to move along the second direction, the detecting piece detects the two sensing pieces respectively and obtains a first sensing point and a second sensing point, a connecting line of the first sensing point and the second sensing point forms an actual position line, and a target datum line is preset in the controller;

obtaining an adjustment distance according to the distance from the midpoint of the actual position line in the third direction to the target datum line, wherein the controller controls the third driving mechanism to drive the carrier plate to move in the third direction by the adjustment distance

And obtaining an adjusting angle according to the included angle between the actual position line and the target datum line, wherein the controller controls the fourth driving mechanism to drive the carrier plate to rotate by taking the first direction as an axis.

The embodiment of the invention has at least the following beneficial effects:

the transfer mechanism moves through driving the clamping piece, so that automatic carrying of the part to be detected is realized, automatic detection is realized, the positions of the detection parts in multiple directions can be adjusted through arranging the two-to-two vertical driving mechanisms, the functions of calibrating the test positions and conveying the part to be detected to the detection positions are achieved, the detection position accuracy is high, and detection is more accurate.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 shows a schematic diagram of an axial structure of a detection device according to an embodiment of the present invention;

fig. 2 is a schematic structural view showing a first driving mechanism of a detection apparatus according to an embodiment of the present invention;

fig. 3 is a schematic structural view showing a second driving mechanism and a third driving mechanism of the detecting apparatus according to the embodiment of the present invention;

fig. 4 is a schematic structural view of a transfer mechanism of a detection apparatus according to an embodiment of the present invention;

fig. 5 is a schematic diagram showing a partial structure of a transfer mechanism of a detection apparatus according to an embodiment of the present invention;

FIG. 6 is a top view of FIG. 5;

FIG. 7 isbase:Sub>A schematic view of the structure of section A-A of FIG. 6;

FIG. 8 is a schematic view B of the enlarged partial structure of FIG. 7;

fig. 9 is a schematic structural view showing connection between a transfer mechanism and a base of a detection apparatus according to an embodiment of the present invention;

fig. 10 is a schematic structural diagram of a carrier plate assembly and a detecting member of a detecting device according to an embodiment of the present invention;

fig. 11 is an exploded view showing a fourth driving mechanism of the detecting apparatus according to the embodiment of the present invention.

Description of main reference numerals:

10-a detection device;

100-a first drive mechanism; 110-a first support table;

120-a lifting assembly; 121-lifting a rotating member; 122-lifting the conversion member;

130-a synchronous drive assembly; 131-lifting drive; 132-lifting the transmission; 133-lifting synchronizers;

140-a lift guide assembly; 141-lifting the guide rail; 142-lifting the slider;

150-a frame; 160-a first connection plate; 170-a second connection plate; 180-a second support table;

200-a second drive mechanism; 300-a third drive mechanism;

400-a transfer mechanism;

410-a transfer drive assembly; 411-transfer drive; 412-transferring the driving member; 413—a transfer actuator;

420-clamping piece; 430-a bracket;

440-carrier plate assembly; 441—a carrier plate; 442-sensing element;

450-adaptive component; 451-a first connector; 452-a second connector; 453-connecting shaft; 454-stop; 455-elastic member; 456-a bearing;

460-a transfer guide assembly; 461-a transfer rail; 462—a transfer slide;

500-suspension support; 600-detecting piece;

700-fourth drive mechanism; 710—a base; 720-connecting seats; 730-fourth driver; 731-a stator; 732-mover.

Detailed Description

In order that the invention may be readily understood, a more complete description of the invention will be rendered by reference to the appended drawings. The drawings illustrate preferred embodiments of the invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

It will be understood that when an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment. The terms "distal," "proximal," and "proximal" are used herein as directional terms that are conventional in the art of interventional medical devices, wherein "distal" refers to the end of the procedure that is distal to the operator and "proximal" refers to the end of the procedure that is proximal to the operator.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items, and the term "cable bundle" in the text means that each of the cables in a bundle are relatively close to each other and extend in a substantially uniform direction. Unless otherwise specified, the term "cable harness direction" or "cable direction" in this application refers to the direction of the cable harness or cable in the longitudinal direction.

The following detailed description will be given with reference to the accompanying drawings.

The present embodiment provides a detection apparatus 10, which can be applied to detection of a detection object with high accuracy requirements, such as a circuit board/chip/electronic apparatus.

Fig. 1 shows a schematic diagram of an axial structure of a detection apparatus 10 according to an embodiment of the present invention.

As shown in fig. 1, the inspection apparatus 10 includes a first drive mechanism 100, a second drive mechanism 200, a third drive mechanism 300, and a transfer mechanism 400. The transfer mechanism 400 includes a transfer driving assembly 410 and a clamping member 420, wherein the transfer driving assembly 410 drives the clamping member 420 to move along a preset path, and the clamping member 420 is used for clamping a workpiece to be detected. The first driving mechanism 100 is used for driving the transfer mechanism 400 to reciprocate in a first direction, the second driving mechanism 200 is used for driving the transfer mechanism 400 to reciprocate in a second direction, and the third driving mechanism 300 is used for driving the transfer mechanism 400 to reciprocate in a third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other.

The clamping member 420 directly or indirectly clamps the component to be detected, for example, the clamping member is clamped by a clamping tray. The transfer mechanism 400 drives the clamping piece 420 to move, so that automatic conveying of the part to be detected is realized, and automatic detection is realized. The position of the detection part in a plurality of directions can be adjusted by arranging the driving mechanisms which are perpendicular to each other, so that the effects of calibrating the test position and conveying the part to be detected to the detection position are achieved, the detection position precision is high, and the detection is more accurate.

The first direction is a lifting direction, if the detecting device 10 is better in horizontal placement, the first direction is a vertical direction, the second direction and the third direction are two directions perpendicular to each other on a horizontal plane, the first driving mechanism 100 is used for lifting the clamping piece 420 to carry the piece to be detected to a detection position for detection, and the second driving mechanism 200 and the third driving mechanism 300 are used for driving the piece to be detected to calibrate the detection position on the horizontal plane.

In this embodiment, the inspection apparatus 10 includes a first support table 110, and the transfer mechanism 400 is located on the first support table 110, and it is understood that the transfer mechanism 400 may be directly or indirectly located on the first support table 110. The first driving mechanism 100 includes two sets of lifting assemblies 120, where the two sets of lifting assemblies 120 are spaced apart and are used to drive the first support table 110 to reciprocate along the first direction. The two groups of lifting assemblies 120 arranged at intervals make the first driving mechanism 100 a double-shaft lifting mechanism, the two groups of lifting assemblies 120 are symmetrically arranged on two sides of a load, the lifting force is more uniform, the power is stronger, and the load capacity is higher.

Fig. 2 shows a schematic structural diagram of a first driving mechanism 100 of the detection apparatus 10 according to the embodiment of the present invention.

Illustratively, as shown in FIG. 2, the lift assembly 120 includes a lift rotator 121 and a lift translator 122, the lift translator 122 cooperating with the lift rotator 121 to translate rotation of the lift rotator 121 into reciprocal movement in a first direction. For example, the lifting assembly 120 may be a mechanism that changes rotational motion to linear motion of a ball screw, threaded screw, rack and pinion, cam structure, or the like. In this embodiment, the lifting assembly 120 is a ball screw mechanism, the lifting rotary member 121 is a screw rod, the lifting conversion member 122 is a ball slider, and the two are matched and smooth, so that the transmission loss is small and the noise is low.

In this embodiment, the first driving mechanism 100 further includes a synchronous driving assembly 130, and the synchronous driving assembly 130 is used to drive the two lifting assemblies 120 to move synchronously and in the same direction. Therefore, the two lifting assemblies 120 can synchronously operate, the height consistency is ensured, the problem of blockage caused by lifting deflection is avoided, the lifting precision of the first driving mechanism 100 is improved, and the first supporting table 110 is always kept horizontal.

Illustratively, the synchronous driving assembly 130 includes a lift driving member 131, a lift transmitting member 132 and a lift synchronizing member 133, wherein the lift driving member 131 drives the lift transmitting member 132 to rotate through the lift synchronizing member 133, and the lift transmitting member 132 drives the lift rotating member 121 to rotate. The lifting driving part 131 is a motor, the lifting transmission part 132 is a belt pulley, the lifting synchronizing part 133 is a conveyor belt, two driving wheels are connected to the motor, the two driving wheels drive two driven wheels to rotate through the two conveyor belts, the two driven wheels are respectively fixed with two lead screws relatively, so that the two lead screws are driven to synchronously rotate, and the two lead screws synchronously drive ball sliding blocks on the two lead screws to reciprocate. The motor drives the two driven wheels to rotate through the driving connection conveyor belt, so that power transmission can be better realized, and the problem of slipping caused by driving the two driven wheels through one conveyor belt is effectively prevented. And in order to make the rotation speed of the two driven wheels consistent, the sizes of the two driving wheels are the same, and the sizes of the two driven wheels are the same.

In this embodiment, the first driving mechanism 100 further includes two lifting guide assemblies 140, the lifting guide assemblies 140 are in one-to-one correspondence with the lifting assemblies 120, and the lifting guide assemblies 140 extend along the first direction. The lifting guide assembly 140 is used for guiding the lifting assembly 120, improving the rigidity of the lifting assembly 120 in the first direction, and ensuring the movement precision of the lifting assembly 120. The lift guide assembly 140 includes a lift rail 141 and a lift slider 142, the lift rail 141 extending in a first direction.

Illustratively, the inspection apparatus 10 further includes a frame 150, the lift drive member 131 being fixed relative to the frame 150, the lift transmission member 132 and the lift rotation member 121 being rotatable relative to the frame 150, the lift rail 141 being fixed relative to the frame 150, the lift slider 142 being fixed to the lift conversion member 122 so as to limit rotation of the lift conversion member 122 and cause the lift conversion member 122 to have only a degree of freedom of reciprocal movement in the first direction. In addition, the first supporting table 110 is fixed relative to the lifting slider 142, so as to drive the first supporting table 110 to move along the first direction, and the first supporting table 110 forms a bearing surface for the load thereon.

In the present embodiment, one of the second driving mechanism 200 and the third driving mechanism 300 is connected to the first support base 110, and the other is connected to the transfer mechanism 400, and the second driving mechanism 200 and the third driving mechanism 300 are connected. The second drive mechanism 200 and the third drive mechanism 300 are drive mechanisms on a horizontal plane for calibrating the horizontal position of the component to be inspected. The second driving mechanism 200 and the third driving mechanism 300 are both disposed above the first support table 110, and the transfer mechanism 400 is connected to the first support table 110 through the second driving mechanism 200 and the third driving mechanism 300, so that the load of the detecting apparatus 10 in the first direction is all dropped on the first driving mechanism 100, and the load of the second driving mechanism 200 and the third driving mechanism 300 in the vertical direction is smaller.

Fig. 3 shows a schematic structural diagram of the second driving mechanism 200 and the third driving mechanism 300 of the detection apparatus 10 according to the embodiment of the present invention.

Referring to fig. 2 and fig. 3 together, at least one of the second driving mechanism 200 and the third driving mechanism 300 is a direct-drive motor module, i.e. the second driving mechanism 200 is a direct-drive motor module, or the third driving mechanism 300 is a direct-drive motor module, or both the second driving mechanism 200 and the third driving mechanism 300 are direct-drive motor modules. The direct-drive motor module has the characteristics of small volume and high driving precision, and is suitable for carrying out position calibration on a workpiece to be detected. In this embodiment, the housing of the second driving mechanism 200 is connected to the first support table 110, the housing of the third driving mechanism 300 is connected to the driving member of the second driving mechanism 200, the driving member of the third driving mechanism 300 is connected to the transfer mechanism 400, and the second driving mechanism 200 is larger in size and higher in load capacity than the third driving mechanism 300.

It will be appreciated that the second drive mechanism 200 and the third drive mechanism 300 may also be other types of linear drive mechanisms, such as ball screws, racks and pinions, cam mechanisms, air cylinders, etc.

Illustratively, the first support table 110 has a double-layered structure, the second driving mechanism 200 is connected below the lower layer and connected to the third driving mechanism 300 through the first connection plate 160, the third driving mechanism 300 is located between the double-layered structure, and the third driving mechanism 300 is connected to the second support table 180 through the second connection plate 170, and the second support table 180 is located above the upper layer and connected to the transfer mechanism 400.

Fig. 4 isbase:Sub>A schematic structural view ofbase:Sub>A transfer mechanism ofbase:Sub>A detection apparatus according to an embodiment of the present invention, fig. 5 isbase:Sub>A schematic partial structural view ofbase:Sub>A transfer mechanism ofbase:Sub>A detection apparatus according to an embodiment of the present invention, fig. 6 isbase:Sub>A top view of fig. 5, fig. 7 isbase:Sub>A schematic structural view ofbase:Sub>A sectionbase:Sub>A-base:Sub>A of fig. 6, fig. 8 isbase:Sub>A schematic partial enlarged structural view B of fig. 7, and fig. 9 isbase:Sub>A schematic structural view ofbase:Sub>A transfer mechanism ofbase:Sub>A detection apparatus according to an embodiment of the present invention connected tobase:Sub>A base.

Referring to fig. 4 to 9, in the present embodiment, the transferring mechanism 400 includes a support 430, and the transferring driving component 410 is mounted on the support 430. The inspection apparatus 10 further includes a levitation support 500, the levitation support 500 being disposed between the second support table 180 and the bracket 430. The transfer mechanism 400 is used for conveying and positioning the component to be detected, the suspension support 500 can be an air bearing/air bearing, the suspension support 500 is always kept in the whole working process, the transfer mechanism 400 and the second support table 180 are not contacted, the support force generated by the suspension support 500 is enough to bear the load in the vertical direction during the test, and the small load force for supporting the mass of the transfer mechanism 400 is only required to be generated at other times.

In order to enable the suspension supports 500 to form a more stable support for the support frame 430, the number of the suspension supports 500 is multiple and uniformly distributed, so that the position deflection of the support frame 430 caused by uneven stress can be prevented, and the positioning accuracy can be influenced.

The transfer mechanism 400 further includes a carrier assembly 440, where the carrier assembly 440 includes a carrier 441 and sensing elements 442, and the sensing elements 442 are disposed on the carrier 441 along a second direction at intervals. The detecting apparatus 10 further includes a detecting member 600, the detecting member 600 is configured to sense the sensing members 442, the clamping member 420 is configured to clamp the carrier 441, and the detecting member 600 is configured to detect two sensing members 442 when the carrier 441 is driven by the transfer driving assembly 410 to move along the second direction. The transfer mechanism 400 is used for transferring the carrier plate 441, the carrier plate 441 is used for carrying a workpiece to be detected, and the detecting piece 600 detects the sensing piece 442 to determine the position of the carrier plate 441, so as to calibrate the position of the carrier plate 441, thereby realizing accurate positioning.

Meanwhile, the detection equipment 10 can simultaneously support a plurality of workpieces to be tested by clamping the carrier plate assembly 440 through the clamping piece 420, and effectively solves the problems that the number of the workpieces to be tested is limited and the testing efficiency is low in the testing device in the related art.

The transfer mechanism 400 further includes an adaptive assembly 450, where the adaptive assembly 450 includes a first connector 451, a second connector 452, and a connection shaft 453, the first connector 451 is connected to the transfer driving assembly 410, the second connector 452 is connected to the clamping member 420, the first connector 451 and the second connector 452 are rotatably connected through the connection shaft 453, and the connection shaft 453 extends along the first direction. At least one of the first connector 451 and the second connector 452 is rotatable about a first direction with respect to the connection shaft 453. Thereby, the second connector 452 can rotate, and further can adapt to the placement angle of the carrier plate 441.

The self-adapting assembly 450 further comprises a limiting member 454 and an elastic member 455, wherein the limiting member 454 is connected to the end portion of the connection shaft 453, the elastic member 455 is sleeved outside the connection shaft 453 and is clamped between the limiting member 454 and the first connection member 451, so as to prevent loosening caused by frequent relative rotation between the first connection member 451 and the second connection member 452, the self-adapting assembly 450 has a good anti-loosening effect, the elastic member 455 can be a spring, such as a belleville spring, or an elastic washer, and in this embodiment, the elastic member 455 comprises a spring and an elastic washer.

The connection shaft 453 is fixed to the second connection member 452 to rotate relative to the first connection member 451, and a bearing 456 is provided between the connection shaft 453 and the first connection member 451 to reduce a rotational friction force with the first connection member 451. The first connection member 451 and the second connection member 452 have bar-shaped bars extending in a third direction, and the connection shaft 453 is connected to the middle of the second connection member 452, so that the stress is balanced.

The second connecting member 452 is provided with a plurality of clamping members 420 at intervals, so that more clamping positions can be provided for the carrier plate 441, the clamping force for the carrier plate 441 is improved, and the carrier plate 441 is more stable and more reliable. The clamping piece 420 is an automatic clamping component, such as an electric sucking disc, and is used for sucking the carrier plate 441 when the power is on, so that the clamping automation degree is high, and when the position has certain deviation, the negative pressure sucking force can also enable the carrier plate 441 to approach the sucking disc, so that the position deviation has certain adjustment effect. Of course, in other embodiments, the clamping member 420 may be a manipulator, such as a clamping cylinder, a finger cylinder, or the like. The opening of the sucking disc faces the third direction, so that the opening of the sucking disc faces the end face of the carrier plate 441, and the carrier plate 441 can be pushed and pulled well.

The transfer driving assembly 410 includes a transfer driving member 411, a transfer transmission member 412, and a transfer executing member 413, wherein the transfer driving member 411 drives the transfer executing member 413 to reciprocate through the transfer transmission member 412, and the transfer executing member 413 is connected to the clamping member 420, thereby driving the clamping member 420 to move.

In this embodiment, the transfer driving member 411 includes a motor, the transfer driving member 412 includes a driving wheel and a driven wheel, and the transfer executing member 413 includes a conveyor belt. The first connecting piece 451 is connected with the conveyer belt conveying, the motor drive action wheel rotates, follow driving wheel and action wheel and set up along the interval in the second direction, conveyer belt stretch-draw is on action wheel and follow the driving wheel and the conveyer belt extends along the second direction, the pivot of motor, the pivot parallel arrangement and the along third direction of pivot from the driving wheel of action wheel, the action wheel becomes the rectilinear motion of conveyer belt when rotating circular motion, the effect of supporting the conveyer belt is played from the driving wheel, when the conveyer belt removes, from the driving wheel rotation, thereby reduce the resistance to the conveyer belt removal formation. The belt transmission mechanism has simple structure and low working noise.

The transfer mechanism 400 further includes a transfer guide assembly 460, the transfer guide assembly 460 includes a transfer rail 461 and a transfer slider 462, the transfer rail 461 is fixed to the bracket 430, the transfer slider 462 is connected to the first link 451, and the first link 451 is connected to the conveyor. The extending direction of the transfer rail 461 is identical to the linear movement direction of the transfer driving unit 410, and both extend in the second direction, and the transfer rail 461 and the bracket 430 may be fixed by bolting, and the transfer slider 462 may be connected to the first connector 451, or may be assembled or integrally formed with the first connector 451. In this embodiment, the first connecting member 451 is bent at right angles, one section extends along the third direction for connecting with the second connecting member 452, the other section extends along the first direction for connecting with the transferring member, the transferring slider 462 is connected to the first connecting member 451 by a screw, and a chute with an inverted structure is formed on the transferring slider 462 for slidably matching with the transferring rail 461, so that the second connecting member 452 is slidably connected to the bracket 430. The conveyor belt of the transfer driving assembly 410 is connected to the second connecting member 452, and the conveyor belt does not need to support the second connecting member 452 in the first direction, but only needs to pull the second connecting member 452 to move in the third direction.

Fig. 10 shows a schematic structural diagram of a carrier plate assembly and a detecting member of a detecting device according to an embodiment of the present invention, and fig. 11 shows an exploded schematic structural diagram of a fourth driving mechanism of a detecting device according to an embodiment of the present invention.

Referring to fig. 10 and 11 together, the inspection apparatus 10 further includes a fourth driving mechanism 700, and the fourth driving mechanism 700 is configured to drive the transfer mechanism 400 to rotate about the first direction. Thereby, the rotational position of the carrier plate 441 on the horizontal plane can be adjusted, and the rotational angle can be aligned. The first drive mechanism 100 is connected to the second drive mechanism 200, the second drive mechanism 200 is connected to the third drive mechanism 300, and the fourth drive mechanism 700 is connected to the transfer mechanism 400. The transfer mechanism 400 is directly connected to the chuck 420 because of its relatively maximum driving stroke, and the fourth driving mechanism 700 is provided between the transfer mechanism 400 and the third driving mechanism 300 because of its minimum driving power and small size.

The fourth driving mechanism 700 includes a base 710, a connecting seat 720, and a fourth driving member 730, where the base 710 and the bracket 430 are rotatably connected through the connecting seat 720, a suspension support member 500 is disposed on the base 710, and the suspension support member 500 is disposed between the base 710 and the second support stand 180. The fourth driving member 730 drives the bracket 430 to rotate about the first direction with respect to the base 710.

Illustratively, the fourth drive member 730 includes a stator 731 and a mover 732, the stator 731 being fixed relative to the base 710, and the mover 732, when moved relative to the stator 731, driving the base 710 to rotate relative to the support 430. The fourth driving mechanism 700 has a simple structure, is not simply driven by rotation, but shares driving force through the rotary connecting seat 720, drives the bracket 430 to rotate through the movement of the rotor, has smaller driving force and high rotation driving precision, has a better locking effect on the rotation between the bracket 430 and the base 710 when the rotor is not moved, and ensures positioning precision.

In one embodiment, the fourth driving member 730 may be a motor, where the motor housing is fixed relative to the base 710, and an output shaft of the motor is connected to the bracket 430 through a coupling, so that the motor directly drives the bracket 430 to rotate. In another embodiment, the fourth driving member 730 is a motor, a gear transmission pair is disposed between the motor and the connection seat 720, that is, an output shaft of the motor is connected to a gear, and a gear which is engaged with the gear connected to the output shaft of the motor is disposed outside the connection seat, so that torque is transmitted when the motor rotates, and the connection seat 720 is driven to rotate. In yet another embodiment, the fourth driving member 730 is a motor, a synchronous belt is between the motor and the connecting seat 720, a driving wheel is connected to an output shaft of the motor, and a driven wheel is coaxially connected to an outer surface of the connecting seat 720 as a driven wheel or to the connecting seat, so that the motor drives the connecting seat 720 to rotate when rotating. The sensing element 442 may be an optical standard block, such as an infrared light emitting module or a light sensing module, and the detecting element 600 may be an industrial camera or a high-speed camera, where the optical standard module is used in combination with the industrial camera, and can be captured by the industrial camera to determine the position of the carrier plate 441. The carrier 441 is a rectangular plate body, and the two sensing elements 442 are located on a center line of the carrier in the third direction and symmetrically disposed with respect to the center line of the carrier in the second direction.

The inspection apparatus 10 further includes a controller (not shown) in communication with the inspection piece 600, the first driving mechanism 100, the second driving mechanism 200, the third driving mechanism 300, the fourth driving mechanism 700, and the transfer mechanism 400, respectively, and the controller controls the second driving mechanism 200, the third driving mechanism 300, and the fourth driving mechanism 700 to operate according to the positions of the two sensing pieces 442 detected by the inspection piece 600. The sensing element 442 on the carrier plate 441 is detected by the detecting element 600, and since the sensing element 442 has a certain position with respect to the carrier plate 441, the position of the carrier plate 441 can be determined by detecting the position of the sensing element 442. The detecting member 600 feeds back the measured position to the controller, and the controller calculates the position offset according to the measured position, and then controls the second driving mechanism 200, the third driving mechanism 300 and the fourth driving mechanism 700 to operate, thereby calibrating the position of the carrier plate 441.

The controller controls the driving mechanism to act to calibrate the position of the carrier plate 441 as follows:

the controller controls the second driving mechanism 200 to drive the carrier plate 441 to move along the second direction, the position of the detecting element 600 is fixed, when the carrier plate 441 moves along the second direction, one sensing element 442 enters the shooting range of the detecting element 600, the detecting element 600 shoots and records the position of the sensing element 442, and the controller calculates a first sensing point;

then, the controller continues to control the second driving mechanism 200 to drive the carrier 441 to move along the second direction, so that the other sensing element 442 enters the shooting range of the detecting element 600, the detecting element 600 shoots and records the position of the sensing element 442, and the controller calculates a second sensing point;

the detecting element 600 detects the two sensing elements 442 respectively and obtains a first sensing point and a second sensing point, the connection lines of the first sensing point and the second sensing point form an actual position line, and a target reference line is preset in the controller;

the control system of the controller connects the first sensing point and the second sensing point to obtain an actual position line, a target position line is pre-stored in the controller, the actual position line is compared with the target position line, and then the third driving mechanism 300 and the fourth driving mechanism 700 are controlled to act so that the actual position line is overlapped or fitted with the target position line;

according to the distance from the midpoint of the actual position line in the third direction to the target datum line, the controller controls the third driving mechanism 300 to drive the carrier plate to move a second adjustment distance in the third direction, so that the midpoint of the actual position line and the midpoint of the target position line coincide;

according to the angle between the actual position line and the target reference line, the controller controls the fourth driving mechanism 700 to drive the carrier plate to rotate by the angle with the first direction as the axis, so that the actual position line coincides with the target position line, and the calibration of the position of the carrier plate 441 is achieved.

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.

Claims

1. Detection apparatus, characterized by comprising:

the fourth driving mechanism is used for driving the transfer mechanism to rotate by taking the first direction as an axis; the fourth driving mechanism comprises a fourth driving piece, a connecting seat and a base, the base and the bracket are rotatably connected through the connecting seat, and the fourth driving piece drives the bracket to rotate relative to the base by taking a first direction as an axis; in the first direction, the first driving mechanism is connected with the second driving mechanism, the second driving mechanism is connected with the third driving mechanism, and the fourth driving mechanism is connected with the transfer mechanism;

the transfer mechanism further comprises a carrier plate assembly, wherein the carrier plate assembly comprises a carrier plate and two induction pieces, and the two induction pieces are positioned on the midline of the carrier plate in the third direction and are symmetrically arranged relative to the midline of the carrier plate in the second direction; the detection device further comprises a detection piece, wherein the detection piece is used for sensing the induction piece; the clamping piece is used for clamping the carrier plate;

when the detection device is aligned, the second driving mechanism drives the carrier plate to move along the second direction, so that the two sensing pieces enter the shooting range of the detection piece successively to obtain a corresponding first sensing point and a corresponding second sensing point, an actual position line is formed by fitting the first sensing point and the second sensing point, the third driving mechanism drives the carrier plate to move along the third direction to enable the actual position line to coincide with the midpoint of a preset target position line, and the fourth driving mechanism drives the carrier plate to rotate to enable the actual position line to coincide with the preset target position line;

the transfer mechanism comprises a self-adaptive assembly, the self-adaptive assembly comprises a first connecting piece, a second connecting piece and a connecting shaft, the first connecting piece is connected with the transfer driving assembly, the second connecting piece is connected with the clamping piece, the first connecting piece and the second connecting piece are rotatably connected through the connecting shaft, and the connecting shaft extends along the first direction.

2. The inspection apparatus of claim 1 including a first support table, said transfer mechanism being located above said first support table;

3. The inspection apparatus of claim 2 wherein said first drive mechanism further comprises two lift guide assemblies, said lift guide assemblies being in one-to-one correspondence with said lift assemblies and said lift guide assemblies extending in said first direction.

4. The inspection apparatus of claim 2 wherein said first drive mechanism further comprises a synchronous drive assembly for driving the synchronous and co-directional movement of both of said lifting assemblies.

5. The inspection apparatus of claim 4 wherein said lifting assembly includes a lifting rotation member and a lifting conversion member, said lifting conversion member cooperating with said lifting rotation member to convert rotation of said lifting rotation member into reciprocal movement in said first direction;

6. The apparatus according to claim 2, wherein one of the second drive mechanism and the third drive mechanism is connected to the first support table, the other is connected to the transfer mechanism, and the second drive mechanism and the third drive mechanism are connected.

7. The inspection apparatus of claim 1 wherein said support is coupled to said third drive mechanism, and wherein a direction of movement of said transfer drive assembly is aligned with said second direction.

8. The detection apparatus according to claim 1, wherein the detection apparatus comprises a second support table and a levitation support, the levitation support being provided between the second support table and the cradle.

9. The inspection apparatus of claim 1 further comprising a controller in communication with said inspection piece, said first drive mechanism, said second drive mechanism, said third drive mechanism, said fourth drive mechanism, said transfer mechanism, respectively, said controller controlling operation of said second drive mechanism, said third drive mechanism, and said fourth drive mechanism based on the position of said two sensing pieces detected by said inspection piece.

10. The detecting device according to claim 9, wherein the controller controls the second driving mechanism to drive the carrier plate to move along the second direction, the detecting member detects the two sensing members respectively and obtains a first sensing point and a second sensing point, a connection line of the first sensing point and the second sensing point forms an actual position line, and a target reference line is preset in the controller;

obtaining an adjustment distance according to the distance from the midpoint of the actual position line in the third direction to the target datum line, wherein the controller controls the third driving mechanism to drive the carrier plate to move the adjustment distance in the third direction;