CN114988097A - Material transportation equipment and processing system - Google Patents
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- CN114988097A CN114988097A CN202210742115.2A CN202210742115A CN114988097A CN 114988097 A CN114988097 A CN 114988097A CN 202210742115 A CN202210742115 A CN 202210742115A CN 114988097 A CN114988097 A CN 114988097A
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- 239000000463 material Substances 0.000 title claims abstract description 222
- 238000012545 processing Methods 0.000 title claims abstract description 61
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- 230000000712 assembly Effects 0.000 claims abstract description 27
- 238000000429 assembly Methods 0.000 claims abstract description 27
- 230000004044 response Effects 0.000 claims abstract description 12
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- 230000008569 process Effects 0.000 claims description 24
- 230000005540 biological transmission Effects 0.000 claims description 10
- 238000003754 machining Methods 0.000 claims description 4
- 230000003028 elevating effect Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 16
- 230000036544 posture Effects 0.000 description 14
- 235000012431 wafers Nutrition 0.000 description 10
- 230000032258 transport Effects 0.000 description 9
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/905—Control arrangements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
Material transportation equipment and system of processing, wherein, material transportation equipment includes: a fixing device; the bearing device comprises a multilayer bearing module, the multilayer bearing module comprises a plurality of carrier assemblies with the sizes, and each carrier assembly is suitable for placing materials with the corresponding size; the lifting device is suitable for responding to the first displacement control signal to drive the bearing device to move up and down; and stopping driving the carrying device to move in response to the second displacement control signal; the first acquisition device is suitable for acquiring the pose relation between the corresponding bearing module and the grabbing device and outputting a first pose acquisition signal; the first industrial control device is suitable for outputting a first displacement control signal when the relative poses of the corresponding bearing module and the grabbing device are determined to be inconsistent with the pre-stored pose information based on the first pose acquisition signal; and when the two signals are determined to be consistent, outputting a second displacement control signal and outputting a first grabbing signal. By adopting the scheme, materials with different sizes can be transported, and the transportation efficiency is improved.
Description
Technical Field
The embodiment of the specification relates to the technical field of machine manufacturing, in particular to material transportation equipment and a processing system.
Background
In a machine manufacturing process, when processing a material, a carrying device carrying the material is generally required to be transported to a corresponding processing platform.
However, in the actual transportation process, because the size of the carrier for placing the material on the bearing device is too single, the material with only one size or one size can be placed on the bearing device in one transportation process, and the production efficiency is low.
From the above, how to transport various materials with different sizes and improve the transport efficiency is to be solved by the technical personnel in the field.
Disclosure of Invention
In view of this, the embodiments of the present specification provide a material transportation device and a processing system, which can transport materials of various sizes, and improve transportation efficiency.
First, an embodiment of the present specification provides a material transportation device, including: fixing device and set up in last device, elevating gear, the first collection system, the industrial control device and the grabbing device of bearing of fixing device, wherein:
the bearing device comprises a multilayer bearing module, the multilayer bearing module comprises a plurality of carrier assemblies with the sizes, and each carrier assembly is suitable for placing materials with the corresponding size;
the lifting device is movably connected with the bearing device and is suitable for responding to a first displacement control signal output by the first industrial control device to drive the bearing device to move up and down; and in response to a second displacement control signal output by the first industrial control device, stopping driving the bearing device to move;
the first acquisition device is arranged on the lifting device, is electrically connected with the first industrial control device, is suitable for acquiring the pose relation between the corresponding bearing module and the gripping device in the moving process of the bearing device, and outputs a first pose acquisition signal to the first industrial control device;
the first industrial control device is respectively electrically connected with each bearing module, the lifting device and the grabbing device, is suitable for acquiring signals based on the first position and posture, and outputs a first displacement control signal to the lifting device to drive the bearing devices to move up and down when the relative position and posture of the corresponding bearing module and the grabbing device are determined to be inconsistent with the prestored position and posture information; when the relative pose of the corresponding bearing module and the grabbing device is determined to be consistent with the prestored pose information, outputting a second displacement control signal to control the lifting device to stop driving the bearing device to move, and outputting a corresponding first grabbing signal to the grabbing device;
the grabbing device is suitable for responding to the first grabbing signal and grabbing the material.
Optionally, each layer of the carrying module comprises a plurality of sizes of stage assemblies or different layers of the carrying modules comprise different sizes of stage assemblies.
Optionally, the material transporting apparatus further comprises: the second acquisition device is arranged on the fixing device, is electrically connected with the first industrial control device, is suitable for acquiring the relative pose of the gripping device and the corresponding carrier platform assembly, and outputs a second pose acquisition signal to the first industrial control device;
the first industrial control device is further adapted to output a second grabbing signal to the grabbing device when the relative pose of the corresponding carrier assembly and the grabbing device is determined to be consistent with the pre-stored pose information based on the second pose acquisition signal;
the grabbing device is further suitable for responding to the second grabbing signal and grabbing the object on the corresponding carrier assembly.
Optionally, the material transporting apparatus further comprises: set up in third collection system, second industrial control device and position appearance adjusting device on fixing device, wherein:
the grabbing device is suitable for grabbing the material based on the first grabbing signal and placing the material on the pose adjusting device; after the pose of the material is adjusted, grabbing the material and placing the material on corresponding processing equipment;
the third acquisition device is electrically connected with the second industrial control device, is suitable for acquiring the pose of the material and outputting a second pose acquisition signal to the second industrial control device;
the second industrial control device is electrically connected with the pose adjusting module and is suitable for determining whether the pose of the corresponding material is consistent with the pose information of the prestored material based on the second pose acquisition signal and outputting a pose adjusting signal to the pose adjusting device when the pose of the corresponding material is inconsistent with the pose information of the prestored material;
the pose adjusting device is placed along a preset path and is suitable for responding to the pose adjusting signal and driving the material to move so as to adjust the pose of the material.
Optionally, the processing equipment is adapted to output a corresponding processing completion signal to the first industrial control device when the material processing is completed;
the first industrial control device is also suitable for responding to the machining completion signal and outputting a corresponding third grabbing signal to the grabbing device;
the grabbing device is further suitable for placing the material on the corresponding carrying platform assembly based on the third grabbing signal.
Optionally, the carrying device includes:
a fixed frame movably connected with the fixing device and comprising a multi-layer supporting structure;
the multilayer bears the weight of the module and sets up respectively on the bearing structure of corresponding layer, and every layer bears the weight of the module and includes: the device comprises a carrier plate and a carrying platform assembly positioned on the carrier plate.
Optionally, the fixing means comprises:
a frame structure;
a mounting plate on the frame structure;
and the lifting device fixing part is arranged on the inner side of the mounting plate.
Optionally, the lifting device comprises: the guide rail module is fixed on the lifting device fixing part and used for providing a moving path of the bearing module;
the driving module is positioned at the bottom of the frame structure, is respectively connected with the industrial control device and the bearing module, and is used for providing driving force for the bearing module so as to drive the bearing module to move;
and the limiting module is fixed on the mounting plate and used for limiting the moving distance of the bearing module.
Optionally, the drive module comprises a drive assembly and a transmission assembly, wherein:
the first end of the driving component is electrically connected with the industrial control device, and the second end of the driving component is connected with the first end of the transmission component and used for providing driving force for the bearing module;
and the second end of the transmission component is connected with the bearing module and is used for transmitting the driving force to the bearing module so as to drive the bearing module to move.
Optionally, the rail module comprises:
the lifting assembly is used for bearing the bearing module;
and the guide rail assembly is arranged on the mounting plate, is connected with the lifting assembly and is used for providing a moving path of the bearing module.
Optionally, the limiting module comprises a limiting installation assembly fixed on the installation plate and a limiting assembly arranged on the limiting installation assembly, and the limiting assembly is used for limiting the moving distance of the bearing module.
Optionally, the fixing device further comprises: and the rotatable assembly is arranged at the bottom of the frame structure and enables the fixing device to horizontally move.
Optionally, the grasping means includes:
a mounting module located on the frame structure;
the supporting column is positioned on the mounting module;
one end of the rotating module is rotatably connected with the supporting column;
and one end of the grabbing module is connected with the other end of the rotating module, and the other end of the grabbing module can take and place the materials.
Optionally, the grasping module may include: the first grabbing component and the second grabbing component are arranged in parallel.
Correspondingly, this description embodiment still provides a material processing system, includes: the material transporting apparatus of any preceding embodiment, adapted to transport material to a processing apparatus; the processing equipment is suitable for processing the material.
By adopting the material transportation equipment in the embodiment of the specification, the bearing device can comprise a plurality of layers of bearing modules, each layer of bearing module comprises a plurality of stage assemblies with corresponding sizes, each stage assembly is suitable for placing materials with corresponding sizes, and in the process that the lifting device moves the bearing device up and down, the first industrial control device can output a first displacement control signal to the lifting device to drive the bearing device to move up and down based on a first posture acquisition signal output by the first acquisition module when determining that the relative postures of the corresponding bearing module and the grabbing device are inconsistent with the prestored posture information; and when the relative pose of the corresponding bearing module and the grabbing device is determined to be consistent with the prestored pose information, outputting a second displacement control signal to control the lifting device to stop driving the bearing device to move, and outputting a corresponding first grabbing signal to the grabbing device, wherein the grabbing device can grab the material in response to the first grabbing signal. From this, through the use has the multilayer to bear the weight of the module, and the multilayer bears the weight of the device that the module includes the microscope carrier subassembly of a plurality of sizes, can place the material of multiple size difference on bearing the weight of the device, improve the size and the quantity of the material of single transportation, and through the cooperation of first industrial control device and grabbing device for grabbing device can snatch the material that is located the different sizes on bearing the weight of the module, therefore, adopt the material transportation equipment that this description embodiment provided, can transport the material of multiple size difference, improve conveying efficiency.
Further, by arranging each layer of carrying module to comprise a plurality of carrier assemblies in different sizes or arranging different layers of carrying modules to comprise carrier assemblies in different sizes, the size type and the number of materials in a single transportation process can be improved.
Further, a second acquisition device arranged on the fixing device is used for acquiring the relative poses of the gripping device and the corresponding carrier assembly, and outputting a second pose acquisition signal to the first industrial control device; enabling the first industrial control device to output a second grabbing signal to the grabbing device when the relative poses of the corresponding stage assembly and the grabbing device are determined to be consistent with the prestored pose information based on the second pose acquisition signal, so that the grabbing device can grab the material on the corresponding stage assembly in response to the second grabbing signal. Through the control process, the grabbing device and the corresponding carrier assembly can have the relative posture consistent with the prestored pose information, the carrier assembly for grabbing the materials and the time sequence for grabbing the materials are convenient to determine, the continuity of the material transportation process is improved, and the transportation efficiency can be improved.
Furthermore, based on the first grabbing signal, the grabbing device can place the grabbed materials in the pose adjusting device, meanwhile, the second industrial control device can output pose adjusting signals to the pose adjusting device when determining whether the corresponding pose of the materials is consistent with the prestored pose information of the materials or not and outputting the pose adjusting signals to the pose adjusting device when the corresponding pose of the materials is inconsistent with the prestored pose information of the materials based on the second pose collecting signal output by the third collecting device, and the pose adjusting device placed along the preset path can respond to the pose adjusting signals and drive the materials to move so as to adjust the pose of the materials, so that the pose of the materials reaches the transportation requirement, the materials can be directly placed in the corresponding processing device, and the production efficiency is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present specification, the drawings needed to be used in the embodiments of the present specification or in the description of the prior art will be briefly described below, it is obvious that the drawings described below are only some embodiments of the present specification, and it is also possible for a person skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 shows a schematic structural diagram of a material transportation device in an embodiment of the present description;
FIG. 2 is a schematic structural diagram of a carrying device in an embodiment of the present disclosure;
fig. 3A to 3C are schematic diagrams illustrating a posture relationship between a carrying module and a grasping apparatus in an embodiment of the present specification;
fig. 4 is a schematic structural diagram illustrating relative positions of a fixing device, a lifting device and a gripping device in an embodiment of the present disclosure.
Detailed Description
Known from the background art, the microscope carrier size of placing the material on the load bearing device among the prior art is too single, leads to a transportation, can only place the material of a size or size on the load bearing device, and material transport efficiency is lower.
In order to solve the technical problem, an embodiment of the present specification provides a material transportation device, which has a multilayer bearing module through use, and the multilayer bearing module includes a bearing device of a plurality of sizes of carrier assemblies, and can place materials of various sizes on the bearing device, so as to improve the size and the quantity of the materials transported at a single time, and through the cooperation of a first industrial control device and a gripping device, the gripping device can grip the materials located on the bearing module, and therefore, by adopting the material transportation device provided by the embodiment of the present specification, the materials of various sizes can be transported, and the transportation efficiency is improved.
In specific implementation, the material transportation device provided by the embodiment of the specification can be widely applied to various processing and manufacturing scenes, for example, various processing and manufacturing scenes related to semiconductors, various processing and manufacturing scenes related to insulators and various processing and manufacturing scenes related to conductors, and processing and manufacturing scenes of materials of at least two types of semiconductors, insulators and conductors. Accordingly, the material transportation device provided by the embodiments of the present disclosure can transport a plurality of materials, for example, wafers. The embodiment of the present specification does not set any limit on the application scenario of the material transportation device, and the type and size of the transported material.
For a better understanding and enabling disclosure of the embodiments of the present description to those skilled in the art, reference is made to the accompanying drawings and descriptive matter in which embodiments are illustrated.
Referring to a schematic structural diagram of a material transportation device in an embodiment of the present specification shown in fig. 1, a material transportation device M includes: fixing device 100, and set up bearing device 110, elevating gear 120, first collection device 130, first industrial control device 140 and grabbing device 150 on fixing device 100, wherein:
the carrying device 110 comprises a multi-layer carrying module 111, wherein the multi-layer carrying module 111 comprises a plurality of carrier assemblies 1111 with different sizes, and each carrier assembly 1111 is suitable for placing the material A with the corresponding size;
the lifting device 120 is movably connected with the bearing device 110 and is suitable for responding to a first displacement control signal output by the first industrial control device 140 to drive the bearing device 110 to move up and down; and in response to the second displacement control signal output by the first industrial control device 140, stopping driving the carrying device 110 to move;
the first collecting device 130 is disposed on the lifting device 120, electrically connected to the industrial control device 140, and adapted to collect the pose relationship between the corresponding carrying module 111 and the grabbing device 150 during the movement of the carrying device 110, and output a first pose collecting signal to the first industrial control device 140;
the first industrial control device 140 is electrically connected to each carrying module, the lifting device and the gripping device, and is adapted to output a first displacement control signal to the lifting device 120 to drive the carrying device 110 to move up and down when determining that the relative poses of the corresponding carrying module 111 and the gripping device 150 are inconsistent with the pre-stored pose information based on the first pose acquisition signal; when the relative poses of the corresponding bearing module 111 and the grabbing device 150 are determined to be consistent with the pre-stored pose information, outputting a second displacement control signal to control the lifting device 120 to stop driving the bearing device 110 to move, and outputting a corresponding first grabbing signal to the grabbing device 150;
the gripping device 150 is adapted to grip the material a in response to the first gripping signal.
The working principle of the material transporting equipment M in the above embodiment is briefly described as follows:
in a specific implementation, when the material a needs to be transported, in response to an activation signal, the first industrial control device 150 may output a corresponding first displacement control signal to the lifting device 120 based on the activation signal, the lifting device 120 may drive the carrier 110 to move up and down in response to the first displacement control signal, during the process that the carrier 110 moves up and down, the first collecting module 130 may collect the pose relationship between the corresponding carrier module (e.g., the carrier module 111 in fig. 1) and the gripping device 150 at any time and output a first displacement collecting signal to the first industrial control device 140, the first industrial control device 140 may output a first displacement control signal to the lifting device based on the first displacement collecting signal when it is determined that the relative pose of the corresponding carrier module 111 and the gripping device 150 is inconsistent with the pre-stored pose information, driving the bearing device to move up and down; when the relative pose of the corresponding bearing module 111 and the grabbing device 150 is determined to be consistent with the pre-stored pose information, outputting a second displacement control signal to control the lifting device 120 to stop driving the bearing device 110 to move, and outputting a corresponding first grabbing signal to the grabbing device 150, at this time, the grabbing device 150 can grab the material a in response to the first grabbing signal, and the transportation process of the material is completed.
As can be seen from the above, by using the carrying device 110 having the multi-layer carrying module 111, and the multi-layer carrying module 111 includes the carrier assemblies 1111 with multiple sizes, the materials a with multiple sizes can be placed on the carrying device 110, so as to improve the size and the number of the materials a transported at a time, and the grabbing device 150 can grab the materials a on the carrying module 111 by matching the first industrial control device 140 and the grabbing device 150, therefore, by using the material transporting apparatus provided by the embodiment of the present specification, the materials with multiple sizes can be placed on the carrying device, and the production efficiency is improved.
So that those skilled in the art can better understand and practice the embodiments of the present disclosure, the concepts, aspects, principles, and advantages of the embodiments of the present disclosure, as well as others, will be described in detail below with reference to the accompanying drawings and by way of specific examples of applications.
Referring to fig. 1 and a schematic structural diagram of a carrying device in an embodiment of the present disclosure shown in fig. 2, as shown in fig. 2, the carrying device 110 may include a fixed frame 112 and multiple layers of carrying modules (e.g., three layers of carrying modules 111 in fig. 2), where the fixed frame 112 may be movably connected to the fixed device 100 and include multiple layers of supporting structures (e.g., three layers of supporting structures 1121 in fig. 2); the multiple layers of carrier modules are respectively disposed on the support structures 1121 of the corresponding layers, and each layer of carrier module 111 includes: a carrier 1112 and a stage assembly (e.g., 3 stage assemblies 1111 of fig. 2) located on the carrier 1112.
Therefore, by using the carrier device 110 with the multiple layers of carrier modules 111, wherein the multiple layers of carrier modules 111 comprise the stage assemblies 111 with multiple sizes, materials a with different sizes can be placed on the carrier device 110, and the size and the number of the materials a in single transportation can be increased.
It should be noted that the structure of the carrying device is only an example. In specific implementation, the number of layers of the bearing module in the bearing device and the number of stage assemblies on the bearing module can be flexibly set according to actual production requirements. The structure of the carrying device is not limited in the embodiments of the present specification as long as it can place materials of different sizes.
As mentioned above, the carrying device may include multiple layers of carrying modules, and each layer of carrying module may include a carrier assembly with multiple sizes, and according to the size of the carrier assembly, the size of the placed material may be determined. In specific implementation, carrier assemblies with different sizes and numbers can be adopted for each layer of bearing module, and are used for placing materials with different sizes so as to meet production requirements.
In practical applications, each layer of the carrier module 111 may include a plurality of carrier assemblies 1111 with different sizes, and with reference to fig. 2, for example, each carrier assembly 1111 on the first layer, the second layer and the third layer (in the order from top to bottom) may have different sizes for carrying the material.
As a specific example, at least two of the three stage assemblies 1111 of the carrier module 111 at the first layer have different sizes. For example, the diameter of the wafer carried by the stage assembly located from left to right in the first layer carrier module 111 may be 4 inches, 6 inches, and 8 inches in this order.
The carrier modules 111 of different layers may include carrier assemblies 1111 of different sizes, and with continued reference to fig. 2, for example, carrier assemblies 1111 at the same layer may carry materials of the same size, and carrier assemblies 1111 at different layers may carry materials of different sizes. For example, the wafer carried by the stage assemblies in the first layer of carrier modules 111 may each have a diameter of 4 inches, the wafer carried by the stage assemblies in the second layer of carrier modules 111 may each have a diameter of 6 inches, and the wafer carried by the stage assemblies in the third layer of carrier modules 111 may each have a diameter of 8 inches.
It should be noted that the above description of the dimensions of the carrier material of each stage assembly is only an example. The size of the material carried by the carrier assembly is not limited in the embodiments of the present description, and the size of the material carried by the carrier assembly can be matched with the size of the material and the size of the carrier assembly.
In a specific implementation, for a carrying device with multiple layers of carrying modules, the relative poses of each carrying module and the gripping device need to be collected in the moving process of the carrying device, and when the relative poses of the carrying modules and the gripping device are consistent with the prestored pose information, the gripping device can grip the materials on the corresponding carrying modules.
Based on this, in the embodiment of the present specification, the relative pose of the bearing module and the grasping apparatus may specifically include position information, and therefore, in order to obtain the position information of the bearing module and the grasping apparatus, the acquisition module may acquire the relative position of the bearing module and the grasping apparatus, and transmit a position acquisition signal to the industrial control module; correspondingly, the first industrial control module can output a first position control signal to the lifting device to drive the bearing device to move up and down when determining that the relative positions of the corresponding bearing module and the grabbing device are inconsistent with the pre-stored position information based on the position acquisition signal; and when the relative position of the corresponding bearing module and the grabbing device is determined to be consistent with the pre-stored position information, outputting a second position control signal to control the lifting device to stop driving the bearing device to move, and outputting a corresponding first grabbing signal to the grabbing device.
Referring to fig. 3A to 3C, referring to fig. 1 and fig. 2, a schematic diagram of a posture relationship between a bearing module and a gripping device is shown, wherein as shown in fig. 3A, when the first industrial control device 140 determines that the relative positions of the first layer bearing module 111 and the gripping device 150 are consistent with the pre-stored position information according to the first posture acquisition signal output by the first acquisition device 130, the lifting device 120 is controlled to stop driving the bearing device 111 to move, and at this time, the gripping device 150 may sequentially grip the materials a placed on the bearing module 111 until all the materials a placed in the first layer bearing module 111 are gripped.
When the grabbing device 150 carries the first layer until all the materials a placed in the first layer 111 are grabbed, the lifting device 120 continues to drive the carrying device 110 to move up and down, and the first collecting device 130 continues to collect the relative positions of the second layer carrying module 111 and the grabbing device 150. Referring to fig. 3B, when the first industrial control device 140 determines that the relative position between the second layer bearing module 111 and the grabbing device 150 is consistent with the pre-stored position information according to the first position posture collecting signal output again by the first collecting device 130, the lifting device 120 is controlled to stop driving the bearing device 111 to move, and at this time, the grabbing device 150 may sequentially grab the material a placed on the second layer bearing module 111 until all the material a placed in the second layer bearing module 111 is grabbed.
By analogy, referring to fig. 3C, until the relative positions of the last layer (e.g., the third layer) of the carrying modules 111 and the gripping device 150 are consistent with the pre-stored position information, the gripping device 150 may grip all the materials a placed on the last layer of the carrying modules.
As a specific example, when the position of the plane where the carrying module of the corresponding layer is located and the position of the plane where the grabbing device is located meet the preset condition, it can be considered that the relative positions of the carrying module and the grabbing device are consistent with the pre-stored position information.
In specific implementation, the materials placed on the bearing modules are different for different machining scenarios. In a semiconductor-related machine fabrication scenario, the material a may be a wafer, and accordingly, the wafer may be held in a flower basket (case) B.
In the process of grabbing the material, for each layer of the carrier module, there are a plurality of stage assemblies (for example, each layer of the carrier module in fig. 2 has 3 stage assemblies), and in the actual material fetching process, it is also necessary to determine which stage assembly the material is to be grabbed from.
With continued reference to fig. 1, the material transporting apparatus M may further include a second collecting device (not shown in fig. 1) disposed on the fixing device 100 and electrically connected to the first industrial control device 140, and adapted to collect the relative poses of the gripping device 150 and the corresponding stage assembly 1111, and output a second pose collecting signal to the first industrial control device 140.
Accordingly, the first industrial control device 140 may output a second grab signal to the grab device 150 when determining that the relative pose of the respective stage assembly 1111 and the grab device 150 is consistent with the pre-stored pose information based on the second pose acquisition signal; the grasping device may also grasp the material on the corresponding stage assembly 1111 in response to the second grasping signal.
Therefore, the relative poses of the grabbing device and the corresponding carrier assembly are collected through the second collecting device, and the poses of the grabbing device and the corresponding carrier assembly are consistent with the prestored pose information, so that the grabbing device can grab materials from the corresponding carrier assembly, the continuity of the material transportation process is improved, and the production efficiency is further improved.
Through the mode, the relative pose of the grabbing device and the corresponding carrier assembly can be further determined on the basis of determining the relative pose of the bearing module and the grabbing device, namely the grabbing device is determined to grab the material from the carrier assembly. In the actual processing process, the inventor finds that if the grabbing device directly transports the grabbed materials to the processing device, the actual placing direction of the materials often has a large difference with the actual demand, the materials are not easy to be directly placed into the processing device, and therefore the pose of the materials can be adjusted before the materials are placed into the corresponding processing device.
Specifically, with continued reference to fig. 1, the material transporting apparatus M may further include a third collecting device 160, a second industrial control device 170 and a posture adjusting device 180, which are disposed on the fixing device 100, wherein:
the grasping means 150 may grasp the material based on the first grasping signal and place it on the pose adjustment means 180; after the pose of the material is adjusted, grabbing the material and placing the material on corresponding processing equipment (not shown in figure 1);
the third collecting device 160 is electrically connected with the second industrial control device 170, and is adapted to collect the pose of the material a and output a second pose collecting signal to the second industrial control device 170;
the second industrial control device 170 is electrically connected to the pose adjusting module 180, and is adapted to determine whether the pose of the corresponding material a is consistent with the pose information of the pre-stored material a based on the second pose acquisition signal, and output a pose adjusting signal to the pose adjusting device 180 when the pose of the corresponding material a is inconsistent with the pose information of the pre-stored material a;
the pose adjusting device 180 is placed along a preset path and is adapted to respond to the pose adjusting signal and drive the material a to move so as to adjust the pose of the material a.
Specifically, the third collecting device 160 may collect the geometric center of the material and the pose of the preset identification point on the pose adjusting device 180, and generate a corresponding second pose collecting signal, and the second industrial control device 170 may determine whether the two are aligned based on the second pose collecting signal, and if so, the material is directly grabbed by the grabbing device, and is placed on the corresponding processing equipment; if the materials are not aligned (namely, the pose of the material a is inconsistent with the pre-stored pose information of the material a), according to the difference between the two, determining the parameters (such as the moving direction, the moving distance and the like) for driving the material a to move by the pose adjusting device 180, so that the pose of the material a is consistent with the pre-stored pose information of the material a, and grabbing the material by the grabbing device 150 and placing the material on the corresponding processing equipment.
In specific implementation, when the processing equipment finishes processing the material, the subsequent production process may detect the material or transfer the material to the next processing procedure, and in the process, the processed material needs to be placed on the carrier assembly again, and the transfer of different processing procedures of the material is realized through the carrier assembly.
In some embodiments of the present disclosure, the processing equipment may output a corresponding processing completion signal to the first industrial control device when the material processing is completed. Correspondingly, the first industrial control device can also respond to the machining completion signal and output a corresponding third grabbing signal to the grabbing device; the grabbing device is further adapted to place the material on a corresponding stage assembly based on the third grabbing signal.
In some embodiments of the present disclosure, as shown in FIG. 1, the first industrial control device and the second industrial control device are located at different locations on the fixture. In specific implementation, in order to reduce the volume of the whole material transportation equipment and save the system cost, the first industrial control device and the second industrial control device can be integrated and designed into one industrial control device or equipment, namely, on one hand, the industrial control device is used for judging whether the relative poses of the corresponding bearing module and the gripping device are consistent with the prestored pose information so as to control the gripping device to grip the material; and on the other hand, the first industrial control device and the second industrial control device can share some common functional modules, such as functional modules for a data processing part, through integration, so as to judge whether the pose of the material is consistent with the pre-stored pose information of the material, so as to adjust the pose of the material.
In some embodiments of the present disclosure, the first industrial control device and the second industrial control device may be industrial control machines. In other embodiments, the first industrial control device and the second industrial control device may be implemented by a Processing chip such as a Central Processing Unit (CPU), a Field Programmable Gate Array (FPGA), or an Application Specific Integrated Circuit (ASIC), or one or more Integrated circuits configured to implement the embodiments of the present invention.
In specific implementation, the first industrial control device and the second industrial control device may use a general-purpose computer device to perform data communication and data operation with the first acquisition device, the second acquisition device, the third acquisition device, and other acquisition devices. The process of acquiring data and the process of comparing by the computer device may be performed by any means known or used in the art.
In the embodiments of the present disclosure, the first collecting device, the second collecting device, and the third collecting device may be implemented in various ways, and as some optional examples, the first collecting device, the second collecting device, and the third collecting device may be sensors. In other embodiments, the first collecting device, the second collecting device, and the third collecting device may also be cameras, which monitor the pose relationship between the carrying module and the grasping device in real time, or other devices with a camera function, such as a tablet, a mobile phone, and the like.
In specific implementation, for different application scenarios, fixing devices with different structures and compositions can be adopted to fix the bearing device, the lifting device, the first acquisition device, the first industrial control device and the gripping device.
Referring to fig. 4, with reference to fig. 1, a schematic structural diagram of relative positions of a fixing device, a lifting device and a gripping device in an embodiment of the present disclosure shown in fig. 4, as shown in fig. 4, the fixing device 100 may include: the lifting device comprises a frame structure 101, a mounting plate 102 and a lifting device fixing part 103, wherein the mounting plate 102 is located on the frame structure 101, and the lifting device fixing part 103 is arranged on the inner side of the mounting plate 102.
The lifting device can be fixed to the fixing device 100 by the lifting device fixing portion 103. As a specific example, the lifting device fixing part may include a fixing part in the form of a mounting groove, a mounting post, or the like.
In a specific implementation, as shown in fig. 1 and 4, the overall shape of the fixing device 100 is a square structure, and in other embodiments, the fixing device 100 may have other shapes as long as it can support and fix.
Accordingly, with continued reference to fig. 4, the lifting device (not shown in fig. 4) may include: a rail module 121 fixed to the lifting device fixing part 102, for providing a moving path of the carrier module; the driving module 122 is located at the bottom of the frame structure 101, is respectively connected to the industrial control device and the carrying module, and is configured to provide a driving force for the carrying module to drive the carrying module to move; and the limiting module 123 is fixed on the mounting plate 102 and used for limiting the moving distance of the bearing module.
Specifically, when the lifting device responds to the first displacement control signal, the driving module 122 generates a corresponding driving force, and drives the carrying module to move up and down along the moving path provided by the guide rail module 121 along the preset direction, and when responding to the second displacement control signal, the driving module 122 stops working, and stops driving the carrying device to move under the action of the limiting module 123, so as to limit the further movement of the carrying device.
With continued reference to fig. 4, the drive module 122 includes a drive assembly 1221 and a transmission assembly 1222, wherein: the first end of the driving assembly 1221 is electrically connected to the industrial control device, and the second end of the driving assembly 1221 is connected to the first end of the transmission assembly, and is configured to provide a driving force for the carrier module; the second end of the transmission assembly 1222 is connected to the carrying module, and is used for transmitting the driving force to the carrying module to drive the carrying module to move.
In a specific implementation, when the lifting device receives the first displacement control signal, the driving assembly 1221 may generate a corresponding driving force according to the first displacement control signal, and transmit the driving force to the carrying module through the transmission assembly 1222, and the carrying module may move along the moving path provided by the guide rail module.
In some embodiments of the present description, the drive assembly may be a sprocket reduction assembly, a pulley reduction assembly, or the like.
In some embodiments of the present disclosure, the driving assembly may be a stepping motor, and the stepping motor has good control performance and a large rotation speed adjustment range, so that the stability of the carrying device during the movement process can be improved. In other embodiments, the drive assembly may also be other power devices, such as an electric motor.
In a specific implementation, if the driving force generated by the driving assembly is small, the driving assembly can be directly connected with the bearing device.
It should be noted that "small" described in the embodiments of the present specification is merely used to describe a comparison relationship of relative driving force magnitudes, and does not limit the magnitude of the driving force.
With continued reference to fig. 4, the rail module 121 includes: a lifting assembly 1211 for receiving the carrying module; and a rail assembly 1212 disposed on the mounting plate 102 and connected to the lifting assembly 1211 for providing a moving path of the carrier module.
Specifically, when the driving force generated by the driving assembly is transmitted to the carriage device, the carriage modules located on the lifting assembly 1211 can move up and down along the moving path provided by the rail assembly 1212, so that the postures of the respective carriage modules and the grasping mechanisms reach the prestored postures.
With reference to fig. 4, as can be seen from fig. 4, in the embodiment of the present disclosure, the guide assembly 1212 is engaged with the lifting device fixing portion 103, and the fixing device and the carrying device are fixedly connected by the cooperation between the two.
It will be appreciated that the above-described configuration of the rail modules is merely illustrative. In the embodiment of the present specification, the guide rail assembly is a square, but in other embodiments, the guide rail assembly may have other shapes, such as a cylindrical shape. The embodiments of the present disclosure do not limit the specific structure of the rail module, as long as the rail module can be engaged with the fixing portion of the lifting device and provide a path for the movement of the carrying device.
With continued reference to fig. 4, the limiting module 123 includes a limiting installation component 1231 fixed on the installation plate 102 and a limiting component 1232 disposed above the limiting installation component 1231, wherein the limiting component 1232 is used for limiting the moving distance of the carrying module.
In a specific implementation, the limiting component can be a block structure.
In the actual operation process, the gripping device can adopt multiple modes to grip the materials. As a specific example, the gripping device can directly pick and place the material, and can also absorb the material. In some embodiments of the present disclosure, the grasping device is used for directly taking and placing the material.
With continued reference to fig. 4, the grasping apparatus 150 may include a mounting module 151, a support post 152, a rotation module 153, and a grasping module 154, wherein the mounting module 151 is located on the frame structure 101; the supporting column 152 is located on the mounting module 151; the rotating module 153, one end of which is rotatably connected with the support; and a grabbing module 154, one end of which is connected with the other end of the rotating module 153, and the other end of which can clamp the material.
Continuing with fig. 4, the grabbing module 154 may include: a first gripper assembly 1541 and a second gripper assembly 1542 arranged in parallel. When the grabbing device 150 responds to the first grabbing signal output by the first industrial control device, the rotating module 153 may expand and rotate around the supporting module 152, so as to drive the grabbing module 154 to move, and when the grabbing module 154 moves to the corresponding stage assembly, the first grabbing assembly 1541 and the second grabbing assembly 1542 may respectively move to the lower side of the corresponding material, so as to pick and place the material in the clamping stage assembly, and transfer the material to the processing equipment or the processing equipment.
It can be understood that, based on actual requirements, the grabbing module can be provided with a plurality of grabbing components to improve the quantity of the materials taken and placed simultaneously.
As a specific example, as shown in fig. 4, the first and second gripper modules may be grippers.
In a specific implementation, if the distance between the carrying device and the gripping device is relatively long, which results in that the gripping device cannot grip the material, referring to fig. 4, the rotating module 153 may include at least two rotatable rotating arms, wherein at least one rotating arm performs a circular motion with the supporting column as a center of circle, and at least one rotating arm is used for extending to increase a moving range of the gripping device.
In practical applications, the carrier assembly may contain materials of multiple processing devices, so that the material transportation device needs to be placed in different processing equipment, and for moving convenience, with reference to fig. 4, the fixing device 100 may further include a rotatable assembly 104 mounted at the bottom of the frame structure 101 to enable the fixing device 100 to move horizontally.
In implementations, the rotatable component may be a roller or a universal wheel. As a specific example, with continued reference to fig. 4, it may be mounted below the four corners of the bottom of the frame structure 101, respectively, such that the fixture is able to move in various directions.
In a specific implementation, the rotatable assembly may be mounted on the frame structure by a rotating assembly mounting assembly.
As mentioned above, the carrying device may include multiple layers of carrying modules, and during the up-and-down movement of the carrying device, if the interval between adjacent carrying modules is large, the corresponding movement stroke of each carrying module is correspondingly too long. In the process, the connecting lines among the devices or the components may be twisted together, or the connecting lines of the device are connected to other devices, so that the connecting lines are disconnected, and the transportation process of the material is affected.
It should be understood that the above description of the material transportation apparatus is only illustrative, and in practical applications, a person skilled in the art may adaptively select and/or modify the structures and connection relationships of the fixing device, the carrying device, the lifting device, the first collecting device, the first industrial control device, and the gripping device according to actual requirements and application scenarios. So that further embodiments can be extended, and the examples of this specification do not limit these extensions.
In a specific implementation, the material transportation apparatus in any of the above embodiments may be applied to a material processing system and other apparatuses that need to process materials, and an application example in the material processing system is given below.
Embodiments of the present specification further provide a material processing system, and in an embodiment of the present specification, a material transportation system may include the material transportation apparatus and the processing apparatus described in any of the foregoing embodiments, where: the material transporting equipment is suitable for transporting materials to the processing equipment; the processing equipment is suitable for processing the material.
Specifically, when the material transportation equipment transports the material to the processing equipment, the processing equipment can carry out corresponding processing treatment on the material.
The specific structure of the material transportation device and the working principle thereof can be introduced with reference to the foregoing embodiments, and will not be described herein
In an implementation, in a mechanical manufacturing scenario related to a semiconductor, the processing equipment may be a lithography machine or an etching machine, accordingly, the material may be a wafer, and the wafer may be placed in a basket, and the wafer may be transferred between different processing equipment through the material transportation equipment.
It should be noted that, in the description of the present specification, the terms "first", "second", "third", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined by terms such as "first," "second," "third," etc., may explicitly or implicitly include one or more of the feature. Moreover, the terms "first," "second," "third," and the like are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the specification described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected by one skilled in the art without departing from the spirit and scope of the embodiments of the invention as defined in the appended claims.
Claims (15)
1. A material transport apparatus, comprising: fixing device and set up in last device, elevating gear, the first collection system, the industrial control device and the grabbing device of bearing of fixing device, wherein:
the bearing device comprises a plurality of layers of bearing modules, each layer of bearing module comprises a plurality of carrier assemblies with different sizes, and each carrier assembly is suitable for placing materials with corresponding sizes;
the lifting device is movably connected with the bearing device and is suitable for responding to a first displacement control signal output by the first industrial control device to drive the bearing device to move up and down; and in response to a second displacement control signal output by the first industrial control device, stopping driving the bearing device to move;
the first acquisition device is arranged on the lifting device, is electrically connected with the first industrial control device, is suitable for acquiring the pose relation between the corresponding bearing module and the gripping device in the moving process of the bearing device, and outputs a first pose acquisition signal to the first industrial control device;
the first industrial control device is respectively electrically connected with each bearing module, the lifting device and the grabbing device, is suitable for acquiring signals based on the first position and posture, and outputs a first displacement control signal to the lifting device to drive the bearing devices to move up and down when the relative position and posture of the corresponding bearing module and the grabbing device are determined to be inconsistent with the prestored position and posture information; when the relative pose of the corresponding bearing module and the grabbing device is determined to be consistent with the prestored pose information, outputting a second displacement control signal to control the lifting device to stop driving the bearing device to move, and outputting a corresponding first grabbing signal to the grabbing device;
the grabbing device is suitable for responding to the first grabbing signal and grabbing the material.
2. The material transport apparatus of claim 1, wherein each layer of carrier modules comprises a plurality of sizes of stage assemblies or different layers of carrier modules comprise different sizes of stage assemblies.
3. The material transport apparatus of claim 2, further comprising: the second acquisition device is arranged on the fixing device, is electrically connected with the first industrial control device, is suitable for acquiring the relative pose of the gripping device and the corresponding carrier platform assembly, and outputs a second pose acquisition signal to the first industrial control device;
the first industrial control device is further adapted to output a second grabbing signal to the grabbing device when determining that the relative poses of the corresponding stage assembly and the grabbing device are consistent with the prestored pose information based on the second pose acquisition signal;
the grabbing device is further adapted to grab the material on the corresponding stage assembly in response to the second grabbing signal.
4. A material transport apparatus as claimed in any one of claims 1 to 3, further comprising: the third acquisition device, the second industrial control device and the pose adjusting device are arranged on the fixing device;
the grabbing device is suitable for grabbing the material based on the first grabbing signal and placing the material on the pose adjusting device; and after the pose of the material is adjusted, grabbing the material and placing the material in corresponding processing equipment, wherein:
the third acquisition device is electrically connected with the second industrial control device, is suitable for acquiring the pose of the material and outputting a second pose acquisition signal to the second industrial control device;
the second industrial control device is electrically connected with the pose adjusting module and is suitable for determining whether the pose of the corresponding material is consistent with the pose information of the prestored material based on the second pose acquisition signal and outputting a pose adjusting signal to the pose adjusting device when the pose of the corresponding material is inconsistent with the pose information of the prestored material;
the pose adjusting device is placed along a preset path and is suitable for responding to the pose adjusting signal and driving the material to move so as to adjust the pose of the material.
5. The material transport apparatus of claim 4, wherein the processing apparatus is adapted to output a corresponding process complete signal to the first industrial control device upon completion of the material processing;
the first industrial control device is also suitable for responding to the machining completion signal and outputting a corresponding third grabbing signal to the grabbing device;
the grabbing device is further adapted to place the material on a corresponding stage assembly based on the third grabbing signal.
6. A material transport apparatus as claimed in any one of claims 1 to 3, wherein the load bearing means comprises:
a fixed frame movably connected with the fixing device and comprising a multi-layer supporting structure;
the multilayer bears the weight of the module and sets up respectively on the bearing structure of corresponding layer, and every layer bears the weight of the module and includes: the device comprises a carrier plate and a carrying platform assembly positioned on the carrier plate.
7. A material transport apparatus as claimed in any one of claims 1 to 3, wherein the securing means comprises:
a frame structure;
a mounting plate located on the frame structure;
and the lifting device fixing part is arranged on the inner side of the mounting plate.
8. The material transport apparatus of claim 7, wherein the lifting device comprises:
the guide rail module is fixed on the lifting device fixing part and used for providing a moving path of the bearing module;
the driving module is positioned at the bottom of the frame structure, is respectively connected with the industrial control device and the bearing module, and is used for providing driving force for the bearing module so as to drive the bearing module to move;
and the limiting module is fixed on the mounting plate and used for limiting the moving distance of the bearing module.
9. The material transport apparatus of claim 8, wherein the drive module comprises a drive assembly and a transmission assembly, wherein:
the first end of the driving component is electrically connected with the industrial control device, and the second end of the driving component is connected with the first end of the transmission component and used for providing driving force for the bearing module;
and the second end of the transmission component is connected with the bearing module and is used for transmitting the driving force to the bearing module so as to drive the bearing module to move.
10. The material transport apparatus of claim 8, wherein the rail module comprises:
the lifting assembly is used for bearing the bearing module;
and the guide rail assembly is arranged on the mounting plate, is connected with the lifting assembly and is used for providing a moving path of the bearing module.
11. The material transportation apparatus of claim 8, wherein the position limiting module comprises a position limiting mounting assembly fixed on the mounting plate and a position limiting assembly arranged on the position limiting mounting assembly, and the position limiting assembly is used for limiting the moving distance of the bearing module.
12. The material transport apparatus of claim 7, wherein the securing device further comprises:
and the rotatable assembly is arranged at the bottom of the frame structure and enables the fixing device to horizontally move.
13. The material transport apparatus of claim 7, wherein the gripping device comprises:
a mounting module located on the frame structure;
the supporting column is positioned on the mounting module;
one end of the rotating module is rotatably connected with the supporting column;
and one end of the grabbing module is connected with the other end of the rotating module, and the other end of the grabbing module can take and place the materials.
14. The material transport apparatus of claim 13, wherein the grasping module comprises: the first grabbing component and the second grabbing component are arranged in parallel.
15. A material processing system, comprising:
the material transport apparatus of any one of claims 1 to 14 adapted to transport material to a processing apparatus;
the processing equipment is suitable for processing the material.
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| CN202210742115.2A CN114988097A (en) | 2022-06-28 | 2022-06-28 | Material transportation equipment and processing system |
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| CN115241106A (en) * | 2022-08-03 | 2022-10-25 | 魅杰光电科技(上海)有限公司 | Wafer station lifting machine |
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