CN105185736B - A kind of full-automatic quartz boat charging ＆ discharging machine - Google Patents
A kind of full-automatic quartz boat charging ＆ discharging machine Download PDFInfo
- Publication number
- CN105185736B CN105185736B CN201510513024.1A CN201510513024A CN105185736B CN 105185736 B CN105185736 B CN 105185736B CN 201510513024 A CN201510513024 A CN 201510513024A CN 105185736 B CN105185736 B CN 105185736B
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- China
- Prior art keywords
- quartz boat
- basket tool
- basket
- sucker
- full
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Specific Conveyance Elements (AREA)
Abstract
The invention discloses a kind of full-automatic quartz boat charging ＆ discharging machine,Including frame,Capture moving assembly,Quartz boat carrier slipway mechanism,Basket has belt conveyor line and man-machine interface,Crawl moving assembly includes Double-sucker component,Sucker left/right movement device and sucker reciprocating mechanism,Quartz boat carrier slipway mechanism includes a quartz boat carrier,Quartz boat silicon chip means for correcting is provided with quartz boat carrier,Quartz boat carrier slipway mechanism bottom is provided with quartz boat fluctuating plate supporting spring mechanism,The bottom of basket tool belt conveyor line is provided with basket tool fluctuating plate supporting spring mechanism,Basket tool and guiding device are provided with basket tool belt conveyor line simultaneously,Basket tool silicon chip means for correcting is provided with basket tool,Silicon chip is adsorbed using vacuum cup,Loading and unloading can be carried out to a large amount of silicon chips simultaneously every time,Improve operating efficiency,Reduce the high percentage of damage caused by artificial inserted sheet simultaneously,The full-automatic quartz boat charging ＆ discharging machine can be carried out multiple operation simultaneously,Cost of labor is saved.
Description
Technical field
The present invention relates to a kind of solar cell manufacturing equipment, and in particular to a kind of full-automatic quartz boat charging ＆ discharging machine.
Background technology
At present in solar cell manufacturing process, include multiple processes, such as Wafer Cleaning, making herbs into wool, diffusion, above-mentioned
Process in be required for by silicon chip be fitted into basket tool in and quartz boat in mutually replace.In the prior art, all custom uses people
The mode of work inserted sheet operates, and the problems such as fragment rate is high, the pollution to silicon chip is big, efficiency is low easily occurs in which.
The content of the invention
(1) technical problems to be solved
In order to overcome prior art insufficient, it is proposed that quartz boat and basket tool can mutually be replaced load, work by one kind automatically
Efficiency high, automaticity are high, reduce the full-automatic quartz boat charging ＆ discharging machine of fragment rate.
(2) technical scheme
The present invention's is achieved through the following technical solutions：The present invention proposes a kind of full-automatic quartz boat charging ＆ discharging machine, bag
Including rack, crawl moving assembly, quartz boat carrier slipway mechanism, basket tool belt conveyor line and man-machine interface, the crawl move
Dynamic component includes Double-sucker component, sucker left/right movement device and sucker reciprocating mechanism, the quartz boat carrier slide unit
Mechanism includes a quartz boat carrier, and quartz boat silicon chip means for correcting, the quartz boat are provided with the quartz boat carrier
Carrier slipway mechanism bottom is provided with quartz boat fluctuating plate supporting spring mechanism, and the bottom of the basket tool belt conveyor line is provided with basket tool
Fluctuating plate supporting spring mechanism, while basket tool and guiding device are provided with basket tool belt conveyor line, it is provided with the basket tool
Basket has silicon chip means for correcting.
As an improvement the quartz boat carrier slipway mechanism and basket tool belt conveyor line are provided with localization machine
Structure, the detent mechanism include multiple cylinders and detection sensor.
As a further improvement, the basket tool belt conveyor line includes three sections of belt lines, every section passes through servomotor list
Solely control.
As a further improvement, one group of basket tool detection sensor is provided with every section of belt line.
As a further improvement, the Double-sucker component is connected with vacuum system, the Suction cup assembly includes two back ofs the body
The sucker group that backrest individually controls.
(3) beneficial effect
The present invention has the advantages that relative to prior art：
A kind of full-automatic quartz boat charging ＆ discharging machine that the present invention mentions, it is used full-automatic mechanical operation, inhaled using vacuum
Disk adsorbs silicon chip, can carry out loading and unloading to a large amount of silicon chips simultaneously every time, improve loading and unloading operating efficiency, while reduce because of people
High percentage of damage caused by work inserted sheet, the full-automatic quartz boat charging ＆ discharging machine can be carried out multiple operation simultaneously, saved artificial
Cost, it is adapted to use of large-scale production.
Brief description of the drawings
Fig. 1 is schematic structural view of the invention.
Fig. 2 is elastic holder skeleton schematic diagram.
Fig. 3 is elastic holder structural representation.
Fig. 4 is public pullover structural representation.
1- frames；2- captures moving assembly；3- quartz boat carrier slipway mechanisms；4- baskets have belt conveyor line；The man-machine boundaries of 5-
Face；6- detent mechanisms；21- Double-sucker components；22- sucker left/right movement devices；23- sucker reciprocating mechanisms；31- quartz boats
Silicon chip means for correcting；32- quartz boat fluctuating plate supporting springs mechanism；41- baskets tool fluctuating plate supporting spring mechanism；42- baskets have and guiding device；
43- baskets have silicon chip means for correcting.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
A kind of full-automatic quartz boat charging ＆ discharging machine as shown in Figures 1 to 4, including frame 1, crawl moving assembly 2, quartz
Boat carrier slipway mechanism 3, basket tool belt conveyor line 4 and man-machine interface 5, the crawl moving assembly 2 include Double-sucker component
21st, sucker left/right movement device 22 and sucker reciprocating mechanism 23, the quartz boat carrier slipway mechanism 3 include a stone
English boat carrier, quartz boat silicon chip means for correcting 31, the quartz boat carrier slipway mechanism 3 are provided with the quartz boat carrier
Bottom is provided with quartz boat fluctuating plate supporting spring mechanism 32, and the bottom of the basket tool belt conveyor line 4 is provided with basket tool fluctuating plate support
Piece mechanism 41, while basket tool and guiding device 42 are provided with basket tool belt conveyor line 4, it is provided with basket tool in the basket tool
Silicon chip means for correcting 43.
Wherein, quartz boat carrier slipway mechanism 3 and basket the tool belt conveyor line 4 is provided with detent mechanism 6, described
Detent mechanism includes multiple cylinders and detection sensor；The basket tool belt conveyor line 4 includes three sections of belt lines, and every section logical
Servomotor is crossed individually to control；One group of basket tool detection sensor is provided with every section of belt line, for detecting whether basket tool arrives
Up to specified location, acted to next step and a signal is provided；The Double-sucker component 21 is connected with vacuum system, the sucker group
Part 21 includes two sucker groups individually controlled back-to-back.
A kind of full-automatic quartz boat charging ＆ discharging machine that embodiments above is mentioned, it is when specifically used, with 100 silicon
Exemplified by piece：
During blanking, the quartz boat for being fully loaded with 100 silicon chips is put into quartz boat carrier slide unit by way of artificial loading
In mechanism 3, after detent mechanism positioning, the lower section of crawl moving assembly 2 is sent to by servomotor, at the same time manually sky
Basket tool is put at the basket tool first paragraph belt conveyor line of belt conveyor line 4, and being sent to basket by conveyer belt has belt conveyor line 4 second
Section pipeline, basket tool detent mechanism 6 position.Subsequent Double-sucker component 21 is run to above quartz boat, is driven by servomotor
Sucker reciprocating mechanism 23, after dropping to setting position, the vacuum system of Suction cup assembly 21 is started working, and draws silicon chip.Sucker
After component 21 rises to setting position, basket is run to by sucker left/right movement device 22 and has the conveying of the second segment of belt conveyor line 4
The setting position of line basket tool top, begins to decline, and declines process middle basket tool silicon chip means for correcting 43, basket tool fluctuating plate supporting spring mechanism
41 are started working, and silicon chip is put on basket tool, setting height is risen to after vacuum breaker.Full basket basket tool has Belt Conveying by basket again
The 3rd section of pipeline of line 4, full basket silicon chip is exported.Such circulation work.
Suction cup assembly 21 includes two sucker groups, and the back-to-back silicon chip per lattice is held by two suckers, holds latter two suction
Disk servo is risen simultaneously, and silicon chip is taken out out of quartz boat, and latter two right sucker group separates in overhead, then in each sucker group
There are 50 silicon chips, and two groups of 50 silicon chips are oppositely arranged, latter two right sucker group is each moved to the top of plastic basket tool, moves
Moving the sucker group directly over basket tool and silicon chip is slowly placed in the upper edge of basket tool, left and right fork closes up, and makes the groove of silicon chip alignment basket tool,
Then sucker group continues to decline, and silicon chip has into basket, and the basket tool fluctuating plate supporting spring mechanism 41 of basket tool lower section, which rises, catches silicon chip, so
Posterior sucker group discharges vacuum, and silicon chip falls in basket tool fluctuating plate supporting spring mechanism 41, and basket tool fluctuating plate supporting spring mechanism 41 slowly declines,
Until silicon chip is fallen within basket tool completely.So far, the process for having silicon chip importing plastic basket from quartz boat is completed, leads the modeling of full silicon chip
Material basket has communicated band and is delivered to basket tool the 3rd section of belt of belt conveyor line 4, treats manually to take away.Circulate according to this, 100 lattice quartz boats
Interior silicon chip all takes out then to be filled by 4 basket tools altogether.
Feeding scheme is with blanking scheme on the contrary, when it is implemented, will pass through Suction cup assembly out of basket tool per 50 silicon chips of basket
21 two sucker groups are drawn respectively, until during sucker group to quartz boat carrier 3 top of slipway mechanism, sucker combination is held together, two group 50
Piece silicon chip closes up 100 silicon chips put in back-to-back form interval, and Suction cup assembly 21 is begun to decline, during decline, quartz
Boat silicon chip means for correcting 31, quartz boat fluctuating plate supporting spring mechanism 32 are started working, and silicon chip is put into quartz boat, complete feeding
Process.
The above-described embodiments are merely illustrative of preferred embodiments of the present invention, not to the structure of the present invention
Think and scope is defined.On the premise of design concept of the present invention is not departed from, technology of the ordinary people in the field to the present invention
The all variations and modifications that scheme is made, all should drop into protection scope of the present invention, the claimed technology contents of the present invention,
All record in detail in the claims.
Claims (4)
1. a kind of full-automatic quartz boat charging ＆ discharging machine, including frame (1), crawl moving assembly (2), quartz boat carrier slipway mechanism
(3), basket tool belt conveyor line (4) and man-machine interface (5), it is characterised in that：The crawl moving assembly (2) includes Double-sucker
Component (21), sucker left/right movement device (22) and sucker reciprocating mechanism (23), the quartz boat carrier slipway mechanism
(3) include a quartz boat carrier, quartz boat silicon chip means for correcting (31), the quartz are provided with the quartz boat carrier
Boat carrier slipway mechanism (3) bottom is provided with quartz boat fluctuating plate supporting spring mechanism (32), the bottom of the basket tool belt conveyor line (4)
Portion is provided with basket tool fluctuating plate supporting spring mechanism (41), while basket tool and guiding dress are provided with basket tool belt conveyor line (4)
Put (42), basket tool silicon chip means for correcting (43), the quartz boat carrier slipway mechanism (3) and basket tool are provided with the basket tool
Belt conveyor line (4) is provided with detent mechanism (6), and the detent mechanism includes multiple cylinders and detection sensor.
A kind of 2. full-automatic quartz boat charging ＆ discharging machine according to claim 1, it is characterised in that：The basket has Belt Conveying
Line (4) includes three sections of belt lines, and every section is individually controlled by servomotor.
A kind of 3. full-automatic quartz boat charging ＆ discharging machine according to claim 2, it is characterised in that：It is all provided with every section of belt line
It is equipped with one group of basket tool detection sensor.
A kind of 4. full-automatic quartz boat charging ＆ discharging machine according to claim 1, it is characterised in that：The Double-sucker component
(21) vacuum system is connected with, the Suction cup assembly (21) includes two sucker groups individually controlled back-to-back.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510513024.1A CN105185736B (en) | 2015-08-20 | 2015-08-20 | A kind of full-automatic quartz boat charging ＆ discharging machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510513024.1A CN105185736B (en) | 2015-08-20 | 2015-08-20 | A kind of full-automatic quartz boat charging ＆ discharging machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105185736A CN105185736A (en) | 2015-12-23 |
| CN105185736B true CN105185736B (en) | 2018-01-23 |
Family
ID=54907728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510513024.1A Expired - Fee Related CN105185736B (en) | 2015-08-20 | 2015-08-20 | A kind of full-automatic quartz boat charging ＆ discharging machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105185736B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106129184B (en) * | 2016-08-23 | 2018-05-25 | 昊诚光电（太仓）有限公司 | A kind of PE spreads automatic loading and unloading device |
| CN107204390A (en) * | 2017-07-12 | 2017-09-26 | 无锡市瑞能科技有限公司 | Semi-automatic quartz boat guide card machine |
| CN107364719B (en) * | 2017-08-31 | 2023-05-05 | 东莞市李群自动化技术有限公司 | Glass piece material loading conveyor |
| CN109556411A (en) * | 2017-09-26 | 2019-04-02 | 天津环鑫科技发展有限公司 | Automatic furnace body feeding and discharging mechanism for silicon wafer production |
| CN108364854B (en) * | 2018-02-11 | 2023-01-17 | 无锡先导智能装备股份有限公司 | Method for unloading silicon wafers after quartz boat retreating in photovoltaic diffusion or annealing process |
| CN111668146A (en) * | 2020-06-23 | 2020-09-15 | 无锡市江松科技有限公司 | Automatic working line for loading and unloading wafers of horizontal silicon wafer quartz boat |
| CN113437003B (en) * | 2021-04-02 | 2022-04-01 | 科尔迅智能科技(深圳)有限公司 | High-speed sheet arranging machine |
| CN116504696B (en) * | 2023-06-29 | 2023-09-15 | 苏州诚拓智能装备有限公司 | PECVD transfer device and transfer method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201663151U (en) * | 2009-03-06 | 2010-12-01 | 东莞市启天自动化设备有限公司 | Full automatic silicon chip loading and unloading machine |
| CN202736892U (en) * | 2012-05-19 | 2013-02-13 | 东莞市启天自动化设备有限公司 | Silicon wafer feeding machine |
| CN202736891U (en) * | 2012-05-19 | 2013-02-13 | 东莞市启天自动化设备有限公司 | Silicon wafer unloading machine |
-
2015
- 2015-08-20 CN CN201510513024.1A patent/CN105185736B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201663151U (en) * | 2009-03-06 | 2010-12-01 | 东莞市启天自动化设备有限公司 | Full automatic silicon chip loading and unloading machine |
| CN202736892U (en) * | 2012-05-19 | 2013-02-13 | 东莞市启天自动化设备有限公司 | Silicon wafer feeding machine |
| CN202736891U (en) * | 2012-05-19 | 2013-02-13 | 东莞市启天自动化设备有限公司 | Silicon wafer unloading machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105185736A (en) | 2015-12-23 |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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| GR01 | Patent grant | ||
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| TR01 | Transfer of patent right |
Effective date of registration: 20200526 Address after: 523000 Room 101, building 2, No.1, Chibu Road, Zhangmutou town, Dongguan City, Guangdong Province Patentee after: GUANGDONG QITIAN AUTOMATIC INTELLIGENT EQUIPMENT Co.,Ltd. Address before: 523637, building 8, two bamboo street, Sassafras community, Zhangmutou town, Dongguan, Guangdong Patentee before: DONGGUAN QITIAN AUTOMATICAL EQUIPMENT Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180123 |
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| CF01 | Termination of patent right due to non-payment of annual fee |