CN105185736B - A kind of full-automatic quartz boat charging & discharging machine - Google Patents

A kind of full-automatic quartz boat charging & discharging machine Download PDF

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Publication number
CN105185736B
CN105185736B CN201510513024.1A CN201510513024A CN105185736B CN 105185736 B CN105185736 B CN 105185736B CN 201510513024 A CN201510513024 A CN 201510513024A CN 105185736 B CN105185736 B CN 105185736B
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quartz boat
basket
suction cup
belt conveyor
conveyor line
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CN105185736A (en
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梁明刚
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Guangdong Qitian Automatic Intelligent Equipment Co ltd
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Dongguan Qitian Automation Equipment Co Ltd
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    • H10P72/3412
    • H10P72/78
    • H10P72/70

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Abstract

本发明公开了一种全自动石英舟上下料机,包括机架、抓取移动组件、石英舟载具滑台机构、篮具皮带输送线以及人机界面,抓取移动组件包括双吸盘组件、吸盘左右移动机构以及吸盘上下移动机构,石英舟载具滑台机构包括有一石英舟载具,在石英舟载具内设置有石英舟硅片校正装置,石英舟载具滑台机构底部设置有石英舟上下片托片机构,篮具皮带输送线的底部设置有篮具上下片托片机构,同时篮具皮带输送线上设置有篮具及导引装置,篮具内设置有篮具硅片校正装置,采用真空吸盘吸附硅片,每次可同时对大量硅片进行上下料,提高了工作效率,同时降低了因人工插片而导致的高破碎率,该全自动石英舟上下料机可以将多工序同时进行,节约了人工成本。

The invention discloses a fully automatic quartz boat loading and unloading machine, which includes a frame, a grabbing and moving assembly, a quartz boat carrier slide mechanism, a basket belt conveyor line and a man-machine interface. The grabbing and moving assembly includes a double suction cup assembly, Suction cup left and right movement mechanism and suction cup up and down movement mechanism, the quartz boat carrier slide mechanism includes a quartz boat carrier, a quartz boat silicon wafer correction device is arranged in the quartz boat carrier, and a quartz boat carrier slide mechanism is provided at the bottom of the quartz boat carrier. The bottom of the basket belt conveyor line is equipped with a basket upper and lower piece support mechanism, and the basket belt conveyor line is equipped with a basket and a guide device, and the basket is equipped with a silicon chip correction device. The device adopts vacuum suction cups to absorb silicon wafers, and can load and unload a large number of silicon wafers at the same time, which improves work efficiency and reduces the high breakage rate caused by manual insertion. This automatic quartz boat loading and unloading machine can Multiple processes are carried out at the same time, saving labor costs.

Description

一种全自动石英舟上下料机A fully automatic quartz boat loading and unloading machine

技术领域technical field

本发明涉及一种太阳能电池制造设备,具体涉及一种全自动石英舟上下料机。The invention relates to a solar cell manufacturing equipment, in particular to a fully automatic quartz boat loading and unloading machine.

背景技术Background technique

目前太阳能电池制造过程中,包含有多个工序,如硅片清洗、制绒、扩散等,在上述的工序中都需要将硅片装入篮具中及石英舟中相互替换下来。现有技术中,都习惯采用人工插片的方式操作,该方式容易出现碎片率高、对硅片的污染大、效率低等问题。At present, the solar cell manufacturing process includes multiple processes, such as silicon wafer cleaning, texturing, diffusion, etc. In the above-mentioned processes, it is necessary to put the silicon wafers into baskets and replace them with each other in quartz boats. In the prior art, it is customary to use the method of manually inserting wafers, which is prone to problems such as high fragmentation rate, large pollution to silicon wafers, and low efficiency.

发明内容Contents of the invention

(一)要解决的技术问题(1) Technical problems to be solved

为了克服现有技术不足,现提出一种可自动将石英舟与篮具相互替换装片、工作效率高、自动化程度高、降低碎片率的全自动石英舟上下料机。In order to overcome the shortcomings of the existing technology, a fully automatic quartz boat loading and unloading machine is proposed which can automatically replace the quartz boat and the basket with each other, has high work efficiency, high degree of automation, and reduces the fragmentation rate.

(二)技术方案(2) Technical solutions

本发明的通过如下技术方案实现:本发明提出了一种全自动石英舟上下料机,包括机架、抓取移动组件、石英舟载具滑台机构、篮具皮带输送线以及人机界面,所述抓取移动组件包括双吸盘组件、吸盘左右移动机构以及吸盘上下移动机构,所述石英舟载具滑台机构包括有一石英舟载具,在所述石英舟载具内设置有石英舟硅片校正装置,所述石英舟载具滑台机构底部设置有石英舟上下片托片机构,所述篮具皮带输送线的底部设置有篮具上下片托片机构,同时所述篮具皮带输送线上设置有篮具及导引装置,所述篮具内设置有篮具硅片校正装置。The present invention is achieved through the following technical solutions: the present invention proposes a fully automatic quartz boat loading and unloading machine, including a frame, a grabbing and moving assembly, a quartz boat carrier slide mechanism, a basket belt conveyor line and a man-machine interface, The grabbing and moving assembly includes a double suction cup assembly, a suction cup left and right movement mechanism, and a suction cup up and down movement mechanism. The quartz boat carrier slide mechanism includes a quartz boat carrier, and a quartz boat silicon is arranged in the quartz boat carrier. A sheet correction device, the bottom of the quartz boat carrier slide mechanism is provided with a quartz boat upper and lower sheet support mechanism, the bottom of the basket belt conveyor line is provided with a basket upper and lower sheet support mechanism, and the basket belt conveys A basket and a guide device are arranged on the line, and a basket silicon chip correction device is arranged inside the basket.

作为一种改进,所述石英舟载具滑台机构以及篮具皮带输送线均设置有定位机构,所述定位机构包括有多个气缸及检测传感器。As an improvement, both the quartz boat carrier slide mechanism and the basket belt conveying line are provided with a positioning mechanism, and the positioning mechanism includes a plurality of cylinders and detection sensors.

作为进一步改进,所述篮具皮带输送线包括有三段皮带线,每段通过伺服电机单独控制。As a further improvement, the basket belt conveying line includes three sections of belt lines, and each section is individually controlled by a servo motor.

作为进一步改进,每段皮带线上均设置有一组篮具检测传感器。As a further improvement, each section of the belt line is provided with a group of basket detection sensors.

作为进一步改进,所述双吸盘组件连接有真空系统,所述吸盘组件包括有两个背靠背单独控制的吸盘组。As a further improvement, the double suction cup assembly is connected with a vacuum system, and the suction cup assembly includes two back-to-back independently controlled suction cup groups.

(三)有益效果(3) Beneficial effects

本发明相对于现有技术,具有以下有益效果:Compared with the prior art, the present invention has the following beneficial effects:

本发明提到的一种全自动石英舟上下料机,其采用全自动机械作业,采用真空吸盘吸附硅片,每次可同时对大量硅片进行上下料,提高了上下料工作效率,同时降低了因人工插片而导致的高破碎率,该全自动石英舟上下料机可以将多工序同时进行,节约了人工成本,适合大规模生产使用。A fully automatic quartz boat loading and unloading machine mentioned in the present invention adopts fully automatic mechanical operation, adopts vacuum suction cups to absorb silicon wafers, can simultaneously load and unload a large number of silicon wafers each time, improves the efficiency of loading and unloading work, and simultaneously reduces In order to avoid the high breakage rate caused by manual inserting, the automatic quartz boat loading and unloading machine can carry out multiple processes at the same time, saving labor costs, and is suitable for large-scale production.

附图说明Description of drawings

图1是本发明结构示意图。Fig. 1 is a schematic diagram of the structure of the present invention.

图2是弹力支架骨架示意图。Fig. 2 is a schematic diagram of the skeleton of the elastic support.

图3是弹力支架结构示意图。Fig. 3 is a schematic diagram of the structure of the elastic support.

图4是公套头结构示意图。Fig. 4 is a schematic diagram of the structure of the male socket.

1-机架;2-抓取移动组件;3-石英舟载具滑台机构;4-篮具皮带输送线;5-人机界面;6-定位机构;21-双吸盘组件;22-吸盘左右移动机构;23-吸盘上下移动机构;31-石英舟硅片校正装置;32-石英舟上下片托片机构;41-篮具上下片托片机构;42-篮具及导引装置;43-篮具硅片校正装置。1-frame; 2-grabbing and moving components; 3-quartz boat carrier slide mechanism; 4-basket belt conveyor line; 5-man-machine interface; 6-positioning mechanism; 21-double suction cup assembly; 22-suction cup Left and right movement mechanism; 23- suction cup up and down movement mechanism; 31-quartz boat silicon chip correction device; 32-quartz boat upper and lower plate support mechanism; 41-basket upper and lower plate support mechanism; 42-basket and guide device; 43 - Basket wafer alignment device.

具体实施方式detailed description

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

如图1至图4所示的一种全自动石英舟上下料机,包括机架1、抓取移动组件2、石英舟载具滑台机构3、篮具皮带输送线4以及人机界面5,所述抓取移动组件2包括双吸盘组件21、吸盘左右移动机构22以及吸盘上下移动机构23,所述石英舟载具滑台机构3包括有一石英舟载具,在所述石英舟载具内设置有石英舟硅片校正装置31,所述石英舟载具滑台机构3底部设置有石英舟上下片托片机构32,所述篮具皮带输送线4的底部设置有篮具上下片托片机构41,同时所述篮具皮带输送线4上设置有篮具及导引装置42,所述篮具内设置有篮具硅片校正装置43。A fully automatic quartz boat loading and unloading machine as shown in Figures 1 to 4, including a frame 1, a grabbing and moving assembly 2, a quartz boat carrier slide mechanism 3, a basket belt conveyor line 4, and a man-machine interface 5 , the grabbing and moving assembly 2 includes a double suction cup assembly 21, a suction cup left and right movement mechanism 22, and a suction cup up and down movement mechanism 23, and the quartz boat carrier slide mechanism 3 includes a quartz boat carrier, on which the quartz boat carrier A quartz boat silicon chip correction device 31 is provided inside, a quartz boat upper and lower sheet support mechanism 32 is provided at the bottom of the quartz boat carrier slide mechanism 3, and a basket upper and lower sheet support is provided at the bottom of the basket belt conveyor line 4. A chip mechanism 41, and a basket and a guide device 42 are provided on the basket belt conveying line 4, and a basket silicon chip correction device 43 is provided in the basket.

其中,所述石英舟载具滑台机构3以及篮具皮带输送线4均设置有定位机构6,所述定位机构包括有多个气缸及检测传感器;所述篮具皮带输送线4包括有三段皮带线,每段通过伺服电机单独控制;每段皮带线上均设置有一组篮具检测传感器,用于检测篮具是否到达指定位置,给下一步动作提供一个信号;所述双吸盘组件21连接有真空系统,所述吸盘组件21包括有两个背靠背单独控制的吸盘组。Wherein, the quartz boat carrier slide mechanism 3 and the basket belt conveying line 4 are all provided with a positioning mechanism 6, and the positioning mechanism includes a plurality of cylinders and detection sensors; the basket belt conveying line 4 includes three sections Each section of the belt line is individually controlled by a servo motor; each section of the belt line is provided with a group of basket detection sensors, which are used to detect whether the basket has reached the designated position and provide a signal for the next step; the double suction cup assembly 21 is connected to There is a vacuum system, and the suction cup assembly 21 includes two back-to-back independently controlled suction cup groups.

以上具体实施例提到的一种全自动石英舟上下料机,其在具体使用时,以100片硅片为例:A kind of full-automatic quartz boat loading and unloading machine mentioned in the above specific embodiments, when it is in specific use, take 100 silicon wafers as an example:

下料时,将满载100片硅片的石英舟通过人工上料的方式放入到石英舟载具滑台机构3上,定位机构定位以后,通过伺服电机传送到抓取移动组件2下方,与此同时人工把空篮具放到篮具皮带输送线4第一段皮带输送线处,通过输送带传送到篮具皮带输送线4第二段输送线,篮具定位机构6定位。随后双吸盘组件21运行到石英舟上方,通过伺服电机带动吸盘上下移动机构23,下降到设定位置后,吸盘组件21真空系统开始工作,吸取硅片。吸盘组件21上升到设定位置后,通过吸盘左右移动机构22运行到篮具皮带输送线4第二段输送线篮具上方的设定位置,开始下降,下降过程中篮具硅片校正装置43、篮具上下片托片机构41开始工作,把硅片放到篮具上,破真空后上升到设定高度。满篮篮具再通过篮具皮带输送线4第三段输送线,把满篮硅片导出。如此循环工作。When unloading, put the quartz boat full of 100 silicon wafers into the quartz boat carrier slide mechanism 3 by manual feeding, after the positioning mechanism is positioned, it is transferred to the grabbing and moving assembly 2 below by the servo motor, and At the same time, the empty basket is manually put into the basket belt conveyor line 4 first section belt conveyor line, and is delivered to the basket belt conveyor line 4 second section conveyor line by the conveyor belt, and the basket positioning mechanism 6 locates. Then the double suction cup assembly 21 moves to the top of the quartz boat, drives the suction cup up and down movement mechanism 23 through the servo motor, and after falling to the set position, the vacuum system of the suction cup assembly 21 starts to work to suck silicon wafers. After the suction cup assembly 21 rises to the set position, it moves to the set position above the basket on the second section of the basket belt conveyor line 4 through the suction cup left and right moving mechanism 22, and starts to descend. During the descent, the basket silicon chip correction device 43 , the upper and lower sheet support mechanism 41 of the basket starts to work, puts the silicon chip on the basket, and rises to the set height after breaking the vacuum. The full basket of baskets passes through the third section of the basket belt conveyor line 4 to export the full basket of silicon wafers. And so the cycle works.

吸盘组件21包括两个吸盘组,每格的背靠背硅片由两个吸盘吸住,吸住后两个吸盘伺服同时升起,将硅片从石英舟内取出,然后两个吸盘组在上空分开,则每个吸盘组上均有50片硅片,且两组的50片硅片反向设置,然后两个吸盘组各自移动到塑料篮具的上方,移动到篮具正上方的吸盘组将硅片慢慢置于篮具上沿,左右叉子合拢,使硅片对准篮具的槽,然后吸盘组继续下降,硅片进入篮具,篮具下方的篮具上下片托片机构41升起接住硅片,然后吸盘组释放真空,硅片落在篮具上下片托片机构41上,篮具上下片托片机构41慢慢下降,直到硅片完全落于篮具中。至此,完成从石英舟将硅片导入塑料篮具的过程,导满硅片的塑料篮具经传送带输送至篮具皮带输送线4第三段皮带,待人工取走。依此循环,100格石英舟内的硅片全部取出则共由4个篮具装满。The suction cup assembly 21 includes two suction cup groups, and the back-to-back silicon wafers of each grid are sucked by two suction cups. After being sucked, the two suction cup servos rise at the same time to take out the silicon wafer from the quartz boat, and then the two suction cup groups are separated in the sky. , then there are 50 silicon wafers on each suction cup group, and the 50 silicon wafers of the two groups are set in reverse, and then the two suction cup groups move to the top of the plastic basket, and the suction cup group that moves to the top of the basket will be The silicon wafer is slowly placed on the upper edge of the basket, the left and right forks are closed, so that the silicon wafer is aligned with the groove of the basket, and then the suction cup group continues to descend, and the silicon wafer enters the basket. Catch the silicon chip, then the suction cup group releases the vacuum, the silicon chip falls on the upper and lower sheet support mechanism 41 of the basket, and the upper and lower sheet support mechanism 41 of the basket slowly descends until the silicon chip falls in the basket completely. So far, the process of introducing the silicon wafers into the plastic basket from the quartz boat is completed, and the plastic basket full of silicon wafers is transported to the third section of the basket belt conveyor line 4 through the conveyor belt, to be manually taken away. According to this cycle, all the silicon wafers in the 100-grid quartz boat are taken out and then 4 baskets are filled up.

上料方案与下料方案相反,具体实施时,将每篮50片硅片从篮具内通过吸盘组件21两个吸盘组分别吸取,待到吸盘组至石英舟载具滑台机构3上方时,吸盘组合拢,两组50片硅片合拢呈背靠背形式间隔摆放的100片硅片,吸盘组件21开始下降,下降过程中,石英舟硅片校正装置31、石英舟上下片托片机构32开始工作,把硅片放入到石英舟内,完成上料过程。The feeding scheme is opposite to the unloading scheme. During specific implementation, each basket of 50 silicon wafers is sucked from the basket through the suction cup assembly 21 and the two suction cup groups, until the suction cup group reaches the top of the quartz boat carrier slide mechanism 3 , the suction cup assembly is closed, two groups of 50 silicon wafers are closed to form 100 silicon wafers placed back to back at intervals, the suction cup assembly 21 begins to descend, and during the descent process, the quartz boat silicon wafer correction device 31 and the quartz boat upper and lower wafer support mechanism 32 Start to work, put the silicon wafer into the quartz boat, and complete the loading process.

上面所述的实施例仅仅是对本发明的优选实施方式进行描述,并非对本发明的构思和范围进行限定。在不脱离本发明设计构思的前提下,本领域普通人员对本发明的技术方案做出的各种变型和改进,均应落入到本发明的保护范围,本发明请求保护的技术内容,已经全部记载在权利要求书中。The above-mentioned embodiments are only descriptions of preferred implementations of the present invention, and are not intended to limit the concept and scope of the present invention. Under the premise of not departing from the design concept of the present invention, various modifications and improvements made by ordinary persons in the art to the technical solution of the present invention shall fall within the scope of protection of the present invention, and the technical content claimed in the present invention has been fully described in the claims.

Claims (4)

1. a kind of full-automatic quartz boat charging & discharging machine, including frame (1), crawl moving assembly (2), quartz boat carrier slipway mechanism (3), basket tool belt conveyor line (4) and man-machine interface (5), it is characterised in that:The crawl moving assembly (2) includes Double-sucker Component (21), sucker left/right movement device (22) and sucker reciprocating mechanism (23), the quartz boat carrier slipway mechanism (3) include a quartz boat carrier, quartz boat silicon chip means for correcting (31), the quartz are provided with the quartz boat carrier Boat carrier slipway mechanism (3) bottom is provided with quartz boat fluctuating plate supporting spring mechanism (32), the bottom of the basket tool belt conveyor line (4) Portion is provided with basket tool fluctuating plate supporting spring mechanism (41), while basket tool and guiding dress are provided with basket tool belt conveyor line (4) Put (42), basket tool silicon chip means for correcting (43), the quartz boat carrier slipway mechanism (3) and basket tool are provided with the basket tool Belt conveyor line (4) is provided with detent mechanism (6), and the detent mechanism includes multiple cylinders and detection sensor.
A kind of 2. full-automatic quartz boat charging & discharging machine according to claim 1, it is characterised in that:The basket has Belt Conveying Line (4) includes three sections of belt lines, and every section is individually controlled by servomotor.
A kind of 3. full-automatic quartz boat charging & discharging machine according to claim 2, it is characterised in that:It is all provided with every section of belt line It is equipped with one group of basket tool detection sensor.
A kind of 4. full-automatic quartz boat charging & discharging machine according to claim 1, it is characterised in that:The Double-sucker component (21) vacuum system is connected with, the Suction cup assembly (21) includes two sucker groups individually controlled back-to-back.
CN201510513024.1A 2015-08-20 2015-08-20 A kind of full-automatic quartz boat charging & discharging machine Expired - Fee Related CN105185736B (en)

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CN107204390A (en) * 2017-07-12 2017-09-26 无锡市瑞能科技有限公司 Semi-automatic quartz boat guide card machine
CN107364719B (en) * 2017-08-31 2023-05-05 东莞市李群自动化技术有限公司 Glass piece material loading conveyor
CN109556411A (en) * 2017-09-26 2019-04-02 天津环鑫科技发展有限公司 Automatic furnace body feeding and discharging mechanism for silicon wafer production
CN108364854B (en) * 2018-02-11 2023-01-17 无锡先导智能装备股份有限公司 Method for loading and unloading silicon wafers after the quartz boat retreats in the photovoltaic diffusion or annealing process
CN111668146B (en) * 2020-06-23 2024-08-09 无锡江松科技股份有限公司 Automatic working line for loading and unloading horizontal silicon wafer quartz boat
CN111900121A (en) * 2020-09-15 2020-11-06 马鞍山荣泰科技有限公司 Automatic wafer loading equipment for quartz wafer production
CN113437003B (en) * 2021-04-02 2022-04-01 科尔迅智能科技(深圳)有限公司 High-speed sheet arranging machine
CN116504696B (en) * 2023-06-29 2023-09-15 苏州诚拓智能装备有限公司 PECVD transfer device and transfer method

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