CN104807832A - Automatic fine inspection production line of silicon ingot - Google Patents

Automatic fine inspection production line of silicon ingot Download PDF

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Publication number
CN104807832A
CN104807832A CN201510207553.9A CN201510207553A CN104807832A CN 104807832 A CN104807832 A CN 104807832A CN 201510207553 A CN201510207553 A CN 201510207553A CN 104807832 A CN104807832 A CN 104807832A
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China
Prior art keywords
silicon ingot
transport tape
robot
axis slide
production line
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Pending
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CN201510207553.9A
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Chinese (zh)
Inventor
张刚
乔永立
张庆龙
奚云飞
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HUST Wuxi Research Institute
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HUST Wuxi Research Institute
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Priority to CN201510207553.9A priority Critical patent/CN104807832A/en
Publication of CN104807832A publication Critical patent/CN104807832A/en
Pending legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

The invention discloses an automatic fine inspection production line of a silicon ingot, which sequentially comprises a charging area, an impurity detection working area, an appearance detection working area and a discharging area, wherein the charging area is provided with a charging robot for taking and placing the silicon ingot; the impurity detection working area is provided with a conveying belt, a rectangular coordinate robot and an infrared detection device; the appearance detection working area is provided with an appearance detection device; the discharging area is provided with a discharging robot; the rectangular coordinate robot grabs the silicon ingot on the conveying belt and conveys the silicon ingot to the infrared detection device; the infrared detection device is used for detecting internal impurities of the silicon ingot; and the appearance detection device is used for detecting appearance defects of the silicon ingot. The line can achieve full automatic charging and blanking, carrying and conveying of the silicon ingot in a detection process of the silicon ingot, liberates a labor force and improves production efficiency. At the same time, secondary injuries such as collision and scratch of the silicon ingot are further reduced in a manual carrying process, the subsequent detection and machining workload is reduced, and the waste of raw material machining of the silicon ingot is reduced.

Description

Silicon ingot automatic precision inspection production line
Technical field
The present invention relates to the manufacturing field of silicon ingot, be specifically related to a kind of silicon ingot automatic precision inspection production line.
Background technology
Silicon ingot after cutting into little ingot and section before, need to do further defects inspecting, outward appearance detection etc. to silicon ingot, in later process, the impure part serious with cosmetic injury cut away.At present, in the testing process of silicon ingot, all by the carrying, the loading and unloading that have manually carried out silicon ingot, waste time and energy and inefficiency.And silicon ingot itself is very heavy, can collides with unavoidably in a dead lift process, collide with, cut had both added follow-up detection, the workload of processing, created again the waste of unnecessary raw material.Testing takes time and effort, and line precision is poor, also easily produces unnecessary cutting loss.
Summary of the invention
The applicant, for the deficiencies in the prior art in above-mentioned existing silicon ingot testing process, provides a kind of silicon ingot automatic precision inspection production line of fully-automated synthesis, thus enhances productivity.
The technical solution adopted in the present invention is as follows:
A kind of silicon ingot automatic precision inspection production line, comprises feeding area, defects inspecting workspace, outward appearance testing district and discharging area successively.Feeding area is provided with the feeding robot for picking and placeing silicon ingot, defects inspecting workspace is provided with transport tape, Cartesian robot and infrared detecting device, outward appearance testing district is provided with appearance delection device, discharging area is provided with blanking robot, the silicon ingot that Cartesian robot captures on transport tape delivers to infrared detecting device place, infrared detecting device is for detecting the inside impurity of silicon ingot, and appearance delection device is for detecting the open defect of silicon ingot.
Further improvement as technique scheme: described feeding robot, Cartesian robot, appearance delection device and blanking robot are all equiped with visual identifying system, described visual identifying system is by video camera, form without shadow light source and controller.
Described feeding robot, Cartesian robot and blanking robot are all equiped with the vacuum cup for picking and placeing silicon ingot.
Described vacuum cup is installed in the end of the mechanical arm of feeding robot, and described visual identifying system is installed in the sidepiece of vacuum cup.
Described Cartesian robot comprises support, X-axis slide rail, Y-axis slide rail and Z axis elevating lever, X-axis slide rail is made up of a pair slide rail on support arranged in parallel, Y-axis slide rail is across on X-axis slide rail, Y-axis slide rail is driven by ball-screw and runs, Z axis elevating lever is vertically arranged on Y-axis slide rail, and vacuum cup and visual identifying system are installed in the bottom end of Z axis elevating lever.
Described appearance delection device also comprises worktable and marking assembly, worktable is added is provided with frame, frame is equiped with and drives by ball-screw the Y-axis slide bar run, Y-axis slide bar is vertically provided with Z axis slide bar, visual identifying system is installed in the end of Z axis slide bar, described video camera is fixed on Z axis slide bar, and without the periphery of shadow light source cover at video camera, marking assembly is installed on the top without shadow light source.
Described infrared detecting device comprises two monitor stations be oppositely arranged, and two monitor stations are all equiped with infrared detection equipment, and infrared detection equipment is installed in internal stent and is positioned at the below of Y-axis slide rail and Z axis elevating lever.
Described first transport tape, the second transport tape and the 3rd transport tape are all equiped with multiple silicon ingot detecting sensor.
Described transport tape comprises the first transport tape, the second transport tape and the 3rd transport tape, feeding robot is positioned at the input end of the first transport tape, Cartesian robot is positioned at the first transport tape output terminal, second transport tape and the 3rd transport tape are positioned at the side of Cartesian robot away from the first transport tape, second transport tape and the 3rd transport tape are parallel to each other, and appearance delection device is positioned at the output terminal of the first transport tape and the second transport tape.
Beneficial effect of the present invention is as follows: the silicon ingot automatic precision inspection production line that the present invention adopts can realize loading and unloading, the carrying transmission full automatic treatment of silicon ingot in the testing process of silicon ingot, can replace manually carrying out heavy and manual labor that is that repeat at severe working environment, liberate labour, improve production efficiency.To also reduce in a dead lift process secondary injuries such as the colliding with of silicon ingot, scuffings simultaneously, reduce follow-up detection and the workload of processing, decrease the waste of silicon ingot Raw material processing.Infrared detecting device of the present invention can realize the defects inspecting to silicon ingot, and appearance delection device can realize detecting the outward appearance of silicon ingot, realizes automatically detecting and data processing, has sufficient artificial intelligence.
Present invention employs visual identifying system, visual identity can be carried out to the attitude of silicon ingot, position and coding, feed back to central control system and carry out respective operations, can flexible adaptation for diverse location, the silicon ingot of different attitude carries out loading and unloading or detects the demand of operation.
After the present invention adopts blanking robot to draw taking and placing silicon ingot, direct upset can complete four surfaces of silicon ingot and the defects detection of four seamed edges, and automatically carries out line mark, and does not need manually to overturn, greatly reduce workload and time, realize robotization.
Accompanying drawing explanation
Fig. 1 is vertical view of the present invention.
Fig. 2 is the stereographic map of Cartesian robot.
Fig. 3 is the stereographic map of appearance delection device.
In figure: 1, the first transport tape; 2, the second transport tape; 3, the 3rd transport tape; 4, feeding robot; 5, Cartesian robot; 6, infrared detecting device; 7, appearance delection device; 8, blanking robot; 9, silicon ingot detecting sensor; 10, stacking pallet; 11, visual identifying system; 12, video camera; 13, without shadow light source; 14, vacuum cup; 41, mechanical arm; 51, support; 52, X-axis slide rail; 53, Y-axis slide rail; 54, Z axis elevating lever; 61, monitor station; 62, infrared detection equipment; 71, worktable; 72, marking assembly; 73, frame; 74, Y-axis slide bar; 75, Z axis slide bar.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described.
As shown in Figure 1, a kind of silicon ingot automatic precision inspection production line of the present invention, comprises feeding area, defects inspecting workspace, outward appearance testing district and discharging area.Feeding area is provided with feeding robot 4, defects inspecting workspace is provided with the first transport tape 1, second transport tape 2, the 3rd transport tape 3, Cartesian robot 5 and infrared detecting device 6, outward appearance testing district is provided with appearance delection device 7, and discharging area is provided with blanking robot 8 and stacking pallet 10.
Feeding robot 4 in the present invention, Cartesian robot 5, appearance delection device 7 and blanking robot 8 are all equiped with visual identifying system 11, and described visual identifying system 11 is by video camera 12, form without shadow light source 13 and controller.Carry out visual identity by the attitude of visual identifying system 11 pairs of silicon ingots, position and coding, feed back to central control system and carry out respective operations.Feeding robot 4 in the present invention, Cartesian robot 5 and blanking robot 8 are also equiped with the vacuum cup 14 for picking and placeing silicon ingot.
In feeding area, visual identifying system 11 and vacuum cup 14 are installed in the end of the mechanical arm 41 of feeding robot 4.Feeding robot 4 judges the position of silicon ingot by visual identifying system 11, draws silicon ingot send into the first transport tape 1 by vacuum cup 14.
First transport tape 1 is positioned at the input end of defects inspecting workspace, and the second transport tape 2 and the 3rd transport tape 3 are positioned at the output of defects inspecting workspace.First transport tape 1, second transport tape 2 and the 3rd transport tape 3 are for transmitting carrier bar.Second transport tape 2 and the 3rd transport tape 3 arranged in parallel, the first transport tape 1 is vertical with the 3rd transport tape 3 with the second transport tape 2.The output terminal of the first transport tape 1, second transport tape 2 and the 3rd transport tape 3 is all equiped with multiple silicon ingot detecting sensor 9, and silicon ingot detecting sensor 9 detects on transport tape whether have silicon ingot, if silicon ingot delivers to assigned address, then suspends transport tape and stops conveying.
Defects inspecting workspace is communicated with by the first transport tape 1 with between feeding area.As shown in Figure 2, Cartesian robot 5 comprises support 51, X-axis slide rail 52, Y-axis slide rail 53 and Z axis elevating lever 54, X-axis slide rail 52 is made up of a pair slide rail on support 51 arranged in parallel, Y-axis slide rail 53 is across on X-axis slide rail 52, Y-axis slide rail 53 is driven by ball-screw and runs, Z axis elevating lever 54 is vertically arranged on Y-axis slide rail 53, and vacuum cup 14 and visual identifying system 11 are installed in the bottom end of Z axis elevating lever 54.Y-axis slide rail 53 does the rectilinear motion of horizontal direction on X-axis slide rail 52, and Z axis elevating lever 54 does the horizontal rectilinear motion vertical with Y-axis slide rail 53 direction of motion on Y-axis slide rail 53, and Z axis elevating lever 54 vertically can also do rectilinear motion on Y-axis slide rail 53.The visual identifying system 11 of Cartesian robot 5 judges the ingot position on the first transport tape 1, and vacuum cup 14 silicon ingot drawn on the first transport tape 1 delivers to infrared detecting device 6 place, waits for the detection of infrared detecting device 6 pairs of silicon ingots.
Infrared detecting device 6 is installed in support 51 inside and is positioned at the below of Y-axis slide rail 53 and Z axis elevating lever 54.Infrared detecting device 6 comprises on two monitor stations, 61, two monitor stations 61 of being oppositely arranged and is all equiped with infrared detection equipment 62, and then can walk abreast and carry out infrared acquisition to detect the inner impurity of silicon ingot to silicon ingot.Vacuum cup 14 silicon ingot drawn on the first transport tape 1 of described Cartesian robot 5 is delivered on monitor station 61, and infrared detection equipment 62 pairs of silicon ingots carry out defects inspecting, for the silicon ingot that there is inner impurity or defect, manually identify on the surface of silicon ingot.After having identified, silicon ingot is drawn and is placed on the second transport tape 2 or the 3rd transport tape 3 by the vacuum cup 14 of Cartesian robot 5 again.Second transport tape 2 or the 3rd transport tape 3 carry silicon ingot and waits for that blanking robot 8 pairs of silicon ingots pick and place.
Appearance delection device 7 is positioned at the output terminal of the second transport tape 2 and the 3rd transport tape 3, as shown in Figure 3, described appearance delection device 7 comprises worktable 71, marking assembly 72 and visual identifying system 11, worktable 71 is added is provided with frame 73, frame 73 is equiped with and drives by ball-screw the Y-axis slide bar 74 run, Y-axis slide bar 74 is vertically provided with Z axis slide bar 75.Ball-screw drives Y-axis slide bar 74 to realize the rectilinear movement of horizontal direction, and Z axis slide bar 75 can at vertical direction rectilinear motion.Visual identifying system 11 and marking assembly 72 are installed in the bottom of Z axis slide bar 75.Visual identifying system 11 is installed in the end of Z axis slide bar 75, described video camera 12 is fixed on Z axis slide bar 75, cover on the periphery of video camera 12 without shadow light source 13, marking assembly 72 is installed on the top without shadow light source 13, and marking assembly 72 is to the ingot indicia after detection.
In discharging area, blanking robot 8 is positioned on front side of the worktable 71 of appearance delection device 7, and stacking pallet 10 is positioned at the side of blanking robot 8.Visual identifying system 11 and vacuum cup 14 are installed in the end of blanking robot 8 mechanical arm.
The silicon ingot that during work, the vacuum cup 14 of blanking robot 8 is drawn on the second transport tape 2 or the 3rd transport tape 3 is delivered on the worktable 71 of appearance delection device 7, the mechanical arm of blanking robot 8 overturns, four surfaces and four seamed edges of video camera 12 pairs of silicon ingots of visual identifying system 11 are taken pictures, and carry out defects detection judgement by controller to silicon ingot.If the mark that silicon ingot surface has infrared detection district to do, or seamed edge is because collided with the defect such as recessed, then marking is carried out on the surface of marking assembly 72 pairs of silicon ingots of Z axis slide bar 75.Silicon ingot after detection is placed by classification on qualified or underproof stacking pallet 10 according to testing result by last blanking robot 8.
More than describing is explanation of the invention, and be not the restriction to invention, when without prejudice to spirit of the present invention, the present invention can do any type of amendment.

Claims (9)

1. a silicon ingot automatic precision inspection production line, comprise feeding area successively, defects inspecting workspace, outward appearance testing district and discharging area, it is characterized in that: feeding area is provided with the feeding robot (4) for picking and placeing silicon ingot, defects inspecting workspace is provided with transport tape, Cartesian robot (5) and infrared detecting device (6), outward appearance testing district is provided with appearance delection device (7), discharging area is provided with blanking robot (8), the silicon ingot that Cartesian robot (5) captures on transport tape delivers to infrared detecting device (6) place, infrared detecting device (6) is for detecting the inside impurity of silicon ingot, appearance delection device (7) is for detecting the open defect of silicon ingot.
2. according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described feeding robot (4), Cartesian robot (5), appearance delection device (7) and blanking robot (8) are all equiped with visual identifying system (11), described visual identifying system (11) is made up of video camera (12), light source (13) and controller.
3., according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described feeding robot (4), Cartesian robot (5) and blanking robot (8) are all equiped with the vacuum cup (14) for picking and placeing silicon ingot.
4. according to silicon ingot automatic precision inspection production line according to claim 3, it is characterized in that: described vacuum cup (14) is installed in the end of the mechanical arm (41) of feeding robot (4), and described visual identifying system (11) is installed in the sidepiece of vacuum cup (14).
5. according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described Cartesian robot (5) comprises support (51), X-axis slide rail (52), Y-axis slide rail (53) and Z axis elevating lever (54), X-axis slide rail (52) is made up of a pair slide rail on support (51) arranged in parallel, Y-axis slide rail (53) is across on X-axis slide rail (52), Y-axis slide rail (53) is driven by ball-screw and runs, Z axis elevating lever (54) is vertically arranged on Y-axis slide rail (53), vacuum cup (14) and visual identifying system (11) are installed in the bottom end of Z axis elevating lever (54).
6. according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described appearance delection device (7) comprises worktable (71) and marking assembly (72), worktable (71) is added is provided with frame (73), frame (73) is equiped with and drives by ball-screw the Y-axis slide bar (74) run, Y-axis slide bar (74) is vertically provided with Z axis slide bar (75), visual identifying system (11) is installed in the end of Z axis slide bar (75), described video camera (12) is fixed on Z axis slide bar (75), light source (13) covers on the periphery of video camera (12), marking assembly (72) is installed on the top without shadow light source (13).
7. according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described infrared detecting device (6) comprises two monitor stations (61) be oppositely arranged, two monitor stations (61) are all equiped with infrared detection equipment (62), and infrared detection equipment (62) is installed in support (51) inside and is positioned at the below of Y-axis slide rail (53) and Z axis elevating lever (54).
8., according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described first transport tape (1), the second transport tape (2) and the 3rd transport tape (3) are all equiped with multiple silicon ingot detecting sensor (9).
9. according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described transport tape comprises the first transport tape (1), second transport tape (2) and the 3rd transport tape (3), feeding robot (4) is positioned at the input end of the first transport tape (1), Cartesian robot (5) is positioned at the first transport tape (1) output terminal, second transport tape (2) and the 3rd transport tape (3) are positioned at the side of Cartesian robot (5) away from the first transport tape (1), second transport tape (2) and the 3rd transport tape (3) are parallel to each other, appearance delection device (7) is positioned at the output terminal of the first transport tape (1) and the second transport tape (2).
CN201510207553.9A 2015-04-28 2015-04-28 Automatic fine inspection production line of silicon ingot Pending CN104807832A (en)

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CN105268655A (en) * 2015-10-27 2016-01-27 昆山鸿志犀自动化机电设备有限公司 Keycap detection system
CN105414042A (en) * 2015-10-27 2016-03-23 昆山鸿志犀自动化机电设备有限公司 Device for detecting quality of keycaps
CN105527223A (en) * 2015-08-17 2016-04-27 科为升视觉技术(苏州)有限公司 Product appearance detection device and method
CN105537149A (en) * 2015-12-15 2016-05-04 华中科技大学无锡研究院 Automatic light transmission detection system and method for axial multi-pore-passage medium
CN106124525A (en) * 2016-08-24 2016-11-16 镇江荣德新能源科技有限公司 A kind of crystalline silicon blocks surface grinding and defects inspecting integrated apparatus
CN109013401A (en) * 2018-09-17 2018-12-18 郑州工程技术学院 A kind of U-shaped Elema automatic checkout equipment
CN109443258A (en) * 2018-12-29 2019-03-08 芜湖哈特机器人产业技术研究院有限公司 A kind of backboard flatness checking device and its detection method
CN109499903A (en) * 2018-11-27 2019-03-22 苏州越恒自动化科技有限公司 The automatic detection sorting system and its operating method of a kind of silicon ingot or silicon rod
CN109709091A (en) * 2017-10-25 2019-05-03 浙江大学常州工业技术研究院 Equipment for testing product lacquer painting
CN110239962A (en) * 2019-07-15 2019-09-17 云南冶金昆明重工有限公司 A kind of continuous casting production line of aluminum ingots defect ware detection recovery system
CN110356845A (en) * 2019-07-17 2019-10-22 江苏集萃智能制造技术研究所有限公司 A kind of automatic series connection production line of cell piece and its production method
CN112649397A (en) * 2020-12-24 2021-04-13 苏州泽达兴邦医药科技有限公司 Method and system for analyzing quality of traditional Chinese medicinal materials by utilizing near infrared spectrum
CN116165340A (en) * 2022-12-28 2023-05-26 杭州中为光电技术有限公司 Silicon rod online detection system and detection method
CN116973378A (en) * 2023-09-22 2023-10-31 山东梁山华宇集团汽车制造有限公司 Vehicle production quality detecting system

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CN105527223A (en) * 2015-08-17 2016-04-27 科为升视觉技术(苏州)有限公司 Product appearance detection device and method
CN105527223B (en) * 2015-08-17 2018-06-01 科为升视觉技术(苏州)有限公司 A kind of product appearance inspection device and its detection method
CN105268655A (en) * 2015-10-27 2016-01-27 昆山鸿志犀自动化机电设备有限公司 Keycap detection system
CN105414042A (en) * 2015-10-27 2016-03-23 昆山鸿志犀自动化机电设备有限公司 Device for detecting quality of keycaps
CN105537149A (en) * 2015-12-15 2016-05-04 华中科技大学无锡研究院 Automatic light transmission detection system and method for axial multi-pore-passage medium
CN106124525A (en) * 2016-08-24 2016-11-16 镇江荣德新能源科技有限公司 A kind of crystalline silicon blocks surface grinding and defects inspecting integrated apparatus
CN109709091A (en) * 2017-10-25 2019-05-03 浙江大学常州工业技术研究院 Equipment for testing product lacquer painting
CN109013401A (en) * 2018-09-17 2018-12-18 郑州工程技术学院 A kind of U-shaped Elema automatic checkout equipment
CN109499903A (en) * 2018-11-27 2019-03-22 苏州越恒自动化科技有限公司 The automatic detection sorting system and its operating method of a kind of silicon ingot or silicon rod
CN109443258A (en) * 2018-12-29 2019-03-08 芜湖哈特机器人产业技术研究院有限公司 A kind of backboard flatness checking device and its detection method
CN110239962A (en) * 2019-07-15 2019-09-17 云南冶金昆明重工有限公司 A kind of continuous casting production line of aluminum ingots defect ware detection recovery system
CN110356845A (en) * 2019-07-17 2019-10-22 江苏集萃智能制造技术研究所有限公司 A kind of automatic series connection production line of cell piece and its production method
CN110356845B (en) * 2019-07-17 2021-11-02 江苏集萃智能制造技术研究所有限公司 Automatic series production line for battery pieces and production method thereof
CN112649397A (en) * 2020-12-24 2021-04-13 苏州泽达兴邦医药科技有限公司 Method and system for analyzing quality of traditional Chinese medicinal materials by utilizing near infrared spectrum
CN112649397B (en) * 2020-12-24 2021-12-10 苏州泽达兴邦医药科技有限公司 Method and system for analyzing quality of traditional Chinese medicinal materials by utilizing near infrared spectrum
CN116165340A (en) * 2022-12-28 2023-05-26 杭州中为光电技术有限公司 Silicon rod online detection system and detection method
CN116165340B (en) * 2022-12-28 2023-09-29 杭州中为光电技术有限公司 Silicon rod online detection system and detection method
CN116973378A (en) * 2023-09-22 2023-10-31 山东梁山华宇集团汽车制造有限公司 Vehicle production quality detecting system
CN116973378B (en) * 2023-09-22 2024-01-09 山东梁山华宇集团汽车制造有限公司 Vehicle production quality detecting system

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