CN104807832A - Automatic fine inspection production line of silicon ingot - Google Patents

Abstract

The invention discloses an automatic precision inspection production line for silicon ingots, which sequentially includes a material loading area, an impurity detection work area, an appearance inspection work area and a material unloading area. The working area is equipped with a conveyor belt, a Cartesian robot and an infrared detection device. The appearance inspection work area is equipped with an appearance inspection device, and the unloading area is equipped with a feeding robot. The Cartesian robot grabs the silicon ingots on the conveyor belt and sends them to the infrared detection device. The infrared detection device is used to detect the internal impurities of the silicon ingot, and the appearance detection device is used to detect the appearance defects of the silicon ingot. The invention can realize automatic processing of silicon ingot loading and unloading, transportation and transmission in the detection process of silicon ingots, liberates labor force and improves production efficiency. At the same time, it also reduces the secondary damage to silicon ingots such as knocking and scratching during manual handling, reduces the workload of subsequent inspection and processing, and reduces the waste of silicon ingot raw material processing.

Description

Silicon ingot automatic fine inspection production line

technical field

The invention relates to the field of silicon ingot production, in particular to an automatic precision inspection production line for silicon ingots.

Background technique

After the silicon ingot is cut into small ingots and before slicing, the silicon ingot needs to be further inspected for impurities, appearance inspection, etc., and the parts containing impurities and serious appearance damage are cut off in the subsequent process. At present, in the process of testing silicon ingots, the handling, loading and unloading of silicon ingots are all done manually, which is time-consuming, laborious and inefficient. Moreover, the silicon ingot itself is very heavy, and it is inevitable that bumps will occur during manual handling. Bumps and scratches not only increase the workload of subsequent inspection and processing, but also generate unnecessary waste of raw materials. The detection work is time-consuming and labor-intensive, and the scribing accuracy is poor, and unnecessary cutting loss is likely to occur.

Contents of the invention

Aiming at the deficiencies of the prior art in the above-mentioned existing silicon ingot inspection process, the applicant provides an automatic fine inspection production line for silicon ingots with automatic inspection, so as to improve production efficiency.

The technical scheme adopted in the present invention is as follows:

An automatic precision inspection production line for silicon ingots, which sequentially includes a material loading area, an impurity detection work area, an appearance inspection work area and a material discharge area. The loading area is equipped with a loading robot for picking and placing silicon ingots, the impurity detection work area is equipped with a conveyor belt, a rectangular coordinate robot and an infrared detection device, the appearance inspection work area is equipped with an appearance detection device, and the unloading area is equipped with a feeding robot , the Cartesian coordinate robot grabs the silicon ingot on the conveyor belt and sends it to the infrared detection device. The infrared detection device is used to detect the internal impurities of the silicon ingot, and the appearance detection device is used to detect the appearance defects of the silicon ingot.

As a further improvement of the above technical solution: the loading robot, rectangular coordinate robot, appearance inspection device and unloading robot are all equipped with a visual recognition system, and the visual recognition system is composed of a camera, a shadowless light source and a controller.

The loading robot, Cartesian robot and unloading robot are all equipped with vacuum suction cups for picking and placing silicon ingots.

The vacuum suction cup is installed at the end of the mechanical arm of the loading robot, and the visual recognition system is installed at the side of the vacuum suction cup.

The Cartesian coordinate robot includes a support, an X-axis slide rail, a Y-axis slide rail and a Z-axis elevating rod. The X-axis slide rail is composed of a pair of slide rails arranged parallel to each other on the support. On the slide rail, the Y-axis slide rail runs through the ball screw, the Z-axis lifting rod is installed vertically on the Y-axis sliding rail, and the vacuum suction cup and the visual recognition system are installed at the bottom end of the Z-axis lifting rod.

The appearance detection device also includes a workbench and a marking assembly. A frame is set up on the workbench, and a Y-axis slide bar driven by a ball screw is installed on the frame. A Z slide bar is vertically installed on the Y-axis slide bar. Axis slide bar, the visual recognition system is installed at the end of the Z-axis slide bar, the camera is fixed on the Z-axis slide bar, the shadowless light source is covered on the periphery of the camera, and the marking assembly is fixedly installed above the shadowless light source .

The infrared detection device includes two detection tables opposite to each other. Infrared detection equipment is installed on the two detection tables. The infrared detection equipment is installed inside the bracket and located below the Y-axis slide rail and the Z-axis lifting rod.

A plurality of silicon ingot detection sensors are installed on the first conveyor belt, the second conveyor belt and the third conveyor belt.

The conveyor belt includes a first conveyor belt, a second conveyor belt and a third conveyor belt, the loading robot is located at the input end of the first conveyor belt, the rectangular coordinate robot is located at the output end of the first conveyor belt, and the second conveyor belt and the third conveyor belt are located at the input end of the first conveyor belt. The conveyor belt is located on the side of the Cartesian robot away from the first conveyor belt, the second conveyor belt and the third conveyor belt are parallel to each other, and the appearance inspection device is located at the output end of the first conveyor belt and the second conveyor belt.

The beneficial effects of the present invention are as follows: the silicon ingot automatic precision inspection production line adopted in the present invention can realize the automatic processing of silicon ingot loading and unloading, transportation and transmission in the detection process of silicon ingots, and can replace manual work in harsh working environments for heavy and repetitive manual labor, liberating the labor force and improving production efficiency. At the same time, it also reduces the secondary damage to silicon ingots such as knocking and scratching during manual handling, reduces the workload of subsequent inspection and processing, and reduces the waste of silicon ingot raw material processing. The infrared detection device of the present invention can realize the impurity detection of the silicon ingot, and the appearance detection device can realize the appearance detection of the silicon ingot, realize automatic detection and data processing, and have sufficient artificial intelligence.

The present invention adopts a visual recognition system, which can visually recognize the posture, position and code of silicon ingots, and feed back to the central control system for corresponding operations, and can flexibly adapt to the loading and unloading or detection operations of silicon ingots in different positions and postures need.

The invention adopts the unloading robot to pick up and place the silicon ingot, and directly flips it over to complete the defect detection of the four surfaces and four edges of the silicon ingot, and automatically marks the marking without manual flipping, which greatly reduces the work. Amount and time, realize automation.

Description of drawings

Figure 1 is a top view of the present invention.

Fig. 2 is a perspective view of a Cartesian coordinate robot.

Fig. 3 is a perspective view of the appearance inspection device.

In the figure: 1. The first conveyor belt; 2. The second conveyor belt; 3. The third conveyor belt; 4. Feeding robot; 5. Cartesian coordinate robot; 6. Infrared detection device; 7. Appearance detection device; 8. Unloading robot; 9. Silicon ingot detection sensor; 10. Palletizing tray; 11. Visual recognition system; 12. Camera; 13. Shadowless light source; 14. Vacuum suction cup; 41. Mechanical arm; 51. Bracket; 52. X Axis slide rail; 53, Y-axis slide rail; 54, Z-axis elevating rod; 61, detection table; 62, infrared detection equipment; 71, workbench; 72, marking component; 73, frame; 74, Y-axis Slide bar; 75, Z-axis slide bar.

Detailed ways

The specific implementation manner of the present invention will be described below in conjunction with the accompanying drawings.

As shown in Figure 1, a silicon ingot automatic precision inspection production line according to the present invention includes a feeding area, an impurity detection working area, an appearance inspection working area and a feeding area. The feeding area is equipped with a feeding robot 4, the impurity detection work area is equipped with a first conveyor belt 1, a second conveyor belt 2, a third conveyor belt 3, a Cartesian coordinate robot 5 and an infrared detection device 6, and the appearance detection work area is equipped with Appearance inspection device 7, and the unloading area is provided with unloading robot 8 and palletizing tray 10.

In the present invention, the loading robot 4, the rectangular coordinate robot 5, the appearance detection device 7 and the blanking robot 8 are all equipped with a visual recognition system 11, and the visual recognition system 11 is composed of a camera 12, a shadowless light source 13 and a controller. composition. The posture, position and code of the silicon ingot are visually recognized by the visual recognition system 11, and fed back to the central control system for corresponding operations. In the present invention, the loading robot 4 , the Cartesian coordinate robot 5 and the unloading robot 8 are also equipped with vacuum chucks 14 for picking and placing silicon ingots.

In the loading area, the visual recognition system 11 and the vacuum chuck 14 are installed at the end of the mechanical arm 41 of the loading robot 4 . The feeding robot 4 judges the position of the silicon ingot through the visual recognition system 11 , sucks the silicon ingot through the vacuum chuck 14 and sends it to the first conveyor belt 1 .

The first transmission belt 1 is located at the input end of the impurity detection work area, and the second transmission belt 2 and the third transmission belt 3 are located at the output end of the impurity detection work area. The first conveyor belt 1, the second conveyor belt 2 and the third conveyor belt 3 are conveyor chain plates. The second conveyor belt 2 and the third conveyor belt 3 are arranged parallel to each other, and the first conveyor belt 1 is perpendicular to the second conveyor belt 2 and the third conveyor belt 3 . The output ends of the first transmission belt 1, the second transmission belt 2 and the third transmission belt 3 are all equipped with a plurality of silicon ingot detection sensors 9, and the silicon ingot detection sensors 9 detect whether there are silicon ingots on the transmission belt. To the specified position, the conveyor belt will be suspended to stop conveying.

The impurity detection working area is communicated with the feeding area through the first conveyor belt 1 . As shown in Figure 2, the Cartesian coordinate robot 5 comprises a support 51, an X-axis slide rail 52, a Y-axis slide rail 53 and a Z-axis elevating rod 54, and the X-axis slide rail 52 consists of a pair of slide rails arranged parallel to each other on the support 51. Composition, the Y-axis slide rail 53 straddles the X-axis slide rail 52, the Y-axis slide rail 53 runs through the ball screw, the Z-axis lifting rod 54 is vertically installed on the Y-axis slide rail 53, the vacuum suction cup 14 and the visual The identification system 11 is installed at the end of the bottom surface of the Z-axis elevating rod 54 . The Y-axis slide rail 53 moves linearly in the horizontal direction on the X-axis slide rail 52, and the Z-axis elevating rod 54 performs horizontal linear motion on the Y-axis slide rail 53 perpendicular to the moving direction of the Y-axis slide rail 53, and the Z-axis elevating rod 54 can also move linearly along the vertical direction on the Y-axis slide rail 53. The visual recognition system 11 of the rectangular coordinate robot 5 judges the position of the silicon ingot on the first conveyor belt 1, the vacuum chuck 14 sucks the silicon ingot on the first conveyor belt 1 and sends it to the infrared detection device 6, and waits for the infrared detection device 6 to check the silicon ingot. detection.

The infrared detection device 6 is installed inside the bracket 51 and located below the Y-axis slide rail 53 and the Z-axis lifting rod 54 . The infrared detection device 6 includes two detection platforms 61 opposite to each other. An infrared detection device 62 is installed on each of the two detection platforms 61, so that infrared detection can be performed on silicon ingots in parallel to detect impurities inside the silicon ingots. The vacuum chuck 14 of the Cartesian robot 5 sucks the silicon ingots on the first conveyor belt 1 and sends them to the detection platform 61. The infrared detection equipment 62 detects impurities on the silicon ingots. For silicon ingots with internal impurities or defects, manually The surface of the silicon ingot is marked. After the marking is completed, the vacuum chuck 14 of the Cartesian robot 5 sucks and places the silicon ingot on the second conveyor belt 2 or the third conveyor belt 3 . The silicon ingots are transported on the second conveyor belt 2 or the third conveyor belt 3 and wait for the unloading robot 8 to pick and place the silicon ingots.

Appearance inspection device 7 is positioned at the output end of the second conveyor belt 2 and the 3rd conveyor belt 3, as shown in Figure 3, described appearance inspection device 7 comprises workbench 71, marking assembly 72 and visual recognition system 11, workbench A frame 73 is mounted on the 71, and a Y-axis slide bar 74 driven by a ball screw is installed on the frame 73, and a Z-axis slide bar 75 is vertically installed on the Y-axis slide bar 74. The ball screw drives the Y-axis slide bar 74 to move linearly in the horizontal direction, and the Z-axis slide bar 75 can move linearly in the vertical direction. The visual identification system 11 and the line marker assembly 72 are arranged at the lower part of the Z-axis slide bar 75 . The visual recognition system 11 is installed at the end of the Z-axis slide bar 75, the camera 12 is fixed on the Z-axis slide bar 75, the shadowless light source 13 is covered on the periphery of the camera 12, and the marking assembly 72 is fixedly installed on the shadowless Above the light source 13, the scribe marking assembly 72 marks the inspected silicon ingot.

In the unloading area, the unloading robot 8 is located on the front side of the workbench 71 of the appearance inspection device 7 , and the palletizing tray 10 is located on the side of the unloading robot 8 . The visual recognition system 11 and the vacuum chuck 14 are installed at the end of the robot arm of the unloading robot 8 .

When working, the vacuum chuck 14 of the unloading robot 8 sucks the silicon ingots on the second conveyor belt 2 or the third conveyor belt 3 and sends them to the workbench 71 of the appearance inspection device 7, and the mechanical arm of the unloading robot 8 turns over, and the visual recognition system The camera 12 of 11 takes pictures of the four surfaces and four edges of the silicon ingot, and detects and judges the defects of the silicon ingot through the controller. If the surface of the silicon ingot is marked by the infrared detection area, or the edge has defects such as indentations due to bumps, the marking component 72 of the Z-axis slide bar 75 will mark the surface of the silicon ingot. Finally, the unloading robot 8 classifies and places the detected silicon ingots on qualified or unqualified palletizing trays 10 according to the detection results.

The above description is an explanation of the present invention, not a limitation of the present invention, and the present invention can be modified in any form without violating the spirit of the present invention.

Claims (9)

1. a silicon ingot automatic precision inspection production line, comprise feeding area successively, defects inspecting workspace, outward appearance testing district and discharging area, it is characterized in that: feeding area is provided with the feeding robot (4) for picking and placeing silicon ingot, defects inspecting workspace is provided with transport tape, Cartesian robot (5) and infrared detecting device (6), outward appearance testing district is provided with appearance delection device (7), discharging area is provided with blanking robot (8), the silicon ingot that Cartesian robot (5) captures on transport tape delivers to infrared detecting device (6) place, infrared detecting device (6) is for detecting the inside impurity of silicon ingot, appearance delection device (7) is for detecting the open defect of silicon ingot.

2. according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described feeding robot (4), Cartesian robot (5), appearance delection device (7) and blanking robot (8) are all equiped with visual identifying system (11), described visual identifying system (11) is made up of video camera (12), light source (13) and controller.

3., according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described feeding robot (4), Cartesian robot (5) and blanking robot (8) are all equiped with the vacuum cup (14) for picking and placeing silicon ingot.

4. according to silicon ingot automatic precision inspection production line according to claim 3, it is characterized in that: described vacuum cup (14) is installed in the end of the mechanical arm (41) of feeding robot (4), and described visual identifying system (11) is installed in the sidepiece of vacuum cup (14).

5. according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described Cartesian robot (5) comprises support (51), X-axis slide rail (52), Y-axis slide rail (53) and Z axis elevating lever (54), X-axis slide rail (52) is made up of a pair slide rail on support (51) arranged in parallel, Y-axis slide rail (53) is across on X-axis slide rail (52), Y-axis slide rail (53) is driven by ball-screw and runs, Z axis elevating lever (54) is vertically arranged on Y-axis slide rail (53), vacuum cup (14) and visual identifying system (11) are installed in the bottom end of Z axis elevating lever (54).

6. according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described appearance delection device (7) comprises worktable (71) and marking assembly (72), worktable (71) is added is provided with frame (73), frame (73) is equiped with and drives by ball-screw the Y-axis slide bar (74) run, Y-axis slide bar (74) is vertically provided with Z axis slide bar (75), visual identifying system (11) is installed in the end of Z axis slide bar (75), described video camera (12) is fixed on Z axis slide bar (75), light source (13) covers on the periphery of video camera (12), marking assembly (72) is installed on the top without shadow light source (13).

7. according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described infrared detecting device (6) comprises two monitor stations (61) be oppositely arranged, two monitor stations (61) are all equiped with infrared detection equipment (62), and infrared detection equipment (62) is installed in support (51) inside and is positioned at the below of Y-axis slide rail (53) and Z axis elevating lever (54).

8., according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described first transport tape (1), the second transport tape (2) and the 3rd transport tape (3) are all equiped with multiple silicon ingot detecting sensor (9).

9. according to silicon ingot automatic precision inspection production line according to claim 1, it is characterized in that: described transport tape comprises the first transport tape (1), second transport tape (2) and the 3rd transport tape (3), feeding robot (4) is positioned at the input end of the first transport tape (1), Cartesian robot (5) is positioned at the first transport tape (1) output terminal, second transport tape (2) and the 3rd transport tape (3) are positioned at the side of Cartesian robot (5) away from the first transport tape (1), second transport tape (2) and the 3rd transport tape (3) are parallel to each other, appearance delection device (7) is positioned at the output terminal of the first transport tape (1) and the second transport tape (2).