CN107546142A - A kind of continuous type silicon chip or cell piece detect sorter - Google Patents
A kind of continuous type silicon chip or cell piece detect sorter Download PDFInfo
- Publication number
- CN107546142A CN107546142A CN201610488991.1A CN201610488991A CN107546142A CN 107546142 A CN107546142 A CN 107546142A CN 201610488991 A CN201610488991 A CN 201610488991A CN 107546142 A CN107546142 A CN 107546142A
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- detection
- silicon chip
- cell piece
- conveyer
- material conveyer
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 60
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 60
- 239000010703 silicon Substances 0.000 title claims abstract description 60
- 238000001514 detection method Methods 0.000 claims abstract description 83
- 239000000463 material Substances 0.000 claims abstract description 61
- 238000007599 discharging Methods 0.000 claims abstract description 54
- 238000012360 testing method Methods 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000006872 improvement Effects 0.000 abstract description 4
- 238000010924 continuous production Methods 0.000 abstract description 2
- 238000010521 absorption reaction Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Sorting Of Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
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CN201610488991.1A CN107546142B (en) | 2016-06-28 | 2016-06-28 | Continuous silicon chip or battery piece detection and classification device |
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CN201610488991.1A CN107546142B (en) | 2016-06-28 | 2016-06-28 | Continuous silicon chip or battery piece detection and classification device |
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CN107546142A true CN107546142A (en) | 2018-01-05 |
CN107546142B CN107546142B (en) | 2024-03-29 |
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CN201610488991.1A Active CN107546142B (en) | 2016-06-28 | 2016-06-28 | Continuous silicon chip or battery piece detection and classification device |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108198912A (en) * | 2018-02-24 | 2018-06-22 | 常州亿晶光电科技有限公司 | Solar cell auto plate separation equipment |
CN108745921A (en) * | 2018-03-26 | 2018-11-06 | 江苏金晖光伏有限公司 | A kind of sorting method of inspection of diamond wire saw cut list, polysilicon chip |
CN110491804A (en) * | 2019-08-05 | 2019-11-22 | 马鞍山致青工业设计有限公司 | Continuous detection apparatus is used in a kind of processing of silicon wafer |
CN115360113A (en) * | 2022-08-29 | 2022-11-18 | 深圳市易达凯电子有限公司 | Semi-automatic detection equipment for metal oxide semiconductor chip processing production |
CN115831797A (en) * | 2022-12-26 | 2023-03-21 | 徐州市沂芯微电子有限公司 | Chip detection machine with self-material-taking and installing functions |
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JPS6290945A (en) * | 1986-09-26 | 1987-04-25 | Oki Electric Ind Co Ltd | Conveying method for wafer |
TW520546B (en) * | 2001-03-06 | 2003-02-11 | Samsung Electronics Co Ltd | Plate assembly and a processing apparatus having the same |
JP2005335956A (en) * | 2004-05-27 | 2005-12-08 | Quanta Display Inc | Substrate transfer device |
WO2009096142A1 (en) * | 2008-01-28 | 2009-08-06 | Panasonic Corporation | Substrate detecting apparatus and substrate transfer apparatus |
CN101545948A (en) * | 2008-03-24 | 2009-09-30 | 未来产业株式会社 | Apparatus for transferring packaged chips, test handler and method for manufacturing packaged chips |
KR100931323B1 (en) * | 2009-02-20 | 2009-12-11 | (주)큐엠씨 | LED Chip Sorter |
CN101971320A (en) * | 2008-03-16 | 2011-02-09 | 约纳斯雷德曼自动化技术有限公司 | Method and conveyor belt system having at least one conveyor belt for transporting flat transport goods |
WO2012118447A1 (en) * | 2011-03-02 | 2012-09-07 | Rokko Systems Pte Ltd | Improved system for substrate processing |
CN102723300A (en) * | 2012-06-26 | 2012-10-10 | 江苏爱动力自动化设备有限公司 | Automatic charging device for solar cells |
US20120325148A1 (en) * | 2011-06-22 | 2012-12-27 | Asm Japan K.K. | Method for Positioning Wafers in Multiple Wafer Transport |
CN103199150A (en) * | 2013-03-05 | 2013-07-10 | 哲为(上海)仪器科技有限公司 | Composite type conveying and detecting mechanism for solar cell slices |
JP2014115238A (en) * | 2012-12-12 | 2014-06-26 | Yasunaga Corp | Wafer defect inspection device |
CN103949405A (en) * | 2014-04-02 | 2014-07-30 | 中国电子科技集团公司第四十八研究所 | Blanking system for detecting and sorting silicon chip or cell |
CN104259109A (en) * | 2014-07-28 | 2015-01-07 | 中国电子科技集团公司第四十八研究所 | Stepping silicon wafer quality sorting system |
CN104919582A (en) * | 2013-01-09 | 2015-09-16 | 东京毅力科创株式会社 | Probe apparatus and wafer transfer system |
CN204905217U (en) * | 2015-08-31 | 2015-12-23 | 苏州大学 | Sun energy level polycrystalline silicon piece quality automatic classification device |
CN206194697U (en) * | 2016-06-28 | 2017-05-24 | 南京卓胜自动化设备有限公司 | Type silicon chip or battery piece detect sorter in succession |
-
2016
- 2016-06-28 CN CN201610488991.1A patent/CN107546142B/en active Active
Patent Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6290945A (en) * | 1986-09-26 | 1987-04-25 | Oki Electric Ind Co Ltd | Conveying method for wafer |
TW520546B (en) * | 2001-03-06 | 2003-02-11 | Samsung Electronics Co Ltd | Plate assembly and a processing apparatus having the same |
JP2005335956A (en) * | 2004-05-27 | 2005-12-08 | Quanta Display Inc | Substrate transfer device |
WO2009096142A1 (en) * | 2008-01-28 | 2009-08-06 | Panasonic Corporation | Substrate detecting apparatus and substrate transfer apparatus |
CN101971320A (en) * | 2008-03-16 | 2011-02-09 | 约纳斯雷德曼自动化技术有限公司 | Method and conveyor belt system having at least one conveyor belt for transporting flat transport goods |
CN101545948A (en) * | 2008-03-24 | 2009-09-30 | 未来产业株式会社 | Apparatus for transferring packaged chips, test handler and method for manufacturing packaged chips |
KR100931323B1 (en) * | 2009-02-20 | 2009-12-11 | (주)큐엠씨 | LED Chip Sorter |
WO2012118447A1 (en) * | 2011-03-02 | 2012-09-07 | Rokko Systems Pte Ltd | Improved system for substrate processing |
US20120325148A1 (en) * | 2011-06-22 | 2012-12-27 | Asm Japan K.K. | Method for Positioning Wafers in Multiple Wafer Transport |
CN102723300A (en) * | 2012-06-26 | 2012-10-10 | 江苏爱动力自动化设备有限公司 | Automatic charging device for solar cells |
JP2014115238A (en) * | 2012-12-12 | 2014-06-26 | Yasunaga Corp | Wafer defect inspection device |
CN104919582A (en) * | 2013-01-09 | 2015-09-16 | 东京毅力科创株式会社 | Probe apparatus and wafer transfer system |
CN103199150A (en) * | 2013-03-05 | 2013-07-10 | 哲为(上海)仪器科技有限公司 | Composite type conveying and detecting mechanism for solar cell slices |
CN103949405A (en) * | 2014-04-02 | 2014-07-30 | 中国电子科技集团公司第四十八研究所 | Blanking system for detecting and sorting silicon chip or cell |
CN104259109A (en) * | 2014-07-28 | 2015-01-07 | 中国电子科技集团公司第四十八研究所 | Stepping silicon wafer quality sorting system |
CN204905217U (en) * | 2015-08-31 | 2015-12-23 | 苏州大学 | Sun energy level polycrystalline silicon piece quality automatic classification device |
CN206194697U (en) * | 2016-06-28 | 2017-05-24 | 南京卓胜自动化设备有限公司 | Type silicon chip or battery piece detect sorter in succession |
Non-Patent Citations (1)
Title |
---|
贺相: "录放像机机芯自动装配线介绍", 组合机床与自动化加工技术, no. 08, pages 21 - 25 * |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108198912A (en) * | 2018-02-24 | 2018-06-22 | 常州亿晶光电科技有限公司 | Solar cell auto plate separation equipment |
CN108198912B (en) * | 2018-02-24 | 2020-01-31 | 常州亿晶光电科技有限公司 | Solar cell automatic slicing equipment |
CN108745921A (en) * | 2018-03-26 | 2018-11-06 | 江苏金晖光伏有限公司 | A kind of sorting method of inspection of diamond wire saw cut list, polysilicon chip |
CN110491804A (en) * | 2019-08-05 | 2019-11-22 | 马鞍山致青工业设计有限公司 | Continuous detection apparatus is used in a kind of processing of silicon wafer |
CN115360113A (en) * | 2022-08-29 | 2022-11-18 | 深圳市易达凯电子有限公司 | Semi-automatic detection equipment for metal oxide semiconductor chip processing production |
CN115360113B (en) * | 2022-08-29 | 2024-08-02 | 深圳市易达凯电子有限公司 | Semi-automatic detection equipment for metal oxide semiconductor chip processing production |
CN115831797A (en) * | 2022-12-26 | 2023-03-21 | 徐州市沂芯微电子有限公司 | Chip detection machine with self-material-taking and installing functions |
CN115831797B (en) * | 2022-12-26 | 2023-10-13 | 徐州市沂芯微电子有限公司 | Chip detector with self-feeding installation function |
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CN107546142B (en) | 2024-03-29 |
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PB01 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
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CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Xu Ming Inventor after: Zhang Chi Inventor after: Wang Zhigang Inventor after: Sun Xiaojun Inventor after: Wang Sihai Inventor before: Zhang Chi Inventor before: Wang Zhigang Inventor before: Sun Xiaojun Inventor before: Wang Sihai |
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CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: 211162 No. 3 Xiyan Road, Jiangning Binjiang Economic Development Zone, Nanjing City, Jiangsu Province Applicant after: NANJING TOPSTEK AUTOMATION EQUIPMENT CO.,LTD. Address before: 210000 Tianyuan West Road, Jiangning District, Jiangsu, No. 108, No. Applicant before: NANJING TOPSTEK AUTOMATION EQUIPMENT CO.,LTD. |
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GR01 | Patent grant | ||
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A continuous silicon or battery detection and classification device Granted publication date: 20240329 Pledgee: China Postal Savings Bank Co.,Ltd. Nanjing Branch Pledgor: NANJING TOPSTEK AUTOMATION EQUIPMENT CO.,LTD. Registration number: Y2024980013155 |