CN106124525A - A kind of crystalline silicon blocks surface grinding and defects inspecting integrated apparatus - Google Patents
A kind of crystalline silicon blocks surface grinding and defects inspecting integrated apparatus Download PDFInfo
- Publication number
- CN106124525A CN106124525A CN201610716409.2A CN201610716409A CN106124525A CN 106124525 A CN106124525 A CN 106124525A CN 201610716409 A CN201610716409 A CN 201610716409A CN 106124525 A CN106124525 A CN 106124525A
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- CN
- China
- Prior art keywords
- crawler belt
- infrared
- silico briquette
- crystalline silicon
- mechanical arms
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses a kind of crystalline silicon blocks surface grinding and defects inspecting integrated apparatus, including kibbling mill, Refining apparatus, clearing and drying device, infrared detection device and band turbine；Wherein, described band turbine is provided with transmission crawler belt, transmits crawler belt and is used for placing silico briquette；The side transmitting crawler belt is disposed with kibbling mill, Refining apparatus, clearing and drying device and infrared detection device along the traffic direction transmitting crawler belt；Described infrared detection device includes two mechanical arms, infrared light supply, infrared camera and computer memory device, its mid-infrared light source, infrared camera are oppositely arranged on the both sides transmitting crawler belt, and infrared camera is connected on described computer memory device by data wire；Two mechanical arms, for clamping the two ends of silico briquette, are rotated by two mechanical arms of Serve Motor Control.The present invention saves manually, simple to operate, improves detection efficiency, decreases brilliant brick and scratches, collapses the possibility on limit, enhances the definition of silico briquette defects inspecting.
Description
Technical field
The present invention relates to a kind of crystalline silicon blocks surface grinding and defects inspecting integrated apparatus, belong to infrared acquisition field.
Background technology
The infrared defects inspecting of polysilicon block at present, after mostly taking evolution, artificial block-by-block moves the mode of detection.But
Owing to after evolution, silico briquette surface exists concavo-convex stria, surface roughness is big, has bigger reflection to Infrared, causes infrared spy
Wound is only able to detect some larger-size impure points, and the impure point that size is less becomes fish that has escape the net.These impure points, due to
Hardness is big, easily causes line bow and become big in follow-up multi-wire saw, and gauze vibrations aggravation easily causes scuffing at silicon chip surface
With stria equivalent damage, serious meeting causes broken string, causes a large amount of silicon chip to be scrapped.
For silico briquette outgoing section business, the silico briquette of outgoing has been carried out surface grinding mostly.Client is receiving silico briquette
After, the supplied materials detections such as impurity flaw detection can be re-started.Due to the silico briquette smooth surface after surface grinding, the permeability to infrared light
Good, it is possible to see more tiny impure point.This test result difference caused due to test mode difference, often becomes
The bifurcation point of both sides of supply and demand.
For the difference of silico briquette detection before and after this flour milling, some factory carries out infrared detection after taking silicon block ground surface again
Method, but this method production efficiency is low, easily causes silico briquette surface tear, collapses the feelings such as scarce during manually moving
Shape.Therefore, develop a kind of crystalline silicon blocks surface grinding and defects inspecting integrated apparatus is the most necessary.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the present invention provides a kind of crystalline silicon blocks surface grinding
And defects inspecting integrated apparatus, this device is saved artificial, simple to operate, improves detection efficiency, decreases brilliant brick and scratches, collapses
The possibility on limit, enhances the definition of silico briquette defects inspecting.
Technical scheme: for achieving the above object, the technical solution used in the present invention is:
A kind of crystalline silicon blocks surface grinding and defects inspecting integrated apparatus, including kibbling mill, Refining apparatus, cleaning-drying
Device, infrared detection device and band turbine；
Wherein, described band turbine is provided with transmission crawler belt, transmits crawler belt and is used for placing silico briquette；Transmit crawler belt side along
The traffic direction transmitting crawler belt is disposed with kibbling mill, Refining apparatus, clearing and drying device and infrared detection device；
Described clearing and drying device includes cleaning machine, dehydrator, is oppositely arranged on the both sides transmitting crawler belt；
Described infrared detection device includes two mechanical arms, infrared light supply, infrared camera and computer memory device,
Its mid-infrared light source, infrared camera are oppositely arranged on the both sides transmitting crawler belt, and infrared camera is connected to institute by data wire
State on computer memory device；Two mechanical arms are for clamping the two ends of silico briquette, by two mechanical arms of Serve Motor Control
Rotate the defects inspecting in each face of silico briquette, reduced and manually move the damage caused, and saved artificial.
Further, described cleaning machine is water jet cleaning machine, the impurity on silico briquette surface after cleaning grinding.
Further, described dehydrator is bleed type dehydrator.
Beneficial effect: a kind of crystalline silicon blocks surface grinding of present invention offer and defects inspecting integrated apparatus, will be original
Surface grinding and the infrared defects inspecting two procedures of silico briquette bring together, and become one procedure；Former two people are individually operated can
Become one man operation, and whole process is without manually moving silico briquette, save artificial, decrease silico briquette and scratch, collapse the possibility on limit；
Infrared defects inspecting after being ground silico briquette cleaning, eliminates silico briquette surface line marker, silica flour residual and the impact of other foreign material,
The impurity of more than 0.5mm size can clearly be detected, within detecting time-consuming 30 seconds, improve detection efficiency, enhance silico briquette
The definition of defects inspecting.
Accompanying drawing explanation
Fig. 1 is the present invention a kind of crystalline silicon blocks surface grinding and the structural representation of defects inspecting integrated apparatus；
Figure includes: 1, crystalline silicon blocks, 2, kibbling mill, 3, Refining apparatus, 4, cleaning machine, 5, dehydrator, 6, mechanical arm, 7,
Mechanical arm, 8, infrared light supply, 9, infrared camera, 10, computer operation interface, 11, band turbine.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is further described.
It is illustrated in figure 1 a kind of crystalline silicon blocks surface grinding and defects inspecting integrated apparatus, including kibbling mill 2, fine grinding
Equipment 3, clearing and drying device, infrared detection device and band turbine 11；
Wherein, described band turbine 11 is provided with transmission crawler belt, transmits crawler belt and is used for placing silico briquette 1；Transmit the side of crawler belt
It is disposed with kibbling mill 2, Refining apparatus 3, clearing and drying device and infrared detection device along the traffic direction transmitting crawler belt；
Described clearing and drying device includes cleaning machine 4, dehydrator 5, is oppositely arranged on the both sides transmitting crawler belt；Described cleaning
Machine 4 is water jet cleaning machine, and dehydrator 5 is bleed type dehydrator；
Described infrared detection device includes that mechanical arm 6,7, infrared light supply 8, infrared camera 9 and Computer Storage set
Standby, its mid-infrared light source 8, infrared camera 9 are oppositely arranged on the both sides transmitting crawler belt, and infrared camera 9 is by data wire even
Receive on described computer memory device；Two mechanical arms 6,7, for clamping the two ends of silico briquette 1, pass through Serve Motor Control
Two mechanical arms 6,7 rotate.
The detailed description of the invention of the present invention is as follows:
Silico briquette 1 is rinsed by cleaning machine 4 and is dried by dehydrator 5 after corase grind and fine grinding, reaches to remove silico briquette 1 surface
The purpose of impurity；Then two mechanical arms 6,7 of SERVO CONTROL rotate and make silico briquette 1 rotate 0 degree, 90 degree, 180 degree and 270 degree to see
Examine the impurity situation in 1 four faces of silico briquette；The concrete image transmitting of infrared camera shooting is on computer memory device, through specialty
It is presented on after software processes on computer operation interface 10, detection module the most about 30 seconds, and whole data can be stored in meter
In calculation machine storage device.
The above is only the preferred embodiment of the present invention, it should be pointed out that: for the ordinary skill people of the art
For Yuan, under the premise without departing from the principles of the invention, it is also possible to make some improvements and modifications, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (3)
1. a crystalline silicon blocks surface grinding and defects inspecting integrated apparatus, it is characterised in that include kibbling mill (2), fine grinding
Equipment (3), clearing and drying device, infrared detection device and band turbine (11)；
Wherein, described band turbine (11) is provided with transmission crawler belt, transmits crawler belt and is used for placing silico briquette (1)；Transmit the edge, side of crawler belt
The traffic direction transmission crawler belt is disposed with kibbling mill (2), Refining apparatus (3), clearing and drying device and infrared acquisition dress
Put；
Described clearing and drying device includes cleaning machine (4), dehydrator (5), is oppositely arranged on the both sides transmitting crawler belt；
Described infrared detection device includes that two mechanical arms (6,7), infrared light supply (8), infrared camera (9) and computer are deposited
Storage equipment, its mid-infrared light source (8), infrared camera (9) be oppositely arranged on transmit crawler belt both sides, infrared camera (9) lead to
Cross data wire to be connected on described computer memory device；Two mechanical arms (6,7) are used for clamping the two ends of silico briquette (1), logical
Cross two mechanical arms (6,7) of Serve Motor Control to rotate.
A kind of crystalline silicon blocks surface grinding the most according to claim 1 and defects inspecting integrated apparatus, it is characterised in that
Described cleaning machine (4) is water jet cleaning machine.
A kind of crystalline silicon blocks surface grinding the most according to claim 1 and defects inspecting integrated apparatus, it is characterised in that
Described dehydrator (5) is bleed type dehydrator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610716409.2A CN106124525A (en) | 2016-08-24 | 2016-08-24 | A kind of crystalline silicon blocks surface grinding and defects inspecting integrated apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610716409.2A CN106124525A (en) | 2016-08-24 | 2016-08-24 | A kind of crystalline silicon blocks surface grinding and defects inspecting integrated apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106124525A true CN106124525A (en) | 2016-11-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610716409.2A Pending CN106124525A (en) | 2016-08-24 | 2016-08-24 | A kind of crystalline silicon blocks surface grinding and defects inspecting integrated apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106124525A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108971073A (en) * | 2018-10-15 | 2018-12-11 | 浙江克里蒂弗机器人科技有限公司 | A kind of automated cleaning system comprising photographic device suitable for photovoltaic panel |
| CN109540897A (en) * | 2018-12-29 | 2019-03-29 | 镇江奥博通信设备有限公司 | A kind of fiber adapter detection device |
| CN113030181A (en) * | 2019-12-24 | 2021-06-25 | 阿特斯光伏电力(洛阳)有限公司 | Silicon rod impurity point position determination method |
| CN113751417A (en) * | 2021-08-27 | 2021-12-07 | 苏州斯尔特微电子有限公司 | Wafer grinding and cleaning equipment |
| CN117822090A (en) * | 2022-09-29 | 2024-04-05 | 江苏协鑫硅材料科技发展有限公司 | Purification detection method of impurity-containing silicon material, purification ingot and application of purification ingot |
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2016
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Patent Citations (9)
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108971073A (en) * | 2018-10-15 | 2018-12-11 | 浙江克里蒂弗机器人科技有限公司 | A kind of automated cleaning system comprising photographic device suitable for photovoltaic panel |
| CN109540897A (en) * | 2018-12-29 | 2019-03-29 | 镇江奥博通信设备有限公司 | A kind of fiber adapter detection device |
| CN109540897B (en) * | 2018-12-29 | 2024-04-02 | 镇江奥博通信设备有限公司 | Optical fiber adapter detection device |
| CN113030181A (en) * | 2019-12-24 | 2021-06-25 | 阿特斯光伏电力(洛阳)有限公司 | Silicon rod impurity point position determination method |
| CN113751417A (en) * | 2021-08-27 | 2021-12-07 | 苏州斯尔特微电子有限公司 | Wafer grinding and cleaning equipment |
| CN117822090A (en) * | 2022-09-29 | 2024-04-05 | 江苏协鑫硅材料科技发展有限公司 | Purification detection method of impurity-containing silicon material, purification ingot and application of purification ingot |
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Application publication date: 20161116 |