CN104949667B - 物理量传感器、传感器单元、电子设备以及移动体 - Google Patents

物理量传感器、传感器单元、电子设备以及移动体 Download PDF

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Publication number
CN104949667B
CN104949667B CN201510134544.1A CN201510134544A CN104949667B CN 104949667 B CN104949667 B CN 104949667B CN 201510134544 A CN201510134544 A CN 201510134544A CN 104949667 B CN104949667 B CN 104949667B
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CN
China
Prior art keywords
physical quantity
quantity sensor
signal
circuit
signal processing
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Expired - Fee Related
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CN201510134544.1A
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English (en)
Chinese (zh)
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CN104949667A (zh
Inventor
米泽岳美
村嶋宪行
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Seiko Epson Corp
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Seiko Epson Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Gyroscopes (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
CN201510134544.1A 2014-03-25 2015-03-25 物理量传感器、传感器单元、电子设备以及移动体 Expired - Fee Related CN104949667B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-062508 2014-03-25
JP2014062508A JP6369086B2 (ja) 2014-03-25 2014-03-25 物理量センサー、センサーユニット、電子機器及び移動体

Publications (2)

Publication Number Publication Date
CN104949667A CN104949667A (zh) 2015-09-30
CN104949667B true CN104949667B (zh) 2019-09-06

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Country Status (3)

Country Link
US (1) US10067156B2 (enExample)
JP (1) JP6369086B2 (enExample)
CN (1) CN104949667B (enExample)

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US10345329B2 (en) * 2015-07-07 2019-07-09 Panasonic Intellectual Property Management Co., Ltd. Inertial force sensor
JP6720532B2 (ja) * 2016-01-06 2020-07-08 セイコーエプソン株式会社 回路装置、発振器、電子機器及び移動体
US10191124B2 (en) * 2016-08-26 2019-01-29 Sii Semiconductor Corporation Sensor circuit
US10228555B2 (en) * 2016-09-06 2019-03-12 Stmicroelectronics Ltd Resonance MEMS mirror control system
DE102017205984A1 (de) * 2017-04-07 2018-10-11 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
CN107246890B (zh) * 2017-04-19 2020-08-28 上海矽睿科技有限公司 电容式传感器检测电路及双采样斩波级联结构
DE102018000884A1 (de) * 2018-02-03 2019-08-08 Leopold Kostal Gmbh & Co. Kg Kapazitives Messsystem
JP7172177B2 (ja) * 2018-06-27 2022-11-16 セイコーエプソン株式会社 物理量検出回路、物理量検出装置、電子機器及び移動体
US11368645B2 (en) * 2018-06-27 2022-06-21 Prophesee Sa Image sensor with a plurality of super-pixels
CN112997057B (zh) 2018-09-26 2023-07-18 德克萨斯仪器股份有限公司 具有集成校准机制的方法和传感器系统
US11015914B2 (en) * 2019-01-21 2021-05-25 Novatek Microelectronics Corp. Capacitive image sensing device and capacitive image sensing method
JP7331419B2 (ja) * 2019-04-01 2023-08-23 セイコーエプソン株式会社 集積回路装置、発振器、電子機器及び移動体
JP2021071382A (ja) * 2019-10-31 2021-05-06 セイコーエプソン株式会社 物理量センサー、電子機器及び移動体
JP2022071486A (ja) * 2020-10-28 2022-05-16 セイコーエプソン株式会社 物理量センサー及び慣性計測装置
CN112325755A (zh) * 2020-11-03 2021-02-05 上海艾为电子技术股份有限公司 一种位置传感系统、获取位置传感信号的方法及电子设备
JP7766519B2 (ja) * 2022-02-28 2025-11-10 エイブリック株式会社 物理量センサおよびこれを備える半導体装置

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JPH09243366A (ja) 1996-03-07 1997-09-19 Hitachi Cable Ltd 送電線用運動計測装置
JP4040595B2 (ja) * 2004-04-14 2008-01-30 日本電信電話株式会社 大気汚染物質モニタリングシステム及びセンサ接続インタフェース制御方法
US20060229520A1 (en) * 2005-04-08 2006-10-12 Shunzo Yamashita Controller for sensor node, measurement method for biometric information and its software
JP2007071654A (ja) 2005-09-06 2007-03-22 Japan Aviation Electronics Industry Ltd 振動ジャイロ
JP4820692B2 (ja) * 2006-05-30 2011-11-24 Ｏｋｉセミコンダクタ株式会社 センサ制御回路
JP4449972B2 (ja) * 2006-11-10 2010-04-14 セイコーエプソン株式会社 検出装置、センサ及び電子機器
JP5018028B2 (ja) * 2006-11-10 2012-09-05 セイコーエプソン株式会社 基準電圧供給回路、アナログ回路及び電子機器
JP2008229248A (ja) * 2007-03-23 2008-10-02 Toshiba Corp 睡眠制御装置、方法およびプログラム
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CN101340588B (zh) * 2008-08-20 2010-06-23 炬力集成电路设计有限公司 运动估计方法、装置和多媒体处理器
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CN103472251B (zh) * 2013-08-22 2016-05-18 浙江工业大学 一种降低流速剖面仪信号处理单元功耗的方法及装置

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Publication number Publication date
CN104949667A (zh) 2015-09-30
JP2015184209A (ja) 2015-10-22
US20150276790A1 (en) 2015-10-01
US10067156B2 (en) 2018-09-04
JP6369086B2 (ja) 2018-08-08

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