CN104900653A - Tft布局结构 - Google Patents
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- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 229920005591 polysilicon Polymers 0.000 claims description 3
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
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Abstract
本发明提供一种TFT布局结构,包括受同一控制信号线控制的第一薄膜晶体管(T1)、与第二薄膜晶体管(T2);第一薄膜晶体管(T1)的第一有源层(SC1)、与第二薄膜晶体管(T2)的第二有源层(SC2)位于不同层别,并在空间上层叠设置,第一薄膜晶体管(T1)的第一源极(S1)、及第一漏极(D1)接触第一有源层(SC1),第二薄膜晶体管(T2)的第二源极(S2)、及第二漏极(D2)接触第二有源层(SC2);第一薄膜晶体管(T1)的底栅极层(Bottom Gate)位于第一有源层(SC1)下方,第二薄膜晶体管(T2)的顶栅极层(Top Gate)位于第二有源层(SC2)上方。该TFT布局结构能够缩小电路布局的空间,提升电路布局的灵活度,满足显示面板窄边框、及高分辨率的要求。
Description
技术领域
本发明涉及显示技术领域,尤其涉及一种TFT布局结构。
背景技术
平板显示装置具有机身薄、省电、无辐射等众多优点,得到了广泛的应用。现有的平板显示装置主要包括液晶显示装置(Liquid Crystal Display,LCD)及有机发光二极管显示装置(Organic Light Emitting Display,OLED)。
薄膜晶体管(Thin Film Transistor,TFT)是平板显示装置的重要组成部分。TFT可形成在玻璃基板或塑料基板上,通常作为开关部件和驱动部件用在诸如LCD、OLED等平板显示装置上。对于LCD来说,需要由多个TFT构成的GOA(Gate Drive On Array)电路将栅极驱动器(Gate Drive IC)整合在薄膜晶体管阵列(Array)基板上,以实现逐行扫描对液晶面板进行驱动。对于有源矩阵型OLED(Active Matrix OLED,AMOLED)来说,需要由多个TFT构成的像素补偿电路来对驱动薄膜晶体管的阈值电压进行补偿,以使得AMOLED的显示亮度均匀。
随着全球显示面板竞争日趋激烈,各大显示器生产厂商对窄边框、高分辨率的追求也是越来越高,尤其是在移动显示装置领域,目前搭载的显示面板边框已做到2mm以下、像素密度(Pixels Per Inch,PPI)已高达500以上。对于显示面板的设计来说,更窄的边框意味着更窄的GOA布局空间,更高的PPI意味着更小的子像素面积,在制程能力不变的情况下,电路有效布局的面积就越小,尤其是对于AMOLED显示面板,通常一个子像素里包含有2~7个TFT,这就对电路布局提出了更高的要求。
现有的GOA电路、及AMOLED像素补偿电路通常会涉及到一条控制信号线控制两颗TFT的情况,如图1所示,第一、第二薄膜晶体管T10、T20的栅极均电性连接于一控制信号线G,即所述第一、第二薄膜晶体管T10、T20均受该控制信号线G的控制;图2为图1所示电路的TFT布局结构图,所述第一薄膜晶体管T10的源极S10、漏极D10均形成于图案化的有源层SC上,所述第二薄膜晶体管T20的源极S20、漏极D20同样均形成于图案化的有源层SC上,连接于一控制信号线的同一栅极层Gate同时对第一、第二薄膜晶体管T10、T20进行控制。由于所述第一薄膜晶体管T10的源极S10、漏极D10及第二薄膜晶体管T20的源极S20、漏极D20均形成于同一层图案化的有源层SC上,所述第一、第二薄膜晶体管T10、T20只能沿有源层SC的图案化排布方向进行平行间隔布局,占用的布局空间较大,不利于窄边框、及高分辨率显示面板的开发。
发明内容
本发明的目的在于提供一种TFT布局结构,适用于GOA电路、及AMOLED像素补偿电路,能够在保证电路功能的情况下缩小电路布局的空间,增加显示面板的开口率,满足显示面板窄边框、及高分辨率的要求。
为实现上述目的,本发明提供一种TFT布局结构,包括受同一控制信号线控制的第一薄膜晶体管、与第二薄膜晶体管;
所述第一薄膜晶体管包括底栅极层、第一有源层、第一源极、及第一漏极,所述第二薄膜晶体管包括第二有源层、第二源极、第二漏极、及顶栅极层;
所述第一有源层、与第二有源层位于不同层别,并在空间上层叠设置,所述第一源极、及第一漏极接触第一有源层,所述第二源极、及第二漏极接触第二有源层;
所述底栅极层位于第一有源层下方,所述顶栅极层位于第二有源层上方,所述底栅极层、与顶栅极层均电性连接所述控制信号线以分别控制第一薄膜晶体管、与第二薄膜晶体管的打开与关闭。
所述第一有源层、与第二有源层在空间上相互交叉。
所述TFT布局结构还包括基板、第一绝缘层、钝化层、及第二绝缘层;所述第一源极、及第一漏极与所述第二源极、及第二漏极位于同一层别或不同层别。
所述底栅极层设于所述基板上,所述第一绝缘层设于所述底栅极层、及基板上,所述第一有源层设于第一绝缘层上,所述钝化层设于所述第一有源层、及第一绝缘层上,所述第一源极、及第一漏极设于所述钝化层上并分别通过钝化层过孔接触所述第一有源层的两端,所述第二有源层设于所述钝化层上,所述第二源极、及第二漏极设于所述钝化层上并分别覆盖所述第二有源层的两端,所述第二绝缘层设于所述第一源极、第一漏极、第二有源层、第二源极、第二漏极、及钝化层上,所述顶栅极层设于第二绝缘层上。
所述底栅极层设于所述基板上,所述第一绝缘层设于所述底栅极层、及基板上,所述第一有源层设于第一绝缘层上,所述第一源极、及第一漏极设于所述第一绝缘层上并分别覆盖所述第一有源层的两端,所述钝化层设于所述第一有源层、第一源极、第一漏极、及第一绝缘层上,所述第二有源层设于所述钝化层上,所述第二源极、及第二漏极设于所述钝化层上并分别覆盖所述第二有源层的两端,所述第二绝缘层设于所述第二有源层、第二源极、第二漏极、及钝化层上,所述顶栅极层设于第二绝缘层上。
所述底栅极层、第一源极、第一漏极、第二源极、第二漏极、及顶栅极层的材料为钼、钛、铝、铜中的一种或多种的堆栈组合。
所述第一有源层、及第二有源层的材料为非晶硅基半导体、多晶硅基半导体、氧化锌基半导体中的一种。
所述第一绝缘层、及第二绝缘层的材料为氮化硅、或氧化硅、或二者的组合。
所述第一有源层、与第二有源层均为n型半导体或均为p型半导体。
所述第一有源层、与第二有源层的其中之一为p型半导体,另一个为n型半导体。
本发明的有益效果:本发明提供的一种TFT布局结构,为受同一控制信号线控制的第一薄膜晶体管、与第二薄膜晶体管分别设置第一有源层、与第二有源层、及底栅极层、与顶栅极层,并将第一有源层、与第二有源层设于不同层别,使二者在空间上层叠设置,使得受同一控制信号线控制的两颗TFT在空间上层叠设置,能够在保证电路功能的情况下缩小电路布局的空间,提升电路布局的灵活度,增加显示面板的开口率,满足显示面板窄边框、及高分辨率的要求,适用于GOA电路、及AMOLED像素补偿电路。
为了能更进一步了解本发明的特征以及技术内容,请参阅以下有关本发明的详细说明与附图,然而附图仅提供参考与说明用,并非用来对本发明加以限制。
附图说明
下面结合附图,通过对本发明的具体实施方式详细描述,将使本发明的技术方案及其它有益效果显而易见。
附图中,
图1为一种现有的TFT布局电路图;
图2为图1所示电路的TFT布局结构图;
图3为本发明的TFT布局结构的俯视图;
图4为对应于图3中A-A处剖面图的一种实施方式;
图5为对应于图3中A-A处剖面图的另一种实施方式;
图6为对应于图3中B-B处的剖面图;
图7为对应于图3所示TFT布局结构的电路图。
具体实施方式
为更进一步阐述本发明所采取的技术手段及其效果,以下结合本发明的优选实施例及其附图进行详细描述。
请同时参阅图3、图4、及图6,本发明提供一种TFT布局结构,包括受同一控制信号线控制的第一薄膜晶体管T1、与第二薄膜晶体管T2。
所述第一薄膜晶体管T1包括底栅极层Bottom Gate、第一有源层SC1、第一源极S1、及第一漏极D1;所述第二薄膜晶体管T2包括第二有源层SC2、第二源极S2、第二漏极D2、及顶栅极层Top Gate。
所述第一有源层SC1、与第二有源层SC2位于不同层别,并在空间上层叠设置,所述第一源极S1、及第一漏极D1接触第一有源层SC1,所述第二源极S2、及第二漏极D2接触第二有源层SC2;所述底栅极层Bottom Gate位于第一有源层SC1下方,所述顶栅极层Top Gate位于第二有源层SC2上方,使得所述第一薄膜晶体管T1、与第二薄膜晶体管T2这两颗TFT在空间上层叠设置。
所述底栅极层Bottom Gate、与顶栅极层Top Gate均电性连接所述控制信号线以分别控制第一薄膜晶体管T1、与第二薄膜晶体管T2的打开与关闭。
如图7所示,本发明的TFT布局结构实现了所述第一薄膜晶体管T1、与第二薄膜晶体管T2在空间上层叠设置,相比于现有技术将受控于同一控制信号线的两颗TFT沿有源层SC的图案化排布方向进行平行间隔布局,能够大幅度缩小电路布局的空间,从而增加显示面板的开口率,满足显示面板窄边框、及高分辨率的要求,同时,设置第一有源层SC1、与第二有源层SC2及底栅极层Bottom Gate、与顶栅极层Top Gate这样的双有源层、双栅极层的结构还能够提升电路布局的灵活度。
进一步地,如图3所示,所述第一有源层SC1、与第二有源层SC2在空间上相互交叉,以进一步缩小电路布局的空间,并便于区分第一源极S1、与第一漏极D1在第一有源层SC1上的引出点、及第二源极S2、与第二漏极D2在第二有源层SC2上的引出点。
具体地,本发明的TFT布局结构还包括基板1、第一绝缘层3、钝化层5、及第二绝缘层7。如图4、图6所示,所述第一源极S1、及第一漏极D1与所述第二源极S2、及第二漏极D2可位于同一层别。所述底栅极层Bottom Gate设于所述基板1上;所述第一绝缘层3设于所述底栅极层Bottom Gate、及基板1上;所述第一有源层SC1设于第一绝缘层3上;所述钝化层5设于所述第一有源层SC1、及第一绝缘层3上;所述第一源极S1、及第一漏极D1设于所述钝化层5上并分别通过钝化层过孔51接触所述第一有源层SC1的两端;所述第二有源层SC2设于所述钝化层5上;所述第二源极S2、及第二漏极D2设于所述钝化层5上并分别覆盖所述第二有源层SC2的两端,使得所述第二源极S2、及第二漏极D2分别与第二有源层SC2形成电性接触;所述第二绝缘层7设于所述第一源极S1、第一漏极D1、第二有源层SC2、第二源极S2、第二漏极D2、及钝化层5上;所述顶栅极层Top Gate设于第二绝缘层7上。在此种实施方式中,所述第一源极S1、及第一漏极D1与所述第二源极S2、及第二漏极D2均位于钝化层5上。
当然,所述第一源极S1、及第一漏极D1与所述第二源极S2、及第二漏极D2也可位于不同层别,如图5、图6所示,所述底栅极层Bottom Gate设于所述基板1上;所述第一绝缘层3设于所述底栅极层Bottom Gate、及基板1上;所述第一有源层SC1设于第一绝缘层3上;所述第一源极S1、及第一漏极D1设于所述第一绝缘层3上并分别覆盖所述第一有源层SC1的两端,使得所述第一源极S1、及第一漏极D1分别与第一有源层SC1形成电性接触;所述钝化层5设于所述第一有源层SC1、第一源极S1、第一漏极D1、及第一绝缘层3上;所述第二有源层SC2设于所述钝化层5上;所述第二源极S2、及第二漏极D2设于所述钝化层5上并分别覆盖所述第二有源层SC2的两端,使得所述第二源极S2、及第二漏极D2分别与第二有源层SC2形成电性接触;所述第二绝缘层7设于所述第二有源层SC2、第二源极S2、第二漏极D2、及钝化层5上;所述顶栅极层Top Gate设于第二绝缘层7上。在此种实施方式中,所述第一源极S1、及第一漏极D1位于所述第一绝缘层3上,而所述第二源极S2、及第二漏极D2位于钝化层5上。
可选地,所述基板1为玻璃基板或塑料基板。
所述底栅极层Bottom Gate、第一源极S1、第一漏极D1、第二源极S2、第二漏极D2、及顶栅极层Top Gate的材料为钼、钛、铝、铜中的一种或多种的堆栈组合。
所述第一有源层SC1、及第二有源层SC2的材料为非晶硅基半导体、多晶硅基半导体、氧化锌基半导体中的一种。
所述第一有源层SC1、与第二有源层SC2可均为n型半导体或均为p型半导体。此种情况下,所述底栅极层Bottom Gate与顶栅极层Top Gate受控制信号线控制,使第一薄膜晶体管T1与第二薄膜晶体管T2同时打开或关闭。
或者,所述第一有源层SC1、与第二有源层SC2的其中之一为p型半导体,另一个为n型半导体。此种情况下,第一薄膜晶体管T1与第二薄膜晶体管T2具有相反的阈值电压,所述底栅极层Bottom Gate与顶栅极层Top Gate受控制信号线控制,当第一薄膜晶体管T1打开时,第二薄膜晶体管T2关闭,而当第一薄膜晶体管T1关闭时,第二薄膜晶体管T2打开。
所述第一绝缘层3、及第二绝缘层7的材料为氮化硅、或氧化硅、或二者的组合。
上述TFT布局结构适用于GOA电路、及AMOLED像素补偿电路,能够在保证电路功能的情况下缩小电路布局的空间,提升电路布局的灵活度,增加显示面板的开口率,满足显示面板窄边框、及高分辨率的要求。
综上所述,本发明的TFT布局结构,为受同一控制信号线控制的第一薄膜晶体管、与第二薄膜晶体管分别设置第一有源层、与第二有源层、及底栅极层、与顶栅极层,并将第一有源层、与第二有源层设于不同层别,使二者在空间上层叠设置,使得受同一控制信号线控制的两颗TFT在空间上层叠设置,能够在保证电路功能的情况下缩小电路布局的空间,提升电路布局的灵活度,增加显示面板的开口率,满足显示面板窄边框、及高分辨率的要求,适用于GOA电路、及AMOLED像素补偿电路。
以上所述,对于本领域的普通技术人员来说,可以根据本发明的技术方案和技术构思作出其他各种相应的改变和变形,而所有这些改变和变形都应属于本发明权利要求的保护范围。
Claims (10)
1.一种TFT布局结构,其特征在于,包括受同一控制信号线控制的第一薄膜晶体管(T1)、与第二薄膜晶体管(T2);
所述第一薄膜晶体管(T1)包括底栅极层(Bottom Gate)、第一有源层(SC1)、第一源极(S1)、及第一漏极(D1),所述第二薄膜晶体管(T2)包括第二有源层(SC2)、第二源极(S2)、第二漏极(D2)、及顶栅极层(Top Gate);
所述第一有源层(SC1)、与第二有源层(SC2)位于不同层别,并在空间上层叠设置,所述第一源极(S1)、及第一漏极(D1)接触第一有源层(SC1),所述第二源极(S2)、及第二漏极(D2)接触第二有源层(SC2);
所述底栅极层(Bottom Gate)位于第一有源层(SC1)下方,所述顶栅极层(Top Gate)位于第二有源层(SC2)上方,所述底栅极层(Bottom Gate)、与顶栅极层(Top Gate)均电性连接所述控制信号线以分别控制第一薄膜晶体管(T1)、与第二薄膜晶体管(T2)的打开与关闭。
2.如权利要求1所述的TFT布局结构,其特征在于,所述第一有源层(SC1)、与第二有源层(SC2)在空间上相互交叉。
3.如权利要求2所述的TFT布局结构,其特征在于,还包括基板(1)、第一绝缘层(3)、钝化层(5)、及第二绝缘层(7);所述第一源极(S1)、及第一漏极(D1)与所述第二源极(S2)、及第二漏极(D2)位于同一层别或不同层别。
4.如权利要求3所述的TFT布局结构,其特征在于,所述底栅极层(BottomGate)设于所述基板(1)上,所述第一绝缘层(3)设于所述底栅极层(BottomGate)、及基板(1)上,所述第一有源层(SC1)设于第一绝缘层(3)上,所述钝化层(5)设于所述第一有源层(SC1)、及第一绝缘层(3)上,所述第一源极(S1)、及第一漏极(D1)设于所述钝化层(5)上并分别通过钝化层过孔(51)接触所述第一有源层(SC1)的两端,所述第二有源层(SC2)设于所述钝化层(5)上,所述第二源极(S2)、及第二漏极(D2)设于所述钝化层(5)上并分别覆盖所述第二有源层(SC2)的两端,所述第二绝缘层(7)设于所述第一源极(S1)、第一漏极(D1)、第二有源层(SC2)、第二源极(S2)、第二漏极(D2)、及钝化层(5)上,所述顶栅极层(Top Gate)设于第二绝缘层(7)上。
5.如权利要求3所述的TFT布局结构,其特征在于,所述底栅极层(BottomGate)设于所述基板(1)上,所述第一绝缘层(3)设于所述底栅极层(BottomGate)、及基板(1)上,所述第一有源层(SC1)设于第一绝缘层(3)上,所述第一源极(S1)、及第一漏极(D1)设于所述第一绝缘层(3)上并分别覆盖所述第一有源层(SC1)的两端,所述钝化层(5)设于所述第一有源层(SC1)、第一源极(S1)、第一漏极(D1)、及第一绝缘层(3)上,所述第二有源层(SC2)设于所述钝化层(5)上,所述第二源极(S2)、及第二漏极(D2)设于所述钝化层(5)上并分别覆盖所述第二有源层(SC2)的两端,所述第二绝缘层(7)设于所述第二有源层(SC2)、第二源极(S2)、第二漏极(D2)、及钝化层(5)上,所述顶栅极层(Top Gate)设于第二绝缘层(7)上。
6.如权利要求3所述的TFT布局结构,其特征在于,所述底栅极层(BottomGate)、第一源极(S1)、第一漏极(D1)、第二源极(S2)、第二漏极(D2)、及顶栅极层(Top Gate)的材料为钼、钛、铝、铜中的一种或多种的堆栈组合。
7.如权利要求3所述的TFT布局结构,其特征在于,所述第一有源层(SC1)、及第二有源层(SC2)的材料为非晶硅基半导体、多晶硅基半导体、氧化锌基半导体中的一种。
8.如权利要求3所述的TFT布局结构,其特征在于,所述第一绝缘层(3)、及第二绝缘层(7)的材料为氮化硅、或氧化硅、或二者的组合。
9.如权利要求7所述的TFT布局结构,其特征在于,所述第一有源层(SC1)、与第二有源层(SC2)均为n型半导体或均为p型半导体。
10.如权利要求7所述的TFT布局结构,其特征在于,所述第一有源层(SC1)、与第二有源层(SC2)的其中之一为p型半导体,另一个为n型半导体。
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US9768203B2 (en) | 2017-09-19 |
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CN104900653B (zh) | 2017-12-29 |
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