CN104885315B - 激光发射装置和主振荡器功率放大器系统 - Google Patents

激光发射装置和主振荡器功率放大器系统 Download PDF

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Publication number
CN104885315B
CN104885315B CN201380067151.2A CN201380067151A CN104885315B CN 104885315 B CN104885315 B CN 104885315B CN 201380067151 A CN201380067151 A CN 201380067151A CN 104885315 B CN104885315 B CN 104885315B
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CN
China
Prior art keywords
laser
grating
emitting device
lens
light
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Expired - Fee Related
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CN201380067151.2A
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English (en)
Chinese (zh)
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CN104885315A (zh
Inventor
藤田五郎
冈美智雄
吉田浩
前田史贞
植田充纪
田中健二
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Sony Corp
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Sony Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H01S3/1055—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length one of the reflectors being constituted by a diffraction grating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0267—Integrated focusing lens
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/50—Amplifier structures not provided for in groups H01S5/02 - H01S5/30
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00—Functional characteristics
    • H01S2301/02—ASE (amplified spontaneous emission), noise; Reduction thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H01S5/0064—Anti-reflection components, e.g. optical isolators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/023—Mount members, e.g. sub-mount members
    • H01S5/02325—Mechanically integrated components on mount members or optical micro-benches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0265—Intensity modulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/065—Mode locking; Mode suppression; Mode selection ; Self pulsating
    • H01S5/0657—Mode locking, i.e. generation of pulses at a frequency corresponding to a roundtrip in the cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4006—Injection locking

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Semiconductor Lasers (AREA)
CN201380067151.2A 2012-12-27 2013-10-23 激光发射装置和主振荡器功率放大器系统 Expired - Fee Related CN104885315B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012-285027 2012-12-27
JP2012285027A JP6273089B2 (ja) 2012-12-27 2012-12-27 レーザ射出装置及びレーザ射出装置の製造方法
PCT/JP2013/006271 WO2014103117A1 (en) 2012-12-27 2013-10-23 Laser emitting apparatus and master oscillator power amplifier system

Publications (2)

Publication Number Publication Date
CN104885315A CN104885315A (zh) 2015-09-02
CN104885315B true CN104885315B (zh) 2018-03-27

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CN201380067151.2A Expired - Fee Related CN104885315B (zh) 2012-12-27 2013-10-23 激光发射装置和主振荡器功率放大器系统

Country Status (5)

Country Link
US (1) US9496685B2 (enExample)
EP (1) EP2939316B1 (enExample)
JP (1) JP6273089B2 (enExample)
CN (1) CN104885315B (enExample)
WO (1) WO2014103117A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015082088A (ja) 2013-10-24 2015-04-27 ソニー株式会社 レーザ走査型顕微鏡システムおよびレーザ光強度設定方法
JP2015125177A (ja) 2013-12-25 2015-07-06 ソニー株式会社 顕微鏡システムおよびその画像データ転送方法
JP6171970B2 (ja) 2014-02-10 2017-08-02 ソニー株式会社 レーザ走査型顕微鏡装置および制御方法
JP2016181643A (ja) * 2015-03-25 2016-10-13 株式会社アマダホールディングス 半導体レーザ発振器
CN106340801A (zh) * 2016-01-29 2017-01-18 北京杏林睿光科技有限公司 一种半导体激光器单元及其安装方法
JP6780267B2 (ja) * 2016-03-17 2020-11-04 大日本印刷株式会社 レーザ照射装置
WO2017183210A1 (ja) 2016-04-22 2017-10-26 ギガフォトン株式会社 レーザ装置
WO2018061210A1 (ja) 2016-09-30 2018-04-05 ギガフォトン株式会社 レーザ装置
CA3176686A1 (en) 2021-03-25 2022-09-29 Illumina, Inc. Apparatus and methods for transmitting light
WO2024180728A1 (ja) * 2023-03-01 2024-09-06 三菱電機株式会社 レーザー光源装置及びレーザー光源装置適用機器

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4530574A (en) * 1982-07-28 1985-07-23 Xerox Corporation Beam collimation and focusing of multi-emitter or broad emitter lasers
US4942583A (en) * 1988-06-17 1990-07-17 Hewlett-Packard Company Misalignment-tolerant, grating-tuned external-cavity laser
CN2924866Y (zh) * 2006-03-31 2007-07-18 中国科学院上海光学精密机械研究所 激光二极管阵列双反馈外腔激光器
CN201126923Y (zh) * 2007-08-21 2008-10-01 长春德信光电技术有限公司 一种大功率半导体激光光源装置
CN101604818A (zh) * 2009-06-30 2009-12-16 山东远普光学股份有限公司 连续无跳模可调谐光栅外腔半导体激光器
CN102025102A (zh) * 2009-09-23 2011-04-20 中国计量科学研究院 一种窄线宽激光器
CN102273030A (zh) * 2008-11-04 2011-12-07 麻省理工学院 二维激光元件的外腔一维多波长光束合并
CN102570298A (zh) * 2010-10-26 2012-07-11 索尼公司 激光二极管组件和半导体光学放大器组件

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05218538A (ja) * 1992-01-31 1993-08-27 Matsushita Giken Kk エキシマレ−ザ加工装置
US5452312A (en) 1993-10-18 1995-09-19 Matsushita Electric Industrial Co., Ltd. Short-wavelength laser light source and optical information processing aparatus
JP4022355B2 (ja) * 2000-03-10 2007-12-19 三菱電機株式会社 レーザ加工装置およびレーザ加工方法およびこの加工方法による光導波路の製造方法
JP2002116062A (ja) * 2000-10-11 2002-04-19 Ricoh Co Ltd 光学式変位検出装置
JP3795500B2 (ja) * 2004-05-11 2006-07-12 独立行政法人科学技術振興機構 リトロー型外部共振器半導体レーザーにおける光軸のずれの補正方法および装置
CN101194402B (zh) * 2005-01-24 2011-04-20 索尔实验室公司 具有快速波长扫描的紧凑多模激光器
JP3126647U (ja) * 2006-08-24 2006-11-02 株式会社島津製作所 レーザー光励起型フォトルミネッセンス測定装置
JP2008071798A (ja) * 2006-09-12 2008-03-27 Sharp Corp レーザ光源装置
JP2008130805A (ja) * 2006-11-21 2008-06-05 Yokogawa Electric Corp 外部共振器型波長可変光源
JP2008192902A (ja) * 2007-02-06 2008-08-21 Sharp Corp レーザ光源装置
JP4947367B2 (ja) * 2007-07-18 2012-06-06 横河電機株式会社 外部共振器型の波長可変光源
JP5870509B2 (ja) * 2011-05-30 2016-03-01 ソニー株式会社 光源装置、光学ピックアップ、記録装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4530574A (en) * 1982-07-28 1985-07-23 Xerox Corporation Beam collimation and focusing of multi-emitter or broad emitter lasers
US4942583A (en) * 1988-06-17 1990-07-17 Hewlett-Packard Company Misalignment-tolerant, grating-tuned external-cavity laser
CN2924866Y (zh) * 2006-03-31 2007-07-18 中国科学院上海光学精密机械研究所 激光二极管阵列双反馈外腔激光器
CN201126923Y (zh) * 2007-08-21 2008-10-01 长春德信光电技术有限公司 一种大功率半导体激光光源装置
CN102273030A (zh) * 2008-11-04 2011-12-07 麻省理工学院 二维激光元件的外腔一维多波长光束合并
CN101604818A (zh) * 2009-06-30 2009-12-16 山东远普光学股份有限公司 连续无跳模可调谐光栅外腔半导体激光器
CN102025102A (zh) * 2009-09-23 2011-04-20 中国计量科学研究院 一种窄线宽激光器
CN102570298A (zh) * 2010-10-26 2012-07-11 索尼公司 激光二极管组件和半导体光学放大器组件

Also Published As

Publication number Publication date
US20150325980A1 (en) 2015-11-12
EP2939316A1 (en) 2015-11-04
JP6273089B2 (ja) 2018-01-31
US9496685B2 (en) 2016-11-15
EP2939316B1 (en) 2018-12-05
WO2014103117A1 (en) 2014-07-03
CN104885315A (zh) 2015-09-02
JP2014127651A (ja) 2014-07-07

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