CN104630735B - Device for monitoring temperature and plasma processing device - Google Patents
Device for monitoring temperature and plasma processing device Download PDFInfo
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- CN104630735B CN104630735B CN201310547435.3A CN201310547435A CN104630735B CN 104630735 B CN104630735 B CN 104630735B CN 201310547435 A CN201310547435 A CN 201310547435A CN 104630735 B CN104630735 B CN 104630735B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
Abstract
The present invention provides a kind of device for monitoring temperature and plasma processing device, driver element actuation temperature detection module is in reaction chamber indoor moving in the device for monitoring temperature, so that temperature detecting module detects the temperature of heated object different zones respectively during movement, and the temperature detected is sent to control unit；Control unit according to the temperature that temperature detecting module is sent compared with preset standard temperature, and when deviation be present in the two, the power output for the detection zone corresponding to temperature that calibration heating unit is sent to temperature detecting module.Device for monitoring temperature provided by the invention, it can improve the heating uniformity of heated object, so as to improve processing quality；And can make it that operating process is simple, so as to improve operating efficiency.
Description
Technical field
The invention belongs to semiconductor equipment manufacturing field, and in particular to a kind of device for monitoring temperature and plasma process are set
It is standby.
Background technology
During degassing technique being carried out in semiconductor integrated circuit manufacturing field using PVD equipment and in LED systems
Make during carrying out pre-heating process before plated film using ITO PVD equipments in field, generally use heating bulb will be added
Work workpiece heat to the temperature needed for technique, and be processed technique temperature homogeneity be influence its follow-up processing quality it is important
Factor.
Fig. 1 removes the structure diagram of gas chamber to be existing, referring to Fig. 1, going to be horizontally disposed with gas chamber 10 has quartz window
17, gas chamber 10 will be gone to from top to bottom to be divided into upper chamber 18 and lower chambers 19, wherein, the bottom in lower chambers 19 is set
At least three thimbles 11 are equipped with, the top of at least three thimbles 11 is used to support workpiece to be machined S, in the side wall of lower chambers 19
Piece mouth 12 is provided with, for workpiece to be machined S to be transferred into and out to the passage of gas chamber 10 as manipulator, and is being heated
During when piece mouth 12 remain off, and ensure that lower chambers 19 have certain vacuum；The roof of upper chamber 18 is
Reflecting plate 13, and the installing plate 15 that bulb installation seat 14 is heated for fixing is provided with the upper surface of reflecting plate 13, each
Heat bulb 16 to be arranged on corresponding heating bulb installation seat 14 via through the through hole of reflecting plate 13 and installing plate 15, heating
Bulb 16 carries out heating by quartz window 17 up to the temperature needed for technique to workpiece to be machined.
Using shown in Fig. 1 when going to the gas chamber to heat workpiece to be machined, it is necessary to which advancing with surface is provided with several
The test substrate of thermocouple carries out heating test, to obtain test data in the heating process, during actual process, with this
Test data is that reference is uniformly heated to workpiece to be machined.
However, using the above method to the uniform heating of workpiece to be machined during can have problems with：
First, due to can be right when going the change of the material of the change of process environments of gas chamber or workpiece to be machined
The actual heating-up temperature of workpiece to be machined is impacted, therefore workpiece to be machined is carried out using test data as with reference to difficult to realize
Uniformly heating, so as to cause the poor temperature uniformity of workpiece to be machined, it is poor in turn result in processing quality；
Second, when needing to be adjusted technological temperature, it is necessary to regain test data, this causes operating process to answer
It is miscellaneous, efficiency is low.
The content of the invention
Present invention seek to address that technical problem present in prior art, there is provided a kind of device for monitoring temperature and plasma
Body process equipment, it can not only improve the heating uniformity of heated object, so as to improve processing quality；And it can make
It is simple to obtain operating process, so as to improve operating efficiency.
The present invention provides a kind of device for monitoring temperature, for monitoring the different zones of the heated object in reaction chamber
Temperature to control heating power, it is single that the device for monitoring temperature includes heating unit, detection unit, driver element and control
Member, wherein, the heating unit is used to heat the different zones of the heated object；The detection unit includes temperature
Detection module, the temperature detecting module be used to detecting temperature in the different zones of the heated object, and will detect
Temperature is sent to described control unit；The driver element is used to drive the temperature detecting module to move in the reaction chamber
It is dynamic, so that the temperature detecting module detects the temperature of the heated object different zones respectively during movement；It is described
Control unit is used for the temperature according to temperature detecting module transmission compared with preset standard temperature, and at the two
When deviation be present, the output of the detection zone corresponding to the temperature that the heating unit is sent to the temperature detecting module is calibrated
Power.
Specifically, the heated object includes the multiple regions concentric each other radially divided, the detection unit
Also include position detecting module, the position detecting module is used to detect in real time during the temperature detecting module moves
The position of the temperature detecting module, and send it to described control unit；Described control unit is used for according to the position
The position judgment that detection module is sent is belonged to by the temperature detecting module in the temperature that the opening position is sent to be added
The region of hot body, and by the temperature compared with preset standard temperature, and the heating list is calibrated when the two has deviation
Power output of the member to the region of the heated object.
Specifically, the heated object includes the central area and edge concentric each other radially divided from inside to outside
Region, the heating unit include center heating module and edge heating module, and the center heating module is used for being heated
Heated the central area of body；The edge heating module is used to heat the fringe region of heated object；The drive
Moving cell is used to drive the temperature detecting module to move between the central area of the reaction chamber and fringe region, so that
The temperature detecting module detects the central area of the heated object and the temperature of fringe region respectively during movement,
And send it to described control unit；The position detecting module is used for real during the temperature detecting module moves
When detect the position of the temperature detecting module, and send it to described control unit；Described control unit is used for according to institute
State the temperature category that the position judgment of position detecting module transmission is sent by the temperature detecting module in the opening position
In the central area temperature or edge area temperature of heated object, if belonging to the central area temperature of heated object, by its with
Preset standard temperature is compared, and the power output of the center heating module is calibrated when the two has deviation；If belong to
The edge area temperature of heated object, then by it compared with preset standard temperature, and institute is calibrated when the two has deviation
State the power output of edge heating module.
Specifically, the position detecting module includes magnetic inductor and magnet, wherein the magnetic inductor is arranged on and quilt
The corresponding opening position in the center of calandria, the magnet are arranged on the opening position corresponding with the temperature detecting module, and
With the temperature detecting module synchronizing moving, and the magnetic inductor is arranged to：It is in described in the magnet to be heated
The magnetic field as caused by the magnet is sensed during the central area of body, and the marginal zone of the heated object is in the magnet
The magnetic field as caused by the magnet can not be sensed during domain；The magnetic inductor is when sensing the magnetic field as caused by the magnet
Signal is sent to described control unit；Described control unit is when receiving the signal from the magnetic inductor, it is determined that this
When the temperature that is sent by the temperature detecting module belong to the central area temperature of heated object；Do not receiving from institute
When stating the signal of magnetic inductor, it is determined that the temperature now sent by the temperature detecting module belongs to the side of heated object
Edge regional temperature.
Specifically, the position detecting module includes magnetic inductor and magnet, wherein the magnet is arranged on and the quilt
The corresponding opening position in the center of calandria, the magnetic inductor are arranged on the position corresponding with the temperature detecting module
Place, and with the temperature detecting module synchronizing moving, and the magnetic inductor is arranged to：Institute is in the magnetic inductor
The magnetic field as caused by the magnet is sensed during the central area for stating heated object, and is in described in the magnetic inductor and is added
The magnetic field as caused by the magnet can not be sensed during the fringe region of hot body；The magnetic inductor is being sensed by the magnet
During caused magnetic field signal is sent to described control unit；Described control unit is receiving the signal from the magnetic inductor
When, it is determined that the temperature now sent by the temperature detecting module belongs to the central area temperature of heated object；Not
When receiving the signal from the magnetic inductor, it is determined that the temperature now sent by the temperature detecting module belongs to
The edge area temperature of heated object.
Specifically, the driver element includes electric rotating machine, centre wheel, external gear and internal gear, wherein the centre wheel
Rotary shaft where the heated object plane, and be located at the opening position corresponding with the center of heated object；The external tooth
The rotary shaft of wheel is mutually fixed with the centre wheel, and the external gear is meshed with the internal gear；The electric rotating machine is used for
The centre wheel is driven to rotate, the centre wheel drives the external gear to be revolved round the sun around the rotary shaft of the centre wheel, meanwhile, institute
State external gear rotation under the drive of the internal gear；The temperature detecting module is arranged on the external gear, and described
Rotated during external gear rotation around its rotary shaft.
Specifically, the driver element also includes the expansion link of the adjustable in length in horizontal direction, the expansion link
One end is fixed with the external gear, and the other end of the expansion link is fixed with the temperature detecting module.
Specifically, the detection unit is also included apart from detection module, described to be used to detect itself and institute apart from detection module
The level interval in the heated object radially between temperature detecting module is stated, and sends it to described control unit；Institute
State control unit to be used to judge whether the temperature that the temperature detecting module is sent is less than default minimum temperature, if so, then basis
The length of the expansion link is now adjusted by the level interval sent apart from detection module, so that the distance inspection
The level interval surveyed between module and the temperature detecting module is equal to range correction value；The range correction value is defined as described
The position of temperature detecting module is not less than default minimum temperature and the boundary position less than default minimum temperature in its temperature detected
When putting place and the level interval between detection module.
Specifically, the driver element includes electric rotating machine and elastic component, wherein the rotary shaft of the electric rotating machine is vertical
The plane where heated object, and it is located at the opening position corresponding with the center of heated object；One end of the elastic component and institute
The rotary shaft for stating electric rotating machine is mutually fixed, and the other end of the elastic component is positioned at the upper remote electric rotating machine in the horizontal direction
The position of rotary shaft, and the temperature detecting module is arranged on the other end of the elastic component；The electric rotating machine is used to drive
The dynamic elastic component accelerates rotation or is rotated in deceleration, and the elastic component drives the temperature detecting module to surround the electric rotating machine
Rotary shaft from inside to outside or ecto-entad helical form rotation.
Specifically, the detection unit is also included apart from detection module, described to be used to detect itself and institute apart from detection module
The level interval in the heated object radially between temperature detecting module is stated, and sends it to described control unit；Institute
State control unit to be used to judge whether the temperature that the temperature detecting module is sent is less than default minimum temperature, if so, then basis
The acceleration that the acceleration of the electric rotating machine rotates now is adjusted by the level interval sent apart from detection module
Or the deceleration being rotated in deceleration so that the level interval between detection module and the temperature detecting module be equal to away from
Leave school on the occasion of；The range correction value be defined as temperature for the position of the temperature detecting module detecting at it not less than it is default most
When low temperature and the boundary opening position less than default minimum temperature and the level interval between detection module.
Preferably, the scope of the vertical spacing between the lower surface of the temperature detecting module and the heated object is 5
~10mm.
The present invention also provides a kind of plasma processing device, including using said temperature provided by the invention monitoring dress
Put.
The present invention has following beneficial effects：
Device for monitoring temperature provided by the invention, it is moved by driver element actuation temperature detection module in reaction chamber
Dynamic, temperature detecting module detects the temperature of heated object different zones, and the temperature that will be detected respectively during movement
Be sent to control unit, control unit according to the temperature that temperature detecting module is sent compared with preset standard temperature,
And when the two has deviation, the output for the detection zone corresponding to temperature that calibration heating unit is sent to temperature detecting module
Power, this makes it possible to achieve the temperature adjustment heating unit according to the heated object different zones detected in real time to heating member
The power output of different zones, so as to can not only improve the heating uniformity of heated object, and then processing quality can be improved；
Moreover, when needing to be adjusted technological temperature, it is only necessary to adjust preset standard temperature, this with needing again in the prior art
Obtain test data to compare, can make it that operating process is simple, so as to improve operating efficiency.
Plasma processing device provided by the invention, it uses device for monitoring temperature provided by the invention, not only can be with
The heating uniformity of heated object is improved, so as to improve processing quality；And operating efficiency can be improved, and then can carry
High economic benefit.
Brief description of the drawings
Fig. 1 is the existing structure diagram for going to gas chamber；
Fig. 2 is the theory diagram for the device for monitoring temperature that first embodiment of the invention provides；
Fig. 3 is the structure diagram for the device for monitoring temperature that Fig. 2 is provided；
Fig. 4 a are the sectional view of driver element in Fig. 3；
Fig. 4 b are the structural representation of driver element in Fig. 3；
Fig. 5 is the top view of heating unit in Fig. 3；
Fig. 6 is the mobile route schematic diagram of temperature detecting module；
Fig. 7 is second of structural representation of driver element in Fig. 2；
Fig. 8 is the third structural representation of driver element in Fig. 2；
Fig. 9 is the mobile route schematic diagram of the driver element actuation temperature detection module shown in Fig. 8；
Figure 10 is the theory diagram for the device for monitoring temperature that second embodiment of the invention provides；And
Figure 11 is the structure diagram for the device for monitoring temperature that Figure 10 is provided.
Embodiment
To make those skilled in the art more fully understand technical scheme, the present invention is carried below in conjunction with the accompanying drawings
The device for monitoring temperature and plasma processing device of confession are described in detail.
Fig. 2 is the theory diagram for the device for monitoring temperature that first embodiment of the invention provides.Fig. 3 is the temperature that Fig. 2 is provided
The structure diagram of supervising device.Fig. 4 a are the sectional view of driver element in Fig. 3.Fig. 4 b are the structural representation of driver element in Fig. 3
Figure.The device for monitoring temperature provided also referring to Fig. 2, Fig. 3, Fig. 4 a and Fig. 4 b, the present embodiment, it is located at reaction chamber for monitoring
For the temperature of the different zones of indoor heated object to control heating power, it includes detection unit 20, driver element 21, heating
Unit 22 and control unit 23.Wherein, heating unit 22 is used to heat heated object S different zones, in this implementation
In example, heating unit 22 includes center heating module 221 and edge heating module 222, and center heating module 221 is used for being added
Hot body S central area is heated, and edge heating module 222 is used to heat heated object S fringe region, heats
Unit 22 is heated by the way of bulb is heated to heated object S, and heating bulb includes tungsten filament infrared heating bulb or halogen
Element heating bulb, as shown in figure 5, multiple interval settings heating bulb positioned at outer ring forms edge heating module 221, positioned at interior
Multiple spaced heating bulbs of circle form center heating module 222；Also, in the present embodiment, heated object S includes
Single workpiece to be machined S ', or, heated object S includes multiple workpiece to be machined S ' and for carrying multiple workpieces to be machined
S ' pallet S ".
Detection unit 20 includes temperature detecting module 201, wherein, temperature detecting module senses including non-contact temperature
Device, and positioned at heated object S lower section, and, it is preferable that between temperature detecting module 201 and heated object S lower surface
Vertical spacing H scope is in 5~10mm；Driver element 21 is used for actuation temperature detection module 201 in reaction chamber indoor moving, with
Temperature detecting module 201 is set to detect heated object S different zones respectively during movement（For example, heated object S center
Region and fringe region）Temperature, and send it to control unit 23；Control unit 23 is used for according to temperature detecting module
201 temperature sent are compared with preset standard temperature, and when the two has deviation, and calibration heating unit 22 is to temperature
Spend the power output of the detection zone corresponding to the temperature that detection module 201 is sent.Specifically, when temperature detecting module 201 is sent out
When the temperature sent is more than preset standard temperature, then reduce the output work of center heating module 221 or edge heating module 222
Rate；If the temperature that temperature detecting module 201 is sent is less than preset standard temperature, increase center heating module 221 or
The power output of edge heating module 222；If the temperature that temperature detecting module 201 is sent is equal to preset standard temperature,
Then keep the power output of center heating module 221 or edge heating module 222 constant.
In the present embodiment, driver element 21 includes electric rotating machine 211, centre wheel 212, external gear 213 and internal gear
214.Wherein, the rotary shaft O1O1 of centre wheel 212 is perpendicular to plane where heated object S, and is located at the center with heated object S
Corresponding opening position；The rotary shaft O2O2 of external gear 213 fixes with the phase of centre wheel 212, and external gear 213 and internal gear 214
It is meshed；Electric rotating machine 211 is used to drive centre wheel 212 to rotate, and centre wheel 212 drives external gear 213 around centre wheel 212
Rotary shaft O1O1 revolves round the sun, meanwhile, the rotation under the drive of internal gear 214 of external gear 213；Temperature detecting module 201 is arranged on outer
On gear 213, and rotated in 213 rotation of external gear around its rotary shaft O2O2.It is readily appreciated that, in actual applications, can be with
The factors such as the size according to heated object S, by set respectively the external diameter R2 of external gear 213 and the external diameter R1 of internal gear 214 come
The mobile route of design temperature detection module 201.
Driver element 21 also includes the expansion link 215 of the adjustable in length in horizontal direction, one end of expansion link 215 with it is outer
Gear 213 is fixed, and the other end and the temperature detecting module 201 of expansion link 215 are fixed, and this make it that temperature detecting module 201 is relative
External gear 213 is fixed.In this case, not only can be by setting the external diameter R2 of external gear 213 and the external diameter of internal gear 214
R1 carrys out the mobile route of design temperature detection module 201, and can also set temperature by setting the length D of expansion link 215
The mobile route of detection module 201 is spent, so as to improve the flexibility of device for monitoring temperature and applicability.As shown in fig. 6, it is
The mobile route schematic diagram of temperature detecting module, wherein, heated object S is multiple workpiece to be machined S ' and multiple for carrying
Workpiece to be machined S ' pallet S ' ', also, R2=0.4R1, D=0.5R2=0.2R1, the mobile route of temperature detecting module 201 are
With the long amplitude cycloid at pallet S ' ' center, can be seen that from the mobile route of temperature detecting module 201：Temperature detecting module
201 move between pallet S ' ' central area and fringe region, and its detection is located at pallet S ' ' central areas or marginal zone
The temperature of partial tray lower surface immediately below each workpiece to be machined in domain, this causes the temperature that temperature detecting module 201 detects
Close to workpiece to be machined S ' temperature, therefore external tooth can be set according to the distribution mode of workpiece to be machined S ' on pallet S ' '
External diameter R2, the external diameter R1 of internal gear 214 and the length D of expansion link 215 of wheel 212, to realize the detecting position of temperature detecting module 201
The temperature of partial tray lower surface immediately below each workpiece to be machined S ' of pallet S ' ' central areas or fringe region, this can
To improve the temperature of the detection of temperature detecting module 201 close to workpiece to be machined S ' temperature, so as to improve temperature detection mould
The accuracy of workpiece to be machined S ' temperature of the detection of block 201 in pallet S ' ' central areas and fringe region, and then pass through this
The workpiece to be machined S ' that embodiment provides device for monitoring temperature and can improved in pallet S ' ' central areas and fringe region adds
The uniformity of heat.
It is readily appreciated that, can refering to the mobile route of the actuation temperature detection module 201 of above-mentioned driver element 21 shown in Fig. 6
To realize that temperature detecting module 201 detects heated object S central area and the temperature of fringe region；It can also realize that temperature is examined
The temperature of regional corresponding to the workpiece to be machined S ' surveyed on the detection pallet of module 201 S ' '.Certainly, in actual applications,
It can be moved using the driver element 21 of other structures come actuation temperature detection module 201, to realize that temperature detecting module 201 is right
The different zones of heated object S divisions are detected.
Preferably, in the present embodiment, heated object S includes the multiple regions concentric each other radially divided（Example
Such as, heated object S central area and fringe region）, detection unit 20 also includes position detecting module 202, position detection mould
Block 202 be used in the position of the real-time detection temperature detection module 201 during movement of temperature detecting module 201, and by its
Send to control unit 23.Specifically, position detecting module 202 includes magnetic inductor 202A and magnet 202B.Wherein, magnetic induction
Device 202A is arranged at the center opposite position with heated object S, and magnet 202B is arranged on relative with temperature detecting module 201
The opening position answered, and with the synchronizing moving of temperature detecting module 201, and magnetic inductor 202A is arranged to：At magnet 202B
The magnetic field as caused by magnet 202B is sensed when heated object S central area, and is in heated object S's in magnet 202B
The magnetic field as caused by magnet 202B can not be sensed during fringe region；Magnetic inductor 202A is being sensed as caused by magnet 202B
During magnetic field signal is sent to control unit 23；Control unit 23 is when receiving the signal from magnetic inductor 202A, it is determined that
The temperature now sent by temperature detecting module 201 belongs to heated object S central area temperature；Come from not receiving
During magnetic inductor 202A signal, it is determined that the temperature now sent by temperature detecting module 201 belongs to heated object S's
Edge area temperature.
In actual applications, magnet 202B can also be arranged on to the opening position corresponding with the center of heated object, magnetic
Inductor 202A is arranged on the opening position corresponding with temperature detecting module 201, and with the synchronizing moving of temperature detecting module 201,
In this case, magnetic inductor 202A is arranged to：Sense when magnetic inductor 202A is in heated object S central area
To the magnetic field as caused by magnet 202B, and can not be sensed when magnetic inductor 202A is in heated object S fringe region by
Magnetic field caused by magnet 202B；Magnetic inductor 202A is sent when sensing the magnetic field caused by magnet 202B to control unit 23
Signal.
Control unit 23 is used for according to the position judgment that position detecting module 202 is sent by temperature detecting module 201
Belong to heated object S central area temperature or edge area temperature in the temperature that the opening position is sent, added if belonging to
Hot body S central area temperature（That is, control unit 23 receives the signal from magnetic inductor 202A）, then by itself and pre- bidding
Quasi- temperature is compared, and when deviation be present in the two calibration center heating module 221 power output；If belong to heated object
S edge area temperature（That is, control unit 23 does not receive the signal from magnetic inductor 202A）, then by itself and preset standard
Temperature is compared, and the power output of edge heating module 222 is calibrated when the two has deviation；Wherein, preset standard temperature
Spend for the technological temperature needed for heated object S progress techniques.
It should be noted that in actual applications, driver element 21 can also realize actuation temperature using other structures
Detection module 201 moves between heated object S central area and fringe region, for example, as shown in fig. 7, to be driven in Fig. 2
Second of structural representation of unit, driver element 21 include electric rotating machine 211, the first external gear 212 ', the second external gear
213 ' and internal gear 214 ', wherein, the rotary shaft O1O1 of the first external gear 212 ' is perpendicular to plane where heated object S, and position
In the opening position corresponding with the center of heated object；Second external gear 213 ' is meshed with the first external gear 212 ', and with it is interior
Gear 214 ' is meshed；Electric rotating machine 211 is used to drive the rotation of the first external gear 212 ', and the first external gear 212 ' is driven outside second
Gear 213 ' revolves round the sun around the rotary shaft O1O1 of the first external gear 212 ', meanwhile, the second external gear 213 ' is in internal gear 214 '
Drive lower rotation；Temperature detecting module 201 is arranged on the second external gear 213 ', and is surrounded in the second 213 ' rotation of external gear
Its rotary shaft O2O2 rotates.Moreover, it is similar with the driver element 21 that the present embodiment provides, in addition to the length in horizontal direction
Adjustable expansion link 215 is spent, one end of expansion link 215 is fixed with the second external gear 213 ', the other end and the temperature of expansion link 215
Degree detection module 201 is fixed, also, can also be by setting the external diameter of the external diameter R2 of the second external gear 213 ', internal gear 214 '
The length D of R1 and expansion link 215 carrys out the mobile route of design temperature detection module 201.
And for example, as shown in figure 8, the third structural representation for driver element in Fig. 2, driver element 21 include electric rotating
Machine 211 and elastic component 216, wherein, the rotary shaft of electric rotating machine 211 is located at being added perpendicular to plane where heated object S
The corresponding opening position in the center of hot body；One end of elastic component 216 and the rotary shaft of electric rotating machine 211 are mutually fixed, elastic component 216
The other end positioned at the position of the upper rotary shaft away from electric rotating machine 211 in the horizontal direction, and temperature detecting module 201 is arranged on
On the other end of elastic component 216；Electric rotating machine 211 is used to drive elastic component 216 to accelerate rotation or be rotated in deceleration, elastic component 216
Drive temperature detecting module 201 surrounds the rotary shaft of electric rotating machine 211 from inside to outside or ecto-entad helical form rotates.At this
In the case of kind, as shown in figure 9, be the mobile route schematic diagram of the driver element actuation temperature detection module shown in Fig. 8, electric rotating
Machine 211 drives elastic component 216 to be rotated in deceleration, and elastic component 216 drives rotation of the temperature detecting module 201 around electric rotating machine 211
Axle ecto-entad（That is, rotated at the B of position to the A of position）Helical form rotates, it is possible to achieve temperature detecting module 201 is from being added
Moved to fringe region hot body S central area；Electric rotating machine 211 drives elastic component 216 to accelerate rotation, and elastic component 216 drives
Temperature detecting module 201 surrounds the rotary shaft of electric rotating machine 211 from inside to outside（That is, rotated at the A of position to the B of position）Spiral
Shape rotates, it is possible to achieve temperature detecting module 201 moves from heated object S fringe region to central area.It is readily appreciated that, can
With any position between position A and B, electric rotating machine 211 drives elastic component 216 to be accelerated or during retarded motion,
Elastic component 216 drives temperature detecting module 201, and around the rotary shaft of electric rotating machine 211, inwardly or outwardly helical form rotates, with reality
The temperature of existing central area and fringe region of the temperature detecting module 201 during movement to heated object detects.
Wherein, elastic component 216 includes spring, and in this case, driver element 21 also includes connecting rod 217, spring housing
Put on the periphery wall of connecting rod 217, and the driving spring of electric rotating machine 211 accelerate rotation or slow down rotation when, spring along this
Connecting rod 217 is elongated or compressed, the maximum length when length of connecting rod 217 changes not less than spring in its elastic range.
And, it is preferable that electric rotating machine 211 drive elastic component 216 it is even accelerate rotation or it is even be rotated in deceleration, this causes temperature detecting module
The temperature of the radial direction of heated object can be uniformly detected during movement, the detection essence of temperature detecting module can be improved
Degree, so as to improve the control accuracy of device for monitoring temperature.It is readily appreciated that, can be passed through using the driver element shown in Fig. 8
The elastic component 216 of different qualities parameter and the acceleration of the control rotation of electric rotating machine 211 or deceleration is selected to change temperature inspection
Survey the mobile route of module 201.
It should also be noted that, in the present embodiment, the temperature needed for heated object to technique is heated in advance, but due to quilt
The factor such as the material of calandria or heating environment so that the heating uniformity of heated object is poor, therefore, then by using this reality
The device for monitoring temperature for applying example offer improves the heating uniformity of heating member.
It is further to note that in the present embodiment, preset standard temperature is the work needed for heated object S progress techniques
Skill temperature（For example, 300 degrees Celsius）, still, the invention is not limited in this, and in actual applications, preset standard temperature can be with
To belong to the arbitrary temp value in certain temperature range.
In summary, the device for monitoring temperature that the present embodiment provides, it passes through the actuation temperature detection module of driver element 21
201 in reaction chamber indoor moving, and temperature detecting module 201 detects heated object S different zones respectively during movement
Temperature, and the temperature detected is sent to control unit 21, control unit 23 is sent according to temperature detecting module 201
Temperature is compared with preset standard temperature, and when the two has deviation, and calibration heating unit 22 is to temperature detecting module 201
The power output of detection zone corresponding to the temperature of transmission, this makes it possible to achieve regulation power output, and this allows to reality
The now output work according to the temperature adjustment heating unit of the heated object different zones detected in real time to the different zones of heating member
Rate, so as to can not only improve heated object S heating uniformity, and then processing quality can be improved；Moreover, working as needs to work
When skill temperature is adjusted, it is only necessary to adjust preset standard temperature, this regains test data phase with needing in the prior art
Than that can make it that operating process is simple, so as to improve operating efficiency.
Figure 10 is the device for monitoring temperature that second embodiment of the invention provides.Figure 11 is the device for monitoring temperature that Figure 10 is provided
Structure diagram.Also referring to Figure 10 and Figure 11, the device for monitoring temperature that the present embodiment provides carries with above-mentioned first embodiment
The device for monitoring temperature of confession is compared, and equally includes detection unit 20, driver element 21, heating unit 22 and control unit 23, by
In detection unit 20, driver element 21, heating unit 22 and control unit 23 function and relation in the above-described first embodiment
Detailed description is there has been, will not be repeated here.
The device for monitoring temperature only provided below with above-mentioned first embodiment the device for monitoring temperature that the present embodiment provides
Difference be described in detail：Specifically, detection unit 20 also includes apart from detection module 203, is wrapped apart from detection module 203
Include range sensor, apart from detection module 203 be used for detect its between temperature detecting module 201 in heated object S radially
Level interval L, and send it to control unit.When using the driver element 21 shown in Fig. 4 a, Fig. 4 b or shown in Fig. 7,
Control unit 23 is used to judge whether the temperature that temperature detecting module 201 is sent is less than default minimum temperature, presets minimum temperature
Refer to the temperature for being not belonging to heated object S any position, if（That is, the temperature of the current detection of temperature detecting module 201 is not
Belong to heated object S temperature）, then it is flexible according to now being adjusted by the level interval L sent apart from detection module 203
The length of bar 215, so that the level interval between detection module 203 and temperature detecting module 201 is equal to range correction value,
The position that range correction value is defined as temperature detecting module 201 is not less than default minimum temperature and less than pre- in its temperature detected
If during the boundary opening position of minimum temperature and the level interval between detection module 203, i.e. realize temperature detection 201
In heated object S boundary position, therefore, this can be realized examines according to the temperature that automatically adjusts of heated object S actual size
Module 201 and heated object S level interval is surveyed, can further improve the flexibility of device for monitoring temperature.
When using driver element 21 as shown in Figure 9, control unit 23 judges the temperature that temperature detecting module 201 is sent
Whether default minimum temperature is less than, if so, then according to now being adjusted by the level interval L sent apart from detection module 203
The acceleration of the acceleration rotation of section electric rotating machine 211 or the deceleration being rotated in deceleration, so as to be examined apart from detection module 203 and temperature
The level interval surveyed between module 201 is equal to range correction value.
As another technical scheme, the present invention also provides a kind of plasma processing device, including reaction chamber and temperature
Supervising device is spent, heated object is provided with reaction chamber, device for monitoring temperature is used to be heated to heated object technique institute
The temperature needed, and the device for monitoring temperature that the device for monitoring temperature is provided using above-mentioned first embodiment or second embodiment.
It should be noted that the plasma processing device that the present embodiment provides includes copper-connection PVD equipment and ITO
PVD equipment.In the temperature prison for going to provide using above-mentioned first embodiment or second embodiment in gas chamber of copper-connection PVD equipment
Control device is heated to the temperature needed for technique to single workpiece to be machined；Using upper in the preheater room of ITO PVD equipments
The device for monitoring temperature that first embodiment or second embodiment provide is stated to heat the pallet for carrying multiple workpieces to be machined,
To realize indirectly heat workpiece to be machined to the temperature needed for technique.
The plasma processing device that the present embodiment provides, it uses what above-mentioned first embodiment or second embodiment provided
Device for monitoring temperature, heated object S heating uniformity can be not only improved, so as to improve processing quality；And can be with
Operating efficiency is improved, and then can be increased economic efficiency.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, but the invention is not limited in this.For those skilled in the art, the original of the present invention is not being departed from
In the case of reason and essence, various changes and modifications can be made therein, and these variations and modifications are also considered as protection scope of the present invention.
Claims (9)
1. a kind of device for monitoring temperature, for monitor the heated object in reaction chamber different zones temperature to control
Heating power, it is characterised in that the device for monitoring temperature includes heating unit, detection unit, driver element and control unit,
Wherein
The heating unit is used to heat the different zones of the heated object；
The detection unit includes temperature detecting module, and the temperature detecting module is used for the not same district for detecting the heated object
Temperature in domain, and the temperature detected is sent to described control unit；
The driver element is used to drive the temperature detecting module in the reaction chamber indoor moving, so that the temperature detection
Module detects the temperature of the heated object different zones respectively during movement；
Described control unit is used for the temperature according to temperature detecting module transmission compared with preset standard temperature,
And when the two has deviation, calibrate the detection zone corresponding to the temperature that the heating unit is sent to the temperature detecting module
The power output in domain；
The driver element includes electric rotating machine, centre wheel, external gear and internal gear, wherein
The rotary shaft of the centre wheel is located at the position corresponding with the center of heated object perpendicular to plane where heated object
Put place；
The rotary shaft of the external gear is mutually fixed with the centre wheel, and the external gear is meshed with the internal gear；
The electric rotating machine is used to drive the centre wheel to rotate, and the centre wheel drives the external gear to surround the centre wheel
Rotary shaft revolution, meanwhile, external gear rotation under the drive of the internal gear；
The temperature detecting module is arranged on the external gear, and in the external gear rotation around the rotation of the external gear
Rotating shaft rotates.
2. device for monitoring temperature according to claim 1, it is characterised in that the heated object includes radially dividing
Multiple regions concentric each other, the detection unit also includes position detecting module, and the position detecting module is used in institute
The position of the temperature detecting module is detected in real time during stating temperature detecting module movement, and sends it to the control
Unit；
The position judgment that described control unit is used to be sent according to the position detecting module is by the temperature detecting module
Belong to the region of heated object in the temperature that the opening position is sent, and by the temperature compared with preset standard temperature,
And power output of the heating unit to the region of the heated object is calibrated when the two has deviation.
3. device for monitoring temperature according to claim 2, it is characterised in that the heated object is included radially by interior
The central area concentric each other outwards divided and fringe region, the heating unit include center heating module and edge heating
Module, the center heating module are used to heat the central area of heated object；The edge heating module be used for pair
The fringe region of heated object is heated；
The driver element be used to driving the temperature detecting module the central area of the reaction chamber and fringe region it
Between move so that the temperature detecting module detects the central area and edge of the heated object respectively during movement
The temperature in region, and send it to described control unit；The position detecting module is used to move in the temperature detecting module
The position of the temperature detecting module is detected in dynamic process in real time, and sends it to described control unit；
The position judgment that described control unit is used to be sent according to the position detecting module is by the temperature detecting module
Belong to the central area temperature or edge area temperature of heated object in the temperature that the opening position is sent, if belonging to heated
The central area temperature of body, then by it compared with preset standard temperature, and the center is calibrated when the two has deviation
The power output of heating module；If belonging to the edge area temperature of heated object, by it compared with preset standard temperature,
And the power output of the edge heating module is calibrated when the two has deviation.
4. device for monitoring temperature according to claim 3, it is characterised in that the position detecting module includes magnetic inductor
And magnet, wherein
The magnetic inductor is arranged on the opening position corresponding with the center of heated object, and the magnet is arranged on and the temperature
The corresponding opening position of detection module, and with the temperature detecting module synchronizing moving, and
The magnetic inductor is arranged to：Sensed when the magnet is in the central area of the heated object by the magnetic
Magnetic field caused by body, and can not sense when the magnet is in the fringe region of the heated object and be produced by the magnet
Magnetic field；The magnetic inductor sends signal when sensing the magnetic field caused by the magnet to described control unit；
Described control unit is when receiving the signal from the magnetic inductor, it is determined that now by the temperature detecting module
The temperature sent belongs to the central area temperature of heated object；When not receiving the signal from the magnetic inductor,
The temperature for then determining now to be sent by the temperature detecting module belongs to the edge area temperature of heated object.
5. device for monitoring temperature according to claim 3, it is characterised in that the position detecting module includes magnetic inductor
And magnet, wherein
The magnet is arranged on the opening position corresponding with the center of the heated object, the magnetic inductor be arranged on it is described
The corresponding opening position of temperature detecting module, and with the temperature detecting module synchronizing moving, and
The magnetic inductor is arranged to：Sensed when the magnetic inductor is in the central area of the heated object by institute
Magnetic field caused by magnet is stated, and can not be sensed by described when the magnetic inductor is in the fringe region of the heated object
Magnetic field caused by magnet；The magnetic inductor is sent when sensing the magnetic field caused by the magnet to described control unit to be believed
Number；
Described control unit is when receiving the signal from the magnetic inductor, it is determined that now by the temperature detecting module
The temperature sent belongs to the central area temperature of heated object；When not receiving the signal from the magnetic inductor,
The temperature for then determining now to be sent by the temperature detecting module belongs to the edge area temperature of heated object.
6. device for monitoring temperature according to claim 1, it is characterised in that the driver element is additionally included in horizontal direction
The expansion link of upper adjustable in length, one end of the expansion link are fixed with the external gear, the other end of the expansion link and institute
Temperature detecting module is stated to fix.
7. device for monitoring temperature according to claim 6, it is characterised in that the detection unit also includes distance detection mould
Block,
It is described to be used to detect described between detection module and the temperature detecting module described to be added apart from detection module
The level interval of hot body radially, and send it to described control unit；
Described control unit is used to judge whether the temperature that the temperature detecting module is sent is less than default minimum temperature, if so,
Then according to now the length of the expansion link is adjusted by the level interval sent apart from detection module, so that described
Level interval between detection module and the temperature detecting module is equal to range correction value；
The range correction value is defined as the temperature position of the temperature detecting module detected in the temperature detecting module not
Less than default minimum temperature and less than default minimum temperature boundary opening position when and the level between detection module
Spacing.
8. device for monitoring temperature according to claim 1, it is characterised in that the temperature detecting module is heated with described
The scope of vertical spacing between the lower surface of body is in 5~10mm.
9. a kind of plasma processing device, it is characterised in that including using the temperature prison described in claim 1-8 any one
Control device.
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Address after: 100176 No. 8 Wenchang Avenue, Beijing economic and Technological Development Zone Applicant after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Applicant before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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| CB02 | Change of applicant information | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |