CN105200387B - Heating control apparatus and Pvd equipment - Google Patents
Heating control apparatus and Pvd equipment Download PDFInfo
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- CN105200387B CN105200387B CN201410286251.0A CN201410286251A CN105200387B CN 105200387 B CN105200387 B CN 105200387B CN 201410286251 A CN201410286251 A CN 201410286251A CN 105200387 B CN105200387 B CN 105200387B
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Abstract
The invention discloses a kind of heating control apparatus and Pvd equipments.The device includes rotation section, driving device, fixed part, heating member connecting portion and heating member；Heating member connecting portion includes fixing end and fire end, and fixing end is connected with fixed part, and fire end is connected with heating member；Rotation section can drive heating member to be moved in default circular scope under the driving of driving device, and default circular in the radial direction there are displacements described for the movement.It improves the uniformity for going that substrate heats in gas chamber, while can also be needed to carry out concentration heating to a certain position of substrate according to processing, and computer heating control is flexible.
Description
Technical field
The present invention relates to technical field of semiconductors more particularly to a kind of heating control apparatus and Pvd equipment.
Background technology
Physical vapour deposition (PVD) (Physical Vapor Deposition, PVD) technology is most widely made in semi-conductor industry
A kind of film fabrication techniques refer to the thin film preparation process that film is prepared using physical method；And in IC manufacturing
It is mostly magnetron sputtering (Magnetron Sputtering) technology in industry, is mainly used for the deposition of the metallic films such as aluminium, copper,
To form metal contact, metal interconnecting wires etc..
In physical vapour deposition (PVD) making technology, entire technique could be completed by generally requiring 4 steps, and four work steps are pressed suddenly
According to being sequentially respectively：1) degassing technique (Degas)；2) pre-cleaning processes (PreClean)；3) copper barrier layer technique；4) copper is young brilliant
Layer process.
Wherein, substrate is mainly heated to 300 DEG C or so by degassing technique, with remove vapor on substrate and it is other easily
Volatilize impurity.In degassing technique, substrate (heating object) is more demanding to heating uniformity, will if uniformity cannot be guaranteed
There is the volatile impurity of substrate some regions and remove incomplete situation, serious local temperature is uneven to be likely to result in fragment.
Meanwhile the considerations of for production capacity, it is desirable to which substrate can reach technological temperature as soon as possible.
It is general that substrate is heated using the heating lamp of bulb type in traditional technology.After substrate is passed to chamber, put
Put on pedestal, pedestal, which is held up, rises to technique position, by the heating lamp for being fixed on chamber roof soaked quartz window into
(optional) the heating substrate of heater in row irradiation and pedestal.In heating process, the position of light bulb and substrate is fixed.On substrate
The part of face light bulb is directly heated by bulb irradiation, and on substrate not by light bulb cover part, can only transit chamber it is indoor
Thermoradiation efficiency heats, therefore be easy to cause on substrate that the temperature of each several part is unbalanced, and heating uniformity is poor.And due to light bulb
It is fixed with the position of substrate, the indoor temperature uniformity of chamber is substantially non-adjustable.
The content of the invention
Based on this, it is necessary to it be easy to cause that temperature is unbalanced, and heating uniformity is poor for heating unit in traditional technology, and
The substantially nonadjustable problem of temperature uniformity provides a kind of computer heating control that computer heating control can be carried out according to actual demand for heat and fills
It puts and Pvd equipment.
To realize the present invention purpose provide a kind of heating control apparatus, including rotation section, driving device, fixed part, plus
Warmware connecting portion and heating member；
The heating member connecting portion includes fixing end and fire end, and the fixing end is connected with the fixed part, described to add
Hot junction is connected with the heating member；
The rotation section can drive the heating member to be moved in default circular scope under the driving of the driving device
It is dynamic, and default circular in the radial direction there are displacements described for the movement.
As a kind of embodiment of heating control apparatus, the rotation section is cylindrical ring structure, the rotation section
Inside is equipped with flabellum；
The fixed part is cylindrical structure, and the fixed part is located on the outside of fixed part and extends internally recessed equipped with opening
Slot；
The rotation section is coaxially disposed with the fixed part, and the rotation section is set on the outside of the fixed part；
The fixing end of the heating member connecting portion is connected with the bottom of the groove, the fire end of the heating member connecting portion
It is in contact positioned at the opening of the groove, and with the flabellum of the rotation section；
The rotation section is enclosed under the driving of the driving device when rotating about the axis, and the flabellum drives the heating member
It is moved in the rotation section inner ring circular scope, and circular in the radial direction there are displacements described for the movement.
As a kind of embodiment of heating control apparatus, the rotation section is cylindrical structure, the rotation section outside
Equipped with flabellum；
The fixed part is cylindrical ring structure, and the fixed part is located on the inside of fixed part and outwardly extending recessed equipped with opening
Slot；
The rotation section is coaxially disposed with the fixed part, and the fixed part is set on the outside of the rotation section；
The fixing end of the heating member connecting portion is connected with the bottom of the groove, the fire end of the heating member connecting portion
It is in contact positioned at the opening of the groove, and with the flabellum of the rotation section；
The rotation section is enclosed under the driving of the driving device when rotating about the axis, and the flabellum drives the heating member
It is moved in the fixed part inner ring circular scope, and circular in the radial direction there are displacements described for the movement.
As a kind of embodiment of heating control apparatus, the rotation section includes the first rotation section of cylindrical ring structure
With the second rotation section of cylindrical structure, the first rotation section inside is equipped with flabellum, flabellum is equipped on the outside of second rotation section；
The fixed part is cylindrical ring structure, and the fixed part is equipped with what opening was located on the outside of fixed part and extended internally
Groove and opening are located on the inside of fixed part and outwardly extending groove；
The rotation section and fixed part coaxial arrangement, from outside to inside respectively described first rotation section, the fixation
Portion and second rotation section；
The heating member connecting portion includes the first heating member connecting portion and the second heating member connecting portion；
The bottom that the fixing end of the first heating member connecting portion is located at the groove on the outside of fixed part with opening is connected, described
The fire end of first heating member connecting portion is located at the opening for the groove that opening is located on the outside of fixed part, and is rotated with described first
The flabellum in portion is in contact；
The bottom that the fixing end of the second heating member connecting portion is located at the groove on the inside of fixed part with opening is connected, described
The fire end of second heating member connecting portion is located at the opening for the groove that opening is located on the inside of fixed part, and is rotated with described second
The flabellum in portion is in contact；
First rotation section and/or the second rotation section are enclosed under the driving of driving device when rotating about the axis, the fan
Leaf drives first heating member and/or the second heating member to justify in first rotation section inner ring and/or the fixed part inner ring
It is moved in the range of shape, and circular in the radial direction there are displacements described for the movement.
As a kind of embodiment of heating control apparatus, the heating member is heating lamp.
As a kind of embodiment of heating control apparatus, the heating member connecting portion is spring.
As a kind of embodiment of heating control apparatus, the opening is located at groove on the outside of fixed part along described solid
The radial direction for determining portion is set.
As a kind of embodiment of heating control apparatus, the groove that the opening is located on the inside of fixed part is relatively described
Fixed part radial direction has the setting of predetermined inclination angle.
As a kind of embodiment of heating control apparatus, groove of the opening on the outside of fixed part is described solid
Determine to be uniformly distributed in portion, and quantity is 8.
As a kind of embodiment of heating control apparatus, groove of the opening on the inside of fixed part is described solid
Determine to be uniformly distributed in portion, and quantity is 4.
A kind of Pvd equipment based on identical inventive concept, it is described that gas chamber is gone to include including going to gas chamber
Claims 1 to 10 any one of them heating control apparatus.
As a kind of embodiment of Pvd equipment, temperature sensor and thermal control plate are further included；
Temperature signal is transferred to the thermal control plate by the temperature sensor for measuring the temperature of heating object；
The thermal control plate is electrically connected with the temperature sensor and the heating control apparatus, is received the temperature and is passed
The temperature signal that sensor is sent, and filled according to the driving that the temperature signal is sent control signals in the heating control apparatus
It puts, the driving device is controlled to drive rotation section rotation.
Beneficial effects of the present invention include：A kind of heating control apparatus and Pvd equipment provided by the invention,
The position of the rotation control heating member of rotation section can be controlled by driving device, improves substrate in gas chamber is gone to heat uniform
Property, while can also be needed to carry out substrate a certain position concentration heating according to processing, computer heating control is flexible.
Description of the drawings
Fig. 1 is traditional degassing chamber structure schematic diagram；
Fig. 2 gathers view for light bulb in an a kind of specific embodiment of heating control apparatus of the present invention；
Fig. 3 is light bulb discrete state schematic diagram in an a kind of specific embodiment of heating control apparatus of the present invention；
Fig. 4 is a kind of the first rotation section schematic diagram of a specific embodiment of heating control apparatus of the present invention；
Fig. 5 is a kind of fixed part schematic diagram of a specific embodiment of heating control apparatus of the present invention；
Fig. 6 is a kind of schematic three dimensional views of a specific embodiment of heating control apparatus of the present invention.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with attached drawing to the present invention's
Heating control apparatus and PVD go the specific embodiment of gas chamber to illustrate.It should be appreciated that specific implementation described herein
Example is only used to explain the present invention, is not intended to limit the present invention.
As shown in Figure 1, be traditional PVD degassings (Degas) chamber structure sectional view, the function such as table 1 of each component
It is shown.
Table 1Degas chamber interior structure functions
Heating light bulb is arranged on lamp base, light bulb power adjustable in heating process, but position remains constant.
The present invention is to going to the lamp heated part (i.e. heating control apparatus) in gas chamber to be improved.The present invention's adds
Heat control device includes rotation section, driving portion, fixed part, heating member connecting portion and heating member.Wherein, heating member connecting portion includes
Fixing end and fire end, fixing end is connected with the fixed part, and fire end is connected with heating member；Rotation section is in driving device
The heating member can be driven to be moved in default circular scope under driving, and the movement presets circular radial direction side described
There are displacements upwards.
Herein it should be noted that the default circular scope is the rotation section or the fixed part according to its shape
And the circular scope that size is limited.Rotation section is cylindrical structure or cylindrical ring structure, the fixed part it is similary or
Cylindrical structure or cylindrical ring structure.
The heating control apparatus of the present invention is turned by setting rotatable rotation section in heating unit, and using rotation section
By heating member connecting portion heating member is driven to move when dynamic, so as to realize that the position of specific heating source opposite base is adjustable.From
And can the specific heating location of flexible modulation, make heating temperature more balanced, whole device adjustability is high.
Specifically, referring to Fig. 2, Fig. 3, Fig. 4, for the heating control apparatus of one embodiment of the invention, the rotation section includes
First rotation section 100 of cylindrical ring structure and the second rotation section 400 of cylindrical structure, and 100 inside of the first rotation section is equipped with fan
Leaf, 400 outside of the second rotation section are equipped with flabellum.Rotation section and fixed part 200 are coaxially disposed, and from outside to inside respectively described first
Rotation section 100,200 and second rotation section 400 of fixed part.
And as shown in figure 5, fixed part 200 is cylindrical ring structure, be located on the outside of fixed part equipped with opening in fixed part 200 and
The groove 600 and opening to extend internally is located on the inside of fixed part and outwardly extending groove 700.
Herein it should be noted that groove 600 of the opening on the outside of fixed part is in a particular embodiment in fixed part 200
On can be uniformly distributed, and the trend for the groove 600 being located on the outside of fixed part that is open is along the radial direction side of fixed part cylindrical ring structure
To.As shown in Fig. 2, when the groove 600 on the outside of opening is located at fixed part is consistent with the radial direction of fixed part, rotate when first
When portion rotates, heating member can be radially movable in the circular scope of fixed part inner ring, i.e., the radial direction side in circular scope
There are displacements upwards.
Equally, the groove 700 that opening is located on the inside of fixed part also can uniformly divide on fixed part 200 in a particular embodiment
Cloth, trend or the radial direction along fixed part cylindrical ring structure.But in certain embodiments, the groove in open slot
700 trend may be alternatively provided as the direction for having predetermined inclination angle with the radial direction of fixed part.As shown in Fig. 2, when opening position
When radial direction and the certain inclination angle of groove 700 and fixed part on the inside of fixed part, when the second rotation section rotates, heating
Part radially can simultaneously move in the circular scope of fixed part inner ring with circumferential, i.e., radial direction and circumference in circular scope
There is displacement component in direction.So being obliquely installed groove can make heating control apparatus wider to heating member position adjustable range
It is general.And the groove 700 being located at opening on the inside of fixed part is tilted to the direction vertical with the flabellum bevel edge of the second rotatable parts, is made
Flabellum more stablizes the limitation of the position of heating member.Simultaneously as the second rotation section is typically small, the groove being obliquely installed has
Help reduce the difficulty of flabellum processing on the second rotatable parts, which reduce the requirement to vane angle.Described herein
Predetermined inclination angle can be configured according to actual demand, such as may be configured as 20 degree.
As shown in figure 5, as a kind of embodiment, the groove 600 that opening is located on the outside of fixed part can be set for 8,
The quantity for setting groove 700 of the opening on the inside of fixed part is 4.Certainly, the quantity of groove 600 and groove 700 is at other
It may be alternatively provided as other quantity in specific embodiment.
Meanwhile heating member connecting portion includes the first heating member connecting portion 300 and the second heating member connecting portion 500.First adds
The bottom that the fixing end of warmware connecting portion 300 is located at the groove 600 on the outside of fixed part with opening is connected, and its fire end be located at open
Mouth is located at the opening of the groove 600 on the outside of fixed part, and is in contact with the flabellum of the first rotation section 100.Second heating member connects
The bottom that the fixing end of socket part 500 is located at the groove 700 on the inside of fixed part with opening is connected, the second heating member connecting portion 500
Fire end is located at the opening for the groove 700 that opening is located on the inside of fixed part, and is in contact with the flabellum of the second rotation section 400.
When the first rotation section 100 and/or the second rotation section 400 are enclosed under the driving of driving device when rotating about the axis, phase
The flabellum answered drives the first heating member and/or the second heating member in the inner ring of the first rotation section 100 and/or fixed part 200
It is moved in ring circular scope.
Herein it should be noted that in the embodiment of the present invention, the first rotation section 100 and the second rotation section 400 can individually turn
It moves or is rotated simultaneously under the driving of driving device, when two rotation sections rotate simultaneously, then added by all of its flabellum control
Warmware connecting portion fire end can all have position movement.At this point, the first heating element of the first heating member fire end is connected to
It is radially movable in the circular scope of one rotation section inner ring.The second heating element of the second heating member fire end is connected in fixation
Movement, can radially and circumferentially have position movement in the circular scope of portion's inner ring, and specific and opening is located on the inside of fixed part
The setting direction of groove is related, this point has been described above in front.
Meanwhile fixed part matches with the first rotation section, and the first fixed part is made to be preferably installed to the inside of the first rotation section,
And the arc-shaped medial surface always with the first rotation section of the fire end of the first heating member connecting portion can be kept to be in contact, so as to
Limit the position of fire end.And first heating member connecting portion be in contact with the medial surface of the first rotation section the bevel edge including its flabellum
Further include its internal circular arc segment section, the position of specific fire end and the first rotation section interior contact depending on carrying out on request
Required heating member position during heating process, and to the rotating operation of the first rotation section progress.
It should also be noted that, first rotation section of this heating control apparatus, fixed part and the second rotation section are in the axial direction
All there is certain thickness, as shown in Figure 6.
First rotation section 100 and the second rotation section 400 are controlled by driving device, can be done clockwise, counterclockwise
Rotation.As in a state of fig. 2, the first rotation counterclockwise of rotation section 100 can control, the fire end of heating member connecting portion can be along
The bevel edge of the flabellum of first rotation section flexes outward, away from axial location.When as shown in figure 3, being stretched for heating member connecting portion
Schematic diagram during maximum position is opened up, the off-axis line position of fire end is farthest at this time.It is connected by calculating rotation angle with heating member
The displacement distance scope of the fire end in portion can calculate the accurate location that shaft rotation angle corresponds to fire end end.Convenient for accurate
Control heating location.By the way that heating location is controlled to improve the uniformity that substrate heats, while can also be needed according to processing to substrate
A certain position carries out concentration heating.Moreover, by changing flabellum and the slope of the fire end phase section of heating element connecting portion, it can
To change the resolution ratio of the controllable displacement distance of heating member, (slope of section is bigger, the distance that fire end can move on section
It is longer, heating member connecting portion stretch it is identical apart from when motor rotation angle it is bigger, controllable distance resolution ratio is higher).
The above-mentioned cooperation description to the first rotation section and between the first heating member connecting portion is more specific and detailed, and second
Rotation section drive the second heating member connecting portion connection the second heating member motion process with it is foregoing essentially identical.
Light bulb can be used in foregoing heating member under normal circumstances, can be tungsten filament infrared heating light bulb or halogen
Heat light bulb.The light bulb for playing heat effect is detachably connected with fire end.It heats light bulb and is mounted on above-mentioned heating control apparatus
Fire end.Be re-used as that whole device is installed to goes in gas chamber.It is replaced with the heating unit in the embodiment of the present invention in Fig. 1
The function that lamp base and heating light bulb are realized can retain original light bulb installation version and be used to install current computer heating control dress
It puts.
In other embodiments of the invention, the second rotation section 400 and the fixed part of inner rotation can be provided separately within
200, and not comprising the first foregoing rotation section 100.The rotation of fixed part 200 and second should be suitably adjusted according to chamber size at this time
The size in portion 400, and groove of the opening on the inside of fixed part is set on fixed part.It should be noted that fixed part at this time
On can be not provided with opening be located at fixed part on the outside of groove.
Based on identical inventive concept, in an alternative embodiment of the invention, the first rotation section 100 and fixed part are only included
200, and not comprising the second rotation section 400.Similarly, the rotation of fixed part 200 and first should be suitably adjusted according to chamber size at this time
The size in portion 100, and groove of the opening on the outside of fixed part is set on fixed part.It should be noted that fixed part at this time
On can be not provided with opening be located at fixed part on the inside of groove.
It is preferred that can also set fixed heating member on fixed part, make the heating control apparatus bag of the embodiment of the present invention
Include the heating member that the fixed heating of a part is further included outside moveable heating member.Certainly, specific fixed heating member and movable
The quantity of heating member can be set according to actual use demand.
It is preferred that as a kind of embodiment, foregoing heating member connecting portion can be spring, in this specification attached drawing
Illustrated by taking spring as an example.Simultaneously or other telescopic elastomeric elements, allow heating member with elastic portion
The telescopic moving position of part.
It should be noted that the heating control apparatus of the present invention is provided with radial groove or with radially having on fixed part
The groove at certain inclination angle largely controls heating member connecting portion in the range of groove.By taking the first rotating part as an example, such as scheme
Shown in 2, when being rotated in the first rotation section, heating member connecting portion is being subject to outside the control force of fixing end while opening is subject to be located at
The side stress that groove on the outside of fixed part is given, makes heating member connecting portion be remained unchanged in disc radial direction.This groove
Setting can play good heating member connecting portion fixation, while can guard block, reduce elastomeric element be subject to it is outer
The probability of boundary's damage.
It is preferred that in the embodiment of wherein one heating control apparatus, opening is located at the side of the groove on the inside of fixed part
To the radial direction compared with fixed part, to the side vertical with the flabellum bevel edge being in contact with fire end on the outside of the second rotation section
To inclination.The groove slant that opening is located on the inside of fixed part is set, and on the one hand can extend the length of groove, is conducive to heating member company
On the other hand the protection of socket part and the control of elasticity can also reduce the lateral stress that elastomeric element is subject to phase incisal bevel, protect bullet
Property component.While the inner groovy that is obliquely installed makes heating bulb position radially adjusted simultaneously, also can circumferencial direction into
The certain position of row is adjusted, and makes heating location adjusting control more flexible.
More preferably, foregoing first rotation section, fixed part, the second rotation section and heating member connecting portion can be in driving devices
It moves, i.e., is vertically moved in the axial direction under drive.Movement vertically can above be adjusted in heating distance,
Heating intensity is better controlled with reference to the power of heating light bulb.The heating of Shi Qu gas chamber is more balanced.It needs to illustrate
, foregoing the first rotation section, fixed part, the second rotation section and heating member can be simultaneously in axis direction movement, also can be independent
It is mobile.Height as can be individually improved the second rotation section when central temperature is excessively high, so as to suitably reduce the heating to intermediate region.
The present invention also provides a kind of Pvd equipments, including going to gas chamber, and gas chamber are gone to include foregoing add
Heat control device.
In the embodiment of wherein one Pvd equipment, temperature sensor and thermal control plate are further included.Institute
State temperature sensor for measure heat the temperature of object, and temperature signal is transferred to the thermal control plate；The heating control
Making sheet is electrically connected with the temperature sensor and the heating control apparatus, receives the temperature letter that the temperature sensor is sent
Number, and the driving device in the heating control apparatus is sent control signals to according to the temperature signal, control the driving
Device band moves rotation section rotation.Cavity bottom can be according to demand that infrared temperature senses in different position mounting temperature sensor
Device detects the temperature of substrate each several part, and thermal control plate is by pid control mode or other algorithms, and according to the temperature difference, control is driven
Dynamic device, such as motor, adjust automatically heating member, such as light bulb, position.
The position of the heating member of the Pvd equipment of the embodiment of the present invention can be adjusted according to actual demand for heat
Section, can make more balanced to the heating temperature of substrate.
Embodiment described above only expresses the several embodiments of the present invention, and description is more specific and detailed, but simultaneously
Cannot the limitation to the scope of the claims of the present invention therefore be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the guarantor of the present invention
Protect scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (12)
1. a kind of heating control apparatus, which is characterized in that including rotation section, driving device, fixed part, heating member connecting portion and add
Warmware；
The heating member connecting portion includes fixing end and fire end, and the fixing end is connected with the fixed part, the fire end
It is connected with the heating member；
The rotation section can drive the heating member in the rotation section or the fixation under the driving of the driving device
Portion rotates to move in the default circular scope that is limited, and default circular in the radial direction there are positions described for the movement
It moves.
2. heating control apparatus according to claim 1, it is characterised in that:
The rotation section is cylindrical ring structure, and the inside of the rotation section is equipped with flabellum；
The fixed part is cylindrical structure, and the fixed part is equipped with opening and is located at the groove on the outside of fixed part and to extend internally；
The rotation section is coaxially disposed with the fixed part, and the rotation section is set on the outside of the fixed part；
The fixing end of the heating member connecting portion is connected with the bottom of the groove, and the fire end of the heating member connecting portion is located at
The opening of the groove, and be in contact with the flabellum of the rotation section；
The rotation section is enclosed under the driving of the driving device when rotating about the axis, and the flabellum drives the heating member in institute
It states and is moved in the inner ring circular scope of rotation section, and circular in the radial direction there are positions in the rotation section inner ring for the movement
It moves.
3. heating control apparatus according to claim 1, it is characterised in that：
The rotation section is cylindrical structure, and flabellum is equipped on the outside of the rotation section；
The fixed part is cylindrical ring structure, and the fixed part is located at equipped with opening on the inside of fixed part and outwardly extending groove；
The rotation section is coaxially disposed with the fixed part, and the fixed part is set on the outside of the rotation section；
The fixing end of the heating member connecting portion is connected with the bottom of the groove, and the fire end of the heating member connecting portion is located at
The opening of the groove, and be in contact with the flabellum of the rotation section；
The rotation section is enclosed under the driving of the driving device when rotating about the axis, and the flabellum drives the heating member in institute
It states and is moved in fixed part inner ring circular scope, and circular in the radial direction there are positions in the fixed part inner ring for the movement
It moves.
4. heating control apparatus according to claim 1, it is characterised in that：
The rotation section includes the first rotation section of cylindrical ring structure and the second rotation section of cylindrical structure, first rotation section
Inside is equipped with flabellum, and flabellum is equipped on the outside of second rotation section；
The fixed part is cylindrical ring structure, and the fixed part is located on the outside of fixed part and extends internally recessed equipped with opening
Slot and opening are located on the inside of fixed part and outwardly extending groove；
The rotation section and the fixed part coaxial arrangement, from outside to inside respectively described first rotation section, the fixed part and
Second rotation section；
The heating member connecting portion includes the first heating member connecting portion and the second heating member connecting portion；
The bottom that the fixing end of the first heating member connecting portion is located at the groove on the outside of fixed part with opening is connected, and described first
The fire end of heating member connecting portion is located at the opening for the groove that opening is located on the outside of fixed part, and with first rotation section
Flabellum is in contact；
The bottom that the fixing end of the second heating member connecting portion is located at the groove on the inside of fixed part with opening is connected, and described second
The fire end of heating member connecting portion is located at the opening for the groove that opening is located on the inside of fixed part, and with second rotation section
Flabellum is in contact；
First rotation section and/or the second rotation section are enclosed under the driving of driving device when rotating about the axis, the flabellum band
First heating member and/or the second heating member are moved in first rotation section inner ring and/or the fixed part inner ring circle model
Enclose interior movement, and circular in the radial direction there are positions in the first rotation section inner ring and/or the fixed part inner ring for the movement
It moves.
5. according to claim 1-4 any one of them heating control apparatus, which is characterized in that the heating member is heating lamp.
6. according to claim 1-4 any one of them heating control apparatus, which is characterized in that the heating member connecting portion is bullet
Spring.
7. the heating control apparatus according to claim 2 or 4, which is characterized in that the opening is located on the outside of fixed part
Groove is set along the radial direction of the fixed part.
8. the heating control apparatus according to claim 3 or 4, which is characterized in that the opening is located on the inside of fixed part
The relatively described fixed part radial direction of groove has the setting of predetermined inclination angle.
9. the heating control apparatus according to claim 2 or 4, which is characterized in that the opening is located on the outside of fixed part
Groove is uniformly distributed on the fixed part, and quantity is 8.
10. the heating control apparatus according to claim 3 or 4, which is characterized in that the opening is located on the inside of fixed part
Groove is uniformly distributed on the fixed part, and quantity is 4.
11. a kind of Pvd equipment, including going to gas chamber, which is characterized in that described that gas chamber is gone to include claim 1
To 10 any one of them heating control apparatus.
12. Pvd equipment according to claim 11, which is characterized in that further include temperature sensor and heating
Control panel；
Temperature signal is transferred to the thermal control plate by the temperature sensor for measuring the temperature of heating object；
The thermal control plate is electrically connected with the temperature sensor and the heating control apparatus, receives the temperature sensor
The temperature signal of transmission, and the driving device in the heating control apparatus is sent control signals to according to the temperature signal,
The driving device is controlled to drive rotation section rotation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410286251.0A CN105200387B (en) | 2014-06-24 | 2014-06-24 | Heating control apparatus and Pvd equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410286251.0A CN105200387B (en) | 2014-06-24 | 2014-06-24 | Heating control apparatus and Pvd equipment |
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| Publication Number | Publication Date |
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| CN105200387A CN105200387A (en) | 2015-12-30 |
| CN105200387B true CN105200387B (en) | 2018-05-25 |
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| CN201410286251.0A Active CN105200387B (en) | 2014-06-24 | 2014-06-24 | Heating control apparatus and Pvd equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111139444A (en) * | 2020-01-13 | 2020-05-12 | 北京北方华创微电子装备有限公司 | Heating system of semiconductor processing equipment and control method thereof |
| CN113161262B (en) * | 2021-03-03 | 2022-06-14 | 北京北方华创微电子装备有限公司 | Heating device in semiconductor processing equipment and semiconductor processing equipment |
| CN115182040B (en) * | 2022-05-11 | 2024-05-07 | 华灿光电(苏州）有限公司 | Metal organic vapor phase chemical deposition equipment for improving growth efficiency and using method thereof |
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| CN102808152A (en) * | 2011-06-01 | 2012-12-05 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Heating device, chamber device and substrate processing equipment |
| CN103077917A (en) * | 2012-06-29 | 2013-05-01 | 光达光电设备科技（嘉兴）有限公司 | Substrate supporting seat and semiconductor processing equipment applying same |
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| CN102534473A (en) * | 2010-12-08 | 2012-07-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Heating device and substrate treatment device applying same |
| CN102808152A (en) * | 2011-06-01 | 2012-12-05 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Heating device, chamber device and substrate processing equipment |
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| CN105200387A (en) | 2015-12-30 |
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