CN105200387A - Heating control device and physical vapor deposition equipment - Google Patents
Heating control device and physical vapor deposition equipment Download PDFInfo
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- CN105200387A CN105200387A CN201410286251.0A CN201410286251A CN105200387A CN 105200387 A CN105200387 A CN 105200387A CN 201410286251 A CN201410286251 A CN 201410286251A CN 105200387 A CN105200387 A CN 105200387A
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Abstract
The invention discloses a heating control device and physical vapor deposition equipment. The device comprises a rotary part, a drive device, a fixed part, a heating element connection part and a heating element. The heating element connection part comprises a fixing end and a heating end, the fixing end is connected with the fixed part, the heating end is connected with the heating element, the rotary part can drive the heating element to move in a preset circular range under the drive of the driving device, and the heating element has displacement in the radial direction of the preset circle. Heating uniformity of a substrate in a de-gassing cavity is improved, meanwhile, a certain position of the substrate can be heated intensively according to machining requirements, and heating is flexible to control.
Description
Technical field
The present invention relates to technical field of semiconductors, particularly relate to a kind of heating control apparatus and Pvd equipment.
Background technology
Physical vapor deposition (PhysicalVaporDeposition, PVD) technology is the class film fabrication techniques the most widely used in semi-conductor industry, and general reference adopts physical method to prepare the thin film preparation process of film; And in IC manufacturing industry, mostly be magnetron sputtering (MagnetronSputtering) technology, be mainly used in the deposition of the metallic film such as aluminium, copper, to form metallic contact, metal interconnecting wires etc.
In physical vapor deposition making technology, general needs 4 steps just can complete whole technique, and four work steps are respectively suddenly in order: technique of 1) degassing (Degas); 2) pre-cleaning processes (PreClean); 3) copper barrier layer technique; 4) the young crystal layer technique of copper.
Wherein, technique of degassing mainly by about substrate heating to 300 DEG C, to remove on-chip water vapour and other volatile impurity.Degas in technique, substrate (heating object) requires higher to heating uniformity, if homogeneity can not ensure, will occur the incomplete situation of the volatile Impurity removal in some region of substrate, serious local temperature is uneven may cause fragment.Meanwhile, for the consideration of production capacity, wish that substrate can arrive technological temperature as soon as possible.
In conventional art, the general heating lamp of bulb type that uses heats substrate.After substrate imports chamber into, be placed on pedestal, pedestal is held up rises to technique position, soaked quartz window carry out irradiating and well heater (optional) heated substrate on pedestal by the heating lamp being fixed on chamber roof.In heat-processed, the position of bulb and substrate is fixed.Substrate is just directly heated by bulb irradiation the part of bulb, and not by the part that bulb covers on substrate, can only by the thermoradiation efficiency heating in chamber, therefore easily cause the temperature of each several part on substrate unbalanced, heating uniformity is poor.And owing to fixing the position of bulb and substrate, the temperature homogeneity in chamber is substantially non-adjustable.
Summary of the invention
Based on this, be necessary easily to cause temperature unbalanced for heating unit in conventional art, heating uniformity is poor, and the substantially nonadjustable problem of temperature homogeneity, a kind of heating control apparatus and the Pvd equipment that can carry out computer heating control according to actual demand for heat are provided.
For realizing a kind of heating control apparatus that the object of the invention provides, comprise rotation section, drive unit, fixed part, heating member connection section and heating member;
Described heating member connection section comprises inboardend and fire end, and described inboardend is connected with described fixed part, and described fire end is connected with described heating member;
Described rotation section can drive described heating member to move in default circular scope under the driving of described drive unit, and described movement exists displacement in the radial direction in described default circle.
As a kind of embodiment of heating control apparatus, described rotation section is cylindrical ring structure, and the inner side of described rotation section is provided with flabellum;
Described fixed part is column structure, and described fixed part is provided with opening and is positioned at outside fixed part and the groove extended internally;
Described rotation section and described fixed part are coaxially arranged, and described rotation section is set in outside described fixed part;
The inboardend of described heating member connection section is connected with the bottom of described groove, and the fire end of described heating member connection section is positioned at the opening part of described groove, and contacts with the flabellum of described rotation section;
When described rotation section is enclosed and rotated about the axis under the driving of described drive unit, described flabellum drives described heating member to move in the inner ring circular scope of described rotation section, and described movement exists displacement in the radial direction in described circle.
As a kind of embodiment of heating control apparatus, described rotation section is column structure, is provided with flabellum outside described rotation section;
Described fixed part is cylindrical ring structure, and described fixed part is provided with opening and is positioned at inside fixed part and outward extending groove;
Described rotation section and described fixed part are coaxially arranged, and described fixed part is set in outside described rotation section;
The inboardend of described heating member connection section is connected with the bottom of described groove, and the fire end of described heating member connection section is positioned at the opening part of described groove, and contacts with the flabellum of described rotation section;
When described rotation section is enclosed and rotated about the axis under the driving of described drive unit, described flabellum drives described heating member to move in described fixed part inner ring circular scope, and described movement exists displacement in the radial direction in described circle.
As a kind of embodiment of heating control apparatus, described rotation section comprises the first rotation section of cylindrical ring structure and the second rotation section of column structure, is provided with flabellum inside described first rotation section, is provided with flabellum outside described second rotation section;
Described fixed part is cylindrical ring structure, and described fixed part is provided with opening to be positioned at outside fixed part and the groove extended internally, and opening to be positioned at inside fixed part and outward extending groove;
Described rotation section and described fixed part are coaxially arranged, and are respectively described first rotation section, described fixed part and described second rotation section from outside to inside;
Described heating member connection section comprises the first heating member connection section and the second heating member connection section;
The bottom of the groove that the inboardend of described first heating member connection section is positioned at outside fixed part with opening is connected, the fire end of described first heating member connection section is positioned at the opening part that opening is positioned at the groove outside fixed part, and contacts with the flabellum of described first rotation section;
The bottom of the groove that the inboardend of described second heating member connection section is positioned at inside fixed part with opening is connected, the fire end of described second heating member connection section is positioned at the opening part that opening is positioned at the groove inside fixed part, and contacts with the flabellum of described second rotation section;
When described first rotation section and/or the second rotation section are enclosed and are rotated about the axis under the driving of drive unit, described flabellum drives described first heating member and/or the second heating member to move in described first rotation section inner ring and/or described fixed part inner ring circular scope, and described movement exists displacement in the radial direction in described circle.
As a kind of embodiment of heating control apparatus, described heating member is heating lamp.
As a kind of embodiment of heating control apparatus, described heating member connection section is spring.
As a kind of embodiment of heating control apparatus, described opening is positioned at the groove outside fixed part and arranges along the radial direction of described fixed part.
As a kind of embodiment of heating control apparatus, the relatively described fixed part radial direction of groove that described opening is positioned at inside fixed part has predetermined inclination angle to arrange.
As a kind of embodiment of heating control apparatus, the groove that described opening is positioned at outside fixed part is uniformly distributed on described fixed part, and quantity is 8.
As a kind of embodiment of heating control apparatus, the groove that described opening is positioned at inside fixed part is uniformly distributed on described fixed part, and quantity is 4.
Based on a kind of Pvd equipment of identical inventive concept, comprise the chamber that degass, described in the chamber that degass comprise heating control apparatus described in any one of claim 1 to 10.
As a kind of embodiment of Pvd equipment, also comprise temperature sensor and thermal control plate;
Temperature signal for measuring the temperature of heating thing, and is transferred to described thermal control plate by described temperature sensor;
Described thermal control plate is electrically connected with described temperature sensor and described heating control apparatus, receive the temperature signal that described temperature sensor sends, and send control signals to the drive unit in described heating control apparatus according to described temperature signal, control described drive unit and drive rotation section to rotate.
Beneficial effect of the present invention comprises: a kind of heating control apparatus provided by the invention and Pvd equipment, the position of the rotation control heating member of rotation section is controlled by drive unit, improve the homogeneity of substrate heating in the chamber that degass, also can need to carry out concentrating heating to a certain position of substrate according to processing, computer heating control is flexible simultaneously.
Accompanying drawing explanation
Fig. 1 is that tradition is degassed chamber structure schematic diagram;
Fig. 2 is that in a specific embodiment of a kind of heating control apparatus of the present invention, view gathered by bulb;
Fig. 3 is bulb discrete state schematic diagram in a specific embodiment of a kind of heating control apparatus of the present invention;
Fig. 4 is the first rotation section schematic diagram of a specific embodiment of a kind of heating control apparatus of the present invention;
Fig. 5 is the fixed part schematic diagram of a specific embodiment of a kind of heating control apparatus of the present invention;
Fig. 6 is the schematic three dimensional views of a specific embodiment of a kind of heating control apparatus of the present invention.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with accompanying drawing, the degas embodiment of chamber of heating control apparatus of the present invention and PVD is described.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
As shown in Figure 1, for traditional PVD degass (Degas) chamber structure sectional view, the function of each parts is as shown in table 1.
Table 1Degas chamber interior structure function
Heating bulb is arranged on lamp base, and bulb is power adjustable in heat-processed, but position remains constant.
The present invention improves the lamp heated part (i.e. heating control apparatus) of degassing in chamber.Heating control apparatus of the present invention comprises rotation section, driving part, fixed part, heating member connection section and heating member.Wherein, heating member connection section comprises inboardend and fire end, and inboardend is connected with described fixed part, and fire end is connected with heating member; Rotation section can drive described heating member to move in default circular scope under the driving of drive unit, and described movement exists displacement in the radial direction in described default circle.
It should be noted that, the circular scope that described default circular scope limits according to its shape and size for described rotation section or described fixed part herein.Rotation section is column structure or cylindrical ring structure, and described fixed part equally also can be column structure or cylindrical ring structure.
Heating control apparatus of the present invention by arranging rotating rotation section in heating unit, and drives heating member to move by heating member connection section when utilizing rotation section to rotate, thus the position that can realize concrete heating source opposite base is adjustable.Thus can the concrete heating location of flexible, make Heating temperature more balanced, whole device adjustability is high.
Concrete, see Fig. 2, Fig. 3, Fig. 4 is the heating control apparatus of one embodiment of the invention, and described rotation section comprises the first rotation section 100 of cylindrical ring structure and the second rotation section 400 of column structure, and be provided with flabellum inside the first rotation section 100, be provided with flabellum outside the second rotation section 400.Rotation section and fixed part 200 are coaxially arranged, and are respectively described first rotation section 100, fixed part 200 and the second rotation section 400 from outside to inside.
And as shown in Figure 5, fixed part 200 is cylindrical ring structure, is provided with opening at fixed part 200 and is positioned at outside fixed part and the groove 600 extended internally, and opening to be positioned at inside fixed part and outward extending groove 700.
It should be noted that, the groove 600 that opening is positioned at outside fixed part can be uniformly distributed in a particular embodiment on fixed part 200 herein, and the trend of groove 600 that opening is positioned at outside fixed part is the radial direction along fixed part cylindrical ring structure.As shown in Figure 2, when opening be positioned at groove 600 outside fixed part consistent with the radial direction of fixed part time, when the first rotation section is rotated, heating member radially can move in the circular scope of fixed part inner ring, namely in circular scope, there is displacement in the radial direction.
Equally, the groove 700 that opening is positioned at inside fixed part also can be uniformly distributed in a particular embodiment on fixed part 200, and it moves towards the radial direction that also can be along fixed part cylindrical ring structure.But the trend of the groove 700 in certain embodiments, in open slot also can be set to the direction with the radial direction of fixed part with predetermined inclination angle.As shown in Figure 2, when opening is positioned at the radial direction of groove inside fixed part 700 and fixed part and certain pitch angle, when the second rotation section is rotated, heating member radially can move with circumference in the circular scope of fixed part inner ring simultaneously, and the radial direction namely in circular scope and circumferential direction have displacement component.So being obliquely installed groove can make heating control apparatus more extensive to heating member position adjustments scope.And the groove 700 be positioned at by opening inside fixed part tilts to the direction that the flabellum hypotenuse with the second rotatable parts is vertical, make the restriction of flabellum to the position of heating member more stable.Meanwhile, because the second rotation section is general less, the groove be obliquely installed contributes to the difficulty of flabellum processing on reduction by second rotatable parts, which reduces the requirement to vane angle.Predetermined inclination angle described herein can be arranged according to the actual requirements, as being set to 20 degree.
As shown in Figure 5, as a kind of embodiment, can arrange the groove 600 that opening is positioned at outside fixed part is 8, and the quantity arranging the groove 700 that opening is positioned at inside fixed part is 4.Certainly, the quantity of groove 600 and groove 700 also can be set to other quantity in other specific embodiments.
Meanwhile, heating member connection section comprises the first heating member connection section 300 and the second heating member connection section 500.The bottom that inboardend and the opening of the first heating member connection section 300 are positioned at the groove 600 outside fixed part is connected, and its fire end is positioned at the opening part that opening is positioned at the groove 600 outside fixed part, and contacts with the flabellum of the first rotation section 100.The bottom that inboardend and the opening of the second heating member connection section 500 are positioned at the groove 700 inside fixed part is connected, the fire end of the second heating member connection section 500 is positioned at the opening part that opening is positioned at the groove 700 inside fixed part, and contacts with the flabellum of the second rotation section 400.
When enclose under the first rotation section 100 and/or the second driving of rotation section 400 at drive unit rotate about the axis time, corresponding flabellum drives the first heating member and/or the second heating member to move in the inner ring of the first rotation section 100 and/or the inner ring circular scope of fixed part 200.
It should be noted that herein, in the embodiment of the present invention, first rotation section 100 and the second rotation section 400 can be rotated separately or rotate under the driving of drive unit simultaneously, and when two rotation sections are rotated simultaneously, then all heating member connection section fire ends controlled by its flabellum all can have position to move.Now, the first heater block being connected to the first heating member fire end radially moves in the circular scope of the first rotation section inner ring.The second heater block being connected to the second heating member fire end moves in the circular scope of fixed part inner ring, and position can be had to move in radial and circumference, the setting direction being specifically positioned at the groove inside fixed part with opening is relevant, and this point illustrates above.
Simultaneously, fixed part and the first rotation section match, make the first fixed part just be arranged on the inner side of the first rotation section, and the circular arc of the fire end of the first heating member connection section can be kept to contact with the medial surface of the first rotation section all the time, thus the position of restriction fire end.And the first heating member connection section contacts with the medial surface of the first rotation section, the hypotenuse that comprises its flabellum also comprises the circular arc segment section of its inside, heating member position required when carrying out heating process is on request depended in the position of concrete fire end and the first rotation section interior contact, and to the rotating operation that the first rotation section is carried out.
Also it should be noted that, first rotation section of this heating control apparatus, fixed part and the second rotation section all have certain thickness in the axial direction, as shown in Figure 6.
First rotation section 100 and the second rotation section 400 are controlled by drive unit, can do clockwise, counterclockwise rotation.As in a state of fig. 2, can control the first rotation section 100 and be rotated counterclockwise, the fire end of heating member connection section outwards can stretch, away from axial location along the hypotenuse of the flabellum of described first rotation section.When as shown in Figure 3, be schematic diagram when heating member connection section is stretched over maximum position, now fire end from axial location farthest.By calculating the miles of relative movement scope of the fire end of angle of rotation and heating member connection section, the accurate location of the corresponding fire end end of rotating shaft angle of rotation can be calculated.Be convenient to precisely control heating location.Improving the homogeneity of substrate heating by controlling heating location, also can need to carry out concentrating heating to a certain position of substrate according to processing simultaneously.And, by the slope of change flabellum with the fire end phase tangent plane of heater block connection section, (slope of tangent plane is larger can to change the resolving power of the controlled miles of relative movement of heating member, fire end can on tangent plane the distance of movement longer, the angle that during distance that heating member connection section stretches identical, motor rotates is larger, and controllable distance resolving power is higher).
Above-mentioned to the first rotation section and with describe coordinating between the first heating member connection section comparatively concrete and in detail, the moving process of the second heating member that the second rotation section drives the second heating member connection section to connect is substantially identical with aforementioned.
Aforesaid heating member generally can use bulb, can be tungsten filament Infrared Heating bulb, also can be halogen heating bulb.The bulb and the fire end that play heat effect removably connect.Heating bulb is arranged on the fire end of above-mentioned heating control apparatus.What be re-used as that whole device is installed to degass in chamber.Replace with the heating unit in the embodiment of the present invention function that in Fig. 1, lamp base and heating bulb realize, original bulb can be retained and version is installed for installing current heating control apparatus.
In other embodiments of the invention, the second rotation section 400 and the fixed part 200 of inner rotation can be arranged on separately, and not comprise aforesaid first rotation section 100.Now suitably should adjust the size of fixed part 200 and the second rotation section 400 according to chamber size, and opening is set on fixed part is positioned at groove inside fixed part.It should be noted that, now fixed part can not be arranged opening and be positioned at groove outside fixed part.
Based on identical inventive concept, in an alternative embodiment of the invention, only comprise the first rotation section 100 and fixed part 200, and do not comprise the second rotation section 400.In like manner, now suitably should adjust the size of fixed part 200 and the first rotation section 100 according to chamber size, and opening is set on fixed part is positioned at groove outside fixed part.It should be noted that, now fixed part can not be arranged opening and be positioned at groove inside fixed part.
Preferably, also can fixing heating member be set on fixed part, makes the heating control apparatus of the embodiment of the present invention comprise the heating member also comprising the fixing heating of a part outside moveable heating member.Certainly, concrete fixing heating member and the quantity of movable heating member can be arranged according to actual user demand.
Preferably, as a kind of embodiment, aforesaid heating member connection section can be spring, illustrates in this Figure of description for spring.Can be also simultaneously other telescopic elastomeric elements, make heating member can along with the telescopic moving position of elastomeric element.
It should be noted that, heating control apparatus of the present invention is provided with radial groove or has the groove at certain pitch angle with radial direction on fixed part, heating member connection section major part is controlled within the scope of groove.For the first rotating element, as shown in Figure 2, when the first rotation section is rotated, heating member connection section is subject to opening simultaneously and is positioned at the side stress that the groove outside fixed part gives outside the control being subject to inboardend, and heating member connection section is remained unchanged in disc radial direction.The setting of this groove can play good heating member connection section fixed action, simultaneously can guard block, reduces the probability that elastomeric element is subject to environmental damage.
Preferably, in the embodiment of a heating control apparatus wherein, opening is positioned at the radial direction of direction relative to fixed part of the groove inside fixed part, tilts to the direction vertical with the flabellum hypotenuse contacted with fire end outside the second rotation section.The groove slant that opening is positioned at inside fixed part is arranged, and can extend the length of groove on the one hand, be conducive to the protection of heating member connection section and the control of DE, also can reduce the lateral stress that elastomeric element is subject to phase incisal bevel on the other hand, protection elastomeric element.While the inner groovy be simultaneously obliquely installed makes heating bulb position radially regulate, also can carry out certain position adjustments at circumferential direction, make heating location regulable control more flexible.
More preferably, aforementioned first rotation section, fixed part, the second rotation section and heating member connection section can move in the axial direction under the drive of drive unit, namely vertically move.Motion vertically can regulate in heating distance, and the power in conjunction with heating bulb is better controlled heating intensity.The heating of chamber of making to degas is more balanced.It should be noted that, aforesaid first rotation section, fixed part, the second rotation section and heating member can move at axis direction simultaneously, also can movement separately.The height of the second rotation section can be improved separately time as too high in core temperature, thus suitably reduce the heating to region intermediate.
The present invention also provides a kind of Pvd equipment, comprises the chamber that degass, and the chamber that degass comprises aforesaid heating control apparatus.
In the embodiment of a Pvd equipment wherein, also comprise temperature sensor and thermal control plate.Temperature signal for measuring the temperature of heating thing, and is transferred to described thermal control plate by described temperature sensor; Described thermal control plate is electrically connected with described temperature sensor and described heating control apparatus, receive the temperature signal that described temperature sensor sends, and send control signals to the drive unit in described heating control apparatus according to described temperature signal, control described drive unit and drive rotation section to rotate.Cavity bottom is according to demand at different positions mounting temperature sensor, and can be the temperature that infrared temperature sensor detects substrate each several part, thermal control plate is by pid control mode or other algorithms, according to the temperature difference, accessory drive, as motor, automatic adjustment heating member, as bulb, position.
The position of the heating member of the Pvd equipment of the embodiment of the present invention can regulate according to actual demand for heat, can make the Heating temperature of substrate more balanced.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (12)
1. a heating control apparatus, is characterized in that, comprises rotation section, drive unit, fixed part, heating member connection section and heating member;
Described heating member connection section comprises inboardend and fire end, and described inboardend is connected with described fixed part, and described fire end is connected with described heating member;
Described rotation section can drive described heating member to move in default circular scope under the driving of described drive unit, and described movement exists displacement in the radial direction in described default circle.
2. heating control apparatus according to claim 1, is characterized in that:
Described rotation section is cylindrical ring structure, and the inner side of described rotation section is provided with flabellum;
Described fixed part is column structure, and described fixed part is provided with opening and is positioned at outside fixed part and the groove extended internally;
Described rotation section and described fixed part are coaxially arranged, and described rotation section is set in outside described fixed part;
The inboardend of described heating member connection section is connected with the bottom of described groove, and the fire end of described heating member connection section is positioned at the opening part of described groove, and contacts with the flabellum of described rotation section;
When described rotation section is enclosed and rotated about the axis under the driving of described drive unit, described flabellum drives described heating member to move in the inner ring circular scope of described rotation section, and described movement exists displacement in the radial direction in described rotation section inner ring circle.
3. heating control apparatus according to claim 1, is characterized in that:
Described rotation section is column structure, is provided with flabellum outside described rotation section;
Described fixed part is cylindrical ring structure, and described fixed part is provided with opening and is positioned at inside fixed part and outward extending groove;
Described rotation section and described fixed part are coaxially arranged, and described fixed part is set in outside described rotation section;
The inboardend of described heating member connection section is connected with the bottom of described groove, and the fire end of described heating member connection section is positioned at the opening part of described groove, and contacts with the flabellum of described rotation section;
When described rotation section is enclosed and rotated about the axis under the driving of described drive unit, described flabellum drives described heating member to move in described fixed part inner ring circular scope, and described movement exists displacement in the radial direction in described fixed part inner ring circle.
4. heating control apparatus according to claim 1, is characterized in that:
Described rotation section comprises the first rotation section of cylindrical ring structure and the second rotation section of column structure, is provided with flabellum inside described first rotation section, is provided with flabellum outside described second rotation section;
Described fixed part is cylindrical ring structure, and described fixed part is provided with opening to be positioned at outside fixed part and the groove extended internally, and opening to be positioned at inside fixed part and outward extending groove;
Described rotation section and described fixed part are coaxially arranged, and are respectively described first rotation section, described fixed part and described second rotation section from outside to inside;
Described heating member connection section comprises the first heating member connection section and the second heating member connection section;
The bottom of the groove that the inboardend of described first heating member connection section is positioned at outside fixed part with opening is connected, the fire end of described first heating member connection section is positioned at the opening part that opening is positioned at the groove outside fixed part, and contacts with the flabellum of described first rotation section;
The bottom of the groove that the inboardend of described second heating member connection section is positioned at inside fixed part with opening is connected, the fire end of described second heating member connection section is positioned at the opening part that opening is positioned at the groove inside fixed part, and contacts with the flabellum of described second rotation section;
When described first rotation section and/or the second rotation section are enclosed and are rotated about the axis under the driving of drive unit, described flabellum drives described first heating member and/or the second heating member to move in described first rotation section inner ring and/or described fixed part inner ring circular scope, and described movement exists displacement in the radial direction in the first rotation section inner ring and/or described fixed part inner ring circle.
5. the heating control apparatus according to any one of claim 1-4, is characterized in that, described heating member is heating lamp.
6. the heating control apparatus according to any one of claim 1-4, is characterized in that, described heating member connection section is spring.
7. the heating control apparatus according to claim 2 or 4, is characterized in that, described opening is positioned at the groove outside fixed part and arranges along the radial direction of described fixed part.
8. the heating control apparatus according to claim 3 or 4, is characterized in that, the relatively described fixed part radial direction of groove that described opening is positioned at inside fixed part has predetermined inclination angle to arrange.
9. the heating control apparatus according to claim 2 or 4, is characterized in that, the groove that described opening is positioned at outside fixed part is uniformly distributed on described fixed part, and quantity is 8.
10. the heating control apparatus according to claim 3 or 4, is characterized in that, the groove that described opening is positioned at inside fixed part is uniformly distributed on described fixed part, and quantity is 4.
11. 1 kinds of Pvd equipments, comprise the chamber that degass, it is characterized in that, described in the chamber that degass comprise heating control apparatus described in any one of claim 1 to 10.
12. Pvd equipments according to claim 11, is characterized in that, also comprise temperature sensor and thermal control plate;
Temperature signal for measuring the temperature of heating thing, and is transferred to described thermal control plate by described temperature sensor;
Described thermal control plate is electrically connected with described temperature sensor and described heating control apparatus, receive the temperature signal that described temperature sensor sends, and send control signals to the drive unit in described heating control apparatus according to described temperature signal, control described drive unit and drive rotation section to rotate.
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| CN111139444A (en) * | 2020-01-13 | 2020-05-12 | 北京北方华创微电子装备有限公司 | Heating system of semiconductor processing equipment and control method thereof |
| TWI782838B (en) * | 2021-03-03 | 2022-11-01 | 大陸商北京北方華創微電子裝備有限公司 | Heating device in semiconductor processing equipment and semiconductor processing equipment |
| CN115182040A (en) * | 2022-05-11 | 2022-10-14 | 华灿光电(苏州）有限公司 | Metal organic vapor phase chemical deposition equipment for improving growth efficiency and use method |
| CN115182040B (en) * | 2022-05-11 | 2024-05-07 | 华灿光电(苏州）有限公司 | Metal organic vapor phase chemical deposition equipment for improving growth efficiency and using method thereof |
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| CN105200387B (en) | 2018-05-25 |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Applicant after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Beijing, Wenchang Road, No. 8, No. Applicant before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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