CN204130515U - There is the disk clamping device of position limiting structure - Google Patents
There is the disk clamping device of position limiting structure Download PDFInfo
- Publication number
- CN204130515U CN204130515U CN201420056727.7U CN201420056727U CN204130515U CN 204130515 U CN204130515 U CN 204130515U CN 201420056727 U CN201420056727 U CN 201420056727U CN 204130515 U CN204130515 U CN 204130515U
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- Prior art keywords
- annular solid
- matrix
- clamping device
- locating part
- rotating shaft
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- Expired - Lifetime
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- 239000011159 matrix material Substances 0.000 claims abstract description 57
- 239000007787 solid Substances 0.000 claims abstract description 56
- 230000007246 mechanism Effects 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims description 10
- 230000001133 acceleration Effects 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 24
- 229910052710 silicon Inorganic materials 0.000 abstract description 24
- 239000010703 silicon Substances 0.000 abstract description 24
- 241000222712 Kinetoplastida Species 0.000 description 3
- 238000009987 spinning Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
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- Jigs For Machine Tools (AREA)
Abstract
The utility model discloses a kind of disk clamping device, comprise the rotary chuck placing pan; The rotating shaft that driven rotary chuck rotates; And the driving mechanism driving rotating shaft to rotate.Rotary chuck comprises matrix, is located at the clamping element of matrix periphery, annular solid and position limiting structure.Clamping element comprises main part and clamping part, and main part spins then clamping part is moved between open position and clip position.The main part of annular solid and clamping element forms the field of conjugate action, and the described field of conjugate action is used for when matrix and annular solid relatively rotate, and main part is engaged and autorotation with annular solid.Position limiting structure comprises the first and second locating parts being located at matrix and annular solid, when matrix phase for annular solid generation first direction relatively rotate to make clamping part move to clip position from open position time, first locating part contacts to retrain relatively rotating of this first direction with the second locating part, and then regulates clamping part to act on the power of silicon chip side.
Description
Technical field
The utility model relates to silicon chip processing technique field, particularly a kind of disk clamping device with position limiting structure.
Background technology
In the production technology of integrated circuit, pan such as semiconductor wafer or silicon chip will stand as kinds of surface treatment process steps such as etching, cleaning, polishing, thin film depositions.And in these processes, all need to be supported and holding plate-like article by clamping device.Such as US Patent No. 4903717A discloses a kind of clamping device, and it comprises clamping element and chuck, and clamping element comprises the main part and clamping part that axis departs from mutually, and when therefore main part rotates, the radial position of clamping part changes thereupon.Can silicon chip be picked and placeed when clamping part outward radial moves to open position, contact the peripheral edge of silicon chip when clamping part radially moves to clip position, thus the lateral displacement of silicon chip can be prevented.Main part lower end is provided with the gear teeth, and these gear teeth are meshed with the tooth of public ring gear, and the rotating shaft coaxle of this public ring gear and chuck is arranged.This ring gear causes moving radially, to realize picking and placeing and pinching action of silicon chip of the spinning of main part and clamping part relative to the rotation of chuck.But, often silicon chip edge is impacted when clamping part moves to clip position, and excessive chucking power can cause silicon chip be out of shape and cracked, too small chucking power can make again silicon chip easily slide relative to clamping device.
Utility model content
Main purpose of the present utility model aims to provide a kind of disk clamping device of structure optimization, avoids producing greater impact when clamping silicon chip to silicon chip edge.
For reaching above-mentioned purpose, the utility model provides a kind of disk clamping device, comprises rotary chuck, and it places pan; Rotating shaft, drives described rotary chuck to rotate; And driving mechanism, drive described rotating shaft to rotate, wherein said rotary chuck comprises: matrix, by described rotating shaft driven rotary; Multiple clamping element, is located at the periphery of described matrix; Described clamping element comprises main part and gives prominence to and the clamping part of axis phase deviation each other from described main part, described main part spin then move between the clip position that described clamping part is contacted at the non-contacting open position of radially outer and described pan peripheral edge and radially inner and described pan peripheral edge; Annular solid, be coaxially set with described matrix and form the field of conjugate action with the main part of described clamping element, the described field of conjugate action is used for when described matrix and described annular solid relatively rotate, and the main part of described clamping element is engaged and autorotation with described annular solid; Position limiting structure, it comprises is located at described matrix and described annular solid and the first locating part and second locating part that can form contact-making surface each other respectively, when described matrix phase for described annular solid generation first direction relatively rotate to make described clamping part move to described clip position from described open position time, described first locating part contacts to retrain relatively rotating of described first direction with described second locating part.
Preferably, the position of the contact-making surface of described first locating part and described second locating part is adjustable.
Preferably, described annular solid is ring gear, and the lower end of the main part of described clamping element forms the tooth engaged with described ring gear.
Preferably, described first locating part is the block being fixed on described matrix; Described second locating part is the screw being fixed on described annular solid; Described block has the side relative with described screw.
Preferably, described ring gear inside is cavity, is provided with spoke in described cavity, and described screw is through described spoke and is screwed into length-adjustable expansion screw; Described block to stretch out and side is relative with described expansion screw from described cavity.
Preferably, described rotary chuck also comprises elastic component, and its one end connects described matrix, and the other end connects described annular solid, for when described matrix phase, for described annular solid, relatively rotating of second direction opposite to the first direction occurs, retrain relatively rotating of described second direction.
Preferably, described disk clamping device also comprises push rod, by described push rod limit described annular solid rotate and described driving mechanism drives described rotating shaft to rotate, make described matrix and described annular solid occur described in relatively rotate.
Preferably, when described clamping element moves to described open position from described clip position, or when moving to described clip position from described open position, the angle that rotating shaft described in described driving mechanisms control drives described matrix to rotate is 3 ° to 8 °.
Preferably, described matrix turns in the process that described first locating part contacts with described second locating part along described first direction, and described driving mechanism rotates with rotating shaft described in S curve feed speed control.
Preferably, when described first locating part contacts with described second locating part, the acceleration that rotating shaft described in described driving mechanisms control rotates and speed are 0.
The disk clamping device that the utility model proposes, clamping device is regulated to act on the power of silicon chip side by position limiting structure, more by clamping part from open position to clip position process the control of driving mechanism avoid the sudden change of acceleration, reduce clamping device to the impact of silicon chip.
Accompanying drawing explanation
Fig. 1 is the schematic perspective view of the utility model one embodiment disk clamping device;
Fig. 2 is the structural representation of the clamping element of the disk clamping device of the utility model one embodiment;
Fig. 3 is the clamping element of the disk clamping device of the utility model one embodiment upward view when being positioned at open mode;
Fig. 4 is the clamping element of the disk clamping device of the utility model one embodiment upward view when being positioned at clamp position.
[primary clustering symbol description]
1 rotary chuck; 2 driving mechanisms; 11 clamping elements; 11a clamping part; 11b main part;
12 matrixes; 13 annular solids; 14a first locating part; 14b second locating part; 15 elastic components.
Embodiment
For making content of the present utility model clearly understandable, below in conjunction with Figure of description, content of the present utility model is described further.Certain the utility model is not limited to this specific embodiment, and the general replacement known by those skilled in the art is also encompassed in protection range of the present utility model.
In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, concrete condition the concrete meaning of above-mentioned term in the utility model can be understood.
Incorporated by reference to reference to figure 1 ~ 4, disk clamping device comprises rotary chuck 1, and rotary chuck places pan, the rotating shaft (not looking in figure) that driven rotary chuck 1 rotates, and the driver element 2 driving rotating shaft to rotate.In the present embodiment, pan is silicon chip W, and driver element 2 is drive motors.Wherein, rotary chuck comprises matrix 12, multiple clamping element 11 and annular solid 13.Wherein, matrix 12 is driven by rotating shaft and rotates around rotating shaft axis, and multiple clamping elements 11 are arranged on the periphery of matrix 12, specifically, be such as be arranged in the through hole being arranged in matrix periphery, when matrix 12 is driven rotation by rotating shaft, these clamping elements 11 are also along with rotating together.The concrete structure of clamping element as shown in Figure 2, the clamping part 11a that clamping element comprises main part 11b and gives prominence to from main part 11b, the axis phase deviation of main part 11b and clamping part 11a, therefore, when main part 11b is around its axis spinning, clamping part 11a radially outward with between the non-contacting open position of silicon chip W peripheral edge and the clip position radially-inwardly contacted with silicon chip W peripheral edge is moving.Annular solid 13 and matrix 12 are coaxially arranged, and install over substrate 12 by bearing.Annular solid 13 can rotate relative to matrix 12, specifically, disk clamping device can comprise a push rod, is rotated by this push rod limit collar body, rotating shaft is then still driven by driving mechanism and drives matrix 12 to rotate, then this matrix 12 just to there occurs with annular solid 13 and relatively rotates.On the other hand, annular solid 13 forms the field of conjugate action with the main part 11b of clamping element 11.By this field of conjugate action, when clamping element 11 relatively rotates with annular solid 13 along with matrix 12, the main part 11b of clamping element is meshed with annular solid 13 and autorotation occurs.Thus, clamping part 11a moves between open position and clip position, can carry out picking and placeing or clipping operation of silicon chip W.In the present embodiment, the main part 11b of annular solid 13 and clamping element is by gears meshing, and annular solid 13 is ring gear, and this ring gear inside is cavity, is provided with multiple spoke, as shown is 6 in cavity.The main part 11b lower end of clamping element has the tooth 11c be meshed with ring gear 13.
As shown in Figure 3, be also provided with position limiting structure in rotary chuck, it comprises locating part 14a and 14b being located at matrix 12 and annular solid 13 for a pair respectively.Contact-making surface can be formed between locating part 14a and 14b.When matrix 12 relative to annular solid 13 relatively rotate make clamping part 11a move to clip position from open position time, the first locating part 14a contacts with the second locating part 14b, thus constraint matrix 12 and annular solid 13 relatively rotating in this direction.In the present embodiment, the first locating part 14a is the block being fixed on matrix 12, and this block 14a is from matrix 12 lower surface to downward-extension and stretch out the cavity of annular solid.Second locating part 14b is the screw through spoke, and its end passes from spoke, relative with the side of block 14a.When matrix 12 relative to annular solid 13 turn to the first locating part 14a contact with the second locating part 14b time, stop between matrix 12 and annular solid 13 relatively rotating, the clamping part 11a of clamping element 11 stops moving radially.Therefore, by arranging position limiting structure, matrix 12 can be retrained and make clamping part from open position to relatively rotating the direction of clip position with annular solid 13, thus regulate moving radially and clip position of the clamping part of clamping element, control the power that clamping part acts on silicon chip edge.
Preferably, the contact-making surface position of position limiting structure is adjustable, therefore can realize relative positions different between matrix 12 and annular solid 13, thus obtains the different clip position of clamping element.Such as, the screw of the present embodiment is set to the adjustable length be screwed into, is then differently screwed into length and just can produces the different contact-making surface positions contacted with block.
In other embodiments, also can arrange block on the spoke of annular solid, and arrange screw at base bottom, the utility model is not limited this.
In addition, rotary chuck also can be provided with elastic component, and as helical spring 15, its one end is connected to the spoke of annular solid 13, and its contrary end is connected on matrix 12.This helical spring 15 is contrary with the effect of position limiting structure, clamping element can be made to move to the rotation of matrix 12 relative to annular solid 13 of open position from clip position for retraining.
Next the operation principle of disk clamping device of the present utility model will be described in detail.
Please refer to Fig. 3, clamping device by clamp position to the process of open mode is: first, annular solid 13 is inserted by an external agency (push rod described above), limit collar body 13 rotates (for counterclockwise in figure), and drive motors controls rotating shaft rotation (being counterclockwise in figure), rotating shaft band kinetoplast 12 synchronous rotary, because annular solid 13 is limited by push rod, can not follow matrix 12 and rotate.Like this, matrix 12 overcomes the elastic force of elastic component 15, rotates relative to annular solid 13, and clamping element 11 engages with annular solid 13, and main part 11b turns an angle around himself axis, and clamping part 11a and silicon chip edge disengage.Now, there is certain distance between the first locating part 14a bottom matrix 12 and the second locating part 14b on annular solid 13.
Clamping device by open mode to the process of clamp position is: Electric Machine Control rotating shaft opposite spin (being clockwise direction in Fig. 4), rotating shaft band kinetoplast 12 synchronous rotary, but when matrix 12 relative to annular solid 13 turn to the first locating part 14a contact with the second locating part 14b time, stop between matrix 12 and annular solid 13 relatively rotating, the clamping part of clamping element 11 moves to the position of clamping silicon chip.Now remove push rod, clamping device can carry out continuous rotation.Wherein, when the clamping part of clamping element moves to open position from clip position, or move to clip position from open position, the angle that drive motors controls the rotation of rotating shaft band kinetoplast 12 can be 3 ° to 8 °
In a preferred embodiment of the present utility model, when the clamping part of clamping element by open position to clip position time, drive motors drives rotating shaft to rotate with S curve feed speed control, and S curve can be parabolic type or trigonometric function type.Whole feed speed control process can comprise and add accelerating sections, even accelerating sections, subtract accelerating sections, at the uniform velocity section, accelerating and decelerating part, even braking section and subtract the combination of braking section, and meet acceleration consecutive variations in time, thus make acceleration there will not be sudden change, the rotary speed of matrix 12 so can be made more steady.Preferably, when the first locating part 14a contacts with the second locating part 14b, acceleration, speed are 0, or all close to 0, thus the relative impact power reduced when the first locating part 14a contacts with the second locating part 14b, improve the stationarity of motion, the final clamping element that reduces is to the impact of silicon chip edge.
In sum, disk clamping device of the present utility model, by moving radially and clip position of position limiting structure adjustable holding element, thus regulates clamping element to act on the power of silicon chip side.In addition, the utility model more by clamping part from open position to clip position process the sudden change of the control of the driving mechanism acceleration of avoiding matrix to rotate, to reduce the impact of clamping device to silicon chip.
Although the utility model discloses as above with preferred embodiment; right described many embodiments are citing for convenience of explanation only; and be not used to limit the utility model; those skilled in the art can do some changes and retouching under the prerequisite not departing from the utility model spirit and scope, and the protection range that the utility model is advocated should be as the criterion with described in claims.
Claims (10)
1. a disk clamping device, comprises rotary chuck, and it places pan; Rotating shaft, drives described rotary chuck to rotate; And driving mechanism, drive described rotating shaft to rotate, wherein said rotary chuck comprises:
Matrix, by described rotating shaft driven rotary;
Multiple clamping element, is located at the periphery of described matrix; Described clamping element comprises main part and gives prominence to and the clamping part of axis phase deviation each other from described main part, described main part spin then move between the clip position that described clamping part is contacted at the non-contacting open position of radially outer and described pan peripheral edge and radially inner and described pan peripheral edge;
Annular solid, be coaxially set with described matrix and form the field of conjugate action with the main part of described clamping element, the described field of conjugate action is used for when described matrix and described annular solid relatively rotate, and the main part of described clamping element is engaged and autorotation with described annular solid;
Position limiting structure, it comprises is located at described matrix and described annular solid and the first locating part and second locating part that can form contact-making surface each other respectively, when described matrix phase for described annular solid generation first direction relatively rotate to make described clamping part move to described clip position from described open position time, described first locating part contacts to retrain relatively rotating of described first direction with described second locating part.
2. disk clamping device according to claim 1, is characterized in that, the position of the contact-making surface of described first locating part and described second locating part is adjustable.
3. disk clamping device according to claim 1, is characterized in that, described annular solid is ring gear, and the lower end of the main part of described clamping element forms the tooth engaged with described ring gear.
4. disk clamping device according to claim 3, is characterized in that, described first locating part is the block being fixed on described matrix; Described second locating part is the screw being fixed on described annular solid; Described block has the side relative with described screw.
5. disk clamping device according to claim 4, is characterized in that, described ring gear inside is cavity, is provided with spoke in described cavity, and described screw is through described spoke and is screwed into length-adjustable expansion screw; Described block to stretch out and side is relative with described expansion screw from described cavity.
6. disk clamping device according to claim 1, it is characterized in that, described rotary chuck also comprises elastic component, its one end connects described matrix, the other end connects described annular solid, for when described matrix phase, for described annular solid, relatively rotating of second direction opposite to the first direction occurs, retrain relatively rotating of described second direction.
7. disk clamping device according to claim 1, it is characterized in that, described disk clamping device also comprises push rod, by described push rod limit described annular solid rotate and described driving mechanism drives described rotating shaft to rotate, make described matrix and described annular solid occur described in relatively rotate.
8. disk clamping device according to claim 7, it is characterized in that, when described clamping element moves to described open position from described clip position, or when moving to described clip position from described open position, the angle that rotating shaft described in described driving mechanisms control drives described matrix to rotate is 3 ° to 8 °.
9. disk clamping device according to claim 7, it is characterized in that, described matrix turns in the process that described first locating part contacts with described second locating part along described first direction, and described driving mechanism rotates with rotating shaft described in S curve feed speed control.
10. disk clamping device according to claim 9, is characterized in that, when described first locating part contacts with described second locating part, the acceleration that rotating shaft described in described driving mechanisms control rotates and speed are 0.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420056727.7U CN204130515U (en) | 2014-01-29 | 2014-01-29 | There is the disk clamping device of position limiting structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420056727.7U CN204130515U (en) | 2014-01-29 | 2014-01-29 | There is the disk clamping device of position limiting structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204130515U true CN204130515U (en) | 2015-01-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420056727.7U Expired - Lifetime CN204130515U (en) | 2014-01-29 | 2014-01-29 | There is the disk clamping device of position limiting structure |
Country Status (1)
| Country | Link |
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| CN (1) | CN204130515U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103745950A (en) * | 2014-01-29 | 2014-04-23 | 北京七星华创电子股份有限公司 | Disk clamping device with limit structure |
| CN105448785A (en) * | 2015-12-31 | 2016-03-30 | 北京七星华创电子股份有限公司 | Semi-conductor film forming equipment, automatic positioning and clamping structures of wafer and clamping method |
| CN108983553A (en) * | 2017-05-30 | 2018-12-11 | 佳能株式会社 | Transmit hand, transmission device, lithographic equipment, the manufacturing method of article and holding mechanism |
| CN114789414A (en) * | 2022-05-27 | 2022-07-26 | 河北圣昊光电科技有限公司 | Blue membrane anchor clamps |
-
2014
- 2014-01-29 CN CN201420056727.7U patent/CN204130515U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103745950A (en) * | 2014-01-29 | 2014-04-23 | 北京七星华创电子股份有限公司 | Disk clamping device with limit structure |
| CN105448785A (en) * | 2015-12-31 | 2016-03-30 | 北京七星华创电子股份有限公司 | Semi-conductor film forming equipment, automatic positioning and clamping structures of wafer and clamping method |
| CN105448785B (en) * | 2015-12-31 | 2018-12-18 | 北京北方华创微电子装备有限公司 | Semiconductor film-forming apparatus, wafer automatic positioning clamping structure and method for chucking |
| CN108983553A (en) * | 2017-05-30 | 2018-12-11 | 佳能株式会社 | Transmit hand, transmission device, lithographic equipment, the manufacturing method of article and holding mechanism |
| CN108983553B (en) * | 2017-05-30 | 2021-07-06 | 佳能株式会社 | Transfer hand, transfer apparatus, lithographic apparatus, method of manufacturing article, and holding mechanism |
| CN114789414A (en) * | 2022-05-27 | 2022-07-26 | 河北圣昊光电科技有限公司 | Blue membrane anchor clamps |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20150128 |