CN216378351U

CN216378351U - Carry wafer stage of high vanadium oxide deposit degree of consistency

Info

Publication number: CN216378351U
Application number: CN202122806544.5U
Authority: CN
Inventors: 宋永辉; 王世宽; 徐伟
Original assignee: Wuxi Shangji Semiconductor Technology Co ltd
Current assignee: Wuxi Shangji Semiconductor Technology Co ltd
Priority date: 2021-11-16
Filing date: 2021-11-16
Publication date: 2022-04-26
Anticipated expiration: 2031-11-16

Abstract

The utility model discloses a slide holder for improving the deposition uniformity of vanadium oxide, which is applied to the field of physical vapor deposition and has the technical scheme that: including a vacuum section of thick bamboo and the slide glass subassembly of setting in a vacuum section of thick bamboo, slide glass subassembly includes the slide glass dish, and the upper surface of slide glass dish is provided with a plurality of substrates that are used for the vanadium oxide deposit, and the below of slide glass dish is folded and is equipped with the heating plate, and the position that corresponds a plurality of substrates on the heating plate is provided with a plurality of heating cavitys, is provided with the electric heat radiation board that is used for the substrate heating in a plurality of heating cavitys, and the technical effect who has is: by adding the electric heating radiation plate below the substrate and matching with the heating cavity and the heat collecting cavity, the substrate can be heated more pertinently, and meanwhile, the substrate is heated more uniformly, so that vanadium oxide particles are deposited on the substrate uniformly and rapidly.

Description

Carry wafer stage of high vanadium oxide deposit degree of consistency

Technical Field

The utility model relates to the field of physical vapor deposition, in particular to a slide holder for improving the uniformity of vanadium oxide deposition.

Background

The vanadium oxide deposition slide holder is a device which is provided with a substrate and can form a product by uniformly depositing vanadium oxide on the substrate, and the vanadium oxide deposition speed can be clamped by heating the slide holder in the vanadium oxide deposition process;

the traditional slide holder usually adopts integral heating to a slide holder disc provided with a substrate to accelerate the deposition of vanadium oxide, but the method can cause the temperature rise of the position on the slide holder disc where the substrate is not arranged, although the deposition speed of the vanadium oxide is accelerated, the growth uniformity of the vanadium oxide on the surface of the substrate cannot be ensured, if the vanadium oxide on the substrate has the condition of non-uniform growth, other procedures are needed for reprocessing, and the working efficiency is low.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a slide holder for improving the uniformity of vanadium oxide deposition, which has the advantages that each substrate can be directionally heated, and the vanadium oxide deposition can be faster and more uniform.

The technical purpose of the utility model is realized by the following technical scheme:

the utility model provides an improve slide glass platform of vanadium oxide deposit degree of consistency, includes a vacuum section of thick bamboo and sets up the slide glass subassembly in a vacuum section of thick bamboo, the slide glass subassembly includes the slide glass dish, the upper surface of slide glass dish is provided with a plurality of substrates that are used for the vanadium oxide deposit, the below of slide glass dish is folded and is equipped with the heating plate, it is a plurality of to correspond on the heating plate the position of substrate is provided with a plurality of heating cavitys, and is a plurality of be provided with in the heating cavity and be used for the electric heat radiation board to the substrate heating.

Through the technical scheme: the electric heat radiation board can heat up self fast, and the temperature is controllable, because it generates heat for electric radiation, its directive property of generating heat is better, because the mounted position of heating cavity correspondence every substrate, after the electric heat radiation board heating, the heating cavity can be more targeted heats its target area, after the substrate temperature risees, the temperature of its week side is lower relatively, the higher substrate of temperature can attract the vanadium oxide particle better, can accomplish the deposit of more vanadium oxide particles in unit interval, because the heating region is comparatively concentrated, the being heated of substrate is more even, thereby realize the homogeneity of better vanadium oxide particle deposit.

The utility model is further configured to: the bottom surface of the slide plate is provided with a heat collecting cavity which is beneficial to heating the substrate at the position corresponding to the heating cavities.

Through the technical scheme: the heat collecting cavity can better concentrate heat, and the substrate is convenient to be uniformly and quickly heated.

The utility model is further configured to: the vacuum pump is characterized in that the central positions of the slide plate disc and the heating disc penetrate downwards to form a hollow transmission rod, a sealing bearing is sleeved on the transmission rod in a sliding sealing mode, and the sealing bearing is embedded at the bottom of the vacuum cylinder in a sealing mode.

Through the technical scheme: the transmission rod is used for driving the slide plate disc and the heating disc to rotate, the transmission rod is in sealing connection with the heating disc, and in order to ensure that the transmission rod cannot damage the vacuum environment when penetrating out of the vacuum cylinder, the rotation of the transmission rod cannot be influenced while sealing is kept by adopting the sealing bearing.

The utility model is further configured to: the transmission rod penetrates out of one end of the vacuum cylinder through the sealing bearing, a hollow driving shaft is fixedly connected in a sealing mode, and a driving mechanism for driving the driving shaft to rotate is arranged at one end, far away from the vacuum cylinder, of the driving shaft.

Through the technical scheme: the driving mechanism is used for driving the driving shaft to rotate so as to drive the transmission rod, the slide glass disc and the heating disc to rotate.

The utility model is further configured to: the drive mechanism includes the drive frame, the middle part of drive frame is provided with the bearing, the drive shaft passes through the bearing and wears out the drive frame, be provided with driving motor on the drive frame, the tip of driving motor axis of rotation is provided with drive gear, the drive shaft is located drive gear's corresponding position and is provided with drive gear, drive gear with drive gear meshing transmission is connected.

Through the technical scheme: the driving motor drives the driving shaft to rotate through the driving gear and the transmission gear, and the bearing on the driving frame can ensure the vertical degree of the driving shaft when rotating, so that the driving shaft is prevented from generating angle deviation when rotating.

The utility model is further configured to: the end part of the driving shaft penetrating out of the driving frame is provided with a conductive sliding ring, a power transmission line of the conductive sliding ring penetrates through the driving shaft and the transmission rod, and the power transmission line of the conductive sliding ring penetrates out of the transmission rod and is electrically connected with the electrothermal radiating plates.

Through the technical scheme: the conductive slip ring is used for supplying power to the electrothermal radiating plate, and meanwhile, the transmission line cannot be twisted or knotted when the driving shaft rotates.

The utility model is further configured to: and the transmission rod and the driving shaft are respectively internally provided with a sealing rubber block, and a transmission line of the conductive sliding ring is hermetically connected with the sealing rubber block.

Through the technical scheme: the sealing rubber block can seal the hollow transmission rod and the drive shaft, and the vacuum environment in the vacuum cylinder is prevented from being damaged.

The utility model is further configured to: the driving shaft is located the actuating mechanism with linear bearing has been put to the slip cover between the vacuum tube, the last backup pad that is provided with of linear bearing, the driving shaft slides and wears out the backup pad, the bottom surface and the backup pad fixed connection of vacuum tube.

Through the technical scheme: the backup pad can form to support and fix a vacuum section of thick bamboo, and its vertical degree can be guaranteed when the drive shaft rotates to the linear bearing that sets up on it, prevents to cause the destruction to the vacuum environment in a vacuum section of thick bamboo when the turned angle of drive shaft takes place the skew.

The utility model is further configured to: the supporting plate is located one side of the driving frame is fixedly provided with a servo sliding table, and one end of the driving frame is connected with the servo sliding table in a sliding mode through a sliding block.

Through the technical scheme: the servo sliding table can drive the driving frame and the driving shaft which is rotationally connected with the driving frame to slide up and down, and meanwhile, the driving shaft can drive the slide plate disc to slide up and down through the transmission rod, so that the uniform deposition of vanadium oxide is realized by changing the up-down position of the substrate in the process of vanadium oxide deposition.

The utility model is further configured to: the supporting plate is provided with a sliding rail at one end, away from the servo sliding table, of the supporting plate, and the sliding rail is connected with one end, away from the servo sliding table, of the driving frame in a sliding mode.

Through the technical scheme: when the servo sliding table drives the driving frame to slide up and down, the sliding rail can further ensure the accuracy of the up-and-down sliding of the servo sliding table, and the servo sliding table is prevented from structural attenuation after long-time sliding action, so that the service life of the servo sliding table is prolonged.

In conclusion, the utility model has the following beneficial effects:

by adding the electric heating radiation plate below the substrate and matching with the heating cavity and the heat collecting cavity, the substrate can be heated more pertinently, and meanwhile, the substrate is heated more uniformly, so that vanadium oxide particles are deposited on the substrate uniformly and rapidly.

Drawings

FIG. 1 is a schematic view of the slide holder according to the present embodiment;

FIG. 2 is an exploded view of the slide assembly of the present embodiment;

FIG. 3 is a schematic view of the internal connection of the stage according to this embodiment.

Reference numerals: 1. a vacuum cylinder; 2. a slide assembly; 3. a slide tray; 4. a substrate; 5. heating the plate; 6. heating the cavity; 7. an electrothermal radiating plate; 8. a heat collecting cavity; 9. a transmission rod; 10. sealing the bearing; 11. a drive shaft; 12. a drive mechanism; 13. a driving frame; 14. a bearing; 15. a drive motor; 16. a drive gear; 17. a transmission gear; 18. a conductive slip ring; 19. sealing the rubber block; 20. a linear bearing; 21. a support plate; 22. a servo sliding table; 23. a slide rail.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

Example (b):

referring to fig. 1 and 2, a slide holder for improving the uniformity of vanadium oxide deposition comprises a vacuum cylinder 1 and a slide holder assembly 2 arranged in the vacuum cylinder 1, the slide holder assembly 2 is arranged at the center of the vacuum cylinder 1, the slide holder assembly 2 comprises a slide holder plate 3, twelve substrates 4 for vanadium oxide deposition are uniformly distributed on the upper surface of the slide holder plate 3 along the circumferential side of the slide holder plate, the substrates 4 in the embodiment are made of silicon wafers, a heating plate 5 with the same size as the slide holder plate 3 is stacked below the slide holder plate 3, heating cavities 6 are respectively arranged on the heating plate 5 corresponding to the twelve substrates 4, an electrothermal radiation plate 7 for heating the substrates 4 is arranged in the heating cavity 6, the radiation direction of the electrothermal radiation plate faces the slide holder plate 3, a heat accumulation cavity 8 beneficial to heating the substrates is arranged on the surface of the slide holder plate 3, which is attached to the heating plate 5, corresponding to the positions of the heating cavities 6, after the temperature of the heating cavity 6 is raised to the target temperature by the electric heating radiation plate 7, heat can be transmitted to the heat collecting cavity 8, so that the single substrate 4 can be heated in a centralized manner, the heating speed and the heating uniformity of the substrate 4 can be greatly improved, and the deposition of vanadium oxide particles on the substrate 4 is facilitated.

Referring to fig. 1 and 3, the central positions of the slide plate 3 and the heating plate 5 penetrate downwards to be provided with a hollow transmission rod 9, the upper end of the transmission rod 9 is embedded in the slide plate 3 in a sealing manner, a sealing bearing 10 is sleeved on the transmission rod 9 in a sliding and sealing manner, the sealing bearing 10 is embedded at the bottom of the vacuum cylinder 1 in a sealing manner, the transmission rod 9 penetrates through one end of the vacuum cylinder 1 through the sealing bearing 10 to be fixedly connected with a hollow driving shaft 11 in a sealing manner, the outer diameter of the driving shaft 11 is larger than that of the transmission rod 9, when the driving shaft 11 slides upwards and abuts against the sealing bearing 10, the driving shaft 11 can slide upwards continuously to generate a limit position, and one end of the driving shaft 11, which is far away from the vacuum cylinder 1, is provided with a driving mechanism 12 for driving the driving shaft to rotate.

Referring to fig. 3, the driving mechanism 12 includes a driving frame 13, the driving frame 13 is a double-layer three-dimensional structure, bearings 14 are respectively disposed in the middle of the upper side and the lower side of the driving frame 13, the driving shaft 11 penetrates through the lower layer of the driving frame 13 through the bearings 14, the driving shaft 11 can rotate relative to the driving frame 13 through the bearings 14, a driving motor 15 is disposed on the upper layer of the driving frame 13, a driving gear 16 is disposed inside the driving frame 13 and below the end of the rotating shaft of the driving motor 15, a transmission gear 17 is disposed at the corresponding position of the driving shaft 11 on the driving gear 16, and the transmission gear 17 is in meshing transmission connection with the driving gear 16.

Referring to fig. 3, a conductive slip ring 18 is disposed at an end portion of the driving shaft 11 penetrating through the driving frame 13, the conductive slip ring 18 is fixedly connected with a lower layer of the driving frame 13, the driving shaft 11 is rotatably connected with the conductive slip ring 18, a power line of the conductive slip ring 18 penetrates through the driving shaft 11 and the transmission rod 9, sealing rubber blocks 19 are disposed in the transmission rod 9 and the driving shaft 11 respectively, the power line of the conductive slip ring 18 is hermetically connected with the sealing rubber blocks 19, and the power line of the conductive slip ring 18 penetrates through the transmission rod 9 and is electrically connected with the plurality of electrothermal radiating plates 7.

Referring to fig. 3, a linear bearing 20 is slidably sleeved on the driving shaft 11 between the driving mechanism 12 and the vacuum cylinder 1, a supporting plate 21 is fixedly disposed at the upper end of the linear bearing 20, the central position of the supporting plate 21 is communicated with the central position of the linear bearing 20 through an opening, the driving shaft 11 penetrates through the supporting plate 21 through the linear bearing 20 in a sliding manner, the bottom surface of the vacuum cylinder 1 is fixedly connected with the supporting plate 21, a servo sliding table 22 and a sliding rail 23 are fixedly disposed at two sides of the supporting plate 21 on the driving frame 13, one end of the driving frame 13 is slidably connected with the servo sliding table 22 through a sliding block, the other end of the driving frame is slidably connected with the sliding rail 23, the sliding distance and the sliding direction of the driving frame 13 on the servo sliding table 22 and the sliding rail 23 are the same, and the servo sliding table 22 can drive the driving shaft 11 to slide up and down in the linear bearing 20 through the driving frame 13.

The working process and principle of the embodiment are as follows:

in the process of depositing vanadium oxide, the substrate for receiving the vanadium oxide settlement needs to be heated to a certain temperature, so that the settlement of the vanadium oxide is accelerated, and meanwhile, in order to ensure the uniformity of the vanadium oxide settlement, the total contact area of the vanadium oxide and the substrate can be increased by adjusting the vertical height of a slide plate for bearing the substrate back and forth, so that the vanadium oxide is fully settled at the weak position of the substrate;

in this embodiment, by individually heating each substrate 4, a temperature difference can be formed between the substrate 4 and the air around the substrate 4, so that the vanadium oxide tends to the heated substrate 4, and simultaneously, the substrate 4 can be uniformly heated and heated more quickly by the directional heating cooperation of the heating cavity 6 and the heat collecting cavity 8, so that the vanadium oxide can be rapidly and uniformly deposited on the substrate 4.

The present embodiment is only for explaining the present invention, and it is not limited to the present invention, and those skilled in the art can make modifications of the present embodiment without inventive contribution as needed after reading the present specification, but all of them are protected by patent law within the scope of the claims of the present invention.

Claims

1. A slide holder for improving the deposition uniformity of vanadium oxide comprises a vacuum cylinder (1) and a slide assembly (2) arranged in the vacuum cylinder (1);

the device is characterized in that the slide glass component (2) comprises a slide glass tray (3), and a plurality of substrates (4) for depositing vanadium oxide are arranged on the upper surface of the slide glass tray (3);

the heating plate (5) is arranged below the slide plate (3) in an overlapped mode, the heating plate (5) is provided with a plurality of heating cavities (6) corresponding to the positions of the substrates (4), and the heating cavities (6) are internally provided with electric heating radiation plates (7) used for heating the substrates (4).

2. The slide holder for improving the uniformity of vanadium oxide deposition according to claim 1, wherein a heat collecting cavity (8) for facilitating the heating of the substrate (4) is arranged on the bottom surface of the slide holder (3) corresponding to the plurality of heating cavities (6).

3. The slide holder for improving the uniformity of vanadium oxide deposition according to claim 1, wherein a hollow transmission rod (9) penetrates downwards from the center positions of the slide holder disk (3) and the heating disk (5), a sealing bearing (10) is sleeved on the transmission rod (9) in a sliding and sealing manner, and the sealing bearing (10) is embedded at the bottom of the vacuum cylinder (1) in a sealing manner.

4. The slide holder for improving the uniformity of vanadium oxide deposition according to claim 3, wherein the end of the transmission rod (9) penetrating through the vacuum cylinder (1) through the sealing bearing (10) is fixedly connected with a hollow driving shaft (11) in a sealing manner, and a driving mechanism (12) for driving the driving shaft (11) to rotate is arranged at the end of the driving shaft (11) far away from the vacuum cylinder (1).

5. The slide holder for improving the uniformity of vanadium oxide deposition according to claim 4, wherein the driving mechanism (12) comprises a driving frame (13), a bearing (14) is arranged in the middle of the driving frame (13), the driving shaft (11) penetrates out of the driving frame (13) through the bearing (14), a driving motor (15) is arranged on the driving frame (13), a driving gear (16) is arranged at the end of the rotating shaft of the driving motor (15), a transmission gear (17) is arranged at the corresponding position of the driving shaft (11) on the driving gear (16), and the transmission gear (17) is in meshing transmission connection with the driving gear (16).

6. The stage for improving uniformity of vanadium oxide deposition according to claim 5, wherein the end of the driving shaft (11) penetrating out of the driving frame (13) is provided with a conductive slip ring (18), a power line of the conductive slip ring (18) penetrates through the driving shaft (11) and the transmission rod (9), and the power line of the conductive slip ring (18) penetrates out of the transmission rod (9) and is electrically connected with the electrothermal radiating plates (7).

7. The slide holder for improving the uniformity of vanadium oxide deposition according to claim 6, wherein the transmission rod (9) and the driving shaft (11) are respectively provided with a sealing rubber block (19), and the transmission line of the conductive slip ring (18) is hermetically connected with the sealing rubber block (19).

8. The slide holder for improving the uniformity of vanadium oxide deposition according to claim 5, wherein a linear bearing (20) is slidably sleeved on the driving shaft (11) between the driving mechanism (12) and the vacuum cylinder (1), a supporting plate (21) is arranged on the linear bearing (20), the driving shaft (11) slidably penetrates through the supporting plate (21), and the bottom surface of the vacuum cylinder (1) is fixedly connected with the supporting plate (21).

9. The slide holder for improving the uniformity of vanadium oxide deposition according to claim 8, wherein a servo sliding table (22) is fixedly arranged on one side of the support plate (21) on the driving rack (13), and one end of the driving rack (13) is slidably connected with the servo sliding table (22) through a sliding block.

10. The slide holder for improving the uniformity of vanadium oxide deposition according to claim 9, wherein a slide rail (23) is disposed at one end of the support plate (21) away from the servo sliding table (22), and the slide rail (23) is slidably connected to one end of the driving frame (13) away from the servo sliding table (22).