CN104630735A - Temperature monitoring device and plasma processing apparatus - Google Patents
Temperature monitoring device and plasma processing apparatus Download PDFInfo
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- CN104630735A CN104630735A CN201310547435.3A CN201310547435A CN104630735A CN 104630735 A CN104630735 A CN 104630735A CN 201310547435 A CN201310547435 A CN 201310547435A CN 104630735 A CN104630735 A CN 104630735A
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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Abstract
The invention provides a temperature monitoring device and a plasma processing apparatus. In the temperature monitoring device, a drive unit driving temperature detection module moves in a reaction chamber to make the temperature detection module detect the temperatures of different areas of a heated body in the movement process and send the detected temperatures to a control unit; and the control unit compares the temperatures sent by the temperature detection module with a preset standard temperature, and a calibration heating unit outputs power to the detected areas corresponding to the temperatures sent by the temperature detection module when a deviation exists between the temperatures and the preset standard temperature. The temperature monitoring device provided by the invention can improve the heating uniformity of the heated body in order to improve the process quality, and can simplify the operation process in order to improve the work efficiency.
Description
Technical field
The invention belongs to semiconductor devices and manufacture field, be specifically related to a kind of device for monitoring temperature and plasma processing device.
Background technology
Adopt in semiconductor integrated circuit manufacture field PVD equipment carry out degassing technique process in and in LED manufacture field, adopt ITO PVD equipment to carry out before plated film in pre-heating process process, workpiece to be machined is heated to the temperature needed for technique by usual employing heating bulb, and the temperature homogeneity of processed technique is the important factor affecting its follow-up processing quality.
Fig. 1 is the structure diagram of the existing chamber that degass, refer to Fig. 1, degas in chamber 10 and be horizontally disposed with quartz window 17, upper chamber 18 and lower chambers 19 is divided into from top to bottom in order to the chamber 10 that will degas, wherein, bottom in lower chambers 19 is provided with at least three thimbles 11, the top of at least three thimbles 11 is for supporting workpiece to be machined S, the sidewall of lower chambers 19 is provided with piece mouth 12, for as mechanical manipulator workpiece to be machined S being imported into and the passage of the gas chamber 10 that spreads out of, and piece mouth 12 keeps closing condition time in heat-processed, and ensure that lower chambers 19 has certain vacuum tightness, the roof of upper chamber 18 is reflector 13, and the mounting plate 15 be provided with on the upper surface of reflector 13 for fixing heating bulb installation seat 14, each heating bulb 16 is arranged on corresponding heating bulb installation seat 14 via the through hole running through reflector 13 and mounting plate 15, and heating bulb 16 is heated by quartz window 17 pairs of workpieces to be machined until temperature needed for technique.
When adopting the chamber that degass shown in Fig. 1 to heat workpiece to be machined, need to utilize surface mounting to have the test substrate of several thermopairs to carry out adding Thermal test in advance, to obtain test data in this heat-processed, in actual process process, with this test data for reference carries out homogeneous heating to workpiece to be machined.
But, adopt aforesaid method can there is following problem in the process of workpiece to be machined homogeneous heating:
One, all can impact the actual Heating temperature of workpiece to be machined during change due to the change of the process environments when the chamber that degass or the material of workpiece to be machined, therefore be realize carrying out homogeneous heating to workpiece to be machined with reference to being difficult to test data, thus cause the poor temperature uniformity of workpiece to be machined, and then cause processing quality poor;
Its two, when needs adjust technological temperature, need to regain test data, this makes, and operating process is complicated, efficiency is low.
Summary of the invention
The present invention is intended to solve the technical problem existed in prior art, and provide a kind of device for monitoring temperature and plasma processing device, it not only can improve the heating uniformity of heated object, thus can improve processing quality; And operating process can be made simple, thus can increase work efficiency.
The invention provides a kind of device for monitoring temperature, for monitoring the temperature of the different zones of the heated object being positioned at reaction chamber to control heating power, described device for monitoring temperature comprises heating unit, detecting unit, driver element and control unit, wherein, described heating unit is used for heating the different zones of described heated object; Described detecting unit comprises temperature detecting module, and the temperature detected for detecting the temperature in the different zones of described heated object, and is sent to described control unit by described temperature detecting module; Described driver element for driving described temperature detecting module at described reaction chamber indoor moving, with the temperature making described temperature detecting module detect described heated object different zones respectively in the process of movement; The temperature that described control unit is used for sending according to described temperature detecting module and comes and preset standard temperature compare, and when the two exists deviation, calibrate the output rating of the surveyed area corresponding to temperature that described heating unit sends described temperature detecting module.
Particularly, described heated object comprises the multiple regions concentric each other radially divided, described detecting unit also comprises position detecting module, described position detecting module is used for the position detecting described temperature detecting module in the process of described temperature detecting module movement in real time, and sends it to described control unit; The temperature that the position judgment that described control unit is used for sending according to described position detecting module and comes is sent in this position by described temperature detecting module and comes belongs to the region of heated object, and this temperature and preset standard temperature are compared, and calibrate the output rating of described heating unit to this region of described heated object when the two exists deviation.
Particularly, described heated object comprises the central zone concentric each other and fringe region that radially divide from inside to outside, described heating unit comprises center heating module and edge heating module, and described center heating module is used for heating the central zone of heated object; Described edge heating module is used for heating the fringe region of heated object; Described driver element moves between the central zone and fringe region of described reaction chamber for driving described temperature detecting module, to make described temperature detecting module detect the central zone of described heated object and the temperature of fringe region respectively in the process of movement, and send it to described control unit; Described position detecting module is used for the position detecting described temperature detecting module in the process of described temperature detecting module movement in real time, and sends it to described control unit; The temperature that the position judgment that described control unit is used for sending according to described position detecting module and comes is sent in this position by described temperature detecting module and comes belongs to central zone temperature or the edge area temperature of heated object, if belong to the central zone temperature of heated object, then itself and preset standard temperature are compared, and calibrate the output rating of described center heating module when the two exists deviation; If belong to the edge area temperature of heated object, then itself and preset standard temperature are compared, and calibrate the output rating of described edge heating module when the two exists deviation.
Particularly, described position detecting module comprises magnetic inductor and magnet, wherein said magnetic inductor is arranged on the position corresponding with the center of heated object, described magnet is arranged on the position corresponding with described temperature detecting module, and with described temperature detecting module synchronizing moving, and described magnetic inductor is set to: sense the magnetic field produced by described magnet when described magnet is in the central zone of described heated object, and the magnetic field produced by described magnet cannot be sensed when described magnet is in the fringe region of described heated object; Described magnetic inductor sends signal when sensing the magnetic field produced by described magnet to described control unit; Described control unit when receiving the signal from described magnetic inductor, then determines that the temperature now sent by described temperature detecting module belongs to the central zone temperature of heated object; When not receiving the signal from described magnetic inductor, then determine that the temperature now sent by described temperature detecting module belongs to the edge area temperature of heated object.
Particularly, described position detecting module comprises magnetic inductor and magnet, wherein said magnet is arranged on the position corresponding with the center of described heated object, described magnetic inductor is arranged on the position corresponding with described temperature detecting module, and with described temperature detecting module synchronizing moving, and described magnetic inductor is set to: sense the magnetic field produced by described magnet when described magnetic inductor is in the central zone of described heated object, and the magnetic field produced by described magnet cannot be sensed when described magnetic inductor is in the fringe region of described heated object, described magnetic inductor sends signal when sensing the magnetic field produced by described magnet to described control unit, described control unit when receiving the signal from described magnetic inductor, then determines that the temperature now sent by described temperature detecting module belongs to the central zone temperature of heated object, when not receiving the signal from described magnetic inductor, then determine that the temperature now sent by described temperature detecting module belongs to the edge area temperature of heated object.
Particularly, described driver element comprises rotating machine, middle wheel, outer rotor and internal wheel, and the rotational axis vertical of wherein said middle wheel in heated object place plane, and is positioned at the position corresponding with the center of heated object; Turning axle and the described middle wheel of described outer rotor fix, and described outer rotor is meshed with described internal wheel; Described rotating machine rotates for driving described middle wheel, and described middle wheel drives described outer rotor to revolve round the sun around the turning axle of described middle wheel, meanwhile, and the rotation under the drive of described internal wheel of described outer rotor; Described temperature detecting module is arranged on described outer rotor, and rotates around its turning axle at described outer rotor time rotational.
Particularly, described driver element also comprises the expansion link of adjustable in length in the horizontal direction, and one end and the described outer rotor of described expansion link are fixed, and the other end and the described temperature detecting module of described expansion link are fixed.
Particularly, described detecting unit also comprises distance detection module, and described distance detection module for detecting the level interval between itself and described temperature detecting module in described heated object radial direction, and sends it to described control unit; Whether described control unit is less than default minimum temperature for the temperature judging described temperature detecting module and send, if, the level interval then come according to now being sent by described distance detection module regulates the length of described expansion link, equals range correct value to make the level interval between described distance detection module and described temperature detecting module; Described range correct value is defined as the level interval of position when the temperature that it detects is not less than default minimum temperature and be less than the position, boundary of default minimum temperature and between described distance detection module of described temperature detecting module.
Particularly, described driver element comprises rotating machine and elastic component, and the rotational axis vertical of wherein said rotating machine in heated object place plane, and is positioned at the position corresponding with the center of heated object; One end of described elastic component and the turning axle of described rotating machine fix, and the other end of described elastic component is positioned at the position of the turning axle gone up in the horizontal direction away from described rotating machine, and described temperature detecting module is arranged on the other end of described elastic component; Described rotating machine for drive described elastic component accelerate rotate or be rotated in deceleration, described elastic component drive described temperature detecting module around described rotating machine turning axle from inside to outside or ecto-entad spirrillum rotate.
Particularly, described detecting unit also comprises distance detection module, and described distance detection module for detecting the level interval between itself and described temperature detecting module in described heated object radial direction, and sends it to described control unit; Whether described control unit is less than default minimum temperature for the temperature judging described temperature detecting module and send, if, the level interval then come according to now being sent by described distance detection module regulates the acceleration that the acceleration of described rotating machine rotates or the retarded velocity be rotated in deceleration, and equals range correct value to make the level interval between described distance detection module and described temperature detecting module; Described range correct value is defined as the level interval of position when the temperature that it detects is not less than default minimum temperature and be less than the position, boundary of default minimum temperature and between described distance detection module of described temperature detecting module.
Preferably, the scope of the vertical spacing between the lower surface of described temperature detecting module and described heated object is at 5 ~ 10mm.
The present invention also provides a kind of plasma processing device, comprises and adopts said temperature monitoring device provided by the invention.
The present invention has following beneficial effect:
Device for monitoring temperature provided by the invention, it passes through drive unit drives temperature detecting module at reaction chamber indoor moving, temperature detecting module detects the temperature of heated object different zones respectively in the process of movement, and the temperature detected is sent to control unit, the temperature that control unit sends according to temperature detecting module and comes and preset standard temperature compare, and when the two exists deviation, the output rating of the surveyed area corresponding to temperature that calibration heating unit sends temperature detecting module, this makes it possible to achieve and regulates heating unit to the output rating of the different zones of heating member according to the temperature of the heated object different zones detected in real time, thus not only can improve the heating uniformity of heated object, and then can processing quality be improved, and, when needs adjust technological temperature, only need adjustment preset standard temperature, this with need to regain compared with test data in prior art, operating process can be made simple, thus can increase work efficiency.
Plasma processing device provided by the invention, it adopts device for monitoring temperature provided by the invention, not only can improve the heating uniformity of heated object, thus can improve processing quality; And can increase work efficiency, and then can increase economic efficiency.
Accompanying drawing explanation
Fig. 1 is the structure diagram of the existing chamber that degass;
The functional block diagram of the device for monitoring temperature that Fig. 2 provides for first embodiment of the invention;
The structure diagram of the device for monitoring temperature that Fig. 3 provides for Fig. 2;
Fig. 4 a is the sectional view of driver element in Fig. 3;
Fig. 4 b is the structural representation of driver element in Fig. 3;
Fig. 5 is the vertical view of heating unit in Fig. 3;
Fig. 6 is the mobile route schematic diagram of temperature detecting module;
Fig. 7 is the second structural representation of driver element in Fig. 2;
Fig. 8 is the third structural representation of driver element in Fig. 2;
Fig. 9 is the mobile route schematic diagram of the drive unit drives temperature detecting module shown in Fig. 8;
The functional block diagram of the device for monitoring temperature that Figure 10 provides for second embodiment of the invention; And
The structure diagram of the device for monitoring temperature that Figure 11 provides for Figure 10.
Embodiment
For making those skilled in the art understand technical scheme of the present invention better, below in conjunction with accompanying drawing, device for monitoring temperature provided by the invention and plasma processing device are described in detail.
The functional block diagram of the device for monitoring temperature that Fig. 2 provides for first embodiment of the invention.The structure diagram of the device for monitoring temperature that Fig. 3 provides for Fig. 2.Fig. 4 a is the sectional view of driver element in Fig. 3.Fig. 4 b is the structural representation of driver element in Fig. 3.See also Fig. 2, Fig. 3, Fig. 4 a and Fig. 4 b, the device for monitoring temperature that the present embodiment provides, for monitoring the temperature of the different zones of the heated object being positioned at reaction chamber to control heating power, it comprises detecting unit 20, driver element 21, heating unit 22 and control unit 23.Wherein, heating unit 22 is for heating the different zones of heated object S, in the present embodiment, heating unit 22 comprises center heating module 221 and edge heating module 222, center heating module 221 is for heating the central zone of heated object S, edge heating module 222 is for heating the fringe region of heated object S, heating unit 22 adopts the mode of heating bulb to heat heated object S, heating bulb comprises tungsten filament Infrared Heating bulb or halogen heating bulb, as shown in Figure 5, the multiple intervals being positioned at outer ring arrange heating bulb and form edge heating module 221, the multiple spaced heating bulb being positioned at inner ring forms center heating module 222, further, in the present embodiment, heated object S comprises single workpiece to be machined S ', or heated object S comprises multiple workpiece to be machined S ' and the pallet S for carrying multiple workpiece to be machined S ' ".
Detecting unit 20 comprises temperature detecting module 201, and wherein, temperature detecting module comprises non-contact temperature sensor, and be positioned at the below of heated object S, further, preferably, the scope of the vertical spacing H between the lower surface of temperature detecting module 201 and heated object S is at 5 ~ 10mm; Driver element 21 for actuation temperature detection module 201 at reaction chamber indoor moving, in the process of movement, heated object S different zones is detected respectively (such as to make temperature detecting module 201, the central zone of heated object S and fringe region) temperature, and send it to control unit 23; Control unit 23 compares for the temperature that sends according to temperature detecting module 201 and preset standard temperature, and when the two exists deviation, the output rating of the surveyed area corresponding to temperature that calibration heating unit 22 pairs of temperature detecting module 201 send.Particularly, when the temperature that temperature detecting module 201 sends is greater than preset standard temperature, then reduce the output rating of center heating module 221 or edge heating module 222; If when the temperature that temperature detecting module 201 sends is less than preset standard temperature, then increase the output rating of center heating module 221 or edge heating module 222; If when the temperature that temperature detecting module 201 sends equals preset standard temperature, then keep the output rating of center heating module 221 or edge heating module 222 constant.
In the present embodiment, driver element 21 comprises rotating machine 211, middle wheel 212, outer rotor 213 and internal wheel 214.Wherein, the turning axle O1O1 of middle wheel 212 perpendicular to heated object S place plane, and is positioned at the position corresponding with the center of heated object S; Turning axle O2O2 and the middle wheel 212 of outer rotor 213 fix, and outer rotor 213 is meshed with internal wheel 214; Rotating machine 211 rotates for driving middle wheel 212, and middle wheel 212 drives outer rotor 213 to revolve round the sun around the turning axle O1O1 of middle wheel 212, meanwhile, and outer rotor 213 rotation under the drive of internal wheel 214; Temperature detecting module 201 is arranged on outer rotor 213, and rotates around its turning axle O2O2 at outer rotor 213 time rotational.Easy understand, in actual applications, according to factors such as the sizes of heated object S, can carry out the mobile route of design temperature detection module 201 by the external diameter R1 of the external diameter R2 and internal wheel 214 that set outer rotor 213 respectively.
Driver element 21 also comprises the expansion link 215 of adjustable in length in the horizontal direction, one end and the outer rotor 213 of expansion link 215 are fixed, the other end and the temperature detecting module 201 of expansion link 215 are fixed, and this makes temperature detecting module 201 phase external gear wheel 213 fix.In this case, the mobile route of design temperature detection module 201 not only can be carried out by the setting external diameter R2 of the outer rotor 213 and external diameter R1 of internal wheel 214, and the mobile route of design temperature detection module 201 can be carried out by the length D setting expansion link 215, thus handiness and the suitability of device for monitoring temperature can be improved.As shown in Figure 6, for the mobile route schematic diagram of temperature detecting module, wherein, heated object S is multiple workpiece to be machined S ' and the pallet S ' ' for carrying multiple workpiece to be machined S ', and, R2=0.4R1, D=0.5R2=0.2R1, the mobile route of temperature detecting module 201 is the long amplitude cycloid with the center of pallet S ' ', mobile route as can be seen from temperature detecting module 201: temperature detecting module 201 moves between the central zone and fringe region of pallet S ' ', and its detect be positioned at pallet S ' ' central zone or fringe region each workpiece to be machined immediately below the temperature of partial tray lower surface, this temperature that temperature detecting module 201 is detected is close to the temperature of workpiece to be machined S ', therefore the external diameter R2 of outer rotor 212 can be set according to the distribution mode of the upper workpiece to be machined S ' of pallet S ' ', the external diameter R1 of the internal wheel 214 and length D of expansion link 215, with realize temperature detecting module 201 detect be positioned at pallet S ' ' central zone or fringe region each workpiece to be machined S ' immediately below the temperature of partial tray lower surface, this can improve the temperature of temperature close to workpiece to be machined S ' of temperature detecting module 201 detection, thus the accuracy that temperature detecting module 201 detection is positioned at the workpiece to be machined S ' temperature of pallet S ' ' central zone and fringe region can be improved, and then by homogeneity that the workpiece to be machined S ' that the present embodiment provides device for monitoring temperature to improve to be positioned at pallet S ' ' central zone and fringe region heats.
Easy understand, consults the mobile route of the above-mentioned driver element 21 actuation temperature detection module 201 shown in Fig. 6, can realize temperature detecting module 201 and detect the central zone of heated object S and the temperature of fringe region; Also the temperature that temperature detecting module 201 detects the regional of the workpiece to be machined S ' correspondence on pallet S ' ' can be realized.Certainly, in actual applications, the driver element 21 of other structures also can be adopted to carry out actuation temperature detection module 201 and move, the different zones divided to realize temperature detecting module 201 couples of heated object S detects.
Preferably, in the present embodiment, heated object S comprises multiple regions concentric each other of radially dividing (such as, the central zone of heated object S and fringe region), detecting unit 20 also comprises position detecting module 202, position detecting module 202 for the position of detected temperatures detection module 201 in real time in the process of temperature detecting module 201 in movement, and sends it to control unit 23.Particularly, position detecting module 202 comprises magnetic inductor 202A and magnet 202B.Wherein, magnetic inductor 202A is arranged on the opposite position place, center with heated object S, magnet 202B is arranged on the position corresponding with temperature detecting module 201, and with temperature detecting module 201 synchronizing moving, and magnetic inductor 202A is set to: sense the magnetic field produced by magnet 202B when magnet 202B is in the central zone of heated object S, and the magnetic field produced by magnet 202B cannot be sensed when magnet 202B is in the fringe region of heated object S; Magnetic inductor 202A sends signal when sensing the magnetic field produced by magnet 202B to control unit 23; Control unit 23 when receiving the signal from magnetic inductor 202A, then determines that the temperature now sent by temperature detecting module 201 belongs to the central zone temperature of heated object S; When not receiving the signal from magnetic inductor 202A, then determine that the temperature now sent by temperature detecting module 201 belongs to the edge area temperature of heated object S.
In actual applications, also magnet 202B can be arranged on the position corresponding with the center of heated object, magnetic inductor 202A is arranged on the position corresponding with temperature detecting module 201, and with temperature detecting module 201 synchronizing moving, in this case, magnetic inductor 202A is set to: sense the magnetic field produced by magnet 202B when magnetic inductor 202A is in the central zone of heated object S, and the magnetic field produced by magnet 202B cannot be sensed when magnetic inductor 202A is in the fringe region of heated object S; Magnetic inductor 202A sends signal when sensing the magnetic field produced by magnet 202B to control unit 23.
The temperature that control unit 23 comes for the position judgment sent according to position detecting module 202 is sent in this position by temperature detecting module 201 belongs to central zone temperature or the edge area temperature of heated object S, if belong to the central zone temperature of heated object S (namely, control unit 23 receives the signal from magnetic inductor 202A), then itself and preset standard temperature are compared, and when there is deviation in the two the output rating of calibration center heating module 221; If belong to the edge area temperature (that is, control unit 23 does not receive the signal from magnetic inductor 202A) of heated object S, then itself and preset standard temperature are compared, and calibrate the output rating of edge heating module 222 when the two exists deviation; Wherein, preset standard temperature carries out needed for technique for heated object S technological temperature.
It should be noted that, in actual applications, driver element 21 also can adopt other structures to move between the central zone and fringe region of heated object S to realize actuation temperature detection module 201, such as, as shown in Figure 7, for the second structural representation of driver element in Fig. 2, driver element 21 comprises rotating machine 211, first outer rotor 212 ', the second outer rotor 213 ' and internal wheel 214 ', wherein, the turning axle O1O1 of the first outer rotor 212 ' perpendicular to heated object S place plane, and is positioned at the position corresponding with the center of heated object; Second outer rotor 213 ' is meshed with the first outer rotor 212 ', and is meshed with internal wheel 214 '; Rotating machine 211 rotates for driving the first outer rotor 212 ', and the first outer rotor 212 ' drives the second outer rotor 213 ' to revolve round the sun around the turning axle O1O1 of the first outer rotor 212 ', meanwhile, and the rotation under the drive of internal wheel 214 ' of the second outer rotor 213 '; Temperature detecting module 201 is arranged on the second outer rotor 213 ', and rotates around its turning axle O2O2 at the second outer rotor 213 ' time rotational.And, the driver element 21 that itself and the present embodiment provide is similar, also comprise the expansion link 215 of adjustable in length in the horizontal direction, one end and second outer rotor 213 ' of expansion link 215 are fixed, the other end and the temperature detecting module 201 of expansion link 215 are fixed, further, the mobile route of design temperature detection module 201 also can be carried out by the length D of the external diameter R1 of the external diameter R2 of setting second outer rotor 213 ', internal wheel 214 ' and expansion link 215.
And for example, as shown in Figure 8, be the third structural representation of driver element in Fig. 2, driver element 21 comprises rotating machine 211 and elastic component 216, wherein, the rotational axis vertical of rotating machine 211 in heated object S place plane, and is positioned at the position corresponding with the center of heated object; One end of elastic component 216 and the turning axle of rotating machine 211 fix, and the other end of elastic component 216 is positioned at the position of the turning axle gone up in the horizontal direction away from rotating machine 211, and temperature detecting module 201 is arranged on the other end of elastic component 216; Rotating machine 211 for drive elastic component 216 accelerate rotate or be rotated in deceleration, elastic component 216 drive temperature detecting module 201 around rotating machine 211 turning axle from inside to outside or ecto-entad spirrillum rotate.In this case, as shown in Figure 9, for the mobile route schematic diagram of the drive unit drives temperature detecting module shown in Fig. 8, rotating machine 211 drives elastic component 216 to be rotated in deceleration, elastic component 216 drive temperature detecting module 201 around rotating machine 211 turning axle ecto-entad (namely, rotate to A place, position from position B) spirrillum rotation, temperature detecting module 201 can be realized and move to fringe region from the central zone of heated object S; Rotating machine 211 drives elastic component 216 to accelerate to rotate, elastic component 216 drive temperature detecting module 201 around rotating machine 211 turning axle from inside to outside (namely, rotate to B place, position from position A) spirrillum rotation, temperature detecting module 201 can be realized and move to central zone from the fringe region of heated object S.Easy understand, can any position between A and B of position, rotating machine 211 drive elastic component 216 to carry out accelerating or retarded motion time, elastic component 216 drives temperature detecting module 201 to rotate around the outer or inside spirrillum of axial rotary of rotating machine 211, detects in the process of movement to realize temperature detecting module 201 to the central zone of heated object and the temperature of fringe region.
Wherein, elastic component 216 comprises spring, in this case, driver element 21 also comprises union lever 217, spring is nested with on the periphery wall of union lever 217, and when rotating machine 211 driving spring accelerates rotation or deceleration is revolved, spring elongates along this union lever 217 or compresses, and the length of union lever 217 is not less than maximum length when spring changes in its elastic range.And, preferably, rotating machine 211 drives the even acceleration of elastic component 216 rotate or to be evenly rotated in deceleration, this makes temperature detecting module evenly can detect the temperature of the radial direction of heated object in the process of movement, the accuracy of detection of temperature detecting module can be improved, thus the control accuracy of device for monitoring temperature can be improved.Easy understand, adopts the driver element shown in Fig. 8 can be changed the mobile route of temperature detecting module 201 by the acceleration or retarded velocity selecting the elastic component 216 of different qualities parameter and the rotation of control rotating machine 211.
Also it should be noted that, in the present embodiment, the temperature of heating needed for heated object to technique in advance, but due to the factor such as material or heating environment of heated object, make the heating uniformity of heated object poor, therefore, the heating uniformity then by adopting the device for monitoring temperature that provides of the present embodiment to improve heating member.
It should be noted that in addition, in the present embodiment, preset standard temperature carries out technological temperature needed for technique (such as heated object S, 300 degrees Celsius), but, the present invention is not limited thereto, and in actual applications, preset standard temperature can for belonging to the arbitrary temp value in certain temperature range.
In sum, the device for monitoring temperature that the present embodiment provides, it passes through driver element 21 actuation temperature detection module 201 at reaction chamber indoor moving, temperature detecting module 201 detects the temperature of heated object S different zones respectively in the process of movement, and the temperature detected is sent to control unit 21, the temperature that control unit 23 sends according to temperature detecting module 201 and preset standard temperature compare, and when the two exists deviation, the output rating of the surveyed area corresponding to temperature that calibration heating unit 22 pairs of temperature detecting module 201 send, this makes it possible to achieve regulation output power, this makes it possible to achieve and regulates heating unit to the output rating of the different zones of heating member according to the temperature of the heated object different zones detected in real time, thus not only can improve the heating uniformity of heated object S, and then can processing quality be improved, and, when needs adjust technological temperature, only need adjustment preset standard temperature, this with need to regain compared with test data in prior art, operating process can be made simple, thus can increase work efficiency.
The device for monitoring temperature that Figure 10 provides for second embodiment of the invention.The structure diagram of the device for monitoring temperature that Figure 11 provides for Figure 10.See also Figure 10 and Figure 11, compared with the device for monitoring temperature that the device for monitoring temperature that the present embodiment provides and above-mentioned first embodiment provide, comprise detecting unit 20, driver element 21, heating unit 22 and control unit 23 equally, because the function of detecting unit 20, driver element 21, heating unit 22 and control unit 23 and relation there has been detailed description in the above-described first embodiment, do not repeat them here.
The difference of the device for monitoring temperature that the device for monitoring temperature only provided the present embodiment below and above-mentioned first embodiment provide is described in detail: particularly, detecting unit 20 also comprises distance detection module 203, distance detection module 203 comprises rang sensor, distance detection module 203 for detecting the level interval L between itself and temperature detecting module 201 in heated object S radial direction, and sends it to control unit.As employing Fig. 4 a, during driver element 21 shown in Fig. 4 b or shown in Fig. 7, whether control unit 23 is less than default minimum temperature for the temperature judging temperature detecting module 201 and send, default minimum temperature refers to the temperature of any position not belonging to heated object S, if (namely, the temperature of temperature detecting module 201 current detection does not belong to the temperature of heated object S), the length of adjustable telescopic rod 215 is then carried out according to the level interval L now sent by distance detection module 203, range correct value is equaled to make the level interval between distance detection module 203 and temperature detecting module 201, range correct value is defined as the level interval of position when the temperature that it detects is not less than default minimum temperature and be less than the position, boundary of default minimum temperature and between distance detection module 203 of temperature detecting module 201, namely, realize the boundary position that temperature detection 201 is positioned at heated object S, therefore, this can realize the level interval of the automatic adjustment temperature detecting module 201 according to the physical size of heated object S and heated object S, the handiness of device for monitoring temperature can be improved further.
When adopting driver element 21 as shown in Figure 9, control unit 23 judges whether the temperature that temperature detecting module 201 sends is less than default minimum temperature, if, then regulate the acceleration that the acceleration of rotating machine 211 rotates or the retarded velocity be rotated in deceleration according to the level interval L now sent by distance detection module 203, equal range correct value to make the level interval between distance detection module 203 and temperature detecting module 201.
As another technical scheme, the present invention also provides a kind of plasma processing device, comprise reaction chamber and device for monitoring temperature, heated object is provided with in reaction chamber, device for monitoring temperature is for being heated to the temperature needed for technique to heated object, and the device for monitoring temperature that this device for monitoring temperature adopts above-mentioned first embodiment or the second embodiment to provide.
It should be noted that, the plasma processing device that the present embodiment provides comprises copper-connection PVD equipment and ITO PVD equipment.The device for monitoring temperature adopting above-mentioned first embodiment or the second embodiment to provide in the chamber that degass of copper-connection PVD equipment is heated to the temperature needed for technique to single workpiece to be machined; The pallet of device for monitoring temperature to the multiple workpiece to be machined of carrying provided in indoor above-mentioned first embodiment of employing of the preheater of ITO PVD equipment or the second embodiment heats, to realize the temperature needed for indirect heating workpiece to be machined to technique.
The plasma processing device that the present embodiment provides, its device for monitoring temperature adopting above-mentioned first embodiment or the second embodiment to provide, not only can improve the heating uniformity of heated object S, thus can improve processing quality; And can increase work efficiency, and then can increase economic efficiency.
Be understandable that, the illustrative embodiments that above embodiment is only used to principle of the present invention is described and adopts, but the present invention is not limited thereto.For those skilled in the art, when not departing from principle of the present invention and essence, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (12)
1. a device for monitoring temperature, for monitoring the temperature of the different zones of the heated object being positioned at reaction chamber to control heating power, it is characterized in that, described device for monitoring temperature comprises heating unit, detecting unit, driver element and control unit, wherein
Described heating unit is used for heating the different zones of described heated object;
Described detecting unit comprises temperature detecting module, and the temperature detected for detecting the temperature in the different zones of described heated object, and is sent to described control unit by described temperature detecting module;
Described driver element for driving described temperature detecting module at described reaction chamber indoor moving, with the temperature making described temperature detecting module detect described heated object different zones respectively in the process of movement;
The temperature that described control unit is used for sending according to described temperature detecting module and comes and preset standard temperature compare, and when the two exists deviation, calibrate the output rating of the surveyed area corresponding to temperature that described heating unit sends described temperature detecting module.
2. device for monitoring temperature according to claim 1, it is characterized in that, described heated object comprises the multiple regions concentric each other radially divided, described detecting unit also comprises position detecting module, described position detecting module is used for the position detecting described temperature detecting module in the process of described temperature detecting module movement in real time, and sends it to described control unit;
The temperature that the position judgment that described control unit is used for sending according to described position detecting module and comes is sent in this position by described temperature detecting module and comes belongs to the region of heated object, and this temperature and preset standard temperature are compared, and calibrate the output rating of described heating unit to this region of described heated object when the two exists deviation.
3. device for monitoring temperature according to claim 2, it is characterized in that, described heated object comprises the central zone concentric each other and fringe region that radially divide from inside to outside, described heating unit comprises center heating module and edge heating module, and described center heating module is used for heating the central zone of heated object; Described edge heating module is used for heating the fringe region of heated object;
Described driver element moves between the central zone and fringe region of described reaction chamber for driving described temperature detecting module, to make described temperature detecting module detect the central zone of described heated object and the temperature of fringe region respectively in the process of movement, and send it to described control unit; Described position detecting module is used for the position detecting described temperature detecting module in the process of described temperature detecting module movement in real time, and sends it to described control unit;
The temperature that the position judgment that described control unit is used for sending according to described position detecting module and comes is sent in this position by described temperature detecting module and comes belongs to central zone temperature or the edge area temperature of heated object, if belong to the central zone temperature of heated object, then itself and preset standard temperature are compared, and calibrate the output rating of described center heating module when the two exists deviation; If belong to the edge area temperature of heated object, then itself and preset standard temperature are compared, and calibrate the output rating of described edge heating module when the two exists deviation.
4. device for monitoring temperature according to claim 3, is characterized in that, described position detecting module comprises magnetic inductor and magnet, wherein
Described magnetic inductor is arranged on the position corresponding with the center of heated object, and described magnet is arranged on the position corresponding with described temperature detecting module, and with described temperature detecting module synchronizing moving, and
Described magnetic inductor is set to: sense the magnetic field produced by described magnet when described magnet is in the central zone of described heated object, and cannot sense the magnetic field produced by described magnet when described magnet is in the fringe region of described heated object; Described magnetic inductor sends signal when sensing the magnetic field produced by described magnet to described control unit;
Described control unit when receiving the signal from described magnetic inductor, then determines that the temperature now sent by described temperature detecting module belongs to the central zone temperature of heated object; When not receiving the signal from described magnetic inductor, then determine that the temperature now sent by described temperature detecting module belongs to the edge area temperature of heated object.
5. device for monitoring temperature according to claim 3, is characterized in that, described position detecting module comprises magnetic inductor and magnet, wherein
Described magnet is arranged on the position corresponding with the center of described heated object, and described magnetic inductor is arranged on the position corresponding with described temperature detecting module, and with described temperature detecting module synchronizing moving, and
Described magnetic inductor is set to: sense the magnetic field produced by described magnet when described magnetic inductor is in the central zone of described heated object, and cannot sense the magnetic field produced by described magnet when described magnetic inductor is in the fringe region of described heated object; Described magnetic inductor sends signal when sensing the magnetic field produced by described magnet to described control unit;
Described control unit when receiving the signal from described magnetic inductor, then determines that the temperature now sent by described temperature detecting module belongs to the central zone temperature of heated object; When not receiving the signal from described magnetic inductor, then determine that the temperature now sent by described temperature detecting module belongs to the edge area temperature of heated object.
6. device for monitoring temperature according to claim 1, is characterized in that, described driver element comprises rotating machine, middle wheel, outer rotor and internal wheel, wherein
The rotational axis vertical of described middle wheel in heated object place plane, and is positioned at the position corresponding with the center of heated object;
Turning axle and the described middle wheel of described outer rotor fix, and described outer rotor is meshed with described internal wheel;
Described rotating machine rotates for driving described middle wheel, and described middle wheel drives described outer rotor to revolve round the sun around the turning axle of described middle wheel, meanwhile, and the rotation under the drive of described internal wheel of described outer rotor;
Described temperature detecting module is arranged on described outer rotor, and rotates around its turning axle at described outer rotor time rotational.
7. device for monitoring temperature according to claim 6, it is characterized in that, described driver element also comprises the expansion link of adjustable in length in the horizontal direction, and one end and the described outer rotor of described expansion link are fixed, and the other end and the described temperature detecting module of described expansion link are fixed.
8. device for monitoring temperature according to claim 7, is characterized in that, described detecting unit also comprises distance detection module,
Described distance detection module for detecting the level interval between itself and described temperature detecting module in described heated object radial direction, and sends it to described control unit;
Whether described control unit is less than default minimum temperature for the temperature judging described temperature detecting module and send, if, the level interval then come according to now being sent by described distance detection module regulates the length of described expansion link, equals range correct value to make the level interval between described distance detection module and described temperature detecting module;
Described range correct value is defined as the level interval of position when the temperature that it detects is not less than default minimum temperature and be less than the position, boundary of default minimum temperature and between described distance detection module of described temperature detecting module.
9. device for monitoring temperature according to claim 1, is characterized in that, described driver element comprises rotating machine and elastic component, wherein
The rotational axis vertical of described rotating machine in heated object place plane, and is positioned at the position corresponding with the center of heated object;
One end of described elastic component and the turning axle of described rotating machine fix, and the other end of described elastic component is positioned at the position of the turning axle gone up in the horizontal direction away from described rotating machine, and described temperature detecting module is arranged on the other end of described elastic component;
Described rotating machine for drive described elastic component accelerate rotate or be rotated in deceleration, described elastic component drive described temperature detecting module around described rotating machine turning axle from inside to outside or ecto-entad spirrillum rotate.
10. device for monitoring temperature according to claim 9, is characterized in that, described detecting unit also comprises distance detection module,
Described distance detection module for detecting the level interval between itself and described temperature detecting module in described heated object radial direction, and sends it to described control unit;
Whether described control unit is less than default minimum temperature for the temperature judging described temperature detecting module and send, if, the level interval then come according to now being sent by described distance detection module regulates the acceleration that the acceleration of described rotating machine rotates or the retarded velocity be rotated in deceleration, and equals range correct value to make the level interval between described distance detection module and described temperature detecting module;
Described range correct value is defined as the level interval of position when the temperature that it detects is not less than default minimum temperature and be less than the position, boundary of default minimum temperature and between described distance detection module of described temperature detecting module.
11. device for monitoring temperature according to claim 1, is characterized in that, the scope of the vertical spacing between the lower surface of described temperature detecting module and described heated object is at 5 ~ 10mm.
12. 1 kinds of plasma processing devices, is characterized in that, comprise the device for monitoring temperature adopted described in claim 1-11 any one.
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