CN108998761B - Molybdenum disulfide film and preparation method and preparation system thereof - Google Patents
Molybdenum disulfide film and preparation method and preparation system thereof Download PDFInfo
- Publication number
- CN108998761B CN108998761B CN201810936808.9A CN201810936808A CN108998761B CN 108998761 B CN108998761 B CN 108998761B CN 201810936808 A CN201810936808 A CN 201810936808A CN 108998761 B CN108998761 B CN 108998761B
- Authority
- CN
- China
- Prior art keywords
- module
- molybdenum disulfide
- temperature
- control module
- chip microcomputer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
Abstract
The invention belongs to the technical field of molybdenum disulfide film preparation, and discloses a molybdenum disulfide film, a preparation method and a preparation system thereof, wherein the molybdenum disulfide film and the preparation system thereof comprise: the device comprises a video monitoring module, a temperature detection module, a sealing detection module, a single-chip microcomputer control module, an air exhaust module, a heating module, an adjusting module, a cooling module, an alarm module and a display module. The temperature and the tightness are detected in real time through the temperature detection module and the sealing detection module, and if the detection data is abnormal, the alarm module informs workers to take timely protective measures; meanwhile, the size of the electron beam current for molybdenum metal evaporation, the temperature for sulfur powder evaporation and the growth time are adjusted through the adjusting module, so that the uniform molybdenum disulfide film with controllable layer number is obtained.
Description
Technical Field
The invention belongs to the technical field of molybdenum disulfide film preparation, and particularly relates to a molybdenum disulfide film, and a preparation method and a preparation system thereof.
Background
Molybdenum disulfide, the english name molybdenum disulfide, the main component of molybdenite. Black solid powder with metallic luster. The chemical formula MoS2, the melting point 1185 ℃, the density of 4.80g/cm3(14 ℃), and the Mohs hardness of 1.0-1.5. Molybdenum disulfide is an important solid lubricant, and is particularly suitable for high temperature and high pressure. It is also diamagnetic and can be used as a linear photoconductor and a semiconductor exhibiting P-type or N-type conductivity, having rectifying and transducing functions. Molybdenum disulfide is also useful as a catalyst for the dehydrogenation of complex hydrocarbons. However, in the existing molybdenum disulfide film preparation process, if the temperature or the sealing is abnormal, workers cannot be informed to adjust the molybdenum disulfide film in time; meanwhile, the prepared molybdenum disulfide film is not uniform and has low quality.
In summary, the problems of the prior art are as follows:
(1) if the temperature or the sealing is abnormal in the existing molybdenum disulfide film preparation process, workers cannot be informed to adjust the temperature or the sealing in time; meanwhile, the prepared molybdenum disulfide film is not uniform and has low quality.
(2) The existing molybdenum disulfide film preparation process has large sampling data volume and long sampling time in video processing.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a molybdenum disulfide film, a preparation method and a preparation system thereof.
The invention is realized in such a way that the preparation method of the molybdenum disulfide film comprises the following steps:
firstly, a video monitoring module, a temperature detection module and a sealing detection module send monitoring videos and detected data to a single chip microcomputer control module; the single chip microcomputer control module receives a video compression sensing model of the video monitoring module;
the video compression perception model is as follows:
in the formula (I), the compound is shown in the specification,
the total number of measurements per frame is
In order to dynamically measure the number of times,
for static measurement times, dynamic quantity observation matrix
Sum constant observation matrix
In order to measure the value dynamically,
for constant measurement values, sequence of measurement results ztAnd observation matrix phitFirst, by measuring the constant term
Estimating a sequence of states
And then reuse the dynamic measurement
And state sequence
Decalculation filterbank C ηtIs a systematic error; a is an element of Rd×dIs a state transition matrix; y istIs the video frame at time t, ztIs the observed value at time t;
step two, when the detection is normal, the single chip microcomputer control module starts the air extraction module to vacuumize the background of the cavity of the preparation container to 1 multiplied by 10-3Pa below; then, heating the preparation container to 300-600 ℃ by using a heating module of a heat conduction equation;
the heat conduction equation is:
wherein the content of the first and second substances,
k is the heat conduction coefficient, c is the specific heat capacity, ρ is the density, u is the temperature, t is the time, a is the temperature conduction coefficient, x, y, z are the paths of heat propagation; there is a heat source with intensity F (x, y, z, t) and the corresponding heat transfer equation is:
wherein the content of the first and second substances,
adjusting the size of an electron beam flow for molybdenum metal evaporation, the temperature for sulfur powder evaporation and the growth time through an adjusting module to obtain a uniform molybdenum disulfide film with controllable layer number; cooling the preparation container to room temperature by a cooling module;
checking data abnormity through a time series autoregressive model, sending an alarm sound through an alarm module, and finishing through a worker;
the time series autoregressive model is fitted to the state data through a first order AR model, and the formula is as follows:
in the formula, xtFor monitoring the time series of data online, etIs a normally distributed sequence, et～N(μe，λ2)，xtObeying N (mu, sigma)2) Wherein μ and σ satisfy:
μ＝μe/(1-α)
for each on-line monitoring state quantity, the corresponding limit value is not exceeded under the normal state, so the corresponding limit value is assumed to be matchedSome t, xtAll belong to the interval [ a, b]，a≤xt≤b：
For all a is less than or equal to xt+kDerivation of ≦ b:
a-αkxt≤et+k+αet+k-1+…+αk-1et+1≤b-αkxt；
and fifthly, displaying the monitoring video, the temperature detection data and the sealing detection data through a display module, and keeping the ratio of the brightness of each pixel before and after mapping to the local adaptive brightness around the pixel unchanged.
Further, the filter and the window size thereof for calculating the local adaptive brightness of each pixel of the original high dynamic range image by keeping the ratio of the brightness of each pixel before and after mapping to the local adaptive brightness around the pixel unchanged are selected according to a human visual system, and the local adaptive brightness of each pixel of the display image is obtained by mapping the local adaptive brightness of each pixel of the original high dynamic range image by identifying a threshold brightness value mapping curve:
wherein L isd(x, y) represents the luminance value of each pixel value of the mapped image, and L (x, y) represents the luminance value of the high dynamic range image; l isa(x, y) represents the locally adaptive luminance of the high dynamic range image; TM (L)a(x, y)) represents LaThe result of the mapping operation of (x, y) is the local adaptive luminance of each pixel of the display image, and TM () is the inverse function of the TVI curve.
Another object of the present invention is to provide a molybdenum disulfide thin film production system for implementing the molybdenum disulfide thin film production method, the molybdenum disulfide thin film production system including:
the device comprises a video monitoring module, a temperature detection module, a sealing detection module, a singlechip control module, an air extraction module, a heating module, an adjustment module, a cooling module, an alarm module and a display module;
the video monitoring module is connected with the single-chip microcomputer control module and is used for monitoring the preparation process in real time through the camera;
the temperature detection module is connected with the single chip microcomputer control module and is used for detecting the temperature of the preparation container in real time through the temperature sensor;
the sealing detection module is connected with the single chip microcomputer control module and is used for detecting the sealing degree of the container in real time through the sealing detector;
the singlechip control module is connected with the video monitoring module, the temperature detection module, the sealing detection module, the air extraction module, the heating module, the adjusting module, the cooling module, the alarm module and the display module and is used for controlling and scheduling each module to work normally;
the air pumping module is connected with the singlechip control module and is used for vacuumizing the background of the cavity of the preparation container to 1 x 10-3Pa below;
the heating module is connected with the single chip microcomputer control module and is used for heating the preparation container to 300-600 ℃;
the adjusting module is connected with the singlechip control module and is used for adjusting the electron beam flow of molybdenum metal evaporation, the temperature of sulfur powder evaporation and the growth time to obtain a uniform molybdenum disulfide film with controllable layer number;
the cooling module is connected with the single chip microcomputer control module and used for cooling the preparation container to room temperature after the growth is finished;
the alarm module is connected with the singlechip control module and used for sending out alarm sound through an alarm if temperature or sealing detection data are abnormal;
and the display module is connected with the single-chip microcomputer control module and used for displaying the monitoring video, the temperature detection data and the sealing detection data.
The invention also aims to provide the molybdenum disulfide film prepared by the preparation method of the molybdenum disulfide film, wherein the molybdenum element in the molybdenum disulfide film is Mo4+Sulfur element and S2－The form exists and the atomic ratio of Mo to S is confirmed to be close to 1: 2 by high resolution atomic percent.
Another object of the present invention is to provide a light-absorbing semiconductor prepared from the molybdenum disulfide thin film.
The invention has the advantages and positive effects that: the temperature and the tightness are detected in real time through the temperature detection module and the sealing detection module, and if the detection data is abnormal, the alarm module informs workers to take timely protective measures; meanwhile, the size of the electron beam current for molybdenum metal evaporation, the temperature for sulfur powder evaporation and the growth time are adjusted through the adjusting module, so that the uniform molybdenum disulfide film with controllable layer number is obtained. The video monitoring module of the invention fully utilizes the intra-frame sparsity and inter-frame correlation of the video under the framework of a compressed sensing theory, divides the video into a dynamic part and a static part, simultaneously samples and respectively processes the dynamic part and the static part, and obtains the key parameters of a first-order autoregressive moving average model of a video state space by using methods such as convex optimization and the like. The results of experiments under a plurality of groups of real scenes show that the model reduces the interframe redundancy and data acquisition quantity to a greater extent, and can still obtain a better reconstruction effect when the video acquisition compression ratio is 100-200. Conclusion combining with compressive sensing and linear prediction technology, a new video acquisition model is provided, the static part and the dynamic part of the video are processed respectively, and the using condition of the model is given. Experimental results show that the model has a good compression effect on videos with small interframe change. According to the invention, a numerical solution of the model is obtained through an online induction heating model based on MATALB, and the temperature field distribution characteristic of the molybdenum disulfide film in the heating process is analyzed through the numerical solution. The display module keeps the ratio of the brightness of each pixel before and after mapping to the local adaptive brightness around the pixel unchanged, thereby reducing the halo degree.
Drawings
FIG. 1 is a flow chart of a method for preparing a molybdenum disulfide film according to the present invention.
FIG. 2 is a schematic diagram of a system for preparing a molybdenum disulfide film according to the present invention;
in fig. 2: 1. a video monitoring module; 2. a temperature detection module; 3. a seal detection module; 4. a single chip microcomputer control module; 5. an air extraction module; 6. a heating module; 7. an adjustment module; 8. a cooling module; 9. an alarm module; 10. and a display module.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The application of the principles of the present invention will be further described with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1, a method for preparing a molybdenum disulfide thin film according to an embodiment of the present invention includes the following steps:
s101: the video monitoring module, the temperature detection module and the sealing detection module send monitoring videos and detected data to the single-chip microcomputer control module;
s102: when the detection is normal, the singlechip control module starts the air extraction module to vacuumize the background of the cavity of the preparation container to 1 × 10-3Pa below; then heating the preparation container to 300-600 ℃ through a heating module;
s103: adjusting the size of an electron beam current for molybdenum metal evaporation, the temperature for sulfur powder evaporation and the growth time through an adjusting module to obtain a uniform molybdenum disulfide film with controllable layer number; cooling the preparation container to room temperature by a cooling module;
s104: if the inspection data is abnormal, an alarm sound is sent out through an alarm module, and the data is trimmed by workers;
s105: and displaying the monitoring video, the temperature detection data and the sealing detection data through the display module.
As shown in fig. 2, a system for preparing a molybdenum disulfide thin film according to an embodiment of the present invention includes: the device comprises a video monitoring module 1, a temperature detection module 2, a sealing detection module 3, a single-chip microcomputer control module 4, an air extraction module 5, a heating module 6, an adjusting module 7, a cooling module 8, an alarm module 9 and a display module 10.
The video monitoring module 1 is connected with the single chip microcomputer control module 4 and is used for monitoring the preparation process in real time through a camera;
the temperature detection module 2 is connected with the single chip microcomputer control module 4 and is used for detecting the temperature of the preparation container in real time through a temperature sensor;
the sealing detection module 3 is connected with the single chip microcomputer control module 4 and is used for detecting the sealing degree of the container in real time through a sealing detector;
the singlechip control module 4 is connected with the video monitoring module 1, the temperature detection module 2, the sealing detection module 3, the air extraction module 5, the heating module 6, the adjusting module 7, the cooling module 8, the alarm module 9 and the display module 10 and is used for controlling and scheduling each module to work normally;
an air pumping module 5 connected with the single chip microcomputer control module 4 and used for vacuumizing the background of the cavity of the preparation container to 1 x 10- 3Pa below;
the heating module 6 is connected with the single chip microcomputer control module 4 and is used for heating the preparation container to 300-600 ℃;
the adjusting module 7 is connected with the singlechip control module 4 and is used for adjusting the electron beam flow of molybdenum metal evaporation, the temperature of sulfur powder evaporation and the growth time to obtain a uniform molybdenum disulfide film with controllable layer number;
the cooling module 8 is connected with the single chip microcomputer control module 4 and is used for cooling the preparation container to room temperature after growth is finished;
the alarm module 9 is connected with the singlechip control module 4 and used for sending out alarm sound through an alarm if temperature or sealing detection data are abnormal;
and the display module 10 is connected with the single-chip microcomputer control module 4 and is used for displaying the monitoring video, the temperature detection data and the sealing detection data.
The application of the principles of the present invention will now be described in further detail with reference to specific embodiments.
The preparation method of the molybdenum disulfide film provided by the embodiment of the invention comprises the following steps:
firstly, a video monitoring module, a temperature detection module and a sealing detection module send monitoring videos and detected data to a single chip microcomputer control module; the single chip microcomputer control module receives a video compression sensing model of the video monitoring module;
the video compression perception model is as follows:
xt+1＝Axt+ηt；
in the formula (I), the compound is shown in the specification,
the total number of measurements per frame is
In order to dynamically measure the number of times,
for static measurement times, dynamic quantity observation matrix
Sum constant observation matrix
In order to measure the value dynamically,
for constant measurement values, sequence of measurement results ztAnd observation matrix phitFirst, by measuring the constant term
Estimating a sequence of states
And then reuse the dynamic measurement
And state sequence
Decalculation filterbank C ηtIs a systematic error; a is an element of Rd×dIs a state transition matrix; y istIs the video frame at time t, ztIs the observed value at time t;
step two, when the detection is normal, the single chip microcomputer control module starts the air extraction module to vacuumize the background of the cavity of the preparation container to 1 multiplied by 10-3Pa below; then, heating the preparation container to 300-600 ℃ by using a heating module of a heat conduction equation;
the heat conduction equation is:
wherein the content of the first and second substances,
k is the heat conduction coefficient, c is the specific heat capacity, ρ is the density, u is the temperature, t is the time, a is the temperature conduction coefficient, x, y, z are the paths of heat propagation; there is a heat source with intensity F (x, y, z, t) and the corresponding heat transfer equation is:
wherein the content of the first and second substances,
adjusting the size of an electron beam flow for molybdenum metal evaporation, the temperature for sulfur powder evaporation and the growth time through an adjusting module to obtain a uniform molybdenum disulfide film with controllable layer number; cooling the preparation container to room temperature by a cooling module;
checking data abnormity through a time series autoregressive model, sending an alarm sound through an alarm module, and finishing through a worker;
the time series autoregressive model is fitted to the state data through a first order AR model, and the formula is as follows:
in the formula, xtFor monitoring the time series of data online, etIs a normally distributed sequence, et～N(μe，λ2)，xtObeying N (mu, sigma)2) Wherein μ and σ satisfy:
μ＝μe/(1-α)
for each on-line monitoring state quantity, the corresponding limit value should not be exceeded under normal conditions, so it is assumed that all t, xtAll belong to the interval [ a, b]，a≤xt≤b：
For all a is less than or equal to xt+kDerivation of ≦ b:
a-αkxt≤et+k+αet+k-1+…+αk-1et+1≤b-αkxt；
and fifthly, displaying the monitoring video, the temperature detection data and the sealing detection data through a display module, and keeping the ratio of the brightness of each pixel before and after mapping to the local adaptive brightness around the pixel unchanged.
Further, the filter and the window size thereof for calculating the local adaptive brightness of each pixel of the original high dynamic range image by keeping the ratio of the brightness of each pixel before and after mapping to the local adaptive brightness around the pixel unchanged are selected according to a human visual system, and the local adaptive brightness of each pixel of the display image is obtained by mapping the local adaptive brightness of each pixel of the original high dynamic range image by identifying a threshold brightness value mapping curve:
wherein，Ld(x, y) represents the luminance value of each pixel value of the mapped image, and L (x, y) represents the luminance value of the high dynamic range image; l isa(x, y) represents the locally adaptive luminance of the high dynamic range image; TM (L)a(x, y)) represents LaThe result of the mapping operation of (x, y) is the local adaptive luminance of each pixel of the display image, and TM () is the inverse function of the TVI curve.
According to the molybdenum disulfide film prepared by the invention, the molybdenum element in the molybdenum disulfide film is Mo4+Sulfur element and S2－The form exists and the atomic ratio of Mo to S is confirmed to be close to 1: 2 by high resolution atomic percent.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (4)
1. A preparation method of a molybdenum disulfide film is characterized by comprising the following steps:
firstly, a video monitoring module, a temperature detection module and a sealing detection module send monitoring videos and detected data to a single chip microcomputer control module; the single chip microcomputer control module receives a video compression sensing model of the video monitoring module;
the video compression perception model is as follows:
xt+1＝Axt+ηt；
in the formula (I), the compound is shown in the specification,
the total number of measurements per frame is
In order to dynamically measure the number of times,
for static measurement times, dynamic quantity observation matrix
Sum constant observation matrix
In order to measure the value dynamically,
for constant measurement values, sequence of measurement results ztAnd observation matrix phitFirst, by measuring the constant term
Estimating a sequence of states
And then reuse the dynamic measurement
And state sequence
Decalculation filterbank C ηtIs a systematic error; a is an element of Rd×dIs a state transition matrix; y istIs the video frame at time t, ztIs the observed value at time t;
step two, when the detection is normal, the single chip microcomputer control module starts the air extraction module to vacuumize the background of the cavity of the preparation container to 1 multiplied by 10-3Pa below; followed byHeating the preparation container to 300-600 ℃ by using a heating module of a heat conduction equation;
the heat conduction equation is:
wherein the content of the first and second substances,
k is the heat conduction coefficient, c is the specific heat capacity, ρ is the density, u is the temperature, t is the time, a is the temperature conduction coefficient, x, y, z are the paths of heat propagation; there is a heat source with intensity F (x, y, z, t) and the corresponding heat transfer equation is:
wherein the content of the first and second substances,
adjusting the size of an electron beam flow for molybdenum metal evaporation, the temperature for sulfur powder evaporation and the growth time through an adjusting module to obtain a uniform molybdenum disulfide film with controllable layer number; cooling the preparation container to room temperature by a cooling module;
checking data abnormity through a time series autoregressive model, sending an alarm sound through an alarm module, and finishing through a worker;
the time series autoregressive model is fitted to the state data through a first order AR model, and the formula is as follows:
in the formula, xtFor monitoring the time series of data online, etIs a normally distributed sequence, et～N(μe，λ2)，xtObeying N (mu, sigma)2) Is turning toA state distribution in which μ and σ satisfy:
μ＝μe/(1-α)
for each on-line monitoring state quantity, the corresponding limit value should not be exceeded under normal conditions, so it is assumed that all t, xtAll belong to the interval [ a, b]，a≤xt≤b：
For all a is less than or equal to xt+kDerivation of ≦ b:
a-αkxt≤et+k+αet+k-1+…+αk-1et+1≤b-αkxt；
displaying the monitoring video, the temperature detection data and the sealing detection data through a display module, and keeping the ratio of the brightness of each pixel before and after mapping to the local adaptive brightness around the pixel unchanged;
the filter and the window size thereof used for calculating the local adaptive brightness of each pixel of the original high dynamic range image are selected according to a human visual system, and the local adaptive brightness of each pixel of the display image is obtained by mapping the local adaptive brightness of each pixel of the original high dynamic range image by identifying a threshold value brightness value mapping curve:
wherein L isd(x, y) represents the luminance value of each pixel value of the mapped image, and L (x, y) represents the luminance value of the high dynamic range image; l isa(x, y) represents the locally adaptive luminance of the high dynamic range image; TM (L)a(x, y)) represents LaThe result of the mapping operation of (x, y) is the local adaptive luminance of each pixel of the display image, and TM () is the inverse function of the TVI curve.
2. A molybdenum disulfide thin film production system for implementing the molybdenum disulfide thin film production method according to claim 1, wherein the molybdenum disulfide thin film production system comprises:
the device comprises a video monitoring module, a temperature detection module, a sealing detection module, a singlechip control module, an air extraction module, a heating module, an adjustment module, a cooling module, an alarm module and a display module;
the video monitoring module is connected with the single-chip microcomputer control module and is used for monitoring the preparation process in real time through the camera;
the temperature detection module is connected with the single chip microcomputer control module and is used for detecting the temperature of the preparation container in real time through the temperature sensor;
the sealing detection module is connected with the single chip microcomputer control module and is used for detecting the sealing degree of the container in real time through the sealing detector;
the singlechip control module is connected with the video monitoring module, the temperature detection module, the sealing detection module, the air extraction module, the heating module, the adjusting module, the cooling module, the alarm module and the display module and is used for controlling and scheduling each module to work normally;
the air pumping module is connected with the singlechip control module and is used for vacuumizing the background of the cavity of the preparation container to 1 x 10-3Pa below;
the heating module is connected with the single chip microcomputer control module and is used for heating the preparation container to 300-600 ℃;
the adjusting module is connected with the singlechip control module and is used for adjusting the electron beam flow of molybdenum metal evaporation, the temperature of sulfur powder evaporation and the growth time to obtain a uniform molybdenum disulfide film with controllable layer number;
the cooling module is connected with the single chip microcomputer control module and used for cooling the preparation container to room temperature after the growth is finished;
the alarm module is connected with the singlechip control module and used for sending out alarm sound through an alarm if temperature or sealing detection data are abnormal;
and the display module is connected with the single-chip microcomputer control module and used for displaying the monitoring video, the temperature detection data and the sealing detection data.
3. The molybdenum disulfide thin film prepared by the method for preparing a molybdenum disulfide thin film according to claim 1, wherein the molybdenum element in the molybdenum disulfide thin film is Mo4+Sulfur element and S2－The form exists and the atomic ratio of Mo to S is confirmed to be close to 1: 2 by high resolution atomic percent.
4. A light absorbing semiconductor made from the molybdenum disulfide film of claim 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810936808.9A CN108998761B (en) | 2018-08-16 | 2018-08-16 | Molybdenum disulfide film and preparation method and preparation system thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810936808.9A CN108998761B (en) | 2018-08-16 | 2018-08-16 | Molybdenum disulfide film and preparation method and preparation system thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108998761A CN108998761A (en) | 2018-12-14 |
| CN108998761B true CN108998761B (en) | 2020-05-22 |
Family
ID=64593095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810936808.9A Expired - Fee Related CN108998761B (en) | 2018-08-16 | 2018-08-16 | Molybdenum disulfide film and preparation method and preparation system thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108998761B (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101983255A (en) * | 2008-07-17 | 2011-03-02 | Mks仪器有限公司 | Sputtering system and method including an arc detection system |
| CN102492931A (en) * | 2011-12-12 | 2012-06-13 | 合肥工业大学 | Model compensating method for controlling thin film deposition rate in physical gaseous phase thin film deposition process |
| CN103952670A (en) * | 2014-02-13 | 2014-07-30 | 同济大学 | Laser film quantification research method based on artificial defects |
| CN104451607A (en) * | 2014-12-01 | 2015-03-25 | 西安电子科技大学 | Process optimization method capable of improving uniformity of boron phosphorous silicate glass (BPSG) film obtained from low pressure chemical vapor deposition (LPCVD) |
| CN104498878A (en) * | 2014-12-12 | 2015-04-08 | 电子科技大学 | Method for preparing molybdenum disulfide thin film |
| CN104630735A (en) * | 2013-11-06 | 2015-05-20 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Temperature monitoring device and plasma processing apparatus |
| CN104894524A (en) * | 2015-06-23 | 2015-09-09 | 京东方科技集团股份有限公司 | Surface treatment equipment |
| CN105039924A (en) * | 2015-07-31 | 2015-11-11 | 芜湖真空科技有限公司 | Vacuum coating control system |
| CN107277537A (en) * | 2017-07-20 | 2017-10-20 | 南京邮电大学 | A kind of distributed video compressed sensing method of sampling based on temporal correlation |
| CN206666632U (en) * | 2017-03-20 | 2017-11-24 | 江阴市中兴光电实业有限公司 | Vacuum coating equipment with monitoring system |
| CN206755405U (en) * | 2017-05-15 | 2017-12-15 | 南京信息工程大学 | Intelligent window type air filter |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150345010A1 (en) * | 2013-09-30 | 2015-12-03 | University Of Dayton | Methods of magnetically enhanced physical vapor deposition |
| KR20160042570A (en) * | 2014-10-10 | 2016-04-20 | 삼성전자주식회사 | Physical vapor deposition apparatus and method of depositing phase-change materials using the same |
-
2018
- 2018-08-16 CN CN201810936808.9A patent/CN108998761B/en not_active Expired - Fee Related
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101983255A (en) * | 2008-07-17 | 2011-03-02 | Mks仪器有限公司 | Sputtering system and method including an arc detection system |
| CN102492931A (en) * | 2011-12-12 | 2012-06-13 | 合肥工业大学 | Model compensating method for controlling thin film deposition rate in physical gaseous phase thin film deposition process |
| CN104630735A (en) * | 2013-11-06 | 2015-05-20 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Temperature monitoring device and plasma processing apparatus |
| CN103952670A (en) * | 2014-02-13 | 2014-07-30 | 同济大学 | Laser film quantification research method based on artificial defects |
| CN104451607A (en) * | 2014-12-01 | 2015-03-25 | 西安电子科技大学 | Process optimization method capable of improving uniformity of boron phosphorous silicate glass (BPSG) film obtained from low pressure chemical vapor deposition (LPCVD) |
| CN104498878A (en) * | 2014-12-12 | 2015-04-08 | 电子科技大学 | Method for preparing molybdenum disulfide thin film |
| CN104894524A (en) * | 2015-06-23 | 2015-09-09 | 京东方科技集团股份有限公司 | Surface treatment equipment |
| CN105039924A (en) * | 2015-07-31 | 2015-11-11 | 芜湖真空科技有限公司 | Vacuum coating control system |
| CN206666632U (en) * | 2017-03-20 | 2017-11-24 | 江阴市中兴光电实业有限公司 | Vacuum coating equipment with monitoring system |
| CN206755405U (en) * | 2017-05-15 | 2017-12-15 | 南京信息工程大学 | Intelligent window type air filter |
| CN107277537A (en) * | 2017-07-20 | 2017-10-20 | 南京邮电大学 | A kind of distributed video compressed sensing method of sampling based on temporal correlation |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108998761A (en) | 2018-12-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN117093879B (en) | Intelligent operation management method and system for data center | |
| CN112200178B (en) | Transformer substation insulator infrared image detection method based on artificial intelligence | |
| CN111882810B (en) | Fire identification and early warning method and system | |
| CN108805942B (en) | Infrared image wide dynamic compression method | |
| CN113970376B (en) | Satellite infrared load calibration method based on marine region re-analysis data | |
| KR20230037651A (en) | Anomaly Detection from Aggregate Statistics Using Neural Networks | |
| CN109226282B (en) | Steel plate on-line solid solution post-rolling rapid cooling method based on Internet of things | |
| CN108998761B (en) | Molybdenum disulfide film and preparation method and preparation system thereof | |
| Liu et al. | Fault diagnosis method of substation equipment based on You Only Look Once algorithm and infrared imaging | |
| CN111563525A (en) | Moving target detection method based on YOLOv3-Tiny | |
| Liu et al. | An efficient algorithm for server thermal fault diagnosis based on infrared image | |
| CN110503092B (en) | Improved SSD monitoring video target detection method based on field adaptation | |
| CN103868601B (en) | The bilateral full variational regularization bearing calibration of the non-homogeneous response of IRFPA detector | |
| CN116663739A (en) | Complex terrain fan output prediction method, system, equipment and storage medium | |
| Nie et al. | An infrared image enhancement algorithm for gas leak detecting based on gaussian filtering and adaptive histogram segmentation | |
| Cao et al. | Wafer surface defect detection based on improved YOLOv3 network | |
| CN116007129A (en) | Warm ventilation air conditioner fault diagnosis method integrating human thermal comfort and detection data | |
| CN112050972B (en) | Approximate calculation method for calorific value of subway equipment room | |
| CN108155639B (en) | Method for identifying wide-area adjustable load | |
| Li et al. | Image Restoration for Blast Furnace Burden Surface Based on Dust Multi-Scattering Model | |
| CN112903109A (en) | Industrial temperature measurement imaging equipment based on infrared image and image processing method thereof | |
| Law Aszkowski et al. | Thermo Presence: The Low-resolution Thermal Image Dataset and Occupancy Detection Using Edge Devices | |
| Herrera et al. | Effect of asynchronous data processing on solar irradiance and clearness index estimation by sky imagery | |
| CN205793036U (en) | A kind of power equipment video intelligent logging table analysis system | |
| CN109580043B (en) | Method for judging working condition stability of room type calorimeter based on infrared camera |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200522 Termination date: 20210816 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |