CN104604070A - 直流电源装置以及直流电源装置的控制方法 - Google Patents
直流电源装置以及直流电源装置的控制方法 Download PDFInfo
- Publication number
- CN104604070A CN104604070A CN201280075647.XA CN201280075647A CN104604070A CN 104604070 A CN104604070 A CN 104604070A CN 201280075647 A CN201280075647 A CN 201280075647A CN 104604070 A CN104604070 A CN 104604070A
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- signal
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- state
- direct current
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
- H01J37/32027—DC powered
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J1/00—Circuit arrangements for dc mains or dc distribution networks
- H02J1/001—Hot plugging or unplugging of load or power modules to or from power distribution networks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
- H01J37/32045—Circuits specially adapted for controlling the glow discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T1/00—Details of spark gaps
- H01T1/02—Means for extinguishing arc
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T15/00—Circuits specially adapted for spark gaps, e.g. ignition circuits
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/305—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a thyratron or thyristor type requiring extinguishing means
- H02M3/315—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a thyratron or thyristor type requiring extinguishing means using semiconductor devices only
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33507—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of the output voltage or current, e.g. flyback converters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/48—Generating plasma using an arc
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
- H02M1/007—Plural converter units in cascade
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/32—Means for protecting converters other than automatic disconnection
- H02M1/325—Means for protecting converters other than automatic disconnection with means for allowing continuous operation despite a fault, i.e. fault tolerant converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/36—Means for starting or stopping converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
- H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
- H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/156—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2242/00—Auxiliary systems
- H05H2242/20—Power circuits
- H05H2242/22—DC, AC or pulsed generators
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Combustion & Propulsion (AREA)
- Inverter Devices (AREA)
- Dc-Dc Converters (AREA)
- Plasma Technology (AREA)
- Direct Current Feeding And Distribution (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2012/072602 WO2014038013A1 (ja) | 2012-09-05 | 2012-09-05 | 直流電源装置、直流電源装置の制御方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104604070A true CN104604070A (zh) | 2015-05-06 |
CN104604070B CN104604070B (zh) | 2016-03-23 |
Family
ID=50236665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201280075647.XA Active CN104604070B (zh) | 2012-09-05 | 2012-09-05 | 直流电源装置以及直流电源装置的控制方法 |
Country Status (10)
Country | Link |
---|---|
US (1) | US9160240B2 (zh) |
EP (1) | EP2879257B1 (zh) |
JP (1) | JP5557407B1 (zh) |
KR (1) | KR101519319B1 (zh) |
CN (1) | CN104604070B (zh) |
DE (1) | DE12884309T1 (zh) |
IN (1) | IN2014KN03122A (zh) |
PL (1) | PL2879257T3 (zh) |
TW (1) | TWI472269B (zh) |
WO (1) | WO2014038013A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110800202A (zh) * | 2017-07-05 | 2020-02-14 | 株式会社达谊恒 | 电源系统、电源装置、控制方法以及控制程序 |
Families Citing this family (28)
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JP5729732B2 (ja) * | 2013-09-27 | 2015-06-03 | 株式会社京三製作所 | 直流電源装置、直流電源装置の制御方法 |
JP5679241B1 (ja) * | 2013-09-27 | 2015-03-04 | 株式会社京三製作所 | 電圧形直流電源装置および電圧形直流電源装置の制御方法 |
JP6092410B2 (ja) * | 2013-10-04 | 2017-03-08 | 東芝三菱電機産業システム株式会社 | 電源装置 |
CN105594307B (zh) * | 2013-10-04 | 2018-09-28 | 东芝三菱电机产业系统株式会社 | 电源装置 |
US10370539B2 (en) | 2014-01-30 | 2019-08-06 | Monolith Materials, Inc. | System for high temperature chemical processing |
US10100200B2 (en) | 2014-01-30 | 2018-10-16 | Monolith Materials, Inc. | Use of feedstock in carbon black plasma process |
US11939477B2 (en) | 2014-01-30 | 2024-03-26 | Monolith Materials, Inc. | High temperature heat integration method of making carbon black |
US10138378B2 (en) | 2014-01-30 | 2018-11-27 | Monolith Materials, Inc. | Plasma gas throat assembly and method |
FI3100597T3 (fi) | 2014-01-31 | 2023-09-07 | Monolith Mat Inc | Plasmapolttimen rakenne |
PL3253904T3 (pl) | 2015-02-03 | 2021-01-11 | Monolith Materials, Inc. | Urządzenia i sposób chłodzenia regeneracyjnego |
JP2018510231A (ja) | 2015-02-03 | 2018-04-12 | モノリス マテリアルズ インコーポレイテッド | カーボンブラック生成システム |
JP6332126B2 (ja) * | 2015-04-20 | 2018-05-30 | 株式会社オートネットワーク技術研究所 | 車載負荷制御装置及びコンピュータプログラム |
MX2018001259A (es) * | 2015-07-29 | 2018-04-20 | Monolith Mat Inc | Aparato y método de diseño de energía eléctrica para soplete de plasma cc. |
EP3350855A4 (en) | 2015-09-14 | 2019-08-07 | Monolith Materials, Inc. | CARBON BLACK FROM NATURAL GAS |
WO2017190045A1 (en) | 2016-04-29 | 2017-11-02 | Monolith Materials, Inc. | Secondary heat addition to particle production process and apparatus |
MX2018013161A (es) | 2016-04-29 | 2019-06-24 | Monolith Mat Inc | Metodo y aparato para inyector de antorcha. |
KR102016654B1 (ko) * | 2016-08-03 | 2019-08-30 | 한국전기연구원 | 펄스 전원 장치 스위칭 제어 회로 |
JP2018042294A (ja) * | 2016-09-05 | 2018-03-15 | 日立ジョンソンコントロールズ空調株式会社 | 電力変換装置及びこれを備える空気調和機 |
CN110603297A (zh) | 2017-03-08 | 2019-12-20 | 巨石材料公司 | 用热传递气体制备碳颗粒的系统和方法 |
CA3060576A1 (en) | 2017-04-20 | 2018-10-25 | Monolith Materials, Inc. | Carbon particles with low sulfur, ash and grit impurities |
CA3116989C (en) | 2017-10-24 | 2024-04-02 | Monolith Materials, Inc. | Particle systems and methods |
KR20190048636A (ko) * | 2017-10-31 | 2019-05-09 | 한국전기연구원 | 절연형 게이트 구동 장치 |
KR102242234B1 (ko) * | 2019-05-08 | 2021-04-20 | 주식회사 뉴파워 프라즈마 | 고주파 제너레이터 및 그의 동작 방법 |
TWI692921B (zh) * | 2019-06-26 | 2020-05-01 | 台達電子工業股份有限公司 | 電源供應電路與操作方法 |
CN114747299A (zh) * | 2019-12-24 | 2022-07-12 | 株式会社富士 | 等离子体装置 |
KR20230071354A (ko) | 2021-11-16 | 2023-05-23 | 주식회사 뉴파워 프라즈마 | 고주파 펄스 전원 장치 및 그의 운전 방법 |
KR20230072808A (ko) | 2021-11-18 | 2023-05-25 | 주식회사 뉴파워 프라즈마 | 고주파 펄스 제너레이터 장치 및 그의 운전 방법 |
KR20230073919A (ko) | 2021-11-19 | 2023-05-26 | 주식회사 뉴파워 프라즈마 | 고주파 펄스 전원 장치 및 그의 운전 방법 |
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JPH08167500A (ja) * | 1994-12-15 | 1996-06-25 | Jeol Ltd | 高周波プラズマ発生装置用電源 |
US6069811A (en) * | 1997-12-15 | 2000-05-30 | Sansha Electric Manufacturing Company, Limited | DC power supply apparatus |
JP2006006053A (ja) * | 2004-06-18 | 2006-01-05 | Shihen Tech Corp | 直流電源装置 |
CN1884613A (zh) * | 2005-06-21 | 2006-12-27 | 应用材料股份有限公司 | 随机脉冲直流电源供应器 |
CN101369785A (zh) * | 2008-10-07 | 2009-02-18 | 袁晓欧 | 大功率发电厂烟气脱硫脱氮脉冲电晕等离子体直流电源 |
WO2012023276A1 (ja) * | 2010-08-18 | 2012-02-23 | 株式会社アルバック | 直流電源装置 |
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JPS5893474A (ja) | 1981-11-26 | 1983-06-03 | Fuji Electric Co Ltd | 電流形インバータの制御装置 |
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-
2012
- 2012-09-05 DE DE12884309.1T patent/DE12884309T1/de active Pending
- 2012-09-05 EP EP12884309.1A patent/EP2879257B1/en active Active
- 2012-09-05 KR KR1020157006022A patent/KR101519319B1/ko active IP Right Grant
- 2012-09-05 IN IN3122KON2014 patent/IN2014KN03122A/en unknown
- 2012-09-05 JP JP2013555670A patent/JP5557407B1/ja active Active
- 2012-09-05 US US14/416,474 patent/US9160240B2/en active Active
- 2012-09-05 WO PCT/JP2012/072602 patent/WO2014038013A1/ja active Application Filing
- 2012-09-05 PL PL12884309T patent/PL2879257T3/pl unknown
- 2012-09-05 CN CN201280075647.XA patent/CN104604070B/zh active Active
-
2013
- 2013-05-10 TW TW102116689A patent/TWI472269B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08167500A (ja) * | 1994-12-15 | 1996-06-25 | Jeol Ltd | 高周波プラズマ発生装置用電源 |
US6069811A (en) * | 1997-12-15 | 2000-05-30 | Sansha Electric Manufacturing Company, Limited | DC power supply apparatus |
JP2006006053A (ja) * | 2004-06-18 | 2006-01-05 | Shihen Tech Corp | 直流電源装置 |
CN1884613A (zh) * | 2005-06-21 | 2006-12-27 | 应用材料股份有限公司 | 随机脉冲直流电源供应器 |
CN101369785A (zh) * | 2008-10-07 | 2009-02-18 | 袁晓欧 | 大功率发电厂烟气脱硫脱氮脉冲电晕等离子体直流电源 |
WO2012023276A1 (ja) * | 2010-08-18 | 2012-02-23 | 株式会社アルバック | 直流電源装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110800202A (zh) * | 2017-07-05 | 2020-02-14 | 株式会社达谊恒 | 电源系统、电源装置、控制方法以及控制程序 |
CN110800202B (zh) * | 2017-07-05 | 2023-06-06 | 株式会社达谊恒 | 电源系统、电源装置、控制方法以及记录介质 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2014038013A1 (ja) | 2016-08-08 |
KR101519319B1 (ko) | 2015-05-11 |
TW201412198A (zh) | 2014-03-16 |
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US20150180346A1 (en) | 2015-06-25 |
IN2014KN03122A (zh) | 2015-05-08 |
EP2879257B1 (en) | 2017-05-10 |
JP5557407B1 (ja) | 2014-07-23 |
WO2014038013A1 (ja) | 2014-03-13 |
DE12884309T1 (de) | 2015-09-17 |
US9160240B2 (en) | 2015-10-13 |
CN104604070B (zh) | 2016-03-23 |
EP2879257A4 (en) | 2016-07-06 |
KR20150032602A (ko) | 2015-03-26 |
TWI472269B (zh) | 2015-02-01 |
PL2879257T3 (pl) | 2017-10-31 |
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