CN104552625B - 加工装置 - Google Patents
加工装置 Download PDFInfo
- Publication number
- CN104552625B CN104552625B CN201410573497.6A CN201410573497A CN104552625B CN 104552625 B CN104552625 B CN 104552625B CN 201410573497 A CN201410573497 A CN 201410573497A CN 104552625 B CN104552625 B CN 104552625B
- Authority
- CN
- China
- Prior art keywords
- processing
- machined object
- component
- plant
- processing unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005259 measurement Methods 0.000 claims abstract description 130
- 238000003860 storage Methods 0.000 claims abstract description 76
- 238000003754 machining Methods 0.000 claims abstract description 31
- 238000006073 displacement reaction Methods 0.000 claims description 14
- 238000005286 illumination Methods 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 description 29
- 238000000034 method Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000011218 segmentation Effects 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 210000004233 talus Anatomy 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/20—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring workpiece characteristics, e.g. contour, dimension, hardness
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
- B23Q17/2409—Arrangements for indirect observation of the working space using image recording means, e.g. a camera
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
- B23Q17/2452—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces
- B23Q17/2471—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces of workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP2013-223213 | 2013-10-28 | ||
JP2013223213A JP6305013B2 (ja) | 2013-10-28 | 2013-10-28 | 加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104552625A CN104552625A (zh) | 2015-04-29 |
CN104552625B true CN104552625B (zh) | 2018-02-16 |
Family
ID=53048770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410573497.6A Active CN104552625B (zh) | 2013-10-28 | 2014-10-23 | 加工装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6305013B2 (ko) |
KR (1) | KR102240331B1 (ko) |
CN (1) | CN104552625B (ko) |
TW (1) | TWI629130B (ko) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170034760A (ko) * | 2015-09-21 | 2017-03-29 | 레이저닉스 주식회사 | 극초단 펄스 레이저를 이용하여 가공대상을 변성시키는 방법 및 장치 |
TWI641933B (zh) * | 2016-01-15 | 2018-11-21 | 施教競 | Processing method of processing machine |
JP6696842B2 (ja) * | 2016-06-22 | 2020-05-20 | 株式会社ディスコ | ウェーハの加工方法 |
KR101867390B1 (ko) * | 2016-08-01 | 2018-06-15 | 주식회사 이오테크닉스 | 레이저 가공장치 및 레이저 가공방법 |
CN109141275B (zh) * | 2017-06-15 | 2020-12-04 | 欣兴电子股份有限公司 | 加工方法及其应用的加工机台与系统 |
CN107717633A (zh) * | 2017-11-26 | 2018-02-23 | 清远市飞华设备有限公司 | 一种数控加工中心的加工方法 |
JP2020066038A (ja) * | 2018-10-26 | 2020-04-30 | カンタツ株式会社 | レーザ加工装置、レーザ加工装置の制御方法およびレーザ加工装置の制御プログラム |
CN111347157B (zh) | 2018-12-21 | 2023-04-28 | 松下知识产权经营株式会社 | 激光焊接装置以及激光焊接方法 |
KR102125167B1 (ko) * | 2019-01-21 | 2020-06-19 | 한양대학교 에리카산학협력단 | 자동화 용접 장치 및 그의 동작 방법 |
CN110186391A (zh) * | 2019-05-22 | 2019-08-30 | 浙江大学 | 一种三维模型梯度扫描方法 |
CN112440203B (zh) * | 2019-09-03 | 2022-04-05 | 芯恩(青岛)集成电路有限公司 | 一种晶圆研磨系统和晶圆研磨方法 |
JP7430872B2 (ja) | 2019-10-11 | 2024-02-14 | 三益半導体工業株式会社 | 搬送方法および搬送装置 |
CN111223787B (zh) * | 2020-01-02 | 2023-04-07 | 长江存储科技有限责任公司 | 三维存储器的沟槽结构测量方法、装置、设备及介质 |
CN112518423B (zh) * | 2020-12-24 | 2022-07-19 | 华中科技大学 | 用于正交切削过程的变形场和温度场的同步测量装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1799752A (zh) * | 2005-01-05 | 2006-07-12 | 株式会社迪斯科 | 激光加工装置 |
CN101207058A (zh) * | 2006-12-20 | 2008-06-25 | 株式会社迪思科 | 晶片测量装置及激光加工机 |
CN101804521A (zh) * | 2010-04-15 | 2010-08-18 | 中国电子科技集团公司第四十五研究所 | 振镜系统校正装置及其校正方法 |
CN102601519A (zh) * | 2011-01-18 | 2012-07-25 | 奥林巴斯株式会社 | 调整装置、激光加工装置和调整方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2628256B2 (ja) | 1992-05-15 | 1997-07-09 | 株式会社ディスコ | カーフチェックに基づく自動ダイシングシステム |
JP3112056B2 (ja) * | 1994-09-09 | 2000-11-27 | 株式会社デンソー | 三次元形状測定方法とその装置 |
JP2000252240A (ja) * | 1999-03-03 | 2000-09-14 | Disco Abrasive Syst Ltd | 切削装置 |
JP2003168655A (ja) * | 2001-12-03 | 2003-06-13 | Tokyo Seimitsu Co Ltd | ダイシング装置 |
JP2005030813A (ja) * | 2003-07-09 | 2005-02-03 | Okamoto Machine Tool Works Ltd | 非接触3次元測定装置およびそれを用いるcnc精密研削装置 |
KR101024266B1 (ko) * | 2006-05-09 | 2011-03-29 | 도쿄엘렉트론가부시키가이샤 | 촬상 위치 보정 방법, 촬상 방법, 기판 촬상 장치 및, 컴퓨터 프로그램이 기록된 기록 매체 |
JP4937832B2 (ja) * | 2007-05-23 | 2012-05-23 | オリンパス株式会社 | 3次元形状観察装置 |
US8120781B2 (en) * | 2008-11-26 | 2012-02-21 | Zygo Corporation | Interferometric systems and methods featuring spectral analysis of unevenly sampled data |
JP5484787B2 (ja) * | 2009-05-22 | 2014-05-07 | 株式会社ディスコ | 断面形状検出方法、加工装置および断面形状検出用プログラム |
JP2013113650A (ja) * | 2011-11-28 | 2013-06-10 | Lasertec Corp | トレンチ深さ測定装置及びトレンチ深さ測定方法並びに共焦点顕微鏡 |
-
2013
- 2013-10-28 JP JP2013223213A patent/JP6305013B2/ja active Active
-
2014
- 2014-08-26 TW TW103129331A patent/TWI629130B/zh active
- 2014-09-23 KR KR1020140126964A patent/KR102240331B1/ko active IP Right Grant
- 2014-10-23 CN CN201410573497.6A patent/CN104552625B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1799752A (zh) * | 2005-01-05 | 2006-07-12 | 株式会社迪斯科 | 激光加工装置 |
CN101207058A (zh) * | 2006-12-20 | 2008-06-25 | 株式会社迪思科 | 晶片测量装置及激光加工机 |
CN101804521A (zh) * | 2010-04-15 | 2010-08-18 | 中国电子科技集团公司第四十五研究所 | 振镜系统校正装置及其校正方法 |
CN102601519A (zh) * | 2011-01-18 | 2012-07-25 | 奥林巴斯株式会社 | 调整装置、激光加工装置和调整方法 |
Also Published As
Publication number | Publication date |
---|---|
JP6305013B2 (ja) | 2018-04-04 |
TW201518020A (zh) | 2015-05-16 |
TWI629130B (zh) | 2018-07-11 |
JP2015085397A (ja) | 2015-05-07 |
KR20150048627A (ko) | 2015-05-07 |
KR102240331B1 (ko) | 2021-04-13 |
CN104552625A (zh) | 2015-04-29 |
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GR01 | Patent grant |