CN104516041A - 干涉滤波器、光学滤波器装置、光模块以及电子设备 - Google Patents

干涉滤波器、光学滤波器装置、光模块以及电子设备 Download PDF

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Publication number
CN104516041A
CN104516041A CN201410505597.5A CN201410505597A CN104516041A CN 104516041 A CN104516041 A CN 104516041A CN 201410505597 A CN201410505597 A CN 201410505597A CN 104516041 A CN104516041 A CN 104516041A
Authority
CN
China
Prior art keywords
interference filter
substrate
electrode
fixed
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201410505597.5A
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English (en)
Chinese (zh)
Inventor
佐野朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN104516041A publication Critical patent/CN104516041A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G02B5/286—Interference filters comprising deposited thin solid films having four or fewer layers, e.g. for achieving a colour effect
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/007—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Astronomy & Astrophysics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Filters (AREA)
CN201410505597.5A 2013-09-27 2014-09-26 干涉滤波器、光学滤波器装置、光模块以及电子设备 Pending CN104516041A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-201045 2013-09-27
JP2013201045A JP2015068885A (ja) 2013-09-27 2013-09-27 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器

Publications (1)

Publication Number Publication Date
CN104516041A true CN104516041A (zh) 2015-04-15

Family

ID=52739904

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410505597.5A Pending CN104516041A (zh) 2013-09-27 2014-09-26 干涉滤波器、光学滤波器装置、光模块以及电子设备

Country Status (3)

Country Link
US (1) US20150092273A1 (enExample)
JP (1) JP2015068885A (enExample)
CN (1) CN104516041A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI840809B (zh) * 2015-04-28 2024-05-01 日商濱松赫德尼古斯股份有限公司 光檢測裝置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020071181A1 (ja) * 2018-10-03 2020-04-09 浜松ホトニクス株式会社 ファブリペロー干渉フィルタ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100538432C (zh) * 2006-01-19 2009-09-09 精工爱普生株式会社 波长可变滤波器、波长可变滤波器模块及光谱分析器
JP2012108220A (ja) * 2010-11-16 2012-06-07 Seiko Epson Corp 光フィルターおよび光機器
CN102540312A (zh) * 2010-12-21 2012-07-04 精工爱普生株式会社 波长可变干涉滤波器、光学组件以及电子设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6915048B2 (en) * 2001-06-18 2005-07-05 Cidra Corporation Fabry-perot filter/resonator
FR2839812B1 (fr) * 2002-05-17 2005-07-01 Atmel Grenoble Sa Procede de fabrication collective de composants de filtrage optique et plaquette de composants
US20100296099A1 (en) * 2008-02-06 2010-11-25 Van Brocklin Andrew L Optical device
JP5370246B2 (ja) * 2009-05-27 2013-12-18 セイコーエプソン株式会社 光フィルター、光フィルター装置、分析機器、および光フィルターの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100538432C (zh) * 2006-01-19 2009-09-09 精工爱普生株式会社 波长可变滤波器、波长可变滤波器模块及光谱分析器
JP2012108220A (ja) * 2010-11-16 2012-06-07 Seiko Epson Corp 光フィルターおよび光機器
CN102540312A (zh) * 2010-12-21 2012-07-04 精工爱普生株式会社 波长可变干涉滤波器、光学组件以及电子设备

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI840809B (zh) * 2015-04-28 2024-05-01 日商濱松赫德尼古斯股份有限公司 光檢測裝置

Also Published As

Publication number Publication date
JP2015068885A (ja) 2015-04-13
US20150092273A1 (en) 2015-04-02

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