CN104485340B - 光电转换装置 - Google Patents

光电转换装置 Download PDF

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Publication number
CN104485340B
CN104485340B CN201410655549.4A CN201410655549A CN104485340B CN 104485340 B CN104485340 B CN 104485340B CN 201410655549 A CN201410655549 A CN 201410655549A CN 104485340 B CN104485340 B CN 104485340B
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CN
China
Prior art keywords
photoelectric conversion
waveguide
semiconductor substrate
refractive index
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN201410655549.4A
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English (en)
Chinese (zh)
Other versions
CN104485340A (zh
Inventor
加藤太朗
下津佐峰生
佐野博晃
市川武史
关根康弘
篠原真人
门间玄三
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Canon Inc
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Canon Inc
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Publication of CN104485340A publication Critical patent/CN104485340A/zh
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Expired - Fee Related legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8063—Microlenses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H10F39/8053—Colour filters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8067—Reflectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/807—Pixel isolation structures

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
CN201410655549.4A 2011-02-09 2012-02-06 光电转换装置 Expired - Fee Related CN104485340B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2011-026353 2011-02-09
JP2011026353 2011-02-09
JP2011223301A JP5197823B2 (ja) 2011-02-09 2011-10-07 光電変換装置
JP2011-223301 2011-10-07
CN201210024573.9A CN102637702B (zh) 2011-02-09 2012-02-06 光电转换装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201210024573.9A Division CN102637702B (zh) 2011-02-09 2012-02-06 光电转换装置

Publications (2)

Publication Number Publication Date
CN104485340A CN104485340A (zh) 2015-04-01
CN104485340B true CN104485340B (zh) 2017-10-13

Family

ID=46600421

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201410655549.4A Expired - Fee Related CN104485340B (zh) 2011-02-09 2012-02-06 光电转换装置
CN201210024573.9A Expired - Fee Related CN102637702B (zh) 2011-02-09 2012-02-06 光电转换装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201210024573.9A Expired - Fee Related CN102637702B (zh) 2011-02-09 2012-02-06 光电转换装置

Country Status (3)

Country Link
US (2) US8817144B2 (https=)
JP (1) JP5197823B2 (https=)
CN (2) CN104485340B (https=)

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JP2013004635A (ja) * 2011-06-14 2013-01-07 Canon Inc 撮像素子、撮像装置、及び、形成方法
US9568606B2 (en) * 2012-03-29 2017-02-14 Canon Kabushiki Kaisha Imaging apparatus for distance detection using high and low sensitivity sensors with inverted positional relations
JP2014049575A (ja) * 2012-08-30 2014-03-17 Sony Corp 撮像素子、撮像装置、製造装置および方法
US20140077324A1 (en) * 2012-09-20 2014-03-20 Sony Corporation Solid-state image pickup device, method of manufacturing solid-state image pickup device, and electronic apparatus
US8976833B2 (en) * 2013-03-12 2015-03-10 Taiwan Semiconductor Manufacturing Company, Ltd. Light coupling device and methods of forming same
US9041015B2 (en) * 2013-03-12 2015-05-26 Taiwan Semiconductor Manufacturing Company, Ltd. Package structure and methods of forming same
JP2015018906A (ja) * 2013-07-10 2015-01-29 ソニー株式会社 撮像素子、製造装置、製造方法、電子機器
JP2015060855A (ja) * 2013-09-17 2015-03-30 ソニー株式会社 固体撮像装置およびその製造方法、並びに電子機器
JP6196911B2 (ja) * 2014-02-05 2017-09-13 オリンパス株式会社 固体撮像装置および撮像装置
JP6300564B2 (ja) * 2014-02-18 2018-03-28 キヤノン株式会社 固体撮像装置及びその製造方法
JP2015228466A (ja) * 2014-06-02 2015-12-17 キヤノン株式会社 撮像装置及び撮像システム
JP6173259B2 (ja) 2014-06-02 2017-08-02 キヤノン株式会社 光電変換装置および撮像システム
JP6425427B2 (ja) * 2014-06-16 2018-11-21 キヤノン株式会社 光電変換装置およびその製造方法、撮像システム
JP2016058538A (ja) * 2014-09-09 2016-04-21 キヤノン株式会社 固体撮像装置およびカメラ
JP2017069553A (ja) * 2015-09-30 2017-04-06 キヤノン株式会社 固体撮像装置、その製造方法及びカメラ
JP2020047644A (ja) 2018-09-14 2020-03-26 キオクシア株式会社 半導体装置
US11271024B2 (en) * 2019-12-09 2022-03-08 Vanguard International Semiconductor Corporation Semiconductor device and method for forming the same
US20230253518A1 (en) * 2020-08-27 2023-08-10 Compoundtek Pte. Ltd. Semiconductor device and fabricating method therefor
TWI751867B (zh) * 2020-12-29 2022-01-01 李學能 半導體裝置
TW202310382A (zh) * 2021-08-06 2023-03-01 日商索尼半導體解決方案公司 光檢測裝置及其製造方法以及電子機器

Citations (2)

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CN1681131A (zh) * 2004-04-08 2005-10-12 佳能株式会社 固体摄像元件及其设计支持方法及摄像装置
CN101924114A (zh) * 2009-06-10 2010-12-22 索尼公司 固态成像装置、用于制造固态成像装置的方法和成像设备

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JP2558389B2 (ja) * 1990-11-29 1996-11-27 松下電器産業株式会社 固体撮像装置
JPH0595098A (ja) * 1991-10-02 1993-04-16 Olympus Optical Co Ltd 固体撮像装置
JP2002359363A (ja) * 2001-05-30 2002-12-13 Sony Corp 固体撮像装置およびその製造方法
JP2005086186A (ja) * 2003-09-11 2005-03-31 Matsushita Electric Ind Co Ltd 固体撮像装置とその製造方法
US7443005B2 (en) * 2004-06-10 2008-10-28 Tiawan Semiconductor Manufacturing Co., Ltd. Lens structures suitable for use in image sensors and method for making the same
JP2006344754A (ja) 2005-06-08 2006-12-21 Matsushita Electric Ind Co Ltd 固体撮像装置及びその製造方法
US7968888B2 (en) * 2005-06-08 2011-06-28 Panasonic Corporation Solid-state image sensor and manufacturing method thereof
US7884434B2 (en) * 2005-12-19 2011-02-08 Canon Kabushiki Kaisha Photoelectric conversion apparatus, producing method therefor, image pickup module and image pickup system
JP2007201091A (ja) * 2006-01-25 2007-08-09 Fujifilm Corp 固体撮像素子の製造方法
JP2007201163A (ja) 2006-01-26 2007-08-09 Fujifilm Corp 固体撮像素子の製造方法および固体撮像素子
JP2007227643A (ja) * 2006-02-23 2007-09-06 Fujifilm Corp 固体撮像装置
JP2008042024A (ja) * 2006-08-08 2008-02-21 Fujifilm Corp 固体撮像装置
JP2008091800A (ja) 2006-10-04 2008-04-17 Canon Inc 撮像素子及びその製造方法並びに撮像システム
JP2008192951A (ja) * 2007-02-07 2008-08-21 Matsushita Electric Ind Co Ltd 固体撮像装置およびその製造方法
JP2009099700A (ja) * 2007-10-16 2009-05-07 Sony Corp 固体撮像装置の製造方法
JP2009252983A (ja) * 2008-04-04 2009-10-29 Canon Inc 撮像センサー、及び撮像センサーの製造方法
JP2009283637A (ja) * 2008-05-21 2009-12-03 Panasonic Corp 固体撮像装置とその製造方法
JP2010205924A (ja) * 2009-03-03 2010-09-16 Canon Inc 固体撮像素子
JP5428400B2 (ja) * 2009-03-04 2014-02-26 ソニー株式会社 固体撮像装置、および、その製造方法、電子機器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1681131A (zh) * 2004-04-08 2005-10-12 佳能株式会社 固体摄像元件及其设计支持方法及摄像装置
CN101924114A (zh) * 2009-06-10 2010-12-22 索尼公司 固态成像装置、用于制造固态成像装置的方法和成像设备

Also Published As

Publication number Publication date
CN104485340A (zh) 2015-04-01
CN102637702A (zh) 2012-08-15
JP5197823B2 (ja) 2013-05-15
US20140306309A1 (en) 2014-10-16
JP2012182430A (ja) 2012-09-20
US20120200751A1 (en) 2012-08-09
CN102637702B (zh) 2014-12-10
US9263487B2 (en) 2016-02-16
US8817144B2 (en) 2014-08-26

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Granted publication date: 20171013