CN104485292A - 基板上通过引线键合互叠凸块实现小间距凸点及PoP互叠的方法 - Google Patents

基板上通过引线键合互叠凸块实现小间距凸点及PoP互叠的方法 Download PDF

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CN104485292A
CN104485292A CN201410758902.1A CN201410758902A CN104485292A CN 104485292 A CN104485292 A CN 104485292A CN 201410758902 A CN201410758902 A CN 201410758902A CN 104485292 A CN104485292 A CN 104485292A
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汪民
王宏杰
刘军
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National Center for Advanced Packaging Co Ltd
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Abstract

本发明提供了一种基板上通过引线键合互叠凸块实现小间距凸点及PoP互叠的方法,首先通过引线键合工艺,在基板上制作堆叠的金属凸块至所需高度,形成互叠凸块;采用丝网印刷工艺,在互叠凸块顶部印刷焊料膏,再进行回流工艺,使焊料膏形成焊帽形状覆盖在互叠凸块的顶部;在基板上贴装芯片并完成与基板的互连;通过塑封工艺完成整个封装体的塑封,再通过植球工艺完成整个封装体底面的植球;最后将封装体进行PoP互连,上、下封装体通过底面焊球和上方凸点对准并回流的方式连接。本发明的优点是:整个方式完全使用传统的封装设备及工艺。凸点间距可根据需要选用不同粗细的金属线并控制凸点尺寸来决定,作业方式相对简单。

Description

基板上通过引线键合互叠凸块实现小间距凸点及PoP互叠的方法
技术领域
本发明涉及一种基板上通过引线键合互叠凸块实现小间距凸点及PoP互叠的方法,属于集成电路芯片封装技术领域。
背景技术
1)    传统 PoP( Package on Package)封装体结构如图1所示,上层封装体的焊球10(Solder Ball)与底层封装体基板1上的焊盘互连。互连焊球10需要确保一定高度,并且回流时候凸点(指焊球10)变形及位置移动等风险(容易造成短路风险),凸点间距难以做小。
2) 互连凸点埋入塑封胶(In Mold)方式封装体结构如图2所示,焊球10与凸出塑封胶的互连锡凸点14互连,可以有效避免回流时焊球10凸点变形及位置移动导致短路,但凸点间距及大小一定程度受塑封厚度影响。
3) 如图3所示,塑封通孔(Through Mold Via)方式实现 PoP上下封装体互叠时凸点互连,焊球10与塑封胶中的互连锡凸点14互连,互连凸点间距限制可以减小,但需要单独的塑封胶钻孔设备,同时钻孔效率也比较低,相对而言实现PoP封装成本较高。
4) 专利CN 102325431 A中,通过电镀方式在基板pad上形成铜柱来克服焊球节距的限制,但电镀铜柱的费用投入很高。
发明内容
本发明的目的是克服现有技术中存在的不足,提供一种基板上通过引线键合互叠凸块实现小间距凸点及PoP互叠的方法,更好的实现 PoP封装互连的凸点小间距。
按照本发明提供的技术方案,所述基板上通过引线键合互叠凸块实现小间距凸点及PoP互叠的方法,包括以下步骤:
(1)通过引线键合工艺,在基板上制作金属凸块(可以采用Au / Ag合金);
(2)通过引线键合工艺,在金属凸块上堆叠金属凸块至所需高度,形成互叠凸块;
(3)采用丝网印刷工艺,在互叠凸块顶部印刷焊料膏(可以采用锡或金属合金);
(4)经过丝网印刷后,再进行回流工艺,使焊料膏形成焊帽形状覆盖在互叠凸块的顶部,互叠凸块和焊帽形成基板上的凸点;
(5)在基板上贴装芯片并完成与基板的互连;
(6)通过塑封工艺完成整个封装体的塑封,再通过植球工艺完成整个封装体底面的植球,制作出焊球;
(7)将完成步骤(6)的封装体进行PoP互连,上、下封装体通过底面焊球和上方凸点对准并回流的方式连接。
步骤(5)中,如是倒装芯片,通过倒装贴片后进行回流,并在芯片底面凸点区域进行底填材料填充;如是正贴芯片工艺,需要通过引线键合工艺进行芯片与基板之间的互连。
本发明的优点是:通过引线键合(Wire bond)作业方式在基板上互叠凸块(凸块互叠个数根据需要的互连高度决定);之后再通过锡膏钢网印刷方式在凸块上印刷焊料膏,并回流形成帽状的锡膏顶部,最后实现PoP上、下封装体互连。整个方式完全使用传统的封装设备及工艺。凸点间距可根据需要选用不同粗细的金属线并控制凸点尺寸来决定,作业方式相对简单。
附图说明
图1是现有技术一结构示意图。
图2是现有技术二结构示意图。
图3是现有技术三结构示意图。
图4是制作好导电图形的初始基板。
图5是通过引线键合工艺在基板上制作金属凸块的示意图。
图6是通过引线键合工艺在基板上堆叠金属凸块的示意图。
图7是印刷焊料膏示意图。
图8是制作焊帽覆盖在互叠凸块顶部构成凸点的示意图。
图9是贴装芯片示意图。
图10是塑封和底面植球得到的封装体结构。
图11是将完成组装的封装体进行PoP互连的示意图。
具体实施方式
下面结合附图和实施例对本发明作进一步说明。
本发明的流程如下:
1)WB Stack Bumps方法基板上制备小间距互连凸点。
(1)图4提供了制作好导电图形2的基板1。图5通过引线键合(Wire Bond)工艺,在基板1上进行Bump(凸块)3制作,材料可以是Au / Ag合金线等金属。
(2)如图6所示,使用引线键合工艺,在Bump 3上进行堆叠,堆叠的数量根据单个Bump高度及需要的总高度来决定,形成互叠的凸块结构。
(3)如图7所示,采用丝网印刷工艺,覆盖上丝网印刷版5,在Bump 3相应的位置印刷焊料膏4,材料可以是锡或其他的金属合金。
(4)经过丝网印刷后,再进行回流工艺,使焊料膏4形成焊帽6形状覆盖在互叠凸块的顶部,如图8。通过以上工艺,整个基板上的凸点制备完成。
2) 贴片、塑封及基板植球作业完成整个封装体(Package)的封装流程。
(1)倒装芯片通过倒装贴片后进行回流,并在芯片7底面凸点(chip凸点)11区域进行底填材料8填充,如图9所示。如果是正贴芯片工艺,需要通过引线键合工艺进行芯片与基板之间的互连。
(2)通过塑封工艺完成整个封装体的塑封。塑封胶9可以是树脂等绝缘材料。通过封装体底面植球工艺,完成整个封装体底面的焊球10制作,最终得到的封装体结构如10所示。
3)将完成组装的封装体进行PoP互连。
上、下封装体通过小间距互连凸点对准并回流等方式连接形成如图11所示的PoP封装体。图11中的上层封装体为正贴芯片,包括:基板1、芯片7、塑封胶9,芯片7通过贴片胶12贴装在基板1上并通过金线13与基板1上的焊盘互连,然后由塑封胶9进行封装。类似的实现小间距凸点方法可推广到上层封装体,从而可实现多层封装体互连。
由于采用引线键合互叠金属凸点,通过焊线粗细及凸点大小控制,并结合互叠凸点数目来有效控制凸点高度,本方法可以制作小间距互连凸点,且凸点间距不受Mold厚度影响,PoP上、下封装体回流互连时,不会造成凸点变形及位置移动产生Short。

Claims (4)

1.基板上通过引线键合互叠凸块实现小间距凸点及PoP互叠的方法,其特征是,包括以下步骤:
(1)通过引线键合工艺,在基板(1)上制作金属凸块(3);
(2)通过引线键合工艺,在金属凸块(3)上堆叠金属凸块(3)至所需高度,形成互叠凸块;
(3)采用丝网印刷工艺,在互叠凸块顶部印刷焊料膏(4);
(4)经过丝网印刷后,再进行回流工艺,使焊料膏(4)形成焊帽(6)形状覆盖在互叠凸块的顶部,互叠凸块和焊帽(6)形成基板(1)上的凸点;
(5)在基板(1)上贴装芯片(7)并完成与基板(1)的互连;
(6)通过塑封工艺完成整个封装体的塑封,再通过植球工艺完成整个封装体底面的植球,制作出焊球(10);
(7)将完成步骤(6)的封装体进行PoP互连,上、下封装体通过底面焊球(10)和上方凸点对准并回流的方式连接。
2.如权利要求1所述基板上通过引线键合互叠凸块实现小间距凸点及PoP互叠的方法,其特征是,步骤(5)中,如是倒装芯片,通过倒装贴片后进行回流,并在芯片(7)底面凸点区域进行底填材料(8)填充;如是正贴芯片工艺,需要通过引线键合工艺进行芯片(7)与基板(1)之间的互连。
3.如权利要求1所述基板上通过引线键合互叠凸块实现小间距凸点及PoP互叠的方法,其特征是,所述金属凸块(3)采用Au / Ag合金。
4.如权利要求1所述基板上通过引线键合互叠凸块实现小间距凸点及PoP互叠的方法,所述焊料膏(4)材料是锡或金属合金。
CN201410758902.1A 2014-12-10 2014-12-10 基板上通过引线键合互叠凸块实现小间距凸点及PoP互叠的方法 Pending CN104485292A (zh)

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