CN104364208B - 玻璃基板的切割方法及玻璃基板的制造方法 - Google Patents

玻璃基板的切割方法及玻璃基板的制造方法 Download PDF

Info

Publication number
CN104364208B
CN104364208B CN201380030915.0A CN201380030915A CN104364208B CN 104364208 B CN104364208 B CN 104364208B CN 201380030915 A CN201380030915 A CN 201380030915A CN 104364208 B CN104364208 B CN 104364208B
Authority
CN
China
Prior art keywords
glass substrate
laser
glass
cutting method
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201380030915.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN104364208A (zh
Inventor
植松利之
高桥秀幸
增田秀树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of CN104364208A publication Critical patent/CN104364208A/zh
Application granted granted Critical
Publication of CN104364208B publication Critical patent/CN104364208B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Thermal Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
CN201380030915.0A 2012-06-28 2013-05-31 玻璃基板的切割方法及玻璃基板的制造方法 Expired - Fee Related CN104364208B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2012-145991 2012-06-28
JP2012145991 2012-06-28
JP2013004667 2013-01-15
JP2013-004667 2013-01-15
PCT/JP2013/065194 WO2014002685A1 (ja) 2012-06-28 2013-05-31 ガラス基板の切断方法及びガラス基板の製造方法

Publications (2)

Publication Number Publication Date
CN104364208A CN104364208A (zh) 2015-02-18
CN104364208B true CN104364208B (zh) 2017-12-12

Family

ID=49782852

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380030915.0A Expired - Fee Related CN104364208B (zh) 2012-06-28 2013-05-31 玻璃基板的切割方法及玻璃基板的制造方法

Country Status (5)

Country Link
JP (1) JP6206406B2 (ja)
KR (1) KR20150035577A (ja)
CN (1) CN104364208B (ja)
TW (1) TWI603801B (ja)
WO (1) WO2014002685A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6579040B2 (ja) * 2016-05-31 2019-09-25 日本電気硝子株式会社 ガラスロールの製造方法
JP2018024536A (ja) * 2016-08-08 2018-02-15 日本電気硝子株式会社 帯状ガラスフィルムの切断方法
US11459264B2 (en) 2017-02-07 2022-10-04 Nippon Electric Glass Co., Ltd. Method for producing glass film
JP6909403B2 (ja) 2017-07-31 2021-07-28 日本電気硝子株式会社 ガラスフィルムの製造方法
CN113953673A (zh) * 2020-12-21 2022-01-21 宁夏小牛自动化设备有限公司 一种划裂太阳能电池片的方法及其划裂设备
WO2024042887A1 (ja) * 2022-08-25 2024-02-29 日本電気硝子株式会社 ガラス板の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57209838A (en) * 1981-04-01 1982-12-23 Kurieiteibu Gurasuwaakusu Inte Laser glass cutting method and product made thereby
WO2006070825A1 (ja) * 2004-12-28 2006-07-06 Mitsuboshi Diamond Industrial Co., Ltd. 脆性材料基板の分断方法および基板分断システム
JP2008247038A (ja) * 2008-05-24 2008-10-16 Lemi Ltd 脆性材料のフルカット割断方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000263277A (ja) * 1999-03-16 2000-09-26 Hitachi Cable Ltd 非金属材料の加工方法及びその装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57209838A (en) * 1981-04-01 1982-12-23 Kurieiteibu Gurasuwaakusu Inte Laser glass cutting method and product made thereby
WO2006070825A1 (ja) * 2004-12-28 2006-07-06 Mitsuboshi Diamond Industrial Co., Ltd. 脆性材料基板の分断方法および基板分断システム
JP2008247038A (ja) * 2008-05-24 2008-10-16 Lemi Ltd 脆性材料のフルカット割断方法

Also Published As

Publication number Publication date
TW201404516A (zh) 2014-02-01
CN104364208A (zh) 2015-02-18
JPWO2014002685A1 (ja) 2016-05-30
TWI603801B (zh) 2017-11-01
JP6206406B2 (ja) 2017-10-04
WO2014002685A1 (ja) 2014-01-03
KR20150035577A (ko) 2015-04-06

Similar Documents

Publication Publication Date Title
CN104364208B (zh) 玻璃基板的切割方法及玻璃基板的制造方法
US20200156986A1 (en) Methods of cutting glass using a laser
CN105164073B (zh) 玻璃基板的切断方法及玻璃基板的制造方法
CN105899325B (zh) 借助于激光处理和温度诱导的应力的组合的晶片制造法
US9610653B2 (en) Method and apparatus for separation of workpieces and articles produced thereby
WO2006070825A1 (ja) 脆性材料基板の分断方法および基板分断システム
CN101875156B (zh) 激光加工方法及激光加工装置
WO2013039229A1 (ja) ガラス板切断方法およびガラス板切断装置
JP6703286B2 (ja) 脆性材料の切断方法
WO2011071886A1 (en) Laser machining and scribing systems and methods
TW201026619A (en) Method of cutting mother glass substrate for display panel and substrate of brittle material, and method of manufacturing display
JPWO2003008352A1 (ja) 脆性材料基板のスクライブ装置およびスクライブ方法
CN102319958A (zh) 脆性材料脉冲激光切割方法
JPWO2004014625A1 (ja) 脆性材料基板のスクライブ方法およびスクライブ装置
JP2007260749A (ja) レーザ加工方法、レーザ加工装置及び脆性材料の加工品
JP2011200926A (ja) レーザ加工方法及び脆性材料基板
CN103387335B (zh) 基板切割装置及其方法
WO2021157300A1 (ja) ガラス板及びガラス板の製造方法
CN102489885A (zh) 一种激光钻开锥孔的方法和装置
CN116568644A (zh) 陶瓷切割方法及装置
CN102786214A (zh) 脆性材料基板加工方法
JP2004035315A (ja) 脆性材料基板の分断方法および脆性材料基板分断装置
CN107570894A (zh) 基板的加工方法以及基板的加工装置
JP2010184457A (ja) 脆性材料基板の割断方法
JP2008246808A (ja) 高脆性非金属材料製の被加工物の加工方法及びその装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CP01 Change in the name or title of a patent holder

Address after: Tokyo, Japan

Patentee after: ASAHI GLASS Co.,Ltd.

Address before: Tokyo, Japan

Patentee before: ASAHI GLASS Co.,Ltd.

CP01 Change in the name or title of a patent holder
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20171212

CF01 Termination of patent right due to non-payment of annual fee