CN104350380B - 测量装置和成膜装置 - Google Patents

测量装置和成膜装置 Download PDF

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Publication number
CN104350380B
CN104350380B CN201280073844.8A CN201280073844A CN104350380B CN 104350380 B CN104350380 B CN 104350380B CN 201280073844 A CN201280073844 A CN 201280073844A CN 104350380 B CN104350380 B CN 104350380B
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China
Prior art keywords
signal
optical
substrate
measurement apparatus
film
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CN201280073844.8A
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English (en)
Chinese (zh)
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CN104350380A (zh
Inventor
佐井旭阳
日向阳平
大泷芳幸
姜友松
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Shincron Co Ltd
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Shincron Co Ltd
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Publication of CN104350380A publication Critical patent/CN104350380A/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Toxicology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Mathematical Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
CN201280073844.8A 2012-09-10 2012-09-10 测量装置和成膜装置 Active CN104350380B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/073097 WO2014038090A1 (ja) 2012-09-10 2012-09-10 測定装置及び成膜装置

Publications (2)

Publication Number Publication Date
CN104350380A CN104350380A (zh) 2015-02-11
CN104350380B true CN104350380B (zh) 2017-03-15

Family

ID=49850420

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280073844.8A Active CN104350380B (zh) 2012-09-10 2012-09-10 测量装置和成膜装置

Country Status (5)

Country Link
JP (1) JP5367196B1 (ja)
CN (1) CN104350380B (ja)
HK (1) HK1202331A1 (ja)
TW (1) TWI502164B (ja)
WO (1) WO2014038090A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107179053A (zh) * 2016-03-10 2017-09-19 中国科学院高能物理研究所 导光装置、薄膜的均匀性测试装置和方法
CN105714252B (zh) * 2016-04-28 2018-09-28 中国工程物理研究院激光聚变研究中心 一种光学薄膜沉积扫描控制方法及系统
US11067446B2 (en) * 2017-06-22 2021-07-20 Ams Sensors Singapore Pte. Ltd. Compact spectrometer modules
JP2019144217A (ja) * 2018-02-20 2019-08-29 国立大学法人千葉大学 膜厚測定装置、これを用いた蒸着装置及び膜特性評価装置
CN109811323B (zh) * 2019-01-23 2023-09-08 北京北方华创微电子装备有限公司 一种磁控溅射装置和托盘检测方法

Citations (7)

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CN1302916A (zh) * 2000-12-27 2001-07-11 中国科学院上海技术物理研究所 关于红外截止滤光片光学介质膜厚度的监控方法
CN2552943Y (zh) * 2002-04-30 2003-05-28 西安工业学院 光学薄膜厚度在线实时监控仪
CN1707307A (zh) * 2005-04-08 2005-12-14 中国科学院上海光学精密机械研究所 光学膜厚监控系统
CN2763776Y (zh) * 2004-12-30 2006-03-08 鸿富锦精密工业（深圳）有限公司 膜厚监控装置
CN1877298A (zh) * 2006-07-05 2006-12-13 中国科学院上海光学精密机械研究所 膜层光谱的实时测量装置及其测量方法
CN100477955C (zh) * 2006-03-30 2009-04-15 株式会社东芝 用于光电检测肿瘤的装置
CN102472611A (zh) * 2009-07-03 2012-05-23 株式会社新柯隆 光学式膜厚计以及具有光学式膜厚计的薄膜形成装置

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JPH01304345A (ja) * 1988-06-02 1989-12-07 Nkk Corp ガス検知装置
JPH0590371A (ja) * 1991-09-27 1993-04-09 Nec Corp 膜厚測定方法及びその装置
JP2973639B2 (ja) * 1991-09-30 1999-11-08 横河電機株式会社 シ―ト状物体の特性測定装置
JP3534632B2 (ja) * 1998-12-22 2004-06-07 シャープ株式会社 膜厚測定方法
JP2001174404A (ja) * 1999-12-15 2001-06-29 Takahisa Mitsui 光断層像計測装置および計測方法
JP3823745B2 (ja) * 2001-03-14 2006-09-20 オムロン株式会社 膜厚測定方法およびその方法を用いた膜厚センサ
US7247345B2 (en) * 2002-03-25 2007-07-24 Ulvac, Inc. Optical film thickness controlling method and apparatus, dielectric multilayer film and manufacturing apparatus thereof
JP3959469B2 (ja) * 2003-08-07 2007-08-15 独立行政法人産業技術総合研究所 膜の屈折率及び厚さの測定方法、測定プログラム及びコンピュータ読取可能な記録媒体
JP2006071589A (ja) * 2004-09-06 2006-03-16 Univ Kansai 色測定装置及び光源装置
JP4775798B2 (ja) * 2006-05-18 2011-09-21 独立行政法人科学技術振興機構 複数ガス濃度同時測定装置
JP2008180597A (ja) * 2007-01-24 2008-08-07 Sanyo Electric Co Ltd 光検出装置および光学測定ユニット
JP5314301B2 (ja) * 2008-03-14 2013-10-16 三菱重工業株式会社 ガス濃度計測方法および装置
JP2012026949A (ja) * 2010-07-27 2012-02-09 Shimadzu Corp ガス濃度測定装置
JP2012063321A (ja) * 2010-09-17 2012-03-29 Hamamatsu Photonics Kk 反射率測定装置、反射率測定方法、膜厚測定装置及び膜厚測定方法
JP5126909B2 (ja) * 2010-10-08 2013-01-23 株式会社シンクロン 薄膜形成方法及び薄膜形成装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1302916A (zh) * 2000-12-27 2001-07-11 中国科学院上海技术物理研究所 关于红外截止滤光片光学介质膜厚度的监控方法
CN2552943Y (zh) * 2002-04-30 2003-05-28 西安工业学院 光学薄膜厚度在线实时监控仪
CN2763776Y (zh) * 2004-12-30 2006-03-08 鸿富锦精密工业（深圳）有限公司 膜厚监控装置
CN1707307A (zh) * 2005-04-08 2005-12-14 中国科学院上海光学精密机械研究所 光学膜厚监控系统
CN100477955C (zh) * 2006-03-30 2009-04-15 株式会社东芝 用于光电检测肿瘤的装置
CN1877298A (zh) * 2006-07-05 2006-12-13 中国科学院上海光学精密机械研究所 膜层光谱的实时测量装置及其测量方法
CN102472611A (zh) * 2009-07-03 2012-05-23 株式会社新柯隆 光学式膜厚计以及具有光学式膜厚计的薄膜形成装置

Also Published As

Publication number Publication date
WO2014038090A1 (ja) 2014-03-13
TWI502164B (zh) 2015-10-01
JPWO2014038090A1 (ja) 2016-08-08
CN104350380A (zh) 2015-02-11
JP5367196B1 (ja) 2013-12-11
TW201411090A (zh) 2014-03-16
HK1202331A1 (en) 2015-09-25

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