CN104297918A - 反射镜驱动装置及其驱动方法 - Google Patents
反射镜驱动装置及其驱动方法 Download PDFInfo
- Publication number
- CN104297918A CN104297918A CN201410341171.0A CN201410341171A CN104297918A CN 104297918 A CN104297918 A CN 104297918A CN 201410341171 A CN201410341171 A CN 201410341171A CN 104297918 A CN104297918 A CN 104297918A
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Links
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- 229910052720 vanadium Inorganic materials 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
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- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
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- 229910052738 indium Inorganic materials 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 claims description 3
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- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
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- 229910002113 barium titanate Inorganic materials 0.000 description 3
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- 125000004429 atom Chemical group 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- FSAJRXGMUISOIW-UHFFFAOYSA-N bismuth sodium Chemical compound [Na].[Bi] FSAJRXGMUISOIW-UHFFFAOYSA-N 0.000 description 2
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- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- QNZFKUWECYSYPS-UHFFFAOYSA-N lead zirconium Chemical compound [Zr].[Pb] QNZFKUWECYSYPS-UHFFFAOYSA-N 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 description 2
- 238000004549 pulsed laser deposition Methods 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- UYLYBEXRJGPQSH-UHFFFAOYSA-N sodium;oxido(dioxo)niobium Chemical compound [Na+].[O-][Nb](=O)=O UYLYBEXRJGPQSH-UHFFFAOYSA-N 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 241000446313 Lamella Species 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- FOLMBQLGENFKLO-UHFFFAOYSA-N [Pb].[Mg].[Nb] Chemical compound [Pb].[Mg].[Nb] FOLMBQLGENFKLO-UHFFFAOYSA-N 0.000 description 1
- SITXNCAAFPTBGM-UHFFFAOYSA-N [Pb].[Nb].[Zn] Chemical compound [Pb].[Nb].[Zn] SITXNCAAFPTBGM-UHFFFAOYSA-N 0.000 description 1
- WOIHABYNKOEWFG-UHFFFAOYSA-N [Sr].[Ba] Chemical compound [Sr].[Ba] WOIHABYNKOEWFG-UHFFFAOYSA-N 0.000 description 1
- BEKPOVOEQGXHMA-UHFFFAOYSA-N [Zr].[Nb].[Ni] Chemical compound [Zr].[Nb].[Ni] BEKPOVOEQGXHMA-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 1
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- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000002372 labelling Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
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- 238000001039 wet etching Methods 0.000 description 1
- RPEUFVJJAJYJSS-UHFFFAOYSA-N zinc;oxido(dioxo)niobium Chemical compound [Zn+2].[O-][Nb](=O)=O.[O-][Nb](=O)=O RPEUFVJJAJYJSS-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
- H02N2/145—Large signal circuits, e.g. final stages
- H02N2/147—Multi-phase circuits
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013148569A JP5916667B2 (ja) | 2013-07-17 | 2013-07-17 | ミラー駆動装置及びその駆動方法 |
| JP2013-148569 | 2013-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104297918A true CN104297918A (zh) | 2015-01-21 |
Family
ID=51176271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410341171.0A Pending CN104297918A (zh) | 2013-07-17 | 2014-07-17 | 反射镜驱动装置及其驱动方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9678335B2 (https=) |
| EP (1) | EP2827183B1 (https=) |
| JP (1) | JP5916667B2 (https=) |
| CN (1) | CN104297918A (https=) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106324827A (zh) * | 2016-09-29 | 2017-01-11 | 东南大学 | 一种谐振式液体振镜及其驱动方法 |
| CN113574007A (zh) * | 2019-03-28 | 2021-10-29 | 富士胶片株式会社 | 微镜器件及微镜器件的驱动方法 |
| CN113728263A (zh) * | 2019-04-26 | 2021-11-30 | 富士胶片株式会社 | 微镜器件 |
| CN114105081A (zh) * | 2020-08-27 | 2022-03-01 | 中光电智能感测股份有限公司 | 微型扫描面镜 |
| CN114518683A (zh) * | 2020-11-20 | 2022-05-20 | 精工爱普生株式会社 | 光学器件的驱动方法、光学系统以及显示装置 |
| CN114981704A (zh) * | 2020-01-16 | 2022-08-30 | 奇跃公司 | 扫描镜系统及制造方法 |
| CN116841039A (zh) * | 2023-06-30 | 2023-10-03 | 成都理想境界科技有限公司 | 一种扫描致动器、电极设置方法及扫描显示模组 |
| US12572004B2 (en) | 2020-01-22 | 2026-03-10 | Magic Leap, Inc. | Two mirror scanning relay optics |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0782011B2 (ja) | 1989-12-06 | 1995-09-06 | 株式会社日立製作所 | サンプル調整装置及び血球計測装置 |
| JP6606865B2 (ja) | 2015-05-29 | 2019-11-20 | ミツミ電機株式会社 | 光走査装置及びその製造方法、光走査制御装置 |
| JP6498047B2 (ja) | 2015-06-09 | 2019-04-10 | 株式会社トライフォース・マネジメント | 可動反射装置およびこれを利用した反射面駆動システム |
| US10003889B2 (en) * | 2015-08-04 | 2018-06-19 | Infineon Technologies Ag | System and method for a multi-electrode MEMS device |
| CN108604008B (zh) * | 2016-02-17 | 2020-11-10 | 三菱电机株式会社 | 反射镜驱动装置、反射镜驱动装置的控制方法及反射镜驱动装置的制造方法 |
| WO2018088291A1 (ja) * | 2016-11-09 | 2018-05-17 | 第一精工株式会社 | 可動反射素子 |
| IT201600121010A1 (it) | 2016-11-29 | 2018-05-29 | St Microelectronics Srl | Dispositivo mems con azionamento piezoelettrico, sistema mems proiettivo includente il dispositivo mems e relativo metodo di pilotaggio |
| WO2019167615A1 (ja) * | 2018-02-27 | 2019-09-06 | パイオニア株式会社 | 光偏向器 |
| US11029512B2 (en) * | 2018-06-27 | 2021-06-08 | Microsoft Technology Licensing, Llc | Adjusting a resonant frequency of a scanning mirror |
| WO2020218585A1 (ja) * | 2019-04-26 | 2020-10-29 | 富士フイルム株式会社 | マイクロミラーデバイス |
| JP7451930B2 (ja) * | 2019-10-11 | 2024-03-19 | 株式会社リコー | 光偏向器、偏向装置、距離測定装置、画像投影装置、及び車両 |
| JP7751997B2 (ja) * | 2021-07-13 | 2025-10-09 | スタンレー電気株式会社 | Ｍｅｍｓ光偏向器及び光走査装置 |
| US12431614B1 (en) | 2024-02-05 | 2025-09-30 | Rockwell Collins, Inc. | Frequency tunable piezoelectric VLF antenna |
| US12531330B1 (en) | 2024-02-05 | 2026-01-20 | Rockwell Collins, Inc. | Oscillator integrated piezoelectric radiator |
Citations (7)
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| JP2005128147A (ja) * | 2003-10-22 | 2005-05-19 | Stanley Electric Co Ltd | 光偏向器及び光学装置 |
| JP2007206480A (ja) * | 2006-02-03 | 2007-08-16 | Toko Inc | 光走査素子 |
| CN101273478A (zh) * | 2005-09-26 | 2008-09-24 | 富士胶片株式会社 | 压电器件、驱动该器件的方法、压电设备和液体排放设备 |
| US20080297868A1 (en) * | 2007-05-28 | 2008-12-04 | Konica Minolta Opto, Inc. | Image display apparatus |
| JP2009002978A (ja) * | 2007-06-19 | 2009-01-08 | Konica Minolta Opto Inc | マイクロスキャナ及びそれを備えた光走査装置。 |
| CN101630063A (zh) * | 2008-07-16 | 2010-01-20 | 船井电机株式会社 | 振动镜元件 |
| US20100195180A1 (en) * | 2009-01-30 | 2010-08-05 | Goichi Akanuma | Deflecting mirror for deflecting and scanning light beam |
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| JPH11112048A (ja) * | 1997-10-02 | 1999-04-23 | Seiko Epson Corp | 圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法 |
| US6972883B2 (en) * | 2002-02-15 | 2005-12-06 | Ricoh Company, Ltd. | Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image |
| EP1684406A1 (en) * | 2004-06-07 | 2006-07-26 | Matsushita Electric Industrial Co., Ltd. | Actuator, fine motion mechanism including the actuator, and camera module including the fine motion mechanism |
| JP2007199682A (ja) * | 2005-12-27 | 2007-08-09 | Konica Minolta Holdings Inc | 光偏向器および光ビーム走査装置 |
| JP4926596B2 (ja) * | 2006-08-08 | 2012-05-09 | スタンレー電気株式会社 | 光偏向器及びその製造方法 |
| US20080081215A1 (en) | 2006-09-28 | 2008-04-03 | Fujifilm Corporation | Process for forming a film, piezoelectric film, and piezoelectric device |
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| JP2011075955A (ja) * | 2009-09-30 | 2011-04-14 | Brother Industries Ltd | 画像表示装置 |
| JP5400636B2 (ja) * | 2010-01-20 | 2014-01-29 | スタンレー電気株式会社 | 光偏向器及びこれを用いた光学装置 |
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| JP5264954B2 (ja) | 2011-03-30 | 2013-08-14 | 富士フイルム株式会社 | ミラー駆動装置及び方法 |
| JP6092713B2 (ja) * | 2013-05-28 | 2017-03-08 | スタンレー電気株式会社 | 光偏向器 |
-
2013
- 2013-07-17 JP JP2013148569A patent/JP5916667B2/ja active Active
-
2014
- 2014-07-14 US US14/330,415 patent/US9678335B2/en active Active
- 2014-07-15 EP EP14177045.3A patent/EP2827183B1/en not_active Not-in-force
- 2014-07-17 CN CN201410341171.0A patent/CN104297918A/zh active Pending
Patent Citations (7)
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| JP2005128147A (ja) * | 2003-10-22 | 2005-05-19 | Stanley Electric Co Ltd | 光偏向器及び光学装置 |
| CN101273478A (zh) * | 2005-09-26 | 2008-09-24 | 富士胶片株式会社 | 压电器件、驱动该器件的方法、压电设备和液体排放设备 |
| JP2007206480A (ja) * | 2006-02-03 | 2007-08-16 | Toko Inc | 光走査素子 |
| US20080297868A1 (en) * | 2007-05-28 | 2008-12-04 | Konica Minolta Opto, Inc. | Image display apparatus |
| JP2009002978A (ja) * | 2007-06-19 | 2009-01-08 | Konica Minolta Opto Inc | マイクロスキャナ及びそれを備えた光走査装置。 |
| CN101630063A (zh) * | 2008-07-16 | 2010-01-20 | 船井电机株式会社 | 振动镜元件 |
| US20100195180A1 (en) * | 2009-01-30 | 2010-08-05 | Goichi Akanuma | Deflecting mirror for deflecting and scanning light beam |
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| CN114981704A (zh) * | 2020-01-16 | 2022-08-30 | 奇跃公司 | 扫描镜系统及制造方法 |
| US12601906B2 (en) | 2020-01-16 | 2026-04-14 | Magic Leap, Inc. | Scanning mirror systems and methods of manufacture |
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| CN114105081A (zh) * | 2020-08-27 | 2022-03-01 | 中光电智能感测股份有限公司 | 微型扫描面镜 |
| CN114518683A (zh) * | 2020-11-20 | 2022-05-20 | 精工爱普生株式会社 | 光学器件的驱动方法、光学系统以及显示装置 |
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| CN116841039A (zh) * | 2023-06-30 | 2023-10-03 | 成都理想境界科技有限公司 | 一种扫描致动器、电极设置方法及扫描显示模组 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5916667B2 (ja) | 2016-05-11 |
| US20150022871A1 (en) | 2015-01-22 |
| EP2827183A1 (en) | 2015-01-21 |
| EP2827183B1 (en) | 2022-04-27 |
| US9678335B2 (en) | 2017-06-13 |
| JP2015022064A (ja) | 2015-02-02 |
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