CN104183555A - 半导体封装件及其制法 - Google Patents

半导体封装件及其制法 Download PDF

Info

Publication number
CN104183555A
CN104183555A CN201310213682.XA CN201310213682A CN104183555A CN 104183555 A CN104183555 A CN 104183555A CN 201310213682 A CN201310213682 A CN 201310213682A CN 104183555 A CN104183555 A CN 104183555A
Authority
CN
China
Prior art keywords
wiring board
semiconductor package
bearing part
radio frequency
frequency chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201310213682.XA
Other languages
English (en)
Other versions
CN104183555B (zh
Inventor
邱志贤
蔡宗贤
杨超雅
陈嘉扬
郑志铭
朱育德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siliconware Precision Industries Co Ltd
Original Assignee
Siliconware Precision Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siliconware Precision Industries Co Ltd filed Critical Siliconware Precision Industries Co Ltd
Publication of CN104183555A publication Critical patent/CN104183555A/zh
Application granted granted Critical
Publication of CN104183555B publication Critical patent/CN104183555B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/433Auxiliary members in containers characterised by their shape, e.g. pistons
    • H01L23/4334Auxiliary members in encapsulations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0657Stacked arrangements of devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04042Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/2612Auxiliary members for layer connectors, e.g. spacers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001Core members of the layer connector
    • H01L2224/29099Material
    • H01L2224/2919Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/3201Structure
    • H01L2224/32012Structure relative to the bonding area, e.g. bond pad
    • H01L2224/32014Structure relative to the bonding area, e.g. bond pad the layer connector being smaller than the bonding area, e.g. bond pad
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32135Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/32145Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/48145Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • H01L2224/83191Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/85909Post-treatment of the connector or wire bonding area
    • H01L2224/8592Applying permanent coating, e.g. protective coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92Specific sequence of method steps
    • H01L2224/922Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
    • H01L2224/9222Sequential connecting processes
    • H01L2224/92242Sequential connecting processes the first connecting process involving a layer connector
    • H01L2224/92247Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/0651Wire or wire-like electrical connections from device to substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503Stacked arrangements of devices
    • H01L2225/06575Auxiliary carrier between devices, the carrier having no electrical connection structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/552Protection against radiation, e.g. light or electromagnetic waves
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64Impedance arrangements
    • H01L23/66High-frequency adaptations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901Structure
    • H01L2924/1904Component type
    • H01L2924/19041Component type being a capacitor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901Structure
    • H01L2924/1904Component type
    • H01L2924/19042Component type being an inductor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901Structure
    • H01L2924/1904Component type
    • H01L2924/19043Component type being a resistor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191Disposition
    • H01L2924/19101Disposition of discrete passive components
    • H01L2924/19102Disposition of discrete passive components in a stacked assembly with the semiconductor or solid state device
    • H01L2924/19103Disposition of discrete passive components in a stacked assembly with the semiconductor or solid state device interposed between the semiconductor or solid-state device and the die mounting substrate, i.e. chip-on-passive
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191Disposition
    • H01L2924/19101Disposition of discrete passive components
    • H01L2924/19102Disposition of discrete passive components in a stacked assembly with the semiconductor or solid state device
    • H01L2924/19104Disposition of discrete passive components in a stacked assembly with the semiconductor or solid state device on the semiconductor or solid-state device, i.e. passive-on-chip
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191Disposition
    • H01L2924/19101Disposition of discrete passive components
    • H01L2924/19105Disposition of discrete passive components in a side-by-side arrangement on a common die mounting substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Wire Bonding (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

一种半导体封装件及其制法,该半导体封装件,包括:线路板、设于该线路板上的承载件、设于该承载件上的射频芯片、电性连接该电极垫与该线路板的多个高位焊线、以及包覆该承载件、高位焊线与射频芯片的绝缘层。藉由架高该射频芯片,以利于在该线路板上置放组件及高频布线,而达到高度整合无线系统级封装模块的目的。

Description

半导体封装件及其制法
技术领域
本发明涉及一种半导体封装件的制法,尤指一种能提升产品可靠度的半导体封装件的制法。
背景技术
由于电子产业的蓬勃发展,大部分的电子产品均不断朝小型化、轻量化和高速化的目标迈进,其中更有不少电子产品必须使用射频芯片,例如将射频芯片与数字IC、射频芯片与数字讯号处理器(DigitalSignal Processor,DSP)、或射频芯片与基频芯片(Base Band,BB)等整合在一起,藉以达到小型化或高速化的目标。
现有多芯片封装构造已有许多型态,为达到较小表面接合面积,一般以堆栈方式将多个芯片相互堆栈于一基板上,当采用打线接合的方式电性连接该些芯片与该基板时,将该些芯片的主动面朝上堆栈,以利多个焊线的连接,例如,将一虚芯片(dummy die)设于两相邻芯片之间,或者,以一胶状粘着剂(paste adhesive)或胶膜间隔两相邻的芯片,以提供该些焊线足够的线弧高度。
图1为现有半导体封装件1的剖面示意图。如图1所示,该半导体封装件1包含一线路板10、设于该线路板10上的一射频芯片12、设于该射频芯片12上的一虚芯片11、设于该虚芯片11上的一半导体芯片14、电性连接该半导体芯片14与该线路板10的多个第一焊线140、电性连接该射频芯片12与该线路板10的多个第二焊线13及包覆该虚芯片11、半导体芯片14、第一焊线140、射频芯片12及第二焊线13的封装胶体16,其中,该虚芯片11可提供一间距,以使该第二焊线13具有足够的线弧高度。
然而,该射频芯片12的射频电路为敏感区域(尤其当该射频芯片12为高频率芯片或无线射频芯片时),所以会有干扰(interference)、热量(thermal)等因素影响效能,因而限制布线的灵活度与组件的摆放空间,致使无法实现高整合的无线(wireless)系统级(System inPackage,SiP)封装模块。
此外,该射频芯片12与该半导体芯片14的堆栈会使两者间讯号互相干扰而产生噪声,尤其当该射频芯片12为高频率芯片或无线射频芯片时,对于该半导体芯片14的干扰程度更为严重。
因此,如何克服上述现有技术的问题,实已成目前亟欲解决的课题。
发明内容
鉴于上述现有技术的种种缺失,本发明的主要目的为提供一种半导体封装件及其制法,以达到高度整合无线系统级封装模块的目的。
本发明的半导体封装件,包括:一线路板;承载件,其设于该线路板上;射频芯片,其设于该承载件上,该射频芯片具有相对的主动面与非主动面,该主动面上具有多个电极垫,且该非主动面结合至该承载件上;多个高位焊线,其电性连接该电极垫与该线路板;以及绝缘层,其设于该线路板上,以包覆该承载件、高位焊线与射频芯片。
本发明还提供一种半导体封装件的制法,包括:提供一线路板,该线路板上具有承载件;设置射频芯片于该承载件上,该射频芯片具有相对的主动面与非主动面,该主动面上具有多个电极垫,且该非主动面结合至该承载件上;形成多个高位焊线于该电极垫上,以令该些高位焊线电性连接该电极垫与该线路板;以及形成绝缘层于该线路板上,以包覆该承载件、高位焊线与射频芯片。
前述的半导体封装件及其制法中,该承载件为功能性芯片、虚芯片、散热片或绝缘体。
前述的半导体封装件及其制法中,该射频芯片的宽度大于该承载件的宽度,以于该射频芯片与该线路板之间形成容置空间。此外还包括至少一半导体组件,其设于该线路板上,例如,位于该容置空间中或位于该承载件的周围。
前述的半导体封装件及其制法中,该射频芯片藉由结合层固定于该承载件上。
另外,前述的半导体封装件及其制法中,还包括形成多个低位焊线于该承载件上,以令该低位焊线连接该承载件与该线路板,且该射频芯片藉由结合层固定于该承载件上,且该结合层包覆该低位焊线的部分线段。例如,该低位焊线电性连接该承载件与该线路板;或者,接地层形成于该射频芯片的非主动面上,且该低位焊线接触该接地层,使该承载件接地至该线路板。
由上可知,本发明的半导体封装件及其制法,其藉由将该射频芯片间隔设于该线路板上,以利于在该线路板与该射频芯片之间产生空间,以供置放组件或高频布线,而达到高度整合无线系统级封装模块的目的。
附图说明
图1为现有半导体封装件的剖视示意图;以及
图2A至图2D为本发明的半导体封装件的制法的剖视示意图;其中,图2C’为图2C的其中一种实施例,图2D’及图2D”为图2D的其它实施例。
符号说明
1,2,2’,2” 半导体封装件
10,20       线路板
11          虚芯片
12,22       射频芯片
13          第二焊线
14          半导体芯片
140         第一焊线
16          封装胶体
200         粘着层
201,201’   第一焊垫
202         第二焊垫
21          承载件
210,210’   低位焊线
23          高位焊线
22a         主动面
22b         非主动面
220         电极垫
24          半导体组件
25          结合层
26          绝缘层
27          接地层
S           容置空间
W,d         宽度。
具体实施方式
以下藉由特定的具体实施例说明本发明的实施方式,熟悉此技艺的人士可由本说明书所揭示的内容轻易地了解本发明的其它优点及功效。
须知,本说明书所附图式所绘示的结构、比例、大小等,均仅用以配合说明书所揭示的内容,以供熟悉此技艺的人士的了解与阅读,并非用以限定本发明可实施的限定条件,所以不具技术上的实质意义,任何结构的修饰、比例关系的改变或大小的调整,在不影响本发明所能产生的功效及所能达成的目的下,均应仍落在本发明所揭示的技术内容得能涵盖的范围内。同时,本说明书中所引用的如“上”、“第一”、“第二”、“高位”、“低位”及“一”等的用语,也仅为便于叙述的明了,而非用以限定本发明可实施的范围,其相对关系的改变或调整,在无实质变更技术内容下,当也视为本发明可实施的范畴。
图2A至图2D为本发明的半导体封装件2的制法的剖面示意图。
如图2A所示,提供一线路板20,该线路板20上具有一承载件21,且设置多个半导体组件24于该线路板20上。
于本实施例中,该线路板20具有第一焊垫201与第二焊垫202,且藉由粘着层200固定该承载件21。
此外,该承载件21为功能性芯片、虚芯片(dummy die)、散热片或绝缘体。
又,该些半导体组件24为电阻、电容或电感等,其位于该承载件21的周围。
如图2B所示,形成多个低位焊线210于该承载件21上,以令该低位焊线210电性连接该承载件21与该线路板20的第一焊垫201。
如图2C所示,设置一射频芯片22于该承载件21上,该射频芯片22具有相对的主动面22a与非主动面22b,该主动面22a上具有多个电极垫220,且该非主动面22b结合至该承载件21上。
接着,形成多个高位焊线23于该电极垫220上,以令该些高位焊线23电性连接该电极垫220与该线路板20的第二焊垫202。
于本实施例中,该射频芯片22为高频率芯片或无线射频芯片,且该射频芯片22的宽度W大于该承载件21的宽度d,以于该射频芯片22与该线路板20之间形成一容置空间S,且该半导体组件24位于该容置空间S中,该容置空间S的高度至少0.2㎜。
此外,该射频芯片22藉由一结合层25固定于该承载件21上,且利用胶膜包线(Film over Wire,FOW)技术,使该结合层25包覆该低位焊线210的部分线段,以达轻薄短小的目的,且可避免该低位焊线210跨越及触碰至该射频芯片22而发生短路的问题,且可降低打线作业的困难度。
又,如图2C’所示,本实施例先形成该结合层25于该射频芯片22的非主动面22b上,再将该射频芯片22以该结合层25结合至该承载件21上;于其它实施例中,亦可先形成该结合层25于该承载件21上,再将该射频芯片22以其非主动面22b结合至该结合层25上。
如图2D所示,形成一绝缘层26于该线路板20上,以包覆该承载件21、射频芯片22、低位焊线210及高位焊线23。
于本实施例中,该绝缘层26为模压制程用的封装胶体,但于其它实施例中,该绝缘层26也可为例如压合制程用的薄膜或印刷制程用的胶材等,所以该绝缘层26的材质或形成方式并无特别限制。
本发明将该射频芯片22架高至一适当高度,以形成一容置空间S,供置放组件(如半导体组件24)及高频布线(如线路板20上的线路),所以能提升布线的灵活度与组件的摆放空间,而达到高度整合无线(wireless)系统级(System in Package,SiP)封装模块的目的。
此外,利用架高该射频芯片22,能避免该射频芯片22与半导体组件24(或线路板20的线路)发生干扰。
又,如图2D’所示,也可于该射频芯片22的非主动面22b上形成一接地层27,且该低位焊线210’接触该接地层27,使该承载件21藉由该低位焊线210’仅接地至该线路板20的第一焊垫201’,所以该承载件21无电性功能。
另外,如图2D”所示,该承载件21也可藉由部分该低位焊线210’接地至该线路板20的第一焊垫201’,且藉由部分该低位焊线210电性连接该线路板20的第一焊垫201,所以该承载件21具电性功能。
本发明提供一种半导体封装件2,2’,2”,包括:一线路板20、设于该线路板20上的一承载件21、设于该承载件21上的一射频芯片22、电性连接该电极垫220与该线路板20的多个高位焊线23、以及设于该线路板20上的一绝缘层26。
所述的承载件21为功能性芯片、虚芯片、散热片或绝缘体。
所述的射频芯片22具有相对的主动面22a与非主动面22b,该主动面22a上具有多个电极垫220,且该非主动面22b结合至该承载件21上。
所述的绝缘层26包覆该承载件21、高位焊线23与射频芯片22。
于一实施例中,该射频芯片22的宽度W大于该承载件21的宽度d,以于该射频芯片22与该线路板20之间形成一容置空间S。还包括设于该线路板20上的至少一半导体组件24,其位于该承载件21的周围或位于该容置空间S中。
于一实施例中,该射频芯片22藉由一结合层25固定于该承载件21上,且藉由多个低位焊线210电性连接该承载件21与该线路板20,令该结合层25包覆该低位焊线210的部分线段。
于一实施例中,该射频芯片22的非主动面22b上具有一接地层27,且多个低位焊线210’接触该接地层27,使该承载件21仅接地至该线路板20。或者,该承载件21藉由部分该低位焊线210’接地至该线路板20,且藉由部分该低位焊线210电性连接该线路板20。
综上所述,本发明的半导体封装件及其制法中,藉由架高该射频芯片,以利于在该线路板上置放组件及高频布线,而达到高度整合无线系统级封装模块的目的。
上述实施例仅用以例示性说明本发明的原理及其功效,而非用于限制本发明。任何熟习此项技艺的人士均可在不违背本发明的精神及范畴下,对上述实施例进行修改。因此本发明的权利保护范围,应如权利要求书所列。

Claims (24)

1.一种半导体封装件,其包括:
一线路板;
承载件,其设于该线路板上;
射频芯片,其设于该承载件上,该射频芯片具有相对的主动面与非主动面,该主动面上具有多个电极垫,且该非主动面结合至该承载件上;
多个高位焊线,其电性连接该电极垫与该线路板;以及
绝缘层,其形成于该线路板上,以包覆该承载件、高位焊线与射频芯片。
2.根据权利要求1所述的半导体封装件,其特征在于,该承载件为功能性芯片、虚芯片、散热片或绝缘体。
3.根据权利要求1所述的半导体封装件,其特征在于,该射频芯片的宽度大于该承载件的宽度,以于该射频芯片与该线路板之间形成容置空间。
4.根据权利要求3所述的半导体封装件,其特征在于,该半导体分装件还包括至少一半导体组件,其设于该线路板上并位于该容置空间中。
5.根据权利要求1所述的半导体封装件,其特征在于,该半导体封装件还包括至少一设于该线路板上的半导体组件。
6.根据权利要求5所述的半导体封装件,其特征在于,该半导体组件位于该承载件的周围。
7.根据权利要求1所述的半导体封装件,其特征在于,该射频芯片藉由结合层固定于该承载件上。
8.根据权利要求1所述的半导体封装件,其特征在于,该半导体封装件还包括多个低位焊线,其连接该承载件与该线路板,且该射频芯片藉由结合层固定于该承载件上。
9.根据权利要求8所述的半导体封装件,其特征在于,该低位焊线电性连接该承载件与该线路板。
10.根据权利要求9所述的半导体封装件,其特征在于,该结合层包覆该低位焊线的部分线段。
11.根据权利要求8或10所述的半导体封装件,其特征在于,该射频芯片的非主动面上具有接地层,且该低位焊线接触该接地层,使该承载件接地至该线路板。
12.根据权利要求11所述的半导体封装件,其特征在于,该承载件藉由部分该低位焊线接地至该线路板,且藉由部分该低位焊线电性连接该线路板。
13.一种半导体封装件的制法,其包括:
提供一线路板,该线路板上具有承载件;
设置射频芯片于该承载件上,其中,该射频芯片具有相对的主动面与非主动面,该主动面上具有多个电极垫,且该非主动面结合至该承载件上;
形成多个高位焊线于该电极垫上,以令该些高位焊线电性连接该电极垫与该线路板;以及
形成绝缘层于该线路板上,以包覆该承载件、高位焊线与射频芯片。
14.根据权利要求13所述的半导体封装件的制法,其特征在于,该承载件为功能性芯片、虚芯片、散热片或绝缘体。
15.根据权利要求13所述的半导体封装件的制法,其特征在于,该射频芯片的宽度大于该承载件的宽度,以于该射频芯片与该线路板之间形成容置空间。
16.根据权利要求15所述的半导体封装件的制法,其特征在于,该制法还包括设置至少一半导体组件于该线路板上,且令该半导体组件位于该容置空间中。
17.根据权利要求13所述的半导体封装件的制法,其特征在于,该制法还包括设置至少一半导体组件于该线路板上。
18.根据权利要求17所述的半导体封装件的制法,其特征在于,该半导体组件位于该承载件的周围。
19.根据权利要求13所述的半导体封装件的制法,其特征在于,该射频芯片藉由结合层固定于该承载件上。
20.根据权利要求13所述的半导体封装件的制法,其特征在于,该制法还包括形成多个低位焊线于该承载件上,以令该低位焊线连接该承载件与该线路板,且该射频芯片藉由结合层固定于该承载件上。
21.根据权利要求20所述的半导体封装件的制法,其特征在于,该低位焊线电性连接该承载件与该线路板。
22.根据权利要求21所述的半导体封装件的制法,其特征在于,该结合层包覆该低位焊线的部分线段。
23.根据权利要求20所述的半导体封装件的制法,其特征在于,该射频芯片的非主动面上形成有接地层,供该低位焊线接触该接地层,以使该承载件接地至该线路板。
24.根据权利要求23所述的半导体封装件的制法,其特征在于,该承载件藉由部分该低位焊线接地至该线路板,且藉由部分该低位焊线电性连接该线路板。
CN201310213682.XA 2013-05-28 2013-05-31 半导体封装件及其制法 Active CN104183555B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW102118734A TWI468088B (zh) 2013-05-28 2013-05-28 半導體封裝件及其製法
TW102118734 2013-05-28

Publications (2)

Publication Number Publication Date
CN104183555A true CN104183555A (zh) 2014-12-03
CN104183555B CN104183555B (zh) 2018-09-07

Family

ID=51964497

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310213682.XA Active CN104183555B (zh) 2013-05-28 2013-05-31 半导体封装件及其制法

Country Status (3)

Country Link
US (1) US9502377B2 (zh)
CN (1) CN104183555B (zh)
TW (1) TWI468088B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105552065A (zh) * 2016-02-01 2016-05-04 中国电子科技集团公司第三十八研究所 一种t/r组件控制模块的系统级封装结构及其封装方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105895587A (zh) * 2015-01-09 2016-08-24 特科芯有限公司 Daf与低粗糙度硅片结合性来克服基板与芯片分层方法
JPWO2022034854A1 (zh) * 2020-08-11 2022-02-17
TWI827019B (zh) * 2022-04-25 2023-12-21 矽品精密工業股份有限公司 電子封裝件及其製法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1270417A (zh) * 1999-04-14 2000-10-18 夏普公司 半导体器件及其制造方法
CN1476098A (zh) * 2002-06-19 2004-02-18 ���ǵ�����ʽ���� 图像拾取设备及其制造方法
CN2641822Y (zh) * 2003-06-20 2004-09-15 胜开科技股份有限公司 积体电路封装组件
CN1674280A (zh) * 2004-03-18 2005-09-28 株式会社东芝 叠层式电子部件
CN1779972A (zh) * 2004-11-19 2006-05-31 矽品精密工业股份有限公司 包覆有倒装芯片封装件的半导体装置及其制法
CN101171683A (zh) * 2005-05-04 2008-04-30 斯班逊有限公司 多芯片模块及制造方法
CN101388381A (zh) * 2007-09-14 2009-03-18 南茂科技股份有限公司 具有金属间隔物的多芯片堆叠结构

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6005778A (en) * 1995-06-15 1999-12-21 Honeywell Inc. Chip stacking and capacitor mounting arrangement including spacers
KR20030018204A (ko) * 2001-08-27 2003-03-06 삼성전자주식회사 스페이서를 갖는 멀티 칩 패키지
US6853064B2 (en) * 2003-05-12 2005-02-08 Micron Technology, Inc. Semiconductor component having stacked, encapsulated dice
KR100594229B1 (ko) * 2003-09-19 2006-07-03 삼성전자주식회사 반도체 패키지 및 그 제조방법
US7064430B2 (en) * 2004-08-31 2006-06-20 Stats Chippac Ltd. Stacked die packaging and fabrication method
US7598606B2 (en) * 2005-02-22 2009-10-06 Stats Chippac Ltd. Integrated circuit package system with die and package combination
KR100665217B1 (ko) * 2005-07-05 2007-01-09 삼성전기주식회사 반도체 멀티칩 패키지
US8698294B2 (en) * 2006-01-24 2014-04-15 Stats Chippac Ltd. Integrated circuit package system including wide flange leadframe
US8120156B2 (en) * 2006-02-17 2012-02-21 Stats Chippac Ltd. Integrated circuit package system with die on base package
US7675180B1 (en) * 2006-02-17 2010-03-09 Amkor Technology, Inc. Stacked electronic component package having film-on-wire spacer
US7838971B2 (en) * 2006-07-11 2010-11-23 Atmel Corporation Method to provide substrate-ground coupling for semiconductor integrated circuit dice constructed from SOI and related materials in stacked-die packages
US20080093723A1 (en) * 2006-10-19 2008-04-24 Myers Todd B Passive placement in wire-bonded microelectronics
TW200824067A (en) * 2006-11-29 2008-06-01 Advanced Semiconductor Eng Stacked chip package structure and fabricating method thereof
TW200919674A (en) * 2007-10-23 2009-05-01 Powertech Technology Inc Chip stack structure

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1270417A (zh) * 1999-04-14 2000-10-18 夏普公司 半导体器件及其制造方法
CN1476098A (zh) * 2002-06-19 2004-02-18 ���ǵ�����ʽ���� 图像拾取设备及其制造方法
CN2641822Y (zh) * 2003-06-20 2004-09-15 胜开科技股份有限公司 积体电路封装组件
CN1674280A (zh) * 2004-03-18 2005-09-28 株式会社东芝 叠层式电子部件
CN1779972A (zh) * 2004-11-19 2006-05-31 矽品精密工业股份有限公司 包覆有倒装芯片封装件的半导体装置及其制法
CN101171683A (zh) * 2005-05-04 2008-04-30 斯班逊有限公司 多芯片模块及制造方法
CN101388381A (zh) * 2007-09-14 2009-03-18 南茂科技股份有限公司 具有金属间隔物的多芯片堆叠结构

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105552065A (zh) * 2016-02-01 2016-05-04 中国电子科技集团公司第三十八研究所 一种t/r组件控制模块的系统级封装结构及其封装方法

Also Published As

Publication number Publication date
US9502377B2 (en) 2016-11-22
TW201446089A (zh) 2014-12-01
TWI468088B (zh) 2015-01-01
CN104183555B (zh) 2018-09-07
US20140353850A1 (en) 2014-12-04

Similar Documents

Publication Publication Date Title
US10037938B2 (en) Semiconductor packages
TWI481001B (zh) 晶片封裝結構及其製造方法
CN101359659A (zh) 半导体封装及制造方法、半导体模块和包括该模块的装置
CN106409780A (zh) 电子封装件及其制法
CN102709260A (zh) 半导体封装构造
TWI589059B (zh) 電子封裝件
CN101789420A (zh) 一种半导体器件的系统级封装结构及其制造方法
CN104183555A (zh) 半导体封装件及其制法
CN103035627A (zh) 堆栈式半导体封装结构
CN101315923B (zh) 芯片堆栈封装结构
KR101219484B1 (ko) 반도체 칩 모듈 및 이를 갖는 반도체 패키지 및 패키지 모듈
CN103943620A (zh) 半导体封装件及其制法
CN203774293U (zh) 一种集成电路的3d封装结构
US8981549B2 (en) Multi chip package
KR102571267B1 (ko) 부분 중첩 반도체 다이 스택 패키지
KR20140148273A (ko) 반도체 패키지 및 그 제조 방법
CN104051450B (zh) 半导体封装
US8441129B2 (en) Semiconductor device
TWI453873B (zh) 堆疊式半導體封裝結構
CN104103605A (zh) 半导体封装件及其制法
CN202423278U (zh) 半导体芯片堆叠构造
CN105742276A (zh) 一种采用三维集成封装的t/r组件的电源调制模块及其封装方法
CN104064530A (zh) 半导体封装件及其制法
CN212182316U (zh) 一种无载体的半导体叠层封装结构
CN201541392U (zh) 电路板

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant