CN104136368B - 用于石墨烯形成的方法和系统 - Google Patents

用于石墨烯形成的方法和系统 Download PDF

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CN104136368B
CN104136368B CN201380010837.8A CN201380010837A CN104136368B CN 104136368 B CN104136368 B CN 104136368B CN 201380010837 A CN201380010837 A CN 201380010837A CN 104136368 B CN104136368 B CN 104136368B
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substrate
graphene
carbon source
room temperature
plasma cleaning
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CN104136368A (zh
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大卫·A·博伊德
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California Institute of Technology
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California Institute of Technology
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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CN201380010837.8A 2012-02-24 2013-02-22 用于石墨烯形成的方法和系统 Active CN104136368B (zh)

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US201261603104P 2012-02-24 2012-02-24
US61/603,104 2012-02-24
US201261607337P 2012-03-06 2012-03-06
US61/607,337 2012-03-06
US201261677323P 2012-07-30 2012-07-30
US61/677,323 2012-07-30
PCT/US2013/027284 WO2013126671A1 (en) 2012-02-24 2013-02-22 Method and system for graphene formation

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CN104576457A (zh) * 2014-12-26 2015-04-29 常州二维碳素科技有限公司 一种对石墨烯制件进行表面处理的设备及其处理方法
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