CN104048625A - Automatic contact instrument used for measuring thin sheet material dimensions - Google Patents
Automatic contact instrument used for measuring thin sheet material dimensions Download PDFInfo
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- CN104048625A CN104048625A CN201310078472.4A CN201310078472A CN104048625A CN 104048625 A CN104048625 A CN 104048625A CN 201310078472 A CN201310078472 A CN 201310078472A CN 104048625 A CN104048625 A CN 104048625A
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- guide rail
- core
- axis
- light sheet
- measuring instrument
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Abstract
The invention provides an automatic contact instrument used for measuring thin sheet material dimensions. The automatic contact instrument comprises a measuring head, a control system comprising a numerical control and calculation module, and a shaft system moving along a three-dimensional coordinate, wherein the measuring head comprises a guide rail die and a guide core, the guide core penetrates through the guide rail die, the guide rail die has an air inlet and an air guide groove, an air guide rail is formed in the guide rail die, a top portion of the guide rail is provided with the air inlet, a bottom portion of the guide rail is connected with a spring, the spring is arranged between the guide core and a bottom board, a lower end of the spring is connected with a probe, a top portion of the guide core is connected with a raster ruler, the raster ruler is connected with a laser displacement sensor, and the laser displacement sensor is connected with the control system. The measuring head of the measuring instrument employs the pneumatic control technology, precise adjustment on a measuring force can be realized through changing internal and external air pressure of the guide core, a value of the measuring force can be not only adjusted, but also the measuring force is guaranteed to be constant; a three-dimensional motion platform is employed in combination with the numerical control technology, all-round and automatic measurement is realized, and thereby measurement precision of surface dimensions of thin sheet material type elements can be improved.
Description
Technical field
The present invention relates to precision measurement equipment technical field, particularly a kind of contact light sheet size automatic measuring instrument.
Background technology
In P.e.c. and semicon industry; often can use a large amount of light sheet class components; for example thickness, between the board substrate between 0.05mm to 1mm, is normally usingd stainless steel, nickel alloy etc. as starting material, through techniques such as electroforming, plating, polishing, etchings, makes.In these industries, higher for the surface size feature request of circuit base material, no matter starting material, semi-manufacture or finished product, all need by professional equipment, the flatness equidimension precision index of substrate surface strictly to be checked.
In correlation technique, normally adopt optical device to measure, by reading light reflection displacement, calculate, then combining image treatment technology reflects the configuration of surface feature of measured workpiece.Yet there is following defect in correlation technique: on the one hand, light sheet class component has the jagged micromechanism of class, and this structure can cause a deviation to laser beam reflection angle, thereby cause measuring accuracy to decline; On the other hand, restricted by the development level of machine vision and image processing techniques, this kind equipment still has larger limitation in measuring accuracy.Therefore, correlation technique is difficult to meet the measurement requirement to light sheet class component surface size feature in above-mentioned industry.
Summary of the invention
The existing optical device of above-mentioned defect and problem for to(for) the measuring accuracy deficiency of the configuration of surface feature of light sheet class component, the object of this invention is to provide a kind of measuring accuracy contact light sheet size automatic measuring higher, that ergometry is controlled instrument.
For achieving the above object, the invention provides following technical scheme: a kind of contact light sheet size automatic measuring instrument, it is characterized in that, comprising:
Control system, it comprises numerical control module, computing module, display module;
Axle system, it comprises the Y-axis that is fixed on surface level, along surface level, is vertically mounted in Y-axis and the X-axis of moving along Y-axis, the Z axis to be arranged in X-axis and to move along X-axis perpendicular to surface level direction, and described axle system is connected with the numerical control module in control system;
Gauge head, it is arranged on Z axis and along Z axis and moves, comprise guide rail mould, lead core, the described core of leading is through guide rail mould, described guide rail mould contains guide rail mould air intake opening, its inside surface is provided with air slot, after inflation, can and lead at guide rail mould inside surface and between core outer surface, form air guide rail, the described core inner of leading is hollow, its top is provided with for leading core air intake opening to inner inflatable, its bottom is also connected with spring, described spring is arranged on leads between core and the base plate of gauge head bottom, its lower end is connected with the probe that is passed down through base plate, the described core top of leading is also connected with grating scale, its connection parallel with laser displacement sensor, described laser displacement sensor is connected with the computing module in control system.
As above-mentioned technology preferably, described Y-axis has two, it is installed in parallel on surface level.
As technique scheme preferably, described gauge head adopts vertical vertical installation.
As technique scheme preferably, described in lead core can only be inner along moving perpendicular to surface level direction at guide rail mould.
As technique scheme preferably, the cross sectional shape of described air slot is U font.
As technique scheme preferably, described numerical control module, computing module are arranged in computing machine, described display module comprises display.
The present invention also provides a kind of using method of contact light sheet size automatic measuring instrument, it is characterized in that, contains following steps:
Q1: to air slot fill gas body, at guide rail mould and lead between core and form air film layer, make to lead core in friction free suspended state by guide rail mould air intake opening;
Q2: by leading in core air intake opening guide core, be filled with gas, adjust air pressure inside, make to lead core and probe on perpendicular to surface level direction in mechanical balance state;
Q3: control gauge head and move down along Z axis, make tips of probes and measured workpiece Surface Contact, trace increases leads core inner pressure, make to act on downward acting force on probe and be slightly larger than acting force upwards, to guarantee that tips of probes is with enough but be unlikely to ergometry and the measured workpiece continuous contact of scratch surface;
Q4: the laser displacement sensor in gauge head records the now height value at place of Z axis;
Q5: axle system resets, by the kinematic parameter of numerical control module setting shaft system, starts to measure;
Q6:X axle, Y-axis drive gauge head to measure in surface of the work continuous sweep according to preset path, laser displacement sensor constantly reads altitude information and transfers to computing module, finally obtains by the measurement point on surface of the work with data system that coordinate figure, height value were formed.
As above-mentioned using method preferably, also contain following steps:
Q7: integrated 3D digital display program module in control system, is converted to resulting data system the concrete image of measured workpiece configuration of surface.
Contact light sheet size automatic measuring instrument provided by the invention, in gauge head, adopted Pneumatic Control Technology, by change, lead the inside and outside air pressure of core and realized the fine adjustment to ergometry, both can adjust ergometry size for material behavior, and can when surface elevation changes, guarantee that again ergometry was constant; On the other hand, utilize again three-dimensional motion platform combining with digital control technology, realized comprehensive, the automatic measurement of measured object surface profile.Therefore, this measuring instrument can improve the measuring accuracy for light sheet class component surface size feature.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of the gauge head in the contact light sheet size automatic measuring instrument of the embodiment of the present invention.
Fig. 2 is the structural representation of leading core and guide rail mould in the contact light sheet size automatic measuring instrument of the embodiment of the present invention.
Fig. 3 is the structural representation of the contact light sheet size automatic measuring instrument of the embodiment of the present invention.
Fig. 4 is the structural representation of the axle system in the contact light sheet size automatic measuring instrument of the embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing of the present invention, technical scheme of the present invention is carried out to clear, complete description, obviously, described embodiment is only a part of embodiment of the present invention, rather than whole embodiment.Embodiment based in the present invention, those of ordinary skills, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
As shown in Figure 1, a kind of contact light sheet size automatic measuring instrument that the embodiment of the present invention provides, comprise gauge head 1, it comprises guide rail mould 11, lead core 12, the described core 12 of leading is through guide rail mould 11, described guide rail mould 11 contains guide rail mould air intake opening, its inside surface is provided with air slot, after inflation, can and lead between core 12 outside surfaces at guide rail mould 11 inside surfaces and form air guide rail, the described core 12 of leading is inner for hollow, its top is provided with for leading core air intake opening to inner inflatable, its bottom is also connected with spring 13, described spring 13 is arranged on leads between core 12 and the base plate 14 of gauge head 1 bottom, its lower end is connected with the probe 15 that is passed down through base plate 14, described core 12 tops of leading are also connected with grating scale 16, itself and the parallel connection of laser displacement sensor 17, described laser displacement sensor 17 is connected with the computing module in control system.
As shown in Figure 2, described guide rail mould air intake opening 18 is positioned at the side of guide rail mould 11, described in lead core air intake opening 19 and be positioned at the top of leading core 12.
As shown in Figure 3, a kind of contact light sheet size automatic measuring instrument that the embodiment of the present invention provides, also comprises control system 2, axle system 3, and described control system 2 comprises numerical control module 21, computing module 22, display module 23; Described axle system 3 is connected with the numerical control module 21 in control system 2; Described gauge head 1 is connected with the computing module 22 in control system 2.
As shown in Figure 4, described axle system 3 comprises the Y-axis 31 that is fixed on surface level, along surface level, is vertically mounted in Y-axis 31 and the X-axis 32 of moving along Y-axis 31, the Z axis 33 to be arranged in X-axis 32 and to move along X-axis 32 perpendicular to surface level direction; Described gauge head 1 is arranged on Z axis 33, and it moves along Z axis 33.
As shown in Figure 3, described numerical control module 21, computing module 22 are arranged in computing machine 24, and described display module 23 comprises display.
As shown in Figure 4, described Y-axis 31 has two, and it is installed in parallel on surface level.Described gauge head 1 adopts vertical vertical installation.The cross sectional shape of the air slot of described guide rail mould 11 is U font.The described core 12 of leading can only be inner along moving perpendicular to surface level direction at guide rail mould 11.
The embodiment of the present invention also provides relevant using method, contains following steps: by guide rail mould air intake opening, to air slot fill gas body, at guide rail mould and lead between core and form air film layer, make to lead core in friction free suspended state; By leading in core air intake opening guide core, be filled with gas, adjust air pressure inside, make to lead core and probe on perpendicular to surface level direction in mechanical balance state; Controlling gauge head moves down along Z axis, make tips of probes and measured workpiece Surface Contact, trace increases leads core inner pressure, make to act on downward acting force on probe and be slightly larger than acting force upwards, to guarantee that tips of probes is with enough but be unlikely to ergometry and the measured workpiece continuous contact of scratch surface; Laser displacement sensor in gauge head records the now height value at place of Z axis; Axle system resets, and by the kinematic parameter of numerical control module setting shaft system, starts to measure; X-axis, Y-axis drive gauge head to measure in surface of the work continuous sweep according to preset path, laser displacement sensor constantly reads altitude information and transfers to computing module, finally obtains by the measurement point on surface of the work with data system that coordinate figure, height value were formed.
As above-mentioned using method preferably, also contain following steps: integrated 3D digital display program module in control system, is converted to resulting data system the concrete image of measured workpiece configuration of surface.
Contact light sheet size automatic measuring instrument provided by the present invention, unavoidable technical matters while having solved use optical device measurement light sheet class component size, comprise the measured deviation causing due to material list Noodles zigzag microscopic pattern, and machine vision and the restriction of image processing techniques to measuring accuracy, etc.This measuring instrument not only can improve the measuring accuracy of light sheet class component surface size feature, and can improve automaticity and the work efficiency of measuring process.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited to this, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; can expect easily changing or replacing, within all should being encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (8)
1. a contact light sheet size automatic measuring instrument, is characterized in that, comprising:
Control system, it comprises numerical control module, computing module, display module;
Axle system, it comprises the Y-axis that is fixed on surface level, along surface level, is vertically mounted in Y-axis and the X-axis of moving along Y-axis, the Z axis to be arranged in X-axis and to move along X-axis perpendicular to surface level direction, and described axle system is connected with the numerical control module in control system;
Gauge head, it is arranged on Z axis and along Z axis and moves, comprise guide rail mould, lead core, the described core of leading is through guide rail mould, described guide rail mould contains guide rail mould air intake opening, its inside surface is provided with air slot, after inflation, can and lead at guide rail mould inside surface and between core outer surface, form air guide rail, the described core inner of leading is hollow, its top is provided with for leading core air intake opening to inner inflatable, its bottom is also connected with spring, described spring is arranged on leads between core and the base plate of gauge head bottom, its lower end is connected with the probe that is passed down through base plate, the described core top of leading is also connected with grating scale, its connection parallel with laser displacement sensor, described laser displacement sensor is connected with the computing module in control system.
2. a kind of contact light sheet size automatic measuring instrument according to claim 1, is characterized in that, described Y-axis has two, and it is installed in parallel on surface level.
3. a kind of contact light sheet size automatic measuring instrument according to claim 1, is characterized in that, described gauge head adopts vertical vertical installation.
4. a kind of contact light sheet size automatic measuring instrument according to claim 1, is characterized in that, described in lead core can only be inner along moving perpendicular to surface level direction at guide rail mould.
5. a kind of contact light sheet size automatic measuring instrument according to claim 1, is characterized in that, the cross sectional shape of described air slot is U font.
6. a kind of contact light sheet size automatic measuring instrument according to claim 1, is characterized in that, described numerical control module, computing module are arranged in computing machine, and described display module comprises display.
7. a using method for contact light sheet size automatic measuring instrument, is characterized in that, contains following steps:
Q1: to air slot fill gas body, at guide rail mould and lead between core and form air film layer, make to lead core in friction free suspended state by guide rail mould air intake opening;
Q2: by leading in core air intake opening guide core, be filled with gas, adjust air pressure inside, make to lead core and probe on perpendicular to surface level direction in mechanical balance state;
Q3: control gauge head and move down along Z axis, make tips of probes and measured workpiece Surface Contact, trace increases leads core inner pressure, make to act on downward acting force on probe and be slightly larger than acting force upwards, to guarantee that tips of probes is with enough but be unlikely to ergometry and the measured workpiece continuous contact of scratch surface;
Q4: the laser displacement sensor in gauge head records the now height value at place of Z axis;
Q5: axle system resets, by the kinematic parameter of numerical control module setting shaft system, starts to measure;
Q6:X axle, Y-axis drive gauge head to measure in surface of the work continuous sweep according to preset path, laser displacement sensor constantly reads altitude information and transfers to computing module, finally obtains by the measurement point on surface of the work with data system that coordinate figure, height value were formed.
8. the using method of a kind of contact light sheet size automatic measuring instrument according to claim 7, is characterized in that, also contains following steps:
Q7: integrated 3D digital display program module in control system, is converted to resulting data system the concrete image of measured workpiece configuration of surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310078472.4A CN104048625A (en) | 2013-03-12 | 2013-03-12 | Automatic contact instrument used for measuring thin sheet material dimensions |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310078472.4A CN104048625A (en) | 2013-03-12 | 2013-03-12 | Automatic contact instrument used for measuring thin sheet material dimensions |
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| CN104048625A true CN104048625A (en) | 2014-09-17 |
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| CN201310078472.4A Pending CN104048625A (en) | 2013-03-12 | 2013-03-12 | Automatic contact instrument used for measuring thin sheet material dimensions |
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Cited By (15)
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| CN104713496A (en) * | 2015-02-11 | 2015-06-17 | 四川大学 | Magnetic suspension contact pin type displacement sensor for micro-topography measurement |
| CN105277138A (en) * | 2015-11-02 | 2016-01-27 | 中铁宝桥集团有限公司 | Maglev curve F-type rail curvature two-dimensional measuring device and detection method thereof |
| CN105486250A (en) * | 2016-01-08 | 2016-04-13 | 三峡大学 | Scanning device and method for describing surface form of field large-scale structure surface |
| CN105806301A (en) * | 2014-12-30 | 2016-07-27 | 宁波江丰电子材料股份有限公司 | Surface warpage measurement device and method |
| CN105910553A (en) * | 2016-06-03 | 2016-08-31 | 广东正业科技股份有限公司 | Detector of detection plane and detection method thereof |
| CN106225750A (en) * | 2016-08-31 | 2016-12-14 | 湖北嘉辐达节能科技有限公司 | A kind of glass cotton end product quality on-Line Monitor Device |
| CN106247985A (en) * | 2016-08-31 | 2016-12-21 | 北京燕宏达铁路设备有限公司 | Double track profile measurer |
| CN106643473A (en) * | 2016-12-27 | 2017-05-10 | 河北工业大学 | Automatic flatness detection device and method |
| CN106767419A (en) * | 2017-01-19 | 2017-05-31 | 佛山职业技术学院 | A kind of significantly furring tile method for quick based on optical detection |
| CN108057636A (en) * | 2017-12-14 | 2018-05-22 | 北京铂阳顶荣光伏科技有限公司 | Full-automatic detection substrate size equipment, substrate detection line and its detection method |
| CN108190437A (en) * | 2017-12-22 | 2018-06-22 | 湖北省祥康源塑料制品有限公司 | A kind of conveying device with automatic detection plastic casing appearance qualification degree |
| CN108398112A (en) * | 2018-02-08 | 2018-08-14 | 广州兴森快捷电路科技有限公司 | Circuit board copper plating detecting system and detection method |
| CN110030903A (en) * | 2019-05-31 | 2019-07-19 | 重庆丰川电子科技有限公司 | Keyboard board automatic detection device |
| CN111457820A (en) * | 2020-04-15 | 2020-07-28 | 武汉博联特科技有限公司 | High accuracy height measurement system based on pressure |
| CN111854652A (en) * | 2020-07-24 | 2020-10-30 | 苏州天准科技股份有限公司 | Adsorption plate flatness detection device and detection method thereof |
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| CN105806301A (en) * | 2014-12-30 | 2016-07-27 | 宁波江丰电子材料股份有限公司 | Surface warpage measurement device and method |
| CN104713496A (en) * | 2015-02-11 | 2015-06-17 | 四川大学 | Magnetic suspension contact pin type displacement sensor for micro-topography measurement |
| CN105277138A (en) * | 2015-11-02 | 2016-01-27 | 中铁宝桥集团有限公司 | Maglev curve F-type rail curvature two-dimensional measuring device and detection method thereof |
| CN105486250B (en) * | 2016-01-08 | 2017-11-10 | 三峡大学 | A kind of scanning means and method for describing field large scale structure face configuration of surface |
| CN105486250A (en) * | 2016-01-08 | 2016-04-13 | 三峡大学 | Scanning device and method for describing surface form of field large-scale structure surface |
| CN105910553A (en) * | 2016-06-03 | 2016-08-31 | 广东正业科技股份有限公司 | Detector of detection plane and detection method thereof |
| CN106225750A (en) * | 2016-08-31 | 2016-12-14 | 湖北嘉辐达节能科技有限公司 | A kind of glass cotton end product quality on-Line Monitor Device |
| CN106247985A (en) * | 2016-08-31 | 2016-12-21 | 北京燕宏达铁路设备有限公司 | Double track profile measurer |
| CN106643473A (en) * | 2016-12-27 | 2017-05-10 | 河北工业大学 | Automatic flatness detection device and method |
| CN106767419A (en) * | 2017-01-19 | 2017-05-31 | 佛山职业技术学院 | A kind of significantly furring tile method for quick based on optical detection |
| CN108057636A (en) * | 2017-12-14 | 2018-05-22 | 北京铂阳顶荣光伏科技有限公司 | Full-automatic detection substrate size equipment, substrate detection line and its detection method |
| WO2019114010A1 (en) * | 2017-12-14 | 2019-06-20 | 北京铂阳顶荣光伏科技有限公司 | Fully automatic substrate size detection apparatus, substrate detection line and detection method thereof |
| CN108190437A (en) * | 2017-12-22 | 2018-06-22 | 湖北省祥康源塑料制品有限公司 | A kind of conveying device with automatic detection plastic casing appearance qualification degree |
| CN108190437B (en) * | 2017-12-22 | 2020-02-07 | 武汉杰锐祥源智能科技有限公司 | Conveying device with automatic detection of plastic box appearance qualification degree |
| CN108398112A (en) * | 2018-02-08 | 2018-08-14 | 广州兴森快捷电路科技有限公司 | Circuit board copper plating detecting system and detection method |
| CN110030903A (en) * | 2019-05-31 | 2019-07-19 | 重庆丰川电子科技有限公司 | Keyboard board automatic detection device |
| CN111457820A (en) * | 2020-04-15 | 2020-07-28 | 武汉博联特科技有限公司 | High accuracy height measurement system based on pressure |
| CN111854652A (en) * | 2020-07-24 | 2020-10-30 | 苏州天准科技股份有限公司 | Adsorption plate flatness detection device and detection method thereof |
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Application publication date: 20140917 |