CN203375940U - A surface high-brightness reflective sheet thickness measuring apparatus - Google Patents
A surface high-brightness reflective sheet thickness measuring apparatus Download PDFInfo
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- CN203375940U CN203375940U CN201320485952.8U CN201320485952U CN203375940U CN 203375940 U CN203375940 U CN 203375940U CN 201320485952 U CN201320485952 U CN 201320485952U CN 203375940 U CN203375940 U CN 203375940U
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Abstract
The utility model provides a surface high-brightness reflective sheet thickness measuring apparatus comprising a steel frame pedestal, a platform, a work piece bearing stand, an X shaft, a cross beam, an upper contact-type measuring head, a Z shaft, a Y shaft, a lower contact-type measuring head and a lower measuring head installation base. The platform is disposed on the steel frame pedestal, the work piece bearing stand is disposed on the platform, the Y shaft is fixed between the work piece bearing stand and the platform, the cross beam is fixed on the platform and is perpendicular to the movement direction of the Y shaft, the X shaft is fixed to the cross beam, the Z shaft and a movable plate thereof are disposed on an upper cross bar of the cross beam, the upper contact-type measuring head is fixed on the Z shaft movable plate, and the lower contact-type measuring had is fixed to a lower cross bar of the cross beam through the lower measuring head installation base. The surface high-brightness reflective sheet thickness measuring apparatus is specially designed for sheet thickness measurement, is characterized by simple structure, convenient operation and high performance-cost ratio, and provides an optimized solution for thickness measurement of high-end products, the material surfaces of which have high-brightness reflective characteristics, in the industries of semiconductor, solar energy and optical glass.
Description
Technical field
The utility model relates to a kind of measurement mechanism, relates in particular to the high anti-light sheet measurer for thickness in a kind of surface.
Background technology
In the industries such as semiconductor, sun power, optical glass, there is the large-tonnage product surface to there is the reflective characteristic of high brightness.As the chip substrates in semicon industry, thickness is generally below 0.3mm, and material is stainless steel substrates, nickel sheet, nickel alloy sheet, electroforming sheet etc.According to the performance requirement difference, need, through operations such as electroforming, plating, polishing, etchings, finally just can be processed into finished product, no matter be starting material, semi-manufacture or finished product, its surface all is highlighted reflective characteristic.And the wafer in the sun power industry, itself by 4 layer materials, formed, the 1st layer be wafer layer, the 2nd layer for bonding agent, the 3rd layer for glass, the 4th layer, be adhesive tape, be made into the wafer finished product by process for pressing between each layer, guarantee the final finished thickness evenness, just need to control thickness evenness, especially wafer layer and the glassy layer after each layer is laminated, surface all has the reflective even transparent characteristic of high brightness.All kinds of eyeglasses in the optical glass industry, except from as transparent material, have the reflective characteristic of high brightness equally.Along with market proposes more and more higher requirement to the sector properties of product, the quality control of the key characters such as the thickness of these basic materials is more and more stricter, to guarantee the Performance And Reliability of final finished.
There is the material of the reflective characteristic of high brightness for these, the conventional thickness measuring equipment generally adopts contactless measurement to be measured, usually send light beam by laser displacement sensor, beat at material surface, to reflect at an angle with incident beam, by laser displacement sensor signal receive window, received, if material surface is rough and uneven in surface, can be directly reflected into receive window, and by inner scale, measure in real time institute's feedback beam displacement variable produced because material surface is uneven, by machine vision and image processing techniques, can calculate the concrete numerical value of this variable quantity, finally calculate light sheet thickness, during measurement, the calibrated bolck that is first A by thickness is placed on to be measured on station, on support platform between lower gauge head, the thickness of measurement standard piece, so that measuring system is carried out to the school Z-operation, suppose that tested sheet steel thickness is δ, actual measured object thickness is δ=A-(x-a)-(y-b), when this measuring method is measured at the material thickness for having the reflective characteristic of high brightness, the material surface micromechanism shows as similar " wrinkle " shape characteristic, this microstructure sizes often 10um even more among a small circle in, but be enough to the laser beam reflection angle is affected greatly, directly cause measuring accuracy to descend, in addition, because machine vision and image processing techniques develop into today, minimum resolution can only arrive submicron order, make the measuring accuracy difficulty of final accurate thin material that breakthrough be arranged, and high-end electronic product market is more and more higher to properties of product, thereby all kinds of light sheets for the circuit base material have also been proposed to higher quality requirements.The conventional thickness measuring method is difficult to meet the high-acruracy survey demand.
The utility model content
The utility model aim to provide a kind of in measuring process without manual intervention, measuring accuracy and measurement efficiency the high anti-light sheet measurer for thickness in high surface.
The technical scheme that the utility model solves the problems of the technologies described above is: the high anti-light sheet measurer for thickness in a kind of surface, comprise steel frame base, platform, the Workpiece carrier platform, X-axis, crossbeam, upper contact measuring head, Z axis, Y-axis, lower contact measuring head and lower gauge head mount pad, described platform is located on steel frame base, the Workpiece carrier platform is located on platform, Y-axis is fixed between Workpiece carrier platform and platform, crossbeam is fixed on platform, mutually vertical with Y-axis direction of motion, X-axis is fixed on crossbeam, Z axis and moving plate thereof are located on the upper horizontal stripe of crossbeam, upper contact measuring head is fixed on the moving plate of Z axis, lower contact measuring head is fixed on the bottom crossband of crossbeam by lower gauge head mount pad, described contact measuring head comprises probe, elastic device, square air guide rail, the air guide rail air inlet seat, laser displacement sensor, top board, grating scale, air guide rail is led the core air connector, the gauge head mount pad, gauge head mounting base and base plate, described square air guide rail is arranged on the gauge head mounting base, probe connects the lower end that square air guide rail is led core, run through base plate, lead between core lower end and base plate and be provided with elastic device, the air guide rail air inlet seat is located at the top of square air guide rail, laser displacement sensor is located at the top of air guide rail air inlet seat, the data line be connected with sensor runs through top board, grating scale is arranged on the left side of laser displacement sensor, air guide rail is led the left side that the core air connector is located at the air guide rail air inlet seat, connect air inlet seat, the gauge head mount pad is located at the left side of gauge head mounting base.
As preferably, the parallel laser displacement sensor that is installed on of described grating scale.
As preferably, described elastic device is precision spring.
As preferably, the core inner of leading of described square air guide rail is hollow core structures, and top connects the square rail air inlet seat.
As preferably, described square rail air inlet seat side connects square air guide rail air connector.
The utility model proposes the high anti-light sheet measurer for thickness in a kind of surface, adopting the accurate controlled high precision contact measuring head of ergometry to carry out high anti-material thickness measures, evade well non-contact measurement and be difficult to meet the sector high precision, high stability thickness measure demand because of different materials surface reflection characteristic and image processing techniques, except taking the contact type measurement mode, this measurement mechanism is taked fixedly beam type topology layout, by mutual vertically arranged X-axis, Y-axis and Z axis, coordinate the Workpiece carrier platform that aims at the light sheet design, realized automatic measurement function.Only need surveyor's material loading and blanking, in measuring process without manual intervention, further improve measuring accuracy and measured efficiency, this measurement mechanism aims at the light sheet thickness measure and designs, simple in structure, easy to operate, cost performance is high, and the high-end product thickness measure that has the reflective characteristic of high brightness for material surface in the industries such as semiconductor, sun power, optical glass provides the optimization solution.
The accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Fig. 2 is structural representation of the present utility model;
The structural representation that Fig. 3 is contact measuring head;
The structural representation that Fig. 4 is contact measuring head;
The structural representation that Fig. 5 is square air guide rail;
Fig. 6 is fundamental diagram of the present utility model.
In figure: 1. steel frame base; 2. platform; 3. Workpiece carrier platform; 4.X axle; 5. go up contact measuring head; 6.Z axle; 7. crossbeam; 8. light sheet; 9.Y axle; 10. descend contact measuring head; 11. lower gauge head mount pad; 12. probe; 13. precision spring; 14. square air guide rail; 15. air guide rail air inlet seat; 16. laser displacement sensor; 17. top board; 18. grating scale; 19. air guide rail is led the core air connector; 20. gauge head mount pad; 21. gauge head mounting base; 22. base plate; 23. air guide rail air connector; 24. lead core; 25, data line.
Embodiment
Below describe embodiment of the present utility model in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label means same or similar element or the element with identical or similar functions from start to finish.Be exemplary below by the embodiment be described with reference to the drawings, only for explaining the utility model, and can not be interpreted as restriction of the present utility model.
Referring to shown in Fig. 1 to Fig. 5, the high anti-light sheet measurer for thickness in a kind of surface, comprise steel frame base 1, platform 2, Workpiece carrier platform 3, X-axis 4, crossbeam 7, upper contact measuring head 5, Z axis 6, Y-axis 9, lower contact measuring head 10 and lower gauge head mount pad 11, described platform 2 is located on steel frame base 1, Workpiece carrier platform 3 is located on platform 2, Y-axis 9 is fixed between Workpiece carrier platform 3 and platform 2, crossbeam 7 is fixed on platform 2, mutually vertical with Y-axis 9 direction of motion, X-axis 4 is fixed on crossbeam 7, Z axis 6 and moving plate thereof are located on the upper horizontal stripe of crossbeam 7, upper contact measuring head 5 is fixed on the moving plate of Z axis 6, lower contact measuring head 10 is fixed on the bottom crossband of crossbeam 7 by lower gauge head mount pad 11, described contact measuring head comprises probe 12, precision spring 13, square air guide rail 14, air guide rail air inlet seat 15, laser displacement sensor 16, top board 17, grating scale 18, air guide rail is led core air connector 19, gauge head mount pad 20, gauge head mounting base 21 and base plate 22, described square air guide rail 14 is arranged on gauge head mounting base 21, described square air guide rail 14 to lead core 24 inner be hollow core structures, top connects square rail air inlet seat 15, square rail air inlet seat 15 sides connect square air guide rail air connector 23, probe 12 connects the lower end that square air guide rail is led core 24, run through base plate 22, lead between core 24 lower ends and base plate 22 and be provided with precision spring 13, air guide rail air inlet seat 15 is located at the top of square air guide rail 14, laser displacement sensor 16 is located at the top of air guide rail air inlet seat 15, the data line 25 be connected with sensor 16 runs through top board, the parallel left side that is installed on laser displacement sensor 16 of grating scale 18, air guide rail is led the left side that core air connector 19 is located at air guide rail air inlet seat 15, connect air inlet seat 15, gauge head mount pad 20 is located at the left side of gauge head mounting base 21.
When to square air guide rail 14 air feed, pressurized air can be delivered to by airflow hole each interior spigot surface of square rail 14 " mouth " font, be distributed with air slot on these spigot surfaces, the pressurized air that will have certain air pressure by air slot is fed between each interior spigot surface of leading core 24 and square rail 14 " mouth " font, formation has the air film layer of certain pressure, thereby formation air guide rail, lead core 24 only can accurately move up and down in square rail 14, leading core 24 inner is hollow core structures, top is connecting square rail air inlet seat 15, these air inlet seat 15 sides are equipped with air connector 23, top is equipped with grating scale 18, measure probe 12 by the laser displacement sensor 16 with grating scale 18 parallel installations and change the displacement that causes core vertical movement Shang Xia 24 with workpiece surface appearance, the displacement value of reading from laser displacement sensor 16 is real-time transmitted to measuring system by data line 25, and display measurement result in Survey Software in time.
The concrete measuring principle of the utility model as shown in Figure 6, before measurement, lower contact measuring head 10 is because of upwards blow gas pressure effect, probe 12 is upwards pushed up, and make precision spring 13 in micro-compressive state, now precision spring 13 decrements are H0, it is also H0 that while probe 12 exceeds Workpiece carrier platform 3, and upper contact measuring head 5 is arranged on the Z axis 6 perpendicular to measured workpiece, the pressure of blowing downwards in gauge head, gravity and precision spring are because acted under the upwards retroaction acting in conjunction produced by blow gas pressure and gravity simultaneously, in vertical direction in the mechanical balance state, now Z axis 6 positions are Z0, before measuring actual light sheet, adopt the calibrated bolck that thickness is A to be calibrated measuring system, this calibrated bolck is placed in Workpiece carrier platform 3, now, the calibrated bolck lower surface will be pushed down the probe 12 of lower contact measuring head 10, make this gauge head that the displacement of a H1 be arranged, in measuring system using this value as under the zero-bit of contact measuring head 10, and upper contact measuring head 5 moves downward under Z axis 6 drives, until probe 12 touches the upper surface of calibrated bolck, suppose to move to and move downward the Z1 position, downward blow gas pressure now, probe 12 self gravitations and precision spring 13 reacting forces that make progress, surface of the work reacting force etc. at this everywhere in mechanical balance, the displacement made progress of probe 12 is (Z1-Z0), also be the decrement of precision spring 13, laser displacement sensor 16 by upper contact measuring head 5 accurately reads, now, the calibrated bolck that it is A that measuring system accurately obtains at detect thickness is the displacement reading of the zero-bit of contact measuring head 10 and upper contact measuring head 5 at present, the parameters such as blow gas pressure, upwards lift contact measuring head 5 and turn back to the Z0 position, remove calibrated bolck, replace with tested light sheet 8, the thickness of supposing this light sheet 8 is L, descend the probe 12 of contact measuring head 10 suppressed by this workpiece, the displacement produced is H2, the lower gauge head 10 of explanation is because character of surface causes changing values different while from calibrated bolck, suppressing probe 12, actual this below upwards the variation in thickness of relative standard's piece be (H2-H1), the upper surface of upper gauge head 5 contact workpiece under Z axis 6 drives, and keep air blowing power constant, now Z axis 6 displacements are Z2, actual precision spring 13 decrements are (Z2-Z0), can draw following relation:
(Z1-Z0)+A+H1=(Z2-Z0)+L+?H2
The thickness L=(Z1-Z0) of tested light sheet 8+A+H1-(Z2-Z0)-H2=A+Z1-Z2+H1-H2, on, lower contact measuring head is real-time transmitted to measuring system by measured value, measuring system will calculate fast according to above-mentioned formula the actual (real) thickness value of this light sheet 8, this one-tenth-value thickness 1/10 and this batch of light sheet thickness quality control line are contrasted, once find that this value is not in the light sheet thickness quality index control line arranged in advance, system is understood automatic alarm, this light sheet will be used as unacceptable product and process, when entering the discharging station, it is moved out of measuring system, if qualified it is processed as certified products, be placed on the certified products district, carry out again the measurement of next light sheet, move in circles.
The high anti-light sheet measurer for thickness in a kind of surface the utility model proposes, adopting the accurate controlled high precision contact measuring head of ergometry to carry out high anti-material thickness measures, evade well non-contact measurement and be difficult to meet the sector high precision because of different materials surface reflection characteristic and image processing techniques, high stability thickness measure demand, except taking the contact type measurement mode, this measurement mechanism is taked fixedly beam type topology layout, by mutual vertically arranged X-axis, Y-axis and Z axis, coordinate the Workpiece carrier platform that aims at the light sheet design, realized automatic measurement function, only need surveyor's material loading and blanking, in measuring process without manual intervention, further improve measuring accuracy and measured efficiency, this measurement mechanism aims at the light sheet thickness measure and designs, simple in structure, easy to operate, cost performance is high, for semiconductor, sun power, the high-end product thickness measure that in the industries such as optical glass, material surface has a reflective characteristic of high brightness provides the optimization solution.
In the description of this instructions, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present utility model or example in conjunction with specific features, structure, material or the characteristics of this embodiment or example description.In this manual, the schematic statement of above-mentioned term not necessarily referred to identical embodiment or example.And the specific features of description, structure, material or characteristics can be with suitable mode combinations in any one or more embodiment or example.
Although illustrated and described embodiment of the present utility model, those having ordinary skill in the art will appreciate that: in the situation that do not break away from principle of the present utility model and aim can be carried out multiple variation, modification, replacement and modification to these embodiment, scope of the present utility model is limited by claim and equivalent thereof.
Claims (5)
1. the high anti-light sheet measurer for thickness in surface, comprise steel frame base, platform, the Workpiece carrier platform, X-axis, crossbeam, upper contact measuring head, Z axis, Y-axis, lower contact measuring head and lower gauge head mount pad, it is characterized in that, described platform is located on steel frame base, the Workpiece carrier platform is located on platform, Y-axis is fixed between Workpiece carrier platform and platform, crossbeam is fixed on platform, mutually vertical with Y-axis direction of motion, X-axis is fixed on crossbeam, Z axis and moving plate thereof are located on the upper horizontal stripe of crossbeam, upper contact measuring head is fixed on the moving plate of Z axis, lower contact measuring head is fixed on the bottom crossband of crossbeam by lower gauge head mount pad, described contact measuring head comprises probe, elastic device, square air guide rail, the air guide rail air inlet seat, laser displacement sensor, top board, grating scale, air guide rail is led the core air connector, the gauge head mount pad, gauge head mounting base and base plate, described square air guide rail is arranged on the gauge head mounting base, probe connects the lower end that square air guide rail is led core, run through base plate, lead between core lower end and base plate and be provided with elastic device, the air guide rail air inlet seat is located at the top of square air guide rail, laser displacement sensor is located at the top of air guide rail air inlet seat, the data line be connected with sensor runs through top board, grating scale is arranged on the left side of laser displacement sensor, air guide rail is led the left side that the core air connector is located at the air guide rail air inlet seat, connect air inlet seat, the gauge head mount pad is located at the left side of gauge head mounting base.
2. measurement mechanism according to claim 1, is characterized in that, the parallel laser displacement sensor that is installed on of described grating scale.
3. measurement mechanism according to claim 1, is characterized in that, described elastic device is precision spring.
4. measurement mechanism according to claim 1, is characterized in that, the core inner of leading of described square air guide rail is hollow core structures, and top connects the square rail air inlet seat.
5. measurement mechanism according to claim 4, is characterized in that, described square rail air inlet seat side connects square air guide rail air connector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320485952.8U CN203375940U (en) | 2013-08-09 | 2013-08-09 | A surface high-brightness reflective sheet thickness measuring apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320485952.8U CN203375940U (en) | 2013-08-09 | 2013-08-09 | A surface high-brightness reflective sheet thickness measuring apparatus |
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| CN203375940U true CN203375940U (en) | 2014-01-01 |
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| CN201320485952.8U Expired - Fee Related CN203375940U (en) | 2013-08-09 | 2013-08-09 | A surface high-brightness reflective sheet thickness measuring apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103398664A (en) * | 2013-08-09 | 2013-11-20 | 昆山允可精密工业技术有限公司 | Instrument for measuring thickness of thin plate with high bright reflective surface |
| CN107036509A (en) * | 2017-06-20 | 2017-08-11 | 长沙金诺自动化技术有限公司 | A kind of radio frequency (RF) coaxial connector size detecting device |
-
2013
- 2013-08-09 CN CN201320485952.8U patent/CN203375940U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103398664A (en) * | 2013-08-09 | 2013-11-20 | 昆山允可精密工业技术有限公司 | Instrument for measuring thickness of thin plate with high bright reflective surface |
| CN107036509A (en) * | 2017-06-20 | 2017-08-11 | 长沙金诺自动化技术有限公司 | A kind of radio frequency (RF) coaxial connector size detecting device |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140101 Termination date: 20140809 |
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| EXPY | Termination of patent right or utility model |