CN203375937U - A manual single-measuring head sheet thickness contact measurement device - Google Patents
A manual single-measuring head sheet thickness contact measurement device Download PDFInfo
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- CN203375937U CN203375937U CN201320485939.2U CN201320485939U CN203375937U CN 203375937 U CN203375937 U CN 203375937U CN 201320485939 U CN201320485939 U CN 201320485939U CN 203375937 U CN203375937 U CN 203375937U
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Abstract
The utility model provides a manual single-measuring head sheet thickness contact measurement device comprising adjusting pad feet, a pedestal disposed on the adjusting pad feet, a platform disposed on the pedestal, a support base disposed on the platform, a cross beam disposed on the support base, a Z shaft fixed in the middle of the cross beam, a contact measuring head fixed on a Z shaft movable plate, and a vacuum suction stand disposed on the platform and right below the contact measuring head. Based on the comprehensive cost performance of the device, the manual measurement platform is developed, the complexity and the manufacture cost of the measurement device are reduced to the minimum while the measurement accuracy is guaranteed, and the optimized solution is provided for precision sheet thickness measurement.
Description
Technical field
The utility model relates to the measuring equipment field, relates in particular to a kind of manual single gauge head sheet gauge contact measuring apparatus.
Background technology
In fields such as surface mounting technology (SMT), sun power, precision sheet manufactures, manufacture in a large number or use light sheet.Web plate base material as the use of surface mount industry, material category relates to stainless steel, nickel, nickel alloy etc., thickness is generally in 1mm, and in its machining process, need through operations such as electroforming, plating, polishing, etching, cuies, the middle semi-manufacture that produce and final finished product, all need to carry out the measurement of thickness evenness, to guarantee final product, meets the requirements of the customers; The wafer used in the sun power industry, it is all thin plate class precision element, process various features thereon by techniques such as laser scribings, the final solar panel that forms, this class sheet material generally consists of 4 layers of sheeting, and the 1st layer is wafer layer, the 2nd layer for bonding agent, the 3rd layer are adhesive tape for glass, the 4th layer, between each layer, by process for pressing, is made into the wafer finished product, guarantee the final finished thickness evenness, just need to control the thickness evenness after each layer is laminated; And the precision sheet manufacture view, the sheet material that various stainless steels that provide for the surface mount industry as large shape etc. provide, and the manufacture of Copper Foil, flat glass thin plate, this class sheet material all has common feature, material is thin, thickness evenness is had to strict demand, otherwise can affect the result of use of its rear end product, along with market proposes more and more higher requirement to the sector properties of product, the quality control of the key characters such as the thickness of these basic materials is more and more stricter, to guarantee the Performance And Reliability of final finished.
In above-mentioned light sheet, the equal indentation of micromechanism of most of plate surface, this class sheet material as adopt traditional contactless be that measuring method carries out thickness measure, send light beam by laser displacement sensor, beat at material surface, to reflect at an angle with incident beam, by laser displacement sensor signal receive window, received, if material surface is rough and uneven in surface, can be directly reflected into receive window, and by inner scale, measure in real time institute's feedback beam displacement variable produced because material surface is uneven, by machine vision and image processing techniques, can calculate the concrete numerical value of this variable quantity, finally calculate light sheet thickness.During measurement, the calibrated bolck that is first A by thickness is placed on to be measured on station, on support platform between lower gauge head, the thickness of measurement standard piece, so that measuring system is carried out to the school Z-operation, suppose that tested sheet steel thickness is δ, actual measured object thickness is δ=A-(x-a)-(y-b), because most of thin sheet surface has zigzag micromechanism in various degree, this microstructure sizes often 10um even more among a small circle in, the reflective effect that it produces, be enough to the laser beam reflection angle is affected greatly, directly cause measuring accuracy to descend, and reflective effects difference between different materials, even for a collection of product, measured result also is not quite similar, cause the duplicate measurements precision not high, if material has transparent characteristic, have part light penetrable material while measuring and all do not received by signal receiver, cause measuring accuracy sharply to descend, in addition, because machine vision and image processing techniques develop into today, minimum resolution can only arrive submicron order, make the measuring accuracy difficulty of final accurate thin material that breakthrough be arranged, and high-end electronic product market is more and more higher to properties of product, thereby all kinds of light sheets for the circuit base material have also been proposed to higher quality requirements, the conventional thickness measuring method is difficult to meet the high-acruracy survey demand.
The utility model content
Technical problem to be solved in the utility model is to provide a kind of manual single gauge head sheet gauge contact measuring apparatus that reduces complexity and the manufacturing cost of measurement mechanism.
For achieving the above object, the utility model provides a kind of manual single gauge head sheet gauge contact measuring apparatus, comprises the adjustment feet; Base, described base is located to be adjusted on feet; Platform, described platform is located on base; Supporting seat, described supporting seat is located on platform; Crossbeam, described crossbeam is located on supporting seat; Z axis, described Z axis is fixed on the centre of crossbeam; Contact measuring head, described contact measuring head is fixed on the moving plate of Z axis; The vacuum suction platform, described vacuum suction platform is located on platform, contact measuring head under.
As preferably, described contact measuring head comprises probe, elastic device, square air guide rail, the air guide rail air inlet seat, laser displacement sensor, top board, grating scale, air guide rail is led the core air connector, the gauge head mount pad, gauge head mounting base and base plate, described square air guide rail is arranged on the gauge head mounting base, probe connects the lower end that square air guide rail is led core, run through base plate, lead between core lower end and base plate and be provided with elastic device, the air guide rail air inlet seat is located at the top of square air guide rail, laser displacement sensor is located at the top of air guide rail air inlet seat, the data line be connected with sensor runs through top board, grating scale is arranged on the left side of laser displacement sensor, air guide rail is led the left side that the core air connector is located at the air guide rail air inlet seat, connect air inlet seat, the gauge head mount pad is located at the left side of gauge head mounting base.
As preferably, the parallel laser displacement sensor that is installed on of described grating scale.
As preferably, described elastic device is precision spring.
As preferably, the core inner of leading of described square air guide rail is hollow core structures, and top connects the square rail air inlet seat.
As preferably, described square rail air inlet seat side connects square air guide rail air connector.
As preferably, described vacuum suction platform centre is provided with the absorption air connector, the thin plate supporting surface is protruded in middle part, the absorption annular groove is protruded in described thin plate supporting surface middle part, the outer ring of thin plate supporting surface is provided with around X-direction winding degree set screw, the outer ring of vacuum suction platform is provided with around Y-direction winding degree set screw, and described absorbing ring rooved face is provided with several adsorption holes.
As preferably, described platform has roller.
The utility model provides a kind of manual single gauge head sheet gauge contact measuring apparatus, adopt the single contact measuring head of the accurate controlled high precision of ergometry to carry out thickness measure, solved well that tradition takes to exist in contactless measurement because of different materials surface reflection effect, transparent material sharply descends because penetrable material causes precision, the low image processing techniques that reaches of same type of material duplicate measurements precision is difficult to meet the sector high precision, the problem of high stability thickness measure demand, and on this basis, comprehensive cost performance from equipment, develop the manual measurement platform, when retaining measuring accuracy, reduce to greatest extent complexity and the manufacturing cost of measurement mechanism, for the precision sheet thickness measure provides the optimization solution.
The accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
The structural representation that Fig. 2 is contact measuring head;
The structural representation that Fig. 3 is contact measuring head;
The structural representation that Fig. 4 is square air guide rail;
The structural representation that Fig. 5 is the vacuum suction platform;
The structural representation that Fig. 6 is the vacuum suction platform.
In figure: 1. roller; 2. adjustment feet; 3. steel frame base; 4. grouan platform; 5. grouan supporting seat; 6. grouan fixed cross beam; 7. gauge head holder; 8.Z axle; 9. contact measuring head; 10. light sheet; 11. vacuum suction platform; 12. probe; 13. precision spring; 14. square air guide rail; 15. air guide rail air inlet seat; 16. laser displacement sensor; 17. top board; 18. grating scale; 19. air guide rail is led the core air connector; 20. gauge head mount pad; 21. gauge head mounting base; 22. base plate; 23. air guide rail air connector; 24. lead core; 25, data line; 26. adsorption hole; 27. absorption annular groove; 28. light sheet supporting surface; 29. around Y-direction winding degree set screw; 30. around X-direction winding degree set screw; 31. vacuum absorbing platform gib screw; 32. absorption air connector.
Embodiment
Below describe embodiment of the present utility model in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label means same or similar element or the element with identical or similar functions from start to finish.Be exemplary below by the embodiment be described with reference to the drawings, only for explaining the utility model, and can not be interpreted as restriction of the present utility model.
Referring to shown in Fig. 1 to Fig. 6, a kind of manual single gauge head sheet gauge contact measuring apparatus, comprise and adjust feet 2, steel frame base 3, described steel frame base 3 is located to be adjusted on feet 2, grouan platform 4, described grouan platform 4 is located on steel frame base 3, roller 1, described roller 1 is located at the grouan platform 4 times, during normal the use, measuring instrument must be put steadily, now by adjusting, adjusts feet 2 and can make roller 1 liftoff, and can regulate the levelness of grouan platform 4, and need to move the measuring instrument putting position time, only need to regulate and adjust feet 2, allow roller 1 contact with ground, and after grouan platform 4 is effectively supported, the hand propelled measuring instrument, roller 1 can drive measuring instrument like a cork to formulating putting position, grouan supporting seat 5, described grouan supporting seat 5 is located on platform, grouan fixed cross beam 6, described grouan fixed cross beam 6 is located on grouan supporting seat 5, Z axis 8, described Z axis 8 is fixed on the centre of grouan fixed cross beam 6, contact measuring head 9, described contact measuring head 9 is fixed on the moving plate of Z axis 8, vacuum suction platform 11, described vacuum suction platform 11 is located on grouan platform 4, under contact measuring head 9, vacuum suction platform 11 centres are provided with absorption air connector 32, thin plate supporting surface 28 is protruded in middle part, absorption annular groove 27 is protruded in described thin plate supporting surface 28 middle parts, the outer ring of thin plate supporting surface 28 is provided with around X-direction winding degree set screw 30, the outer ring of vacuum suction platform 11 is provided with around Y-direction winding degree set screw 29, described absorption annular groove 27 surfaces are provided with several adsorption holes 26, this absorptive table 11 is adsorbed the thin plate in measured zone by vacuum adsorption principle, so that the thin plate of measured zone is fitted on the thin plate supporting surface 28 of vacuum suction platform fully, vacuum suction platform 11 can be regulated vacuum suction platform supporting surface 28 relative gauge heads 9 along the move up and down verticality of direction of Z axis 8 by the winding degree set screw around X-direction and Y-direction.
Described contact measuring head comprises probe 12, precision spring 13, square air guide rail 14, air guide rail air inlet seat 15, laser displacement sensor 16, top board 17, grating scale 18, air guide rail is led core air connector 19, gauge head mount pad 20, gauge head mounting base 21 and base plate 22, described square air guide rail 14 is arranged on gauge head mounting base 21, described square air guide rail 14 to lead core 24 inner be hollow core structures, top connects square rail air inlet seat 15, square rail air inlet seat 15 sides connect square air guide rail air connector 23, probe 12 connects the lower end that square air guide rail is led core 24, run through base plate 22, lead between core 24 lower ends and base plate 22 and be provided with precision spring 13, air guide rail air inlet seat 15 is located at the top of square air guide rail 14, laser displacement sensor 16 is located at the top of air guide rail air inlet seat 15, the data line 25 be connected with sensor 16 runs through top board, the parallel left side that is installed on laser displacement sensor 16 of grating scale 18, air guide rail is led the left side that core air connector 19 is located at air guide rail air inlet seat 15, connect air inlet seat 15, gauge head mount pad 20 is located at the left side of gauge head mounting base 21.
When to square air guide rail 14 air feed, pressurized air can be delivered to by airflow hole each interior spigot surface of square rail 14 " mouth " font, be distributed with air slot on these spigot surfaces, the pressurized air that will have certain air pressure by air slot is fed between each interior spigot surface of leading core 24 and square rail 14 " mouth " font, formation has the air film layer of certain pressure, thereby formation air guide rail, lead core 24 only can accurately move up and down in square rail 14, leading core 24 inner is hollow core structures, top is connecting square rail air inlet seat 15, these air inlet seat 15 sides are equipped with air connector 23, top is equipped with grating scale 18, measure probe 12 by the laser displacement sensor 16 with grating scale 18 parallel installations and change the displacement that causes core vertical movement Shang Xia 24 with workpiece surface appearance, the displacement value of reading from laser displacement sensor 16 is real-time transmitted to measuring system by data line 25, and display measurement result in Survey Software in time.
The measuring process that measurement mechanism described in the utility model carries out thickness measure for thin plate is as follows:
1) first under the gauge head 9 of measuring table 4 correspondences, place a calibrated bolck with calibrated altitude, its height value is X0.
2) Z axis 8 that gauge head 9 is installed drives gauge head 9 start bit Z0 in vertical direction to start to move downward, now lead probe 12 on core 24 under the combined action of power, in vertical direction in the mechanical balance state, before the ruby ball of probe 12 ends does not touch calibrated bolck, probe 12 is always in below is motionless, and now the reading value of miniature laser displacement transducer 16 correspondences is H0.
3) after calibrated bolck is encountered in probe 12 ends, the retroaction made progress increases, and probe 12 can move upward to H1, and now Z axis 8 drops to the Z1 position, and now H1 is set to measure zero point, and corresponding is that thickness of reference block is X0, and control system is write down this numerical value.
4) by Z axis 8 from the Z1 Z0 position of moving back, calibrated bolck is removed, the measured object of X1 thickness in placement, allowing Z axis 8 again from the Z0 position, drive gauge head 9 moves downward, until probe 12 touches the measured object surface, and allow laser displacement sensor 16 readings in gauge head 12 just in time when the H1 position, and Z axis 8 stop motion immediately, now Z axis 8 moves downward the Z2 position.
5), by above-mentioned data, can calculate the difference in height between thickness of reference block and measured object thickness
△ Z=︱ Z2-Z1 ︱, and measured object thickness L=︱ X0-△ Z ︱;
When measured object Thickness Ratio calibrated bolck height X0 is large, Z2<Z1; As measured object Thickness Ratio calibrated bolck height X0 hour, Z2 > Z1.
Before measurement, by the calibrated bolck with standard thickness, measuring system is calibrated, after calibration, calibrated bolck is removed, placed the upper thin sheet material, can be measured, during measurement, manually light sheet is placed on measuring table, and begin by manually dragging thin plate so that measurement point all the time under gauge head in the measured zone of vacuum absorbing platform supporting surface work, read a point value, manually pulled thin plate to next measurement point; The thickness measurement data of each measurement point can be passed to measuring system, with this batch of light sheet thickness quality control line, contrasted, once find that this value is not in the light sheet thickness quality index control line arranged in advance, system is understood automatic alarm, and this light sheet will be used as unacceptable product and process, and be moved out of measuring system when it enters the discharging station, if qualified it is processed as certified products, be placed on the certified products district, then carry out the measurement of next light sheet, move in circles.
The utility model provides a kind of manual single gauge head sheet gauge contact measuring apparatus, adopt the single contact measuring head of the accurate controlled high precision of ergometry to carry out thickness measure, solved well that tradition takes to exist in contactless measurement because of different materials surface reflection effect, transparent material sharply descends because penetrable material causes precision, the low image processing techniques that reaches of same type of material duplicate measurements precision is difficult to meet the sector high precision, the problem of high stability thickness measure demand, and on this basis, comprehensive cost performance from equipment, develop the manual measurement platform, when retaining measuring accuracy, reduce to greatest extent complexity and the manufacturing cost of measurement mechanism, for the precision sheet thickness measure provides the optimization solution.
Claims (8)
1. a manual single gauge head sheet gauge contact measuring apparatus, is characterized in that, comprising:
Adjust feet;
Base, described base is located to be adjusted on feet;
Platform, described platform is located on base;
Supporting seat, described supporting seat is located on platform;
Crossbeam, described crossbeam is located on supporting seat;
Z axis, described Z axis is fixed on the centre of crossbeam;
Contact measuring head, described contact measuring head is fixed on the moving plate of Z axis;
The vacuum suction platform, described vacuum suction platform is located on platform, contact measuring head under.
2. measurement mechanism according to claim 1, it is characterized in that, described contact measuring head comprises probe, elastic device, square air guide rail, the air guide rail air inlet seat, laser displacement sensor, top board, grating scale, air guide rail is led the core air connector, the gauge head mount pad, gauge head mounting base and base plate, described square air guide rail is arranged on the gauge head mounting base, probe connects the lower end that square air guide rail is led core, run through base plate, lead between core lower end and base plate and be provided with elastic device, the air guide rail air inlet seat is located at the top of square air guide rail, laser displacement sensor is located at the top of air guide rail air inlet seat, the data line be connected with sensor runs through top board, grating scale is arranged on the left side of laser displacement sensor, air guide rail is led the left side that the core air connector is located at the air guide rail air inlet seat, connect air inlet seat, the gauge head mount pad is located at the left side of gauge head mounting base.
3. measurement mechanism according to claim 2, is characterized in that, the parallel laser displacement sensor that is installed on of described grating scale.
4. measurement mechanism according to claim 2, is characterized in that, described elastic device is precision spring.
5. measurement mechanism according to claim 2, is characterized in that, the core inner of leading of described square air guide rail is hollow core structures, and top connects the square rail air inlet seat.
6. measurement mechanism according to claim 2, is characterized in that, described square rail air inlet seat side connects square air guide rail air connector.
7. measurement mechanism according to claim 1, it is characterized in that, described vacuum suction platform centre is provided with the absorption air connector, the light sheet supporting surface is protruded in middle part, the absorption annular groove is protruded in described light sheet supporting surface middle part, the outer ring of thin plate supporting surface is provided with around X-direction winding degree set screw, and the outer ring of vacuum suction platform is provided with around Y-direction winding degree set screw, and described absorbing ring rooved face is provided with several adsorption holes.
8. measurement mechanism according to claim 1, is characterized in that, described platform has roller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320485939.2U CN203375937U (en) | 2013-08-09 | 2013-08-09 | A manual single-measuring head sheet thickness contact measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320485939.2U CN203375937U (en) | 2013-08-09 | 2013-08-09 | A manual single-measuring head sheet thickness contact measurement device |
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| Publication Number | Publication Date |
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| CN203375937U true CN203375937U (en) | 2014-01-01 |
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| CN201320485939.2U Expired - Fee Related CN203375937U (en) | 2013-08-09 | 2013-08-09 | A manual single-measuring head sheet thickness contact measurement device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103389045A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Contact type measuring unit for thickness of manual single measure head veneer board |
| CN104215188A (en) * | 2014-09-23 | 2014-12-17 | 江苏农林职业技术学院 | Wafer thickness measuring device applied to sapphire thinning device |
| CN105004305A (en) * | 2015-08-31 | 2015-10-28 | 株洲高新技术产业开发区壹星科技有限公司 | Pantograph head carbon sliding block thickness detector |
| CN105157652A (en) * | 2015-08-31 | 2015-12-16 | 株洲高新技术产业开发区壹星科技有限公司 | Pantograph head carbon slide block thickness detection method |
-
2013
- 2013-08-09 CN CN201320485939.2U patent/CN203375937U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103389045A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Contact type measuring unit for thickness of manual single measure head veneer board |
| CN104215188A (en) * | 2014-09-23 | 2014-12-17 | 江苏农林职业技术学院 | Wafer thickness measuring device applied to sapphire thinning device |
| CN104215188B (en) * | 2014-09-23 | 2017-06-16 | 江苏农林职业技术学院 | A kind of wafer measuring thickness device for being applied to sapphire stripping apparatus |
| CN105004305A (en) * | 2015-08-31 | 2015-10-28 | 株洲高新技术产业开发区壹星科技有限公司 | Pantograph head carbon sliding block thickness detector |
| CN105157652A (en) * | 2015-08-31 | 2015-12-16 | 株洲高新技术产业开发区壹星科技有限公司 | Pantograph head carbon slide block thickness detection method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140101 Termination date: 20140809 |
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| EXPY | Termination of patent right or utility model |