CN203148401U - Contact type automatic thin-board dimension measuring instrument - Google Patents

Contact type automatic thin-board dimension measuring instrument Download PDF

Info

Publication number
CN203148401U
CN203148401U CN201320111385XU CN201320111385U CN203148401U CN 203148401 U CN203148401 U CN 203148401U CN 201320111385X U CN201320111385X U CN 201320111385XU CN 201320111385 U CN201320111385 U CN 201320111385U CN 203148401 U CN203148401 U CN 203148401U
Authority
CN
China
Prior art keywords
guide rail
core
measuring instrument
axis
light sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201320111385XU
Other languages
Chinese (zh)
Inventor
崔华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kunshan Yunco Precision Co Ltd
Original Assignee
Kunshan Yunco Precision Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kunshan Yunco Precision Co Ltd filed Critical Kunshan Yunco Precision Co Ltd
Priority to CN201320111385XU priority Critical patent/CN203148401U/en
Application granted granted Critical
Publication of CN203148401U publication Critical patent/CN203148401U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

The utility model provides a contact type automatic thin-board dimension measuring instrument, comprising a measuring head, a control system containing a numerical control module and a calculating module and a shaft system moving along three-dimensional coordinates, wherein the measuring head comprises a guide rail die and a guiding core, the guiding core penetrates the guide rail die, the guide rail die comprises an air inlet and an air guiding groove, an air guide rail can be formed in the interior of the air guiding groove, the air inlet is arranged at the top of the guide rail, the bottom of the guide rail is connected with a spring, the spring is positioned between the guiding core and a base plate, the lower end of the spring is connected with a probe, the top of the guiding core is connected with a grating scale which is connected with a laser displacement sensor, and the laser displacement sensor is connected with the control system. According to the utility model, the measuring head of the measuring instrument employs pneumatic control technology, accurate adjustment of a measuring force is realized by changing the interior and exterior air pressure of the guiding core, so the value of the measuring force can be adjusted and the measuring force is ensured to be constant; meanwhile, a three dimensional motion platform and numerical control technology are cooperatively used to realize omnibearing and automatic measurement, so measurement accuracy of surface dimension of thin-board elements can be improved accordingly.

Description

Contact light sheet size automatic measuring instrument
Technical field
The utility model relates to the precision measurement equipment technical field, particularly a kind of contact light sheet size automatic measuring instrument.
Background technology
In P.e.c. and semicon industry; often can use a large amount of light sheet class components; for example thickness is between the board substrate between the 0.05mm to 1mm, normally with stainless steel, nickel alloy etc. as starting material, make through technologies such as electroforming, plating, polishing, etchings.In these industries, higher for the surface size feature request of circuit base material, no matter starting material, semi-manufacture or finished product all need by professional equipment the flatness equidimension precision index of substrate surface to be carried out the strictness check.
In correlation technique, normally adopt optical device to measure, calculate by reading light reflection displacement, the combining image treatment technology reflects the configuration of surface feature of measured workpiece again.Yet there is following defective in correlation technique: on the one hand, the light sheet class component has the jagged micromechanism of class, and this structure can cause a deviation to the laser beam reflection angle, thereby causes measuring accuracy to descend; On the other hand, restricted by the development level of machine vision and image processing techniques, this kind equipment still has bigger limitation on measuring accuracy.Therefore, correlation technique is difficult to satisfy in the above-mentioned industry measurement requirement to light sheet class component surface size feature.
The utility model content
At above-mentioned defective and the problem of existing optical device for the measuring accuracy deficiency of the configuration of surface feature of light sheet class component, the purpose of this utility model provides a kind of measuring accuracy contact light sheet size automatic measuring higher, that ergometry is controlled instrument.
For achieving the above object, the utility model provides following technical scheme: a kind of contact light sheet size automatic measuring instrument, it is characterized in that, and comprising:
Control system, it comprises numerical control module, computing module, display module;
Axle system, it comprises the Y-axis that is fixed on the surface level, is vertically mounted on the Y-axis and the X-axis of moving along Y-axis, Z axle to be installed in perpendicular to the surface level direction on the X-axis and to move along X-axis along surface level, and described axle system is connected with numerical control module in the control system;
Gauge head, it is installed on the Z axle and along the Z axle and moves, comprise the guide rail mould, lead core, the described core of leading passes the guide rail mould, described guide rail mould contains guide rail mould air intake opening, its inside surface is provided with air slot, can and lead at guide rail mould inside surface after the inflation and form air guide rail between the core outer surface, the described in-core portion that leads is hollow, its top is provided with for leading the core air intake opening to inner inflatable, its bottom also is connected with spring, described spring is arranged between the base plate of leading core and gauge head bottom, and its lower end is connected with the probe that is passed down through base plate, and the described core top of leading also is connected with the grating chi, its parallel connection with laser displacement sensor, described laser displacement sensor is connected with computing module in the control system.
Preferred as above-mentioned technology, described Y-axis has two, and it is installed in parallel on the surface level.
Preferred as technique scheme, described gauge head adopts vertical vertical installation.
Preferred as technique scheme, the described core of leading can only be inner along moving perpendicular to the surface level direction at the guide rail mould.
Preferred as technique scheme, the cross sectional shape of described air slot is the U font.
Preferred as technique scheme, described numerical control module, computing module are installed in the computing machine, and described display module comprises display.
The contact light sheet size automatic measuring instrument that the utility model provides, in gauge head, adopted Pneumatic Control Technology, lead the inside and outside air pressure of core by change and realized accurate adjusting to ergometry, both can adjust the ergometry size at material behavior, and can guarantee that when surface elevation changes ergometry was constant again; On the other hand, utilize three-dimensional motion platform combining with digital control technology again, realized comprehensive, the automatic measurement of measured object surface profile.Therefore, this measuring instrument can improve the measuring accuracy for light sheet class component surface size feature.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do simple the introduction to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of the gauge head in the contact light sheet size automatic measuring instrument of the utility model embodiment.
Fig. 2 is the structural representation of leading core and guide rail mould in the contact light sheet size automatic measuring instrument of the utility model embodiment.
Fig. 3 is the structural representation of the contact light sheet size automatic measuring instrument of the utility model embodiment.
Fig. 4 is the structural representation of the axle system in the contact light sheet size automatic measuring instrument of the utility model embodiment.
Embodiment
Below in conjunction with accompanying drawing of the present utility model, the technical solution of the utility model is carried out clear, complete description, obviously, described embodiment only is a part of embodiment of the present utility model, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
As shown in Figure 1, a kind of contact light sheet size automatic measuring instrument that the utility model embodiment provides, comprise gauge head 1, it comprises guide rail mould 11, lead core 12, the described core 12 of leading passes guide rail mould 11, described guide rail mould 11 contains guide rail mould air intake opening, its inside surface is provided with air slot, can and lead between core 12 outside surfaces at guide rail mould 11 inside surfaces after the inflation and form air guide rail, the described core 12 of leading is inner for hollow, its top be provided with for to inner inflatable lead the core air intake opening, its bottom also is connected with spring 13, described spring 13 is arranged between the base plate 14 of leading core 12 and gauge head 1 bottom, its lower end is connected with the probe 15 that is passed down through base plate 14, described core 12 tops of leading also are connected with grating chi 16, itself and laser displacement sensor 17 parallel connections, and described laser displacement sensor 17 is connected with computing module in the control system.
As shown in Figure 2, described guide rail mould air intake opening 18 is positioned at the side of guide rail mould 11, and the described core air intake opening 19 of leading is positioned at the top of leading core 12.
As shown in Figure 3, a kind of contact light sheet size automatic measuring instrument that the utility model embodiment provides also comprises control system 2, axle system 3, and described control system 2 comprises numerical control module 21, computing module 22, display module 23; Described axle system 3 is connected with numerical control module 21 in the control system 2; Described gauge head 1 is connected with computing module 22 in the control system 2.
As shown in Figure 4, described axle system 3 comprises the Y-axis 31 that is fixed on the surface level, is vertically mounted on the Y-axis 31 and the X-axis 32 of moving along Y-axis 31, Z axle 33 to be installed in perpendicular to the surface level direction on the X-axis 32 and to move along X-axis 32 along surface level; Described gauge head 1 is installed on the Z axle 33, and it moves along Z axle 33.
As shown in Figure 3, described numerical control module 21, computing module 22 are installed in the computing machine 24, and described display module 23 comprises display.
As shown in Figure 4, described Y-axis 31 has two, and it is installed in parallel on the surface level.Described gauge head 1 adopts vertical vertical installation.The cross sectional shape of the air slot of described guide rail mould 11 is the U font.The described core 12 of leading can only be inner along moving perpendicular to the surface level direction at guide rail mould 11.
Contact light sheet size automatic measuring instrument provided by the utility model, unavoidable technical matters when having solved use optical device measurement light sheet class component size, comprise because the measured deviation that material list Noodles zigzag microscopic pattern causes, and machine vision and image processing techniques be to the restriction of measuring accuracy, etc.This measuring instrument not only can improve the measuring accuracy of light sheet class component surface size feature, and can improve automaticity and the work efficiency of measuring process.
The above; it only is embodiment of the present utility model; but protection domain of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; can expect easily changing or replacing, all should be encompassed within the protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of described claim.

Claims (6)

1. a contact light sheet size automatic measuring instrument is characterized in that, comprising:
Control system, it comprises numerical control module, computing module, display module;
Axle system, it comprises the Y-axis that is fixed on the surface level, is vertically mounted on the Y-axis and the X-axis of moving along Y-axis, Z axle to be installed in perpendicular to the surface level direction on the X-axis and to move along X-axis along surface level, and described axle system is connected with numerical control module in the control system;
Gauge head, it is installed on the Z axle and along the Z axle and moves, comprise the guide rail mould, lead core, the described core of leading passes the guide rail mould, described guide rail mould contains guide rail mould air intake opening, its inside surface is provided with air slot, can and lead at guide rail mould inside surface after the inflation and form air guide rail between the core outer surface, the described in-core portion that leads is hollow, its top is provided with for leading the core air intake opening to inner inflatable, its bottom also is connected with spring, described spring is arranged between the base plate of leading core and gauge head bottom, and its lower end is connected with the probe that is passed down through base plate, and the described core top of leading also is connected with the grating chi, its parallel connection with laser displacement sensor, described laser displacement sensor is connected with computing module in the control system.
2. a kind of contact light sheet size automatic measuring instrument according to claim 1 is characterized in that described Y-axis has two, and it is installed in parallel on the surface level.
3. a kind of contact light sheet size automatic measuring instrument according to claim 1 is characterized in that described gauge head adopts vertical vertical installation.
4. a kind of contact light sheet size automatic measuring instrument according to claim 1 is characterized in that, the described core of leading can only be inner along moving perpendicular to the surface level direction at the guide rail mould.
5. a kind of contact light sheet size automatic measuring instrument according to claim 1 is characterized in that the cross sectional shape of described air slot is the U font.
6. a kind of contact light sheet size automatic measuring instrument according to claim 1 is characterized in that described numerical control module, computing module are installed in the computing machine, and described display module comprises display.
CN201320111385XU 2013-03-12 2013-03-12 Contact type automatic thin-board dimension measuring instrument Expired - Fee Related CN203148401U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201320111385XU CN203148401U (en) 2013-03-12 2013-03-12 Contact type automatic thin-board dimension measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201320111385XU CN203148401U (en) 2013-03-12 2013-03-12 Contact type automatic thin-board dimension measuring instrument

Publications (1)

Publication Number Publication Date
CN203148401U true CN203148401U (en) 2013-08-21

Family

ID=48975918

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201320111385XU Expired - Fee Related CN203148401U (en) 2013-03-12 2013-03-12 Contact type automatic thin-board dimension measuring instrument

Country Status (1)

Country Link
CN (1) CN203148401U (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104048625A (en) * 2013-03-12 2014-09-17 昆山允可精密工业技术有限公司 Automatic contact instrument used for measuring thin sheet material dimensions
CN104422414A (en) * 2013-09-11 2015-03-18 江苏肯帝亚木业有限公司 Wood floor size measurement device
CN104776823A (en) * 2015-05-08 2015-07-15 河海大学 Detecting device and detecting method for surface evenness of gate
CN106017353A (en) * 2016-07-22 2016-10-12 大连理工大学 Honeycomb core surface shape measuring device
US20170326684A1 (en) * 2015-01-21 2017-11-16 Maxphotonics Corporation Laser marking head and laser marking machine
CN108267093A (en) * 2018-01-18 2018-07-10 江苏泊朗智能科技有限公司 A kind of vehicle tyre pattern depth measuring device for carwash computer room
CN108860884A (en) * 2017-05-10 2018-11-23 福建晟哲自动化科技有限公司 A kind of liquid crystal display panel carrier sense label-sticking mechanism

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104048625A (en) * 2013-03-12 2014-09-17 昆山允可精密工业技术有限公司 Automatic contact instrument used for measuring thin sheet material dimensions
CN104422414A (en) * 2013-09-11 2015-03-18 江苏肯帝亚木业有限公司 Wood floor size measurement device
US20170326684A1 (en) * 2015-01-21 2017-11-16 Maxphotonics Corporation Laser marking head and laser marking machine
CN104776823A (en) * 2015-05-08 2015-07-15 河海大学 Detecting device and detecting method for surface evenness of gate
CN104776823B (en) * 2015-05-08 2017-06-09 河海大学 A kind of detection means and detection method of door surfaces flatness
CN106017353A (en) * 2016-07-22 2016-10-12 大连理工大学 Honeycomb core surface shape measuring device
CN106017353B (en) * 2016-07-22 2019-07-16 大连理工大学 A kind of honeycomb core surface shape measurement device
CN108860884A (en) * 2017-05-10 2018-11-23 福建晟哲自动化科技有限公司 A kind of liquid crystal display panel carrier sense label-sticking mechanism
CN108267093A (en) * 2018-01-18 2018-07-10 江苏泊朗智能科技有限公司 A kind of vehicle tyre pattern depth measuring device for carwash computer room

Similar Documents

Publication Publication Date Title
CN203148401U (en) Contact type automatic thin-board dimension measuring instrument
CN104048625A (en) Automatic contact instrument used for measuring thin sheet material dimensions
CN103398664A (en) Instrument for measuring thickness of thin plate with high bright reflective surface
CN105091802A (en) Portable two-dimensional following laser measurement device based on laser distance measuring sensor
CN203053405U (en) Rapid gear single error field measuring device based on double-face engagement
CN103398688A (en) Instrument for measuring thickness of thin plate with high bright reflective surface
JP6714882B2 (en) Shape measuring device
CN103389046A (en) Automatic thin plate measuring device with compound measuring function
CN104061866A (en) Contact type measuring head and surface high-reflection thin plate thickness measuring method
CN204924205U (en) Portable two -dimentional follow -up laser surveying device based on laser rangefinder sensor
CN111664804A (en) High-precision three-dimensional profile scanning and measuring platform based on glass guide rail
CN103389044A (en) Manual single-measure-head contact-type measuring method for veneer board thickness
CN102901455B (en) Radius of spherical crown quick online detection device
CN203375937U (en) A manual single-measuring head sheet thickness contact measurement device
CN203148391U (en) Contact measuring head
CN101660901B (en) Non-contact scroll saw guide wheel slot type detector
CN102865816A (en) Non-contact automatic detection device for absolute grating ruler overall measuring accuracy
CN203325845U (en) Tool used for wafer surface flatness measurement
CN102840833A (en) Method and device for measuring thickness of wafer
CN203405179U (en) Automatic thin plate measure apparatus with composite measure function
CN203375940U (en) A surface high-brightness reflective sheet thickness measuring apparatus
CN203375938U (en) A surface high-brightness reflective sheet thickness measuring apparatus
CN103398663A (en) Automatic thin plate thickness measuring device with single measuring head
CN203375939U (en) A single-measuring head automatic sheet thickness measuring device
CN112902880A (en) Method and device for measuring parallelism of planar member

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130821

Termination date: 20210312