CN102865816A - Non-contact automatic detection device for absolute grating ruler overall measuring accuracy - Google Patents
Non-contact automatic detection device for absolute grating ruler overall measuring accuracy Download PDFInfo
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- CN102865816A CN102865816A CN2012103755682A CN201210375568A CN102865816A CN 102865816 A CN102865816 A CN 102865816A CN 2012103755682 A CN2012103755682 A CN 2012103755682A CN 201210375568 A CN201210375568 A CN 201210375568A CN 102865816 A CN102865816 A CN 102865816A
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- worktable
- grating ruler
- fixed
- guide rail
- slide unit
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Abstract
The invention discloses a non-contact automatic detection device for absolute grating ruler overall measuring accuracy, and belongs to the field of grating detection. The device comprises a working platform, a collimator, a screw rod, a first reflector, a second reflector, a sliding platform, a grating ruler and a laser interferometer, wherein the collimator is fixed on one side of the working platform, a standard ruler in the grating ruler is disposed on the working platform and parallel to a guide rail of the working platform, a reading head of the grating ruler is disposed in the sliding platform, the screw rod is fixed on the working platform below the collimator, the sliding platform is disposed on the guide rail of the working platform, the screw rod controls the sliding platform to move on the guide rail, the first reflector and the second reflector are fixed on the sliding platform, and the laser interferometer is fixed on the other side of the working platform. By non-contact detection, the device is used for detecting overall measuring accuracy of the grating ruler after processed and mounted, a qualified grating ruler is selected for online real-time detection to guarantee accuracy requirements needed by the grating ruler.
Description
Technical field
The invention belongs to the grating detection field, be specifically related to a kind of contactless automatic detection device of absolute grating scale overall measurement precision.
Background technology
After the absolute grating scale general assembly was finished, the error that each production link of work in-process and assembling link accumulate can impact the optical grating ruler measurement precision, need to detect the grating scale overall accuracy.Existing grating scale overall accuracy detection method adopts the contact type measurement structure more, the contact probe is installed on the Mobile Slide of workbench, read head synchronizing moving with grating scale, precision to grating scale is tested, owing to have friction force, stress deformation and surface blemish, can there be error in testing result.
Summary of the invention
In order to solve problems of the prior art, the invention provides a kind of contactless automatic detection device of absolute grating scale overall measurement precision, this device reduces the error that produces by contactless metering system in testing process.
The technical scheme that technical solution problem of the present invention adopts is as follows:
The contactless automatic detection device of absolute grating scale overall measurement precision, this device comprises: worktable, parallel light tube, leading screw, the first catoptron, the second catoptron, slide unit, grating scale and laser interferometer; Described parallel light tube is fixed on a side of worktable; Gauge in the grating scale is placed on the worktable, and with the guide rail parallel on the worktable, grating ruler reading head is placed in the slide unit; Leading screw is fixed on the worktable of parallel light tube below, and slide unit is placed on the guide rail of worktable, is moved at guide rail by leading screw control slide unit; The first catoptron and the second catoptron are fixed on the slide unit, and laser interferometer is fixed on the opposite side of worktable.
The invention has the beneficial effects as follows: the present invention is used for detecting grating scale processing, assembling overall measurement precision afterwards by non-contact detection, and online the detection in real time selected qualified grating scale, with the required accuracy requirement of assurance grating scale.
Description of drawings
The structural drawing of the contactless automatic detection device of Fig. 1 absolute grating scale overall measurement of the present invention precision.
Among the figure: 1, worktable, 2, parallel light tube, 3, leading screw, the 4, first catoptron, the 5, second catoptron, 6, slide unit, 7, gauge and 8, laser interferometer.
Embodiment
Below in conjunction with drawings and Examples the present invention is described in further details.
As shown in Figure 1, the contactless automatic detection device of absolute grating scale overall measurement precision, this device comprises: worktable 1, parallel light tube 2, leading screw 3, the first catoptron 4, the second catoptron 5, slide unit 6, grating scale and laser interferometer 8; Parallel light tube 2 is fixed on a side of worktable 1; Gauge 7 in the grating scale is placed on the worktable 1, and with the guide rail parallel on the worktable 1, grating ruler reading head is placed in the slide unit 6; Leading screw 3 is fixed on the worktable 1 of parallel light tube 2 belows, and slide unit 6 is placed on the guide rail of worktable 1, is moved at guide rail by leading screw 3 control slide unit 6; The first catoptron 4 and the second catoptron 5 are fixed on the slide unit 6, and laser interferometer 8 is fixed on the opposite side of worktable 1.
Send the collimation directional light by parallel light tube 2 and incide the first catoptron 4 back reflections and return parallel light tube 2, return by detecting only no former road whether slide unit 6 is existed swing in the guide rail direction, eliminate Abbe error.When grating ruler reading head moves with slide unit 6 to gauge 7 readings, laser interferometer 8 is sent detection light and is returned laser interferometer 8 by the second catoptron 5 back reflections on the slide unit 6 simultaneously, displacement to slide unit 6 detects, obtain the actual displacement amount of grating ruler reading head, the data that obtain with grating ruler reading head compare, and obtain the testing result of grating scale overall accuracy.
Claims (2)
1. the contactless automatic detection device of absolute grating scale overall measurement precision is characterized in that, this device comprises: worktable, parallel light tube, leading screw, the first catoptron, the second catoptron, slide unit, grating scale and laser interferometer; Described parallel light tube is fixed on a side of worktable; Gauge in the grating scale is placed on the worktable, and with the guide rail parallel on the worktable, grating ruler reading head is placed in the slide unit; Leading screw is fixed on the worktable of parallel light tube below, and slide unit is placed on the guide rail of worktable, is moved at guide rail by leading screw control slide unit; The first catoptron and the second catoptron are fixed on the slide unit, and laser interferometer is fixed on the opposite side of worktable.
2. the contactless automatic detection device of absolute grating scale overall measurement precision as claimed in claim 1 is characterized in that, the radiation direction of parallel light tube and the guide rail parallel of worktable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103755682A CN102865816A (en) | 2012-09-27 | 2012-09-27 | Non-contact automatic detection device for absolute grating ruler overall measuring accuracy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103755682A CN102865816A (en) | 2012-09-27 | 2012-09-27 | Non-contact automatic detection device for absolute grating ruler overall measuring accuracy |
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| CN102865816A true CN102865816A (en) | 2013-01-09 |
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| CN2012103755682A Pending CN102865816A (en) | 2012-09-27 | 2012-09-27 | Non-contact automatic detection device for absolute grating ruler overall measuring accuracy |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106091992A (en) * | 2016-08-23 | 2016-11-09 | 中冶陕压重工设备有限公司 | Plane milling and boring machine bed ways parallelism detecting device and detection method |
| CN104390586B (en) * | 2014-11-12 | 2017-04-19 | 广东工业大学 | Device and method for detecting geometric errors of single-axis motions of machine tool |
| CN106839997A (en) * | 2017-03-16 | 2017-06-13 | 黑龙江省计量检定测试院 | The detection method of linear grating chi |
| CN112506131A (en) * | 2020-11-09 | 2021-03-16 | 襄阳华中科技大学先进制造工程研究院 | Method for selecting measuring point of numerical control machine tool |
| CN113776439A (en) * | 2021-09-07 | 2021-12-10 | 中国科学院长春光学精密机械与物理研究所 | Method for reducing Abbe error of grating ruler |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH10253318A (en) * | 1997-03-11 | 1998-09-25 | Brother Ind Ltd | Cleaning mechanism of linear encoder |
| CN101288937A (en) * | 2008-05-27 | 2008-10-22 | 深圳市木森科技有限公司 | Numerically controlled machine, grating ruler system and fixing method of grating ruler |
| CN201348846Y (en) * | 2009-01-14 | 2009-11-18 | 深圳市德普施科技有限公司 | Test bed for testing distance and displacement |
-
2012
- 2012-09-27 CN CN2012103755682A patent/CN102865816A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10253318A (en) * | 1997-03-11 | 1998-09-25 | Brother Ind Ltd | Cleaning mechanism of linear encoder |
| CN101288937A (en) * | 2008-05-27 | 2008-10-22 | 深圳市木森科技有限公司 | Numerically controlled machine, grating ruler system and fixing method of grating ruler |
| CN201348846Y (en) * | 2009-01-14 | 2009-11-18 | 深圳市德普施科技有限公司 | Test bed for testing distance and displacement |
Non-Patent Citations (1)
| Title |
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| 陈龙飞等: "《工程测量》", 31 August 1990, article "自准直平行光管应用举例", pages: 219-220 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104390586B (en) * | 2014-11-12 | 2017-04-19 | 广东工业大学 | Device and method for detecting geometric errors of single-axis motions of machine tool |
| CN106091992A (en) * | 2016-08-23 | 2016-11-09 | 中冶陕压重工设备有限公司 | Plane milling and boring machine bed ways parallelism detecting device and detection method |
| CN106091992B (en) * | 2016-08-23 | 2018-09-11 | 中冶陕压重工设备有限公司 | Plane milling and boring machine bed ways parallelism detecting device and detection method |
| CN106839997A (en) * | 2017-03-16 | 2017-06-13 | 黑龙江省计量检定测试院 | The detection method of linear grating chi |
| CN106839997B (en) * | 2017-03-16 | 2019-04-16 | 黑龙江省计量检定测试院 | The detection method of linear grating ruler |
| CN112506131A (en) * | 2020-11-09 | 2021-03-16 | 襄阳华中科技大学先进制造工程研究院 | Method for selecting measuring point of numerical control machine tool |
| CN112506131B (en) * | 2020-11-09 | 2023-02-28 | 襄阳华中科技大学先进制造工程研究院 | Method for selecting measuring point of numerical control machine tool |
| CN113776439A (en) * | 2021-09-07 | 2021-12-10 | 中国科学院长春光学精密机械与物理研究所 | Method for reducing Abbe error of grating ruler |
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Application publication date: 20130109 |