CN203148391U - Contact measuring head - Google Patents
Contact measuring head Download PDFInfo
- Publication number
- CN203148391U CN203148391U CN2013201257979U CN201320125797U CN203148391U CN 203148391 U CN203148391 U CN 203148391U CN 2013201257979 U CN2013201257979 U CN 2013201257979U CN 201320125797 U CN201320125797 U CN 201320125797U CN 203148391 U CN203148391 U CN 203148391U
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- guide rail
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Abstract
The utility model discloses a contact measuring head comprising a measuring head installation seat, a probe, a square air guide rail, a laser displacement sensor and a grating ruler. The measuring head installation seat is fixed with a measuring head mounting bottom plate which is fixed with the square air guide rail. The square air guide rail comprises a guide core and a square guide rail guide seat which is sleeved on the guide core. The top of the guide core is provided with an air inlet, and the bottom of the guide core is fixed with the probe. One outer side face of the square guide rail guide seat is provided with a square guide rail air inlet. The square guide rail guide seat is internally provided with an air guide groove, and four inner side faces of the air guide groove are provided with guide face openings. Compressed air in the air guide groove enters into the guide face openings and a gas film layer is formed between the square guide rail guide seat and the guide core. According to the contact measuring head, the high precision measuring head with accurate and controllable measuring force is employed to carry out the thickness measurement of highly reflective material, and technical problems existing in the non contact measurement are completely eliminated.
Description
Technical field
The utility model relates to detection range, is specifically related to a kind of contact measuring head.
Background technology
In industries such as semiconductor, sun power, optical glass, there is the large-tonnage product surface to have the reflective characteristic of high brightness.As the chip substrates in the semicon industry, generally below 0.3mm, material is stainless steel substrates, nickel sheet, nickel alloy sheet, electroforming sheet etc. to thickness.According to the performance requirement difference, need just can be processed into finished product at last through operations such as electroforming, plating, polishing, etchings, no matter be starting material, semi-manufacture or finished product, its surface all is highlighted reflective characteristic.And the wafer in the sun power industry (wafer), itself constituted by 4 layer materials, the 1st layer to be wafer layer, the 2nd layer be adhesive tape for glass, the 4th layer for bonding agent, the 3rd layer, be made into the wafer finished product by process for pressing between each layer, guarantee the final finished thickness evenness, just need thickness evenness, especially wafer layer and glassy layer after each layer of control is laminated, the surface all has the reflective even transparent characteristic of high brightness.All kinds of eyeglasses in the optical glass industry except from as the transparent material, have the reflective characteristic of high brightness equally.Along with market proposes more and more higher requirement to the sector properties of product, the quality control of key characters such as the thickness of these basic materials is more and more stricter, to guarantee the Performance And Reliability of final finished.
Has the material of the reflective characteristic of high brightness at these, method for measuring thickness generally all was to measure by contactless measurement in the past, measuring principle is for to send a branch of light by laser displacement sensor, beat at material surface, to reflect at an angle with incident beam, received by laser displacement sensor signal receive window.If material surface is rough and uneven in surface, then can be directly reflected into receive window, and by inner scale, measure the displacement variable that institute's feedback beam produces because material surface is uneven in real time, by machine vision and image processing techniques, can calculate the concrete numerical value of this variable quantity, finally calculate light sheet thickness.During measurement, be earlier that the calibrated bolck of A is placed on the support platform of measuring between the upper and lower gauge head of station with thickness, the thickness of measurement standard piece is to carry out the school Z-operation to measuring system.Suppose that tested sheet steel thickness is δ, then actual measured object thickness is δ=A-(x-a)-(y-b).This measuring method is when measuring at the material thickness with the reflective characteristic of high brightness, and the material surface micromechanism shows as similar " wrinkle " shape characteristic.As shown in Figure 1, this micromechanism size is often at 10um even more among a small circle, but is enough to the laser beam reflection angle is affected greatly, and directly causes measuring accuracy to descend.In addition, because machine vision and image processing techniques develop into today, minimum resolution can only arrive submicron order, make the measuring accuracy difficulty of final accurate thin material that breakthrough be arranged, and high-end electronic product market is more and more higher to the properties of product requirement, thereby all kinds of light sheets that are used for the circuit base material have also been proposed higher quality requirements.The conventional thickness measuring method is difficult to satisfy the high-acruracy survey demand.
The utility model content
Technical problem to be solved in the utility model is to solve the problem that the high anti-light sheet tool for measuring thickness in surface is difficult to satisfy the high-acruracy survey demand.
In order to solve the problems of the technologies described above, the technical scheme that the utility model adopts provides a kind of contact measuring head, comprise the gauge head mount pad, probe, square air guide rail, laser displacement sensor and grating chi, fixedly there is gauge head that base plate is installed on the described gauge head mount pad, described gauge head is installed on the base plate fixedly square air guide rail, fixedly there is the air guide rail air inlet seat described square air guide rail upper end, described air guide rail air inlet seat is provided with air guide rail and leads the core air connector, described square air guide rail comprises leads core and is enclosed within described square rail guide holder of leading on the core, the described core top of leading is provided with air intake opening, fixedly there is described probe the bottom, a lateral surface of described square rail guide holder has the square rail air intake opening, be provided with air slot in the described square rail guide holder, have the spigot surface opening on four medial surfaces, pressurized air in the described air slot enters the spigot surface opening and at described square rail guide holder with lead and form the air film layer between the core, be with precision spring on the described probe, fixedly there is the ruby ball on contact workpiece surface the bottom of described probe, described grating chi is fixed in described top of leading core, causes the core displacement of vertical movement up and down by measuring described probe with the described laser displacement sensor of the parallel installation of described grating chi with the workpiece surface appearance variation.
In above-mentioned contact measuring head, fixedly there is the sensing data transmission cable that is connected with described laser displacement sensor on the top that described gauge head is installed base plate.
In above-mentioned contact measuring head, described gauge head is installed base plate and is comprised the top board of upper end and the base plate of bottom.
In above-mentioned contact measuring head, described laser displacement sensor is fixed on described gauge head by the sensor installing plate and installs on the base plate.
The contact measuring head that the utility model provides, ergometry are accurately controlled, have got rid of the existing technical matters of non-contact measurement fully.Be limited by the development of machine vision and image processing techniques than the optical measurement precision, take the measuring accuracy of contact type measurement higher, this method provides the optimization solution for the high-end product thickness measure that material surface in the industries such as semiconductor, sun power, optical glass has the reflective characteristic of high brightness.
Description of drawings
Fig. 1 influences synoptic diagram for the surface microstructure that the utility model provides to reflective light beam, wherein: 1. the measured object that has micromechanism; 2. actual reflective light beam; 3. receipts light window; 4. laser displacement sensor; 5. luminescence window; 6. theoretical reflective light beam; 7. emission light beam.
The accurate contact measuring head synoptic diagram that Fig. 2 provides for the utility model, wherein: 15. probes; 16. precision spring; 17. square air guide rail; 18. air guide rail air inlet seat; 19. laser displacement sensor; 20. laser displacement sensor gib screw; 21. top board; 22. sensing data transmission cable; 23. pickup wire cable joint; 24. sensor installing plate; 25. grating chi; 26. air guide rail is led the core air connector; 27. gauge head mount pad; 28. gauge head mounting screw; 29. gauge head is installed base plate; 30. base plate.
The square air guide rail synoptic diagram that Fig. 3 provides for the utility model, wherein: 34. lead core; 35. square rail air intake opening; 36. lead the core air intake opening; 37. square rail guide holder.
Fig. 4 is the high anti-light sheet method for measuring thickness synoptic diagram in surface provided by the invention, wherein: 38. times contact measuring heads; 39. Workpiece carrier platform; 40. last contact measuring head; 41. calibrated bolck; Simplify body 42. lead core.
Embodiment
Below in conjunction with accompanying drawing the utility model is made detailed explanation.
As Fig. 2, shown in Figure 3, the contact measuring head that the utility model provides comprises gauge head mount pad 27, probe 15, square air guide rail 17, laser displacement sensor 19 and grating chi 25, fixedly there is gauge head that base plate 29 is installed on the gauge head mount pad 27, gauge head is installed on the base plate 29 fixedly square air guide rail 17, fixedly there is air guide rail air inlet seat 18 square air guide rail 17 upper ends, air guide rail air inlet seat 18 is provided with air guide rail and leads core air connector 26, square air guide rail 17 comprises leads core 34 and is enclosed within the square rail guide holder 37 of leading on the core 34, lead core 34 tops and be provided with air intake opening, fixedly there is probe 15 bottom, a lateral surface of square rail guide holder 37 has the square rail air intake opening, be provided with air slot in the square rail guide holder 37, have the spigot surface opening on four medial surfaces, pressurized air in the air slot enters the spigot surface opening and at square rail guide holder 37 with lead and form the air film layer between the core 34, be with precision spring 16 on the probe 15, fixedly there is the ruby ball on contact workpiece surface the bottom of probe 15, grating chi 25 is fixed in the top of leading core 34, changes the displacement that causes core vertical movement about in the of 34 with workpiece surface appearance by measuring probe 15 with the laser displacement sensor 19 of grating chi 25 parallel installations.
Gauge head is installed base plate 29 and is comprised the top board 21 of upper end and the base plate 30 of bottom, and fixedly there is the sensing data transmission cable 22 that is connected with laser displacement sensor 19 on the top that gauge head is installed base plate 29.Laser displacement sensor 19 is fixed on gauge head by sensor installing plate 24 and installs on the base plate 29.
Describe measuring process below in detail: be supplied to the pressurized air of leading core 34 inside that core 34 inner power P vertically downward of generation can led, as shown in Figure 4, leading core 34 self gravitations is G, under the combined action of these two power vertically downward, to push precision spring 16 downwards, precision spring 16 will produce a reacting force F who makes progress thereupon, be supplied to the pressurized air air pressure of leading core 34 by accurate control, then can accurately control the size of power P vertically downward, thereby realize leading core 34 mechanical balance in vertical direction, be installed in this moment in the mechanical balance state that the probe 15 of leading core 34 lower ends is in vertical direction equally.
When the ruby ball of probe 15 lower ends touched surface of the work, then measured workpiece can have an acting force that upwards promotes probe 15 moment, if probe 15 rigidly connects when this reacting force is big when touching surface of the work, then easily surface of the work was damaged.Therefore, must before probe 15 contact workpiece surfaces, accurately regulate pressure P, make probe 15 in contact process, be in the mechanical balance state of vertical direction.And for the ruby ball on the probe 15 keeps in touch state with surface of the work all the time, can micro-increase power P, make probe 15 act on downwards that power is slightly larger than its reacting force on the surface of the work.According to surface of the work characteristic difference, control is supplied to the pressurized air air pressure of leading core 34 suitably, thereby the size of accurate control P, realize that the ruby ball and the surface of the work that guarantee probe 15 ends in the measuring process all the time keep in touch, and the relative surface of the work of this contact force is of moderate size, guarantee invariable at each measurement point ergometry of workpiece, to guarantee the duplicate measurements precision.
Before the measurement, following contact measuring head upwards pushes up probe 15, and makes precision spring 16 be in micro-compressive state because of upwards blow gas pressure effect, and this moment, precision spring 16 decrements were H0, and while probe 15 exceeds the Workpiece carrier platform and also is H0.Be installed on the Z axle perpendicular to measured workpiece and go up contact measuring head, pressure, gravity and the precision spring 16 of blowing downwards in gauge head is because being acted on simultaneously under the upwards retroaction acting in conjunction that produces by blow gas pressure and gravity, be in the mechanical balance state in vertical direction, this moment, the Z shaft position was Z0.Before measuring actual light sheet, employing thickness is that the calibrated bolck of A comes measuring system is calibrated, this calibrated bolck is placed in the Workpiece carrier platform, at this moment, the calibrated bolck lower surface will be pushed down down the probe 15 of contact measuring head, make this gauge head that the displacement of a H1 be arranged, in measuring system, will be worth as under the zero-bit of contact measuring head.Move downward under the Z axle drives and go up contact measuring head, touch the upper surface of calibrated bolck up to probe 15, suppose to move to and move downward the Z1 position, this moment downward blow gas pressure, probe 15 self gravitations and upwards precision spring 16 reacting forces, surface of the work reacting force etc. at this everywhere in mechanical balance, the displacement that makes progress of probe 15 is (Z1-Z0), also be the decrement of precision spring 16, accurately read by the laser displacement sensor 19 of last contact measuring head.At this moment, measuring system accurately obtains when measurement thickness is the calibrated bolck of A, parameters such as the displacement reading of the zero-bit of following contact measuring head and last contact measuring head, blow gas pressure.Upwards lift contact measuring head and turn back to the Z0 position, remove calibrated bolck, replace with tested light sheet, the thickness of supposing this light sheet is L.Then descend the probe 15 of contact measuring head suppressed by this workpiece, the displacement that produces is H2, then explanation down gauge head because character of surface different changing value when causing with calibrated bolck compacting probe 15, actual should below the make progress variation in thickness of relative standard's piece be (H2-H1).The upper surface of last gauge head contact workpiece under the Z axle drives, and keep air blowing power constant, this moment, the Z axial translation was Z2, actual precision spring 16 decrements are (Z2-Z0).Then can draw following relation:
(Z1-Z0)+A+H1=(Z2-Z0)+L+H2
The one-tenth-value thickness 1/10 L=(Z1-Z0) of tested light sheet+A+H1-(Z2-Z0)-H2=A+Z1-Z2+H1-H2 then.Upper and lower contact measuring head is real-time transmitted to measuring system with measured value, and measuring system will calculate the actual (real) thickness value of this light sheet fast according to above-mentioned formula.This one-tenth-value thickness 1/10 and this batch light sheet thickness quality control line are compared, in case find that this value is not in the light sheet thickness quality index control line that arranges in advance, then system can report to the police automatically, this light sheet will be used as unacceptable product and handle, when it enters the discharging station, then be moved out of measuring system, if qualified then it is handled as certified products, be placed on the certified products district, carry out the measurement of next light sheet again, move in circles.
Contact measuring head disclosed in the utility model affects greatly, directly causes problems such as measuring accuracy decline, measured value instability because of surface microstructure in the time of solving high-end product thickness that material surface in the industries such as semiconductor, sun power, optical glass in the past has the reflective characteristic of high brightness and adopt non-contact measurement to the reflective angle of laser beam.And be limited by the development of machine vision and image processing techniques than the traditional optical measuring accuracy, take the measuring accuracy of contact type measurement higher, this method provides the optimization solution for the high-end product thickness measure that material surface in the industries such as semiconductor, sun power, optical glass has the reflective characteristic of high brightness.
The utility model is not limited to above-mentioned preferred forms, and anyone should learn the structural change of making under enlightenment of the present utility model, every with the utlity model has identical or close technical scheme, all fall within the protection domain of the present utility model.
Claims (4)
1. contact measuring head, it is characterized in that, comprise the gauge head mount pad, probe, square air guide rail, laser displacement sensor and grating chi, fixedly there is gauge head that base plate is installed on the described gauge head mount pad, described gauge head is installed on the base plate fixedly square air guide rail, fixedly there is the air guide rail air inlet seat described square air guide rail upper end, described air guide rail air inlet seat is provided with air guide rail and leads the core air connector, described square air guide rail comprises leads core and is enclosed within described square rail guide holder of leading on the core, the described core top of leading is provided with air intake opening, fixedly there is described probe the bottom, a lateral surface of described square rail guide holder has the square rail air intake opening, be provided with air slot in the described square rail guide holder, have the spigot surface opening on four medial surfaces, pressurized air in the described air slot enters the spigot surface opening and at described square rail guide holder with lead and form the air film layer between the core, be with precision spring on the described probe, fixedly there is the ruby ball on contact workpiece surface the bottom of described probe, described grating chi is fixed in described top of leading core, causes the core displacement of vertical movement up and down by measuring described probe with the described laser displacement sensor of the parallel installation of described grating chi with the workpiece surface appearance variation.
2. contact measuring head as claimed in claim 1 is characterized in that, fixedly there is the sensing data transmission cable that is connected with described laser displacement sensor on the top that described gauge head is installed base plate.
3. contact measuring head as claimed in claim 1 is characterized in that, described gauge head is installed base plate and comprised the top board of upper end and the base plate of bottom.
4. contact measuring head as claimed in claim 1 is characterized in that, described laser displacement sensor is fixed on described gauge head by the sensor installing plate and installs on the base plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013201257979U CN203148391U (en) | 2013-03-19 | 2013-03-19 | Contact measuring head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013201257979U CN203148391U (en) | 2013-03-19 | 2013-03-19 | Contact measuring head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203148391U true CN203148391U (en) | 2013-08-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013201257979U Expired - Fee Related CN203148391U (en) | 2013-03-19 | 2013-03-19 | Contact measuring head |
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| Country | Link |
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| CN (1) | CN203148391U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104061866A (en) * | 2013-03-19 | 2014-09-24 | 昆山允可精密工业技术有限公司 | Contact type measuring head and surface high-reflection thin plate thickness measuring method |
| CN105387810A (en) * | 2015-10-20 | 2016-03-09 | 四川大学 | Electromagnetic bearing self-tilting micrometric displacement sensor system with controllable measuring force |
| CN113819854A (en) * | 2021-11-24 | 2021-12-21 | 中国飞机强度研究所 | Device and method for measuring deformation of aircraft skin in extreme cold weather test |
-
2013
- 2013-03-19 CN CN2013201257979U patent/CN203148391U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104061866A (en) * | 2013-03-19 | 2014-09-24 | 昆山允可精密工业技术有限公司 | Contact type measuring head and surface high-reflection thin plate thickness measuring method |
| CN105387810A (en) * | 2015-10-20 | 2016-03-09 | 四川大学 | Electromagnetic bearing self-tilting micrometric displacement sensor system with controllable measuring force |
| CN113819854A (en) * | 2021-11-24 | 2021-12-21 | 中国飞机强度研究所 | Device and method for measuring deformation of aircraft skin in extreme cold weather test |
| CN113819854B (en) * | 2021-11-24 | 2022-02-08 | 中国飞机强度研究所 | Device and method for measuring deformation of aircraft skin in extreme cold weather test |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130821 Termination date: 20210319 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |