CN101504273B - Measuring apparatus and method for object plane micro-nano dimension - Google Patents
Measuring apparatus and method for object plane micro-nano dimension Download PDFInfo
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- CN101504273B CN101504273B CN 200910056935 CN200910056935A CN101504273B CN 101504273 B CN101504273 B CN 101504273B CN 200910056935 CN200910056935 CN 200910056935 CN 200910056935 A CN200910056935 A CN 200910056935A CN 101504273 B CN101504273 B CN 101504273B
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Abstract
The invention relates to a device and a method for measuring the micro-nano dimension of an object plane. The device is characterized by comprising a nano positioning measuring machine, an optical microscope measuring head and a data processor, wherein three miniature plane mirror interferometers and two angle sensors are arranged inside a box body of the nano positioning measuring machine to realize metric positioning and measurement; a fixed support is vertically supported on one side of the box body of the nano positioning measuring machine, and the optical microscope measuring head is arranged at the other end of the fixed support; and an object to be measured and an object stage are arranged below the optical microscope measuring head. The method comprises that: after the object to be measured is subjected to imaging by the optical microscope measuring head, image data is transferred to the data processor, and the data processor performs numeric conversion on the received data, acquires a gray scale image of the object to be measured in a visual field of the optical microscope measuring head, sets the linewidth direction in the gray scale image, sets regions along the direction, calculates the mean arithmetical value of the gray scale of various pixel points in the regions, performs numeric conversion on the mean arithmetical value of the gray scale, and transmits the acquired data to the nano measuring machine.
Description
Technical field
The present invention relates to measurement mechanism and measuring method thereof little in little, the nano measurement field, nano-scale based on the plane of nanometer positioning measuring machine and optical microscope.
Background technology
Continuous progress along with Micrometer-Nanometer Processing Technology, microcircuit, micro optical element, micromechanics and other various microstructures constantly occur, device feature size constantly reduces with related with it tolerance, and its shape and structure complexity constantly increases, and this just proposes higher requirement to the detection means of geometric sense in the process.In semi-conductor industry, the device accuracy of detection of requirement has reached sub-micron or nanometer level, and this has just proposed urgent requirement to having high-precision measurement mechanism and method.
Present detection means has atomic force probe method, optical measuring technique etc.The atomic force probe method is measured live width, line interval etc., at first needs to determine the direction of scanning, must obtain live width and line spacing distance accurately along orthogonal directions scanning ability energy measurement.Need repeatedly scan and calculate scanning angle at last in order to seek correct direction of scanning, whole process is loaded down with trivial details, and the time is long.And optical measurement means such as live width instrument, line-spacing instrument etc., because the restriction of optical lens, in order to improve resolution, need to improve enlargement factor, but the visual field can reduce along with the increase of enlargement factor, the visual field is limited when causing measuring, and can't disposablely obtain the plane pattern of whole testee, and that can directly detect is limited in scope.
The present invention is for avoiding the existing weak point of above-mentioned prior art, proposed that a kind of plane based on nanometer positioning measuring machine and optical microscope gauge head is little, the measuring method of nano-scale, this new measuring method makes that the time of seeking the direction of scanning is shorter, the measurement range of pick-up unit is bigger, and the result of measurement can trace to the source.
Summary of the invention
Technical matters to be solved by this invention is: propose that a kind of object plane is little, the measuring method of nano-scale and device, fast live width, line are carried out at interval etc. the measurement that can trace to the source in being implemented on a large scale.
The technical solution adopted for the present invention to solve the technical problems is: based on a nanometer positioning measuring machine platform, utilize the optical microscope gauge head to the testee imaging, obtain the gray scale arithmetic mean value in the testee zones of different, the planar dimension of microstructure is measured.
The nanometer positioning measuring machine that object plane is little, use in the nano-scale measuring method (model of producing as German SIOS company is the nanometer positioning measuring machine of NMM-1), utilize three miniature planar mirror interferometers, two angular transducers make to measure and have all eliminated Abbe error in three directions through suitable setting and installation.Testee is placed on movably on the article carrying platform, the position of article carrying platform determines that with three miniature planar mirror interferometers optical maser wavelength, bearing accuracy 0.1nm can directly be traceable in the displacement that article carrying platform moves, uncertainty 10nm, scope 25mm * 25mm * 5mm.
The optical microscope gauge head that object plane is little, use in the nano-scale measuring method comprises light source, optics compound lens, manual focusing arrangement, numerical control assembly with an automatic light meter, CCD.Described optical microscope gauge head is the top that is fixed on nano-measuring machine by the fixed support that is arranged on nano-measuring machine top.Optical measuring head CCD is sent to data processor with view data in the gauge head field of view.
The work that data processor is finished mainly contains: gradation conversion, direction are determined, the area grayscale arithmetic mean calculates, digital-to-analog conversion.
Testee is after the optical measuring head imaging, and view data is sent to data processor, and data processor carries out the numerical value conversion with the data that receive and obtains the gray-scale map of testee in the optical measuring head visual field, can set the direction of live width in gray-scale map,
(afterwards scanning along carry out vertical with the live width direction), the gray scale arithmetic mean in this zone is calculated in the zone of setting cross direction along the line then, and this gray scale arithmetic mean is sent to nano-measuring machine after digital-to-analog conversion.Nano-measuring machine just can obtain position coordinates and gray scale arithmetic mean one to one.
Testee is scanned along the direction vertical with live width, can obtain position coordinates and gray-scale value figure, have among the figure gray scale arithmetic mean change greatly the coordinate position of this feature just correspondence the live width marginal position.The difference of the horizontal ordinate of two live width marginal positions is exactly the actual linewidth value.
The present invention is based on nanometer positioning measuring machine platform, utilize the optical microscope gauge head can realize measurement range 25mm * 25mm, measuring accuracy 0.2 μ m. is along with the lifting of the resolution of optical microscope gauge head, and measuring accuracy also can improve.
The present invention adopts that the plane is little, the beneficial effect of nano-scale measuring method is, has quickened the searching scanning angle, has expanded the scope of the measuring object of other measurement means such as optical measurement, realizes measurement and sign to characteristic parameter such as between live width, line.Solved, the measuring method of nano-scale little to the plane in field of semiconductor processing and manufacturing and the active demand of device, achievement in research has important application prospects and practical value, and is significant for the raising of technology that promotes micro-processing technology and precision.
Description of drawings
Fig. 1 is apparatus of the present invention structural representations;
Fig. 2 is nanometer positioning measuring machine of the present invention and fixed support synoptic diagram;
Fig. 3 a, 3b are scanning process synoptic diagram of the present invention;
Fig. 4 a, 4b are live width scanning curve synoptic diagram, are ordinate with the gray scale arithmetic mean, and scanning distance is a horizontal ordinate;
Fig. 5 is a body surface distance and scanning distance relation synoptic diagram;
Fig. 6 a, 6b are line interval scan curve synoptic diagrams, are ordinate with the gray scale arithmetic mean, and scanning distance is a horizontal ordinate.
Among the figure: 1, directions X miniature planar mirror interferometer; 2, Y direction miniature planar mirror interferometer; 3, Z direction miniature planar mirror interferometer; 4, zero thermal expansion support; 5, fixed support; 6, nanometer positioning measuring machine; 7, objective table; 8, testee; 9, optical microscope gauge head.
Embodiment
The present invention will be further described below in conjunction with the drawings and specific embodiments.
Embodiment 1:
The inventive method is measured the micro/nano level live width, and it is as follows to comprise step:
(1) testee is placed on the objective table of nano-measuring machine, the focus control of regulating optical measuring head then makes the measured object surface basic on the focal plane of optical measuring head.
(2) after focusing is finished, testee is after the optical measuring head imaging, view data is sent to data processor, data processor carries out the numerical value conversion with the data that receive and obtains the gray-scale map of testee in the optical measuring head visual field, in gray-scale map, set the direction of live width, set zone then, calculate the gray scale arithmetic mean of each pixel in the described zone, and described gray scale arithmetic mean is sent to nano-measuring machine after digital-to-analog conversion along this direction.
(3) on this basis, the Z direction motion of locking nano-measuring machine, the control nano-measuring machine is with certain speed (vertical with the live width direction) mobile article carrying platform in a certain direction, measured object is scanned, and write down the coordinate position of each analyzing spot and this moment, data processor sent gray scale arithmetic mean.In scanning process, shown in Fig. 3 a, along with moving of article carrying platform, the change in location of the relative optical microscope of testee is seen Fig. 3 b, is used to calculate the zone of gray scale arithmetic mean also mobile thereupon.
(4) first coordinate position with record is that reference point is calculated the horizontal range of relative first coordinate position of each coordinate position of record subsequently.
(5) utilizing programming software (as the Matlab of U.S. The MathWorks company etc.) to draw distance and gray scale arithmetic mean curve, is ordinate with the gray scale arithmetic mean, and distance is the coordinate system of horizontal ordinate.The actual curve that obtains is compared with figure below can be jagged, but can not influence result of calculation.If imaging is not vertical with body surface, measuring distance be converted to the body surface actual range, as shown in Figure 5.
(6) in distance of drawing and gray scale arithmetic mean curve, in the front and back of the marginal position of live width, the gray scale arithmetic mean has bigger variation.Have the gray scale arithmetic mean change greatly this zone just correspondence the live width fringe region.
If the regional luminance height that the position is high is then shown in Fig. 4 a.
X among the figure
1The oblique line gray scale arithmetic mean at institute corresponding point place is from G
1Be elevated to G
2, reflection be exactly that the zone of gray scale arithmetic mean correspondence enters into the live width district from non-live width district.X among the figure
2The oblique line gray scale arithmetic mean at institute corresponding point place is from G
2Be reduced to G
1, reflection be exactly that the zone of gray scale arithmetic mean correspondence enters into the live width district from non-live width district.
If the regional luminance height that the position is low is then shown in Fig. 4 b.
X among the figure
1The oblique line gray scale arithmetic mean at institute corresponding point place is from G
2Be reduced to G
1, reflection be exactly that the zone of gray scale arithmetic mean correspondence enters into the live width district from non-live width district.X among the figure
2The oblique line gray scale arithmetic mean at institute corresponding point place is from G
1Be elevated to G
2, reflection be exactly that the zone of gray scale arithmetic mean correspondence enters into the live width district from non-live width district.
Reference standard extracts the specified altitude closest approach of two oblique lines, this distance between two points just corresponding be used to calculate the gray scale arithmetic mean the zone move to another edge from an edge of live width.
ΔX＝X
1-X
2
Calculate the relative position Δ X of two points, Here it is moves to the distance of another boundary scan process to the zone that is used to calculate the gray scale arithmetic mean from an edge of live width.
(7) as shown in Figure 5, the plane of scanning motion and body surface not necessarily coincide, and angle is θ, and there are the cosine relation of this angle θ in scanning distance and body surface actual range.
ΔL＝ΔX/cosθ
Calculate body surface actual range Δ L and just finished measurement of the present invention.
Embodiment 2:
The inventive method is measured the micro/nano level line at interval, and it is as follows to comprise step:
(1) testee is placed on the objective table of nano-measuring machine, the focus control of regulating optical measuring head then makes the measured object surface basic on the focal plane of optical measuring head.
(2) after focusing is finished, testee is after the optical measuring head imaging, view data is sent to data processor, data processor carries out the numerical value conversion with the data that receive and obtains the gray-scale map of testee in the optical measuring head visual field, in gray-scale map, set the direction of live width, set zone then, calculate the gray scale arithmetic mean of each pixel in the described zone, and described gray scale arithmetic mean is sent to nano-measuring machine after digital-to-analog conversion along this direction.
(3) on this basis, the Z direction motion of locking nano-measuring machine, the control nano-measuring machine is with certain speed (vertical with the live width direction) mobile article carrying platform in a certain direction, measured object is scanned, and write down the coordinate position of each analyzing spot and this moment, data processor sent gray scale arithmetic mean.In scanning process, as shown in Figure 2, along with moving of article carrying platform, the change in location of the relative optical microscope of testee is used to calculate the zone of gray scale arithmetic mean also mobile thereupon.
(4) first coordinate position with record is that reference point is calculated the horizontal range of relative first coordinate position of each coordinate position of record subsequently.
(5) utilizing programming software (as the Matlab of U.S. The MathWorks company etc.) to draw distance and gray scale arithmetic mean curve, is ordinate with the gray scale arithmetic mean, and distance is the coordinate system of horizontal ordinate.The actual curve that obtains can be jagged, but can not influence result of calculation.If imaging is not vertical with body surface, measuring distance be converted to the body surface actual range, as shown in Figure 5.
(6) in distance of drawing and gray scale arithmetic mean curve, in the front and back of the marginal position of live width, the gray scale arithmetic mean has bigger variation.Have the gray scale arithmetic mean change greatly this zone just correspondence the live width fringe region.
If the regional luminance height that the position is high is then shown in Fig. 6 a.
X among the figure
1The oblique line gray scale arithmetic mean at institute corresponding point place is from G
1Be elevated to G
2, reflection be exactly that the zone of gray scale arithmetic mean arithmetic mean value correspondence enters into first live width district from first non-live width district.X among the figure
2The oblique line gray scale arithmetic mean at institute corresponding point place is from G
3Be reduced to G
4, reflection be exactly that the zone of gray scale arithmetic mean value correspondence enters into second live width district from first non-live width district.
If the regional luminance height that the position is low is then shown in Fig. 6 b.
X among the figure
1The oblique line gray scale arithmetic mean at institute corresponding point place is from G
2Be reduced to G
1, reflection be exactly that the zone of gray scale arithmetic mean value correspondence enters into first live width district from first non-live width district.X among the figure
2The oblique line gray scale arithmetic mean at institute corresponding point place is from G
3Be reduced to G
4, reflection be exactly that the zone of gray scale arithmetic mean value correspondence enters into second live width district from second non-live width district.
Reference standard extracts the specified altitude closest approach of two oblique lines, and the zone that these 2 just corresponding is used to calculate the gray scale arithmetic mean moves to the corresponding edge of another live width from an edge of live width.
ΔX＝X
1-X
2
X
1, X
2Be respectively two spot scan distances of live width scanning curve,
Calculate the relative position Δ X of two points, Here it is moves to the distance of another boundary scan process to the zone that is used to calculate the gray scale arithmetic mean from an edge of live width.
(7) as shown in Figure 5, the plane of scanning motion and body surface not necessarily coincide, and angle is θ, and there are the cosine relation of this angle θ in scanning distance and body surface actual range.
ΔL＝ΔX/cosθ
Calculate body surface actual range Δ L and just finished measurement of the present invention.
Can scan a plurality of live widths during scan line spacings, the zone that is used to calculate the gray scale arithmetic mean be moved at interval the corresponding edge of another live width from an edge of live width through n line.Calculate the relative position Δ X of two points, Here it is moves to the distance of another boundary scan process at interval to the zone that is used to calculate the gray scale arithmetic mean through n line from an edge of live width.Calculate body surface actual range Δ L, calculate Δ D=Δ L/n again and just finished line measurement at interval.
Claims (2)
1. an object plane is little, the measuring method of nano-scale, it is characterized in that: it comprises the nanometer positioning measuring machine, optical microscope gauge head and data processor, be provided with three miniature planar mirror interferometers and two angular transducers in the nanometer positioning measuring machine casing, utilize miniature planar mirror interferometer and angular transducer to realize the location and the measurement of metering property, nanometer positioning measuring machine casing one its fixed support of side vertical support, the support bracket fastened other end is installed the optical microscope gauge head, be testee and objective table under the optical microscope gauge head, they are bearing in the nano-measuring machine tank surface simultaneously; The function of data processor: gradation conversion, direction are determined, the area grayscale arithmetic mean calculates and digital-to-analog conversion, testee is after the imaging of optical microscope gauge head, view data is delivered to data processor, data processor carries out the numerical value conversion with the data that receive and obtains the gray-scale map of testee in optical microscope gauge head visual field, in gray-scale map, set the live width direction, set zone then along this direction, calculate the gray scale arithmetic mean of each pixel in the described zone, and described gray scale arithmetic mean is sent to nano-measuring machine after digital-to-analog conversion; It is as follows that this method measurement live width comprises step:
(1) testee is placed on the objective table of nano-measuring machine, the focus control of regulating optical measuring head then makes the measured object surface basic on the focal plane of optical measuring head;
(2) after focusing is finished, testee is after the imaging of optical microscope gauge head, view data is sent to data processor, data processor carries out the numerical value conversion with the data that receive and obtains the gray-scale map of testee in the optical measuring head visual field, in gray-scale map, set the direction of live width, set zone then, calculate the gray scale arithmetic mean of each pixel in the described zone, and described gray scale arithmetic mean is sent to nano-measuring machine after digital-to-analog conversion along this direction;
(3) on this basis, the Z direction motion of locking nano-measuring machine, the control nano-measuring machine moves article carrying platform with certain speed along the direction vertical with the live width direction, measured object is scanned, and write down the coordinate position of each analyzing spot and this moment, data processor sent gray scale arithmetic mean, in scanning process, along with moving of article carrying platform, the change in location of the relative optical microscope of testee is used to calculate the zone of gray scale arithmetic mean also mobile thereupon;
(4) first coordinate position with record is that reference point is calculated the horizontal range of relative first coordinate position of each coordinate position of record subsequently;
(5) drawing distance and gray scale arithmetic mean curve, is ordinate with the gray scale arithmetic mean, and distance is the coordinate system of horizontal ordinate, and the actual curve that obtains can be jagged, but can not influence result of calculation; If imaging is not vertical with body surface, measuring distance be converted to the body surface actual range;
(6) in distance of drawing and gray scale arithmetic mean curve, in the front and back of the marginal position of live width, the gray scale arithmetic mean has bigger variation, have the gray scale arithmetic mean change greatly this zone just correspondence the live width fringe region;
Reference standard extracts the specified altitude closest approach of two oblique lines, this distance between two points just corresponding be used to calculate the gray scale arithmetic mean the zone move to another edge from an edge of live width;
Δx＝x
1-x
2，
x
1, x
2Be respectively two spot scan distances of live width scanning curve,
Calculate the relative position Δ x of two points, Here it is moves to the distance of another boundary scan process to the zone that is used to calculate the gray scale arithmetic mean from an edge of live width;
(7) if imaging not with the testee Surface Vertical, the plane of scanning motion and body surface not necessarily coincide, angle is θ, there are the cosine relation of this angle θ in scanning distance and body surface actual range:
ΔL＝Δx/cosθ。
2. object plane according to claim 1 is little, the measuring method of nano-scale, it is characterized in that: measurement range is at 25 * 25mm, and measuring accuracy is at 0.2 μ m.
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101968350B (en) * | 2010-09-07 | 2012-05-23 | 上海市计量测试技术研究院 | Orthogonal angle extracting method with two-dimensional line interval |
| TWI461653B (en) * | 2013-02-06 | 2014-11-21 | Inotera Memories Inc | Method for measuring size of specimen |
| CN105043269B (en) * | 2015-07-08 | 2017-09-29 | 上海与德通讯技术有限公司 | The measuring method and electronic equipment of a kind of dimension of object |
| CN107478155A (en) * | 2017-08-24 | 2017-12-15 | 苏州光照精密仪器有限公司 | Product inspection method, apparatus and system |
| CN108021838A (en) * | 2017-12-07 | 2018-05-11 | 曹建 | Object plane dimension measurement method and system |
| JP6979885B2 (en) * | 2018-01-17 | 2021-12-15 | 株式会社ミツトヨ | 3D shape auto trace method and measuring machine |
| CN108981577A (en) * | 2018-06-25 | 2018-12-11 | 苏州健雄职业技术学院 | A kind of piezoelectric ceramics piezoelectric micromotor displacement measurement method |
| CN113533785B (en) * | 2021-07-22 | 2023-04-07 | 中国计量科学研究院 | Scanning electron microscope-based nano line width self-adaptive measurement method and system |
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