CN203310858U - Measuring system based on detection of reference model having nanometer surface microstructure - Google Patents
Measuring system based on detection of reference model having nanometer surface microstructure Download PDFInfo
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- CN203310858U CN203310858U CN2011203204498U CN201120320449U CN203310858U CN 203310858 U CN203310858 U CN 203310858U CN 2011203204498 U CN2011203204498 U CN 2011203204498U CN 201120320449 U CN201120320449 U CN 201120320449U CN 203310858 U CN203310858 U CN 203310858U
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Abstract
The utility model discloses a measuring system based on the detection of a reference model having a nanometer surface microstructure, for the purpose of accurate positioning of moving parts in nanometer processing and manufacturing. The measuring system comprises the reference model having the nanometer surface microstructure, a measuring probe, a reactive circuit, a piezoelectric ceramics pipe, a piezoelectric ceramics pipe Z-direction voltage processing module, and a result display module. The measuring system is characterized in that when the system works, a scanning probing pin scans the reference model, the probe, after detecting the change of probing pin amplitude by using the optical lever principle, sends a feedback signal through the reactive circuit so that the Z-direction voltage of the piezoelectric ceramics pipe bearing the reference model changes with the probing pin amplitude and thus a constant probing pin amplitude is ensured; and the ever-changing piezoelectric ceramics pipe Z-direction voltage reflects the morphology of the reference model, the piezoelectric ceramics pipe Z-direction voltage processing module can be used for processing the voltage, and a measuring result is displayed through the result display module. An interpolation technology is utilized so that the measuring result with higher resolution and precision can be obtained, therefore, the measuring system provided by the utility model can be widely applied to nanometer and even sub-nanometer measuring and positioning.
Description
Technical field
The utility model is a kind of measuring system that has the reference model of nanoscale surface micro-structure based on detection, the accurate location of moving component in realizing nanoprocessing and manufacturing.The utility model can be realized nanoscale, the even measurement of Subnano-class, can be used on the micro-nano operation in assembly project, and the assembling of micro-nano system and making also can be used for improving the non-linear and hysteresis of piezoelectric ceramics scanister.
Technical background
At present, ultra micro processing and ultra micro operation have entered the New Times of nanometer technology, to the requirement of small displacement and small items geometric shape measuring no longer be confined to micron, sub-micrometer scale, but reached nanometer, inferior nanometer scale.The nanometer manufacture is emerging in recent years technical field, its core technology be under micro-nano-scale observability and can be handling.Due to micro-nano operating system, usually adopt the piezoelectric formation drivers such as PZT, its unintentional nonlinearity and sluggish equivalence should be the accurate location of instrument and sample and control and brought very large difficulty with manipulation.
In a lot of application, scan-probe is image device, is also operating control.Probe can move on the XYZ direction.Perpendicular displacement can accurately be controlled by a feedback control loop.Yet the movement on nano level XY direction is mainly open loop.Move horizontally accurately the calibration that depends on Piexoelectric actuator, in the process of calibration, often can run into a lot of problems, for example creep and sluggishness.In addition, the thermal drift of instrument is very obvious, and under room temperature, p.s., the drift of atomic size was very general.At very low temperature (4K) lower-pilot probe, its thermal drift can be ignored.Yet this needs complicated technology, is that the user is undesirable.Therefore, at room temperature operation, must consider drift, creep and sluggishness.
The maximum nanometer metering method of application is to utilize precise displacement sensor to accurately measure the shift value of object on the XYZ direction at present.Usually sensor used has capacitive displacement transducer, laser interferometer, grating scale etc.Before a kind of easy realizations microminiaturized, but measurement range is limited, measurement resolution is relevant with measurement range, less stable to the sensitivity extremely such as electronic noise, but also exists certain non-linear; The theoretic measuring accuracy of latter two and resolution are all higher, but are subjected in actual applications the impact of many factors and noise, are difficult to realize high-precision on-line measurement, and the system relative complex, involve great expense, and location is installed also higher requirement.The utility model can be realized nanoscale, the even measurement of Subnano-class, and system architecture is also fairly simple, with low cost.
Technical Reference
Chen Ying fly, Zhang Haijun. based on the microdisplacement measurement new method research [J] of AFM. optical instrument, 2005,27 (4), pp.3-7.
2. Rong Lie moistens. nano measurement technology [J] geared to the 21st century. and aviation Precision Manufacturing Technology, 2008,44 (4), pp.1-5.
3. Lin Xiao peak. the new method research of nanometer metering and the development [D] of pair image-generating unit atomic force microscopy mirror systems. Zhejiang, 2006.
Yuan in length and breadth, Zhou Xiaojun, Liu Yongzhi etc. adopt the high resolving power microdisplacement measurement method [J] of spectrum analysis technique. Chinese journal of scientific instrument, 2000,21 (1), pp.100-103.
5.Z.Wang，S.Su，Y.K.Verevkin?and?S.Fatikow，“Reference?pattern-based?2Dmeasurement?with?nano?resolution”[C].Proc.SPIE，2006，vol.6376-12.
6.Ralf?K.Heilmann，Carl?G.Chen，Paul?T.Konkola，and?Mark?L.Schattenburg，“Dimensional?Metrology?for?Nanometer-Scale?Science?and?Engineering：Towardssub-nanometer?accurate?encoders”[J].Nanotechnology，2004，vol.15，pp.504-511.
7.P.Sandoz，V.Bonnans?and?T.Gharbi，“High-accuracy?position?and?orientationmeasurement?of?extended?two-dimensional?surfaces?by?a?phase-sensitive?visionmethod”[J].Applied?Optics，2002，Vol.41，No.26，pp.5503-5511.
The utility model content
Existing micro/nano level measurement mechanism, theoretic measuring accuracy and resolution are all higher, but be subjected in actual applications the impact of many factors and noise, be difficult to realize high-precision on-line measurement, and system relative complex, involve great expense, in order to overcome above-mentioned deficiency, the utility model provides a kind of measuring system that has the reference model of nanoscale surface micro-structure based on detection.System is not only simple in structure, and reliability is high, is subjected to external environment and noise effect little, and the course of work synchronizes and carry out with nanometer imaging and manipulation process, has guaranteed better to measure and the real-time of feedback.
The purpose of this utility model be to overcome the deficiencies in the prior art and provide a kind of realize nanoprocessing and manufacture in the pinpoint measuring system of moving component.
The utility model can be realized by following technical measures:
The measuring system that has the reference model of nanoscale surface micro-structure based on detection, comprise reference model with nanoscale surface micro-structure, measuring sonde, feedback circuit, three-dimensional micro-displacement platform driver, three-dimensional micro-displacement platform, three-dimensional micro-displacement platform Z-direction voltage processing module and display module as a result.Described measuring sonde comprises scan-probe, starting of oscillation module, focal length tunable laser and photoelectricity 4 quadrant detector.Scan-probe is fixed on the starting of oscillation module without an end of needle point, and unsettled and needle point is arranged in the focus place of focal length tunable laser beam collimation focus lens group with an end of needle point, and the starting of oscillation module is fixed in measuring sonde.Described focal length tunable laser comprises lasing light emitter and beam collimation focus lens group, the beam collimation focus lens group is fixed on the front end of lasing light emitter, the focal length tunable laser is fixed on the upper left side of measuring sonde, the photoelectricity 4 quadrant detector is fixed on the upper right side of measuring sonde, the laser beam that lasing light emitter sends is by the center of collimation focusing lens combination, focus on the back side of scanning probe tip, the back of scanning probe tip is smooth mirror surface, gets to laser beam above it and reflexes on the photoelectricity 4 quadrant detector and form hot spot.Focal length tunable laser, scanning probe tip, photoelectricity 4 quadrant detector three form a plane perpendicular to scan-probe, and incident light and reflected light are also on this plane.
Feedback circuit one end directly is connected with the photoelectricity 4 quadrant detector in measuring sonde, one end directly is connected with three-dimensional micro-displacement platform driver, three-dimensional micro-displacement platform driver is connected with three-dimensional micro-displacement platform, three-dimensional micro-displacement platform Z-direction voltage processing module one terminates at the front end of three-dimensional micro-displacement platform driver, obtain three-dimensional micro-displacement platform Z-direction driving voltage, the other end is connected with display module as a result.Reference model with nanoscale surface micro-structure is fixed on three-dimensional micro-displacement platform, and it comprises the reference model with nanoscale regular surfaces microstructure and the reference model with nanoscale irregular surface microstructure.
Measuring system is used scan-probe and is had the reference model of nanoscale surface micro-structure, and scan-probe is very sensitive to the reaction of power.Before system is started working, at first three-dimensional micro-displacement platform driver drives three-dimensional micro-displacement platform and produce displacement on X, Y both direction, with reference to model, adjust to the below of scanning probe tip, then drive three-dimensional micro-displacement platform and on Z-direction, produce displacement, scan-probe and the reference model with nanoscale surface micro-structure are constantly approached, until scanning probe tip and have the scope that distance between the reference model of nanoscale surface micro-structure reaches the atomic force effect, approximate procedure completes.During system works, scan-probe under the effect of starting of oscillation module with fixed frequency and amplitude vibration, when measured object is subjected to displacement, scan-probe and the relative displacement with reference model generation equivalent of nanoscale regular surfaces microstructure, be that scan-probe scans the reference model with nanoscale surface micro-structure, in this process, atomic force between probe tip and reference model can make the amplitude of probe reduce, measuring sonde detects the variation of probe amplitude, and be input in feedback circuit with the form of electric signal, feedback circuit plays a role, the Z-direction driving voltage of three-dimensional micro-displacement platform driver is constantly changed, thereby the displacement of three-dimensional micro-displacement platform Z-direction is constantly changed, to keep scanning probe tip and to have the constant distance between the reference model of nanoscale surface micro-structure, namely guarantee the constant of probe amplitude.The three-dimensional micro-displacement platform driver Z-direction driving voltage constantly changed has reflected the pattern of the reference model with nanoscale surface micro-structure, three-dimensional micro-displacement platform Z-direction voltage processing module records and processes this voltage, the accurate location of moving component in finally realizing nanoprocessing and manufacturing, and measurement result is shown by display module as a result.
The utility model also can be realized by following technical measures: for the reference model with nanoscale regular surfaces microstructure, known and the regular shape of the size of model surface microstructure, distance between microstructure is fixed, the degree of accuracy of imaging or control system will be decided by the surface micro-structure of the reference model adopted, and can adopt counting module microstructure to be counted to detect the position of scanning probe tip or measured object.
The utility model also can be realized by following technical measures: for the reference model with nanoscale irregular surface microstructure, size the unknown and the out-of-shape of model surface microstructure, can adopt pattern recognition module to measure the position of scanning probe tip or measured object.
The utility model also can be realized by following technical measures: in measuring system, utilize interpositioning can obtain the more measurement result of high resolving power and precision, the three-dimensional data that the interpolation algorithm module obtains in scanning based on scan-probe: come from the 2-D data of reference model, come from the one-dimensional data (highly/gray-scale information) that needle point deviation that imaging surface height difference causes obtains.
The utility model compared with prior art has the following advantages: the resolution of measurement, precision and scope are determined by reference model, easily realize nanoscale, the even measurement of Subnano-class, system architecture is simple, reliability is high, be subjected to external environment and noise effect little, the course of work is synchronizeed and is carried out with nanometer imaging and manipulation process, has guaranteed better the real-time of measuring and feeding back.
The accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is further illustrated.
Fig. 1 is for having the measuring system structure principle chart of the reference model of nanoscale surface micro-structure based on detection;
Fig. 2 is the reference model surface topography schematic diagram with nanoscale regular surfaces microstructure;
Fig. 3 is the reference model surface topography schematic diagram with nanoscale irregular surface microstructure;
Fig. 4 is for having the measuring system schematic diagram of nanoscale regular surfaces microstructure reference model based on detection;
Fig. 5 is for having the measuring system schematic diagram of nanoscale irregular surface microstructure reference model based on detection;
Fig. 6 has the measuring system schematic diagram of nanoscale surface micro-structure reference model for the application interpolation algorithm based on detection.
In figure 1, scan-probe; 2, starting of oscillation module; 3, focal length tunable laser; 4, lasing light emitter; 5, beam collimation focus lens group; 6, photoelectricity 4 quadrant detector; 7, measuring sonde; 8, feedback circuit; 9, three-dimensional micro-displacement platform driver; 10, three-dimensional micro-displacement platform; 11, three-dimensional micro-displacement platform Z-direction voltage processing module; 12, display module as a result; 13, the reference model that has the nanoscale surface micro-structure; 14, counting module; 15, pattern recognition module; 16, interpolation algorithm module; 17, the reference model that has nanoscale regular surfaces microstructure; 18, the reference model that has nanoscale irregular surface microstructure.
1,2,3,6 all belong to measuring sonde (7), 4,5 all belong to focal length tunable laser (3), 14,15 and 16 all belong to three-dimensional micro-displacement platform Z-direction voltage processing module (11), and 17,18 all belong to the reference model (13) with nanoscale surface micro-structure.
Embodiment
In Fig. 1, systematic survey probe (7) is comprised of scan-probe (1), starting of oscillation module (2), focal length tunable laser (3), photoelectricity 4 quadrant detector (6).Scan-probe (1) is fixed on the starting of oscillation module without an end of needle point, an end with needle point is unsettled, and be positioned at the focus place of the beam collimation focus lens group (5) of focal length tunable laser (3), the back side of scan-probe (1) is smooth mirror surface, the needle point tip of probe is monatomic, and the reaction to power is very sensitive, the laser beam that lasing light emitter (4) sends is by the center of beam collimation focus lens group (5), focus on the back side of scan-probe (1) needle point, and be reflected to the upper hot spot that forms of photoelectricity 4 quadrant detector (6).
Before system is started working, three-dimensional micro-displacement platform driver (9) at first drives three-dimensional micro-displacement platform (10) and produce displacement on X, Y both direction, with reference to model, adjust to the below of scanning probe tip, then drive three-dimensional micro-displacement platform (10) and on Z-direction, produce displacement, the reference model (13) that makes scan-probe (1) and have a nanoscale surface micro-structure constantly approaches, until between the two apart from the scope that reaches the atomic force effect, approximate procedure completes.
During system works, scan-probe (1) under the effect of starting of oscillation module with fixed frequency and amplitude vibration, when measured object is subjected to displacement, scan-probe (1) and the relative displacement with reference model (13) generation equivalent of nanoscale surface micro-structure, be that scan-probe (1) scans reference model, in this process, scan-probe (1) needle point and have acting force between the atom between the reference model (13) of nanoscale surface micro-structure the amplitude of scan-probe (1) is reduced, measuring sonde (7) detects the variation of scan-probe (1) amplitude, and be input in the feedback circuit (8) directly be connected with it with the form of electric signal, feedback circuit (8) other end is connected with three-dimensional micro-displacement platform driver (9), the Z-direction driving voltage of three-dimensional micro-displacement platform driver (9) is constantly changed, thereby the Z-direction displacement of three-dimensional micro-displacement platform (10) is constantly changed, to keep scan-probe (1) needle point and to have the constant distance between the reference model (13) of nanoscale surface micro-structure, namely guarantee the constant of scan-probe (1) amplitude.Three-dimensional micro-displacement platform driver (9) the Z-direction driving voltage constantly changed has reflected the pattern of the reference model (13) with nanoscale surface micro-structure, three-dimensional micro-displacement platform Z-direction voltage processing module (11) is connected to the front end of three-dimensional micro-displacement platform driver (9), record and process the Z-direction driving voltage, the accurate location of moving component in finally realizing nanoprocessing and manufacturing, and measurement result is shown by display module (12) as a result.
In enforcement shown in Figure 4, in system, adopt the reference model (17) with nanoscale regular surfaces microstructure, known and the regular shape of the size of its surface micro-structure, distance between microstructure is fixed and is nanoscale, and the resolution of imaging or control system and precision are decided by the surface micro-structure of the reference model adopted.When measured object is subjected to displacement, scan-probe (1) and the displacement with reference model (17) generation equivalent of nanoscale regular surfaces microstructure, be that scan-probe (1) scans the reference model (17) with nanoscale regular surfaces microstructure, measuring sonde (7) detects the variation of scan-probe (1) amplitude, and be input in the feedback circuit (8) directly be connected with it with the form of electric signal, feedback circuit (8) other end is connected with three-dimensional micro-displacement platform driver (9), the Z-direction driving voltage of three-dimensional micro-displacement platform driver (9) is constantly changed, thereby the Z-direction displacement of three-dimensional micro-displacement platform (10) is constantly changed, to keep scan-probe (1) needle point and to have the constant distance between the reference model (17) of nanoscale regular surfaces microstructure, thereby obtain three-dimensional micro-displacement platform driver (9) the Z-direction driving voltage of the continuous variation corresponding with the reference model pattern.Owing in system, adopting the reference model (17) with nanoscale regular surfaces microstructure, so three-dimensional micro-displacement platform driver (9) the Z-direction driving voltage of the continuous variation obtained is the square-wave voltage of a rule, utilize the high level in this voltage of counting module (14) to count, just can obtain the number of the inswept lip-deep microstructure of the reference model with nanoscale regular surfaces microstructure (17) of scan-probe (2), distance and the size of microstructure are known, thereby in can realizing nanoprocessing and manufacturing, the precise displacement of moving component is measured, and measurement result is shown by display module (12) as a result.
In enforcement shown in Figure 5, in system, adopt the reference model (18) with nanoscale irregular surface microstructure, size the unknown and the out-of-shape of its surface micro-structure, the resolution of imaging or control system and precision are decided by the surface micro-structure of the reference model adopted.When measured object is subjected to displacement, scan-probe (1) and the displacement with reference model (18) generation equivalent of nanoscale irregular surface microstructure, be that scan-probe (1) scans the reference model (18) with nanoscale regular surfaces microstructure, measuring sonde (7) detects the variation of scan-probe (1) amplitude, and be input in the feedback circuit (8) directly be connected with it with the form of electric signal, feedback circuit (8) other end is connected with three-dimensional micro-displacement platform driver (9), the Z-direction driving voltage of three-dimensional micro-displacement platform driver (9) is constantly changed, thereby the Z-direction displacement of three-dimensional micro-displacement platform (10) is constantly changed, to keep scan-probe (1) needle point and to have the constant distance between the reference model (18) of nanoscale irregular surface microstructure, thereby obtain three-dimensional micro-displacement platform driver (9) the Z-direction driving voltage of the continuous variation corresponding with the reference model pattern, utilize pattern recognition module (15) to realize the nano-grade displacement measurement of moving component in nanoprocessing and manufacture, and measurement result is shown by display module (12) as a result.
In enforcement shown in Figure 6, in system, adopt the reference model (13) with nanoscale surface micro-structure, the resolution of imaging or control system and precision are decided by the surface micro-structure of the reference model adopted.When measured object is subjected to displacement, scan-probe (1) and the displacement with reference model (13) generation equivalent of nanoscale surface micro-structure, be that scan-probe (1) scans reference model, measuring sonde (7) detects the variation of scan-probe (1) amplitude, and be input in the feedback circuit (8) directly be connected with it with the form of electric signal, feedback circuit (8) other end is connected with three-dimensional micro-displacement platform driver (9), the Z-direction driving voltage of three-dimensional micro-displacement platform driver (9) is constantly changed, thereby the Z-direction displacement of three-dimensional micro-displacement platform (10) is constantly changed, to keep scan-probe (1) needle point and to have the constant distance between the reference model (13) of nanoscale surface micro-structure, thereby obtain three-dimensional micro-displacement platform driver (9) the Z-direction driving voltage of the continuous variation corresponding with the reference model pattern.Adopt the nano-grade displacement that three-dimensional micro-displacement platform Z-direction voltage processing module (11) can real measured object to measure, pass through again the computing of interpolation algorithm module (16), can realize the more measurement result of high resolving power and precision, in making nanoprocessing and manufacturing, the moving component position is more accurate, and measurement result is shown by display module (12) as a result.
Claims (4)
1. based on detection, have the measuring system of the reference model of nanoscale surface micro-structure, it is characterized in that: system comprises measuring sonde (7), feedback circuit (8), three-dimensional micro-displacement platform driver (9), three-dimensional micro-displacement platform (10), three-dimensional micro-displacement platform Z-direction voltage processing module (11), display module (12) and have the reference model (13) of nanoscale surface micro-structure as a result; Described reference model (13) with nanoscale surface micro-structure is fixed on three-dimensional micro-displacement platform (10), described feedback circuit (8) one ends are connected with measuring sonde (7), the other end is connected with three-dimensional micro-displacement platform driver (9), described three-dimensional micro-displacement platform driver (9) is connected with three-dimensional micro-displacement platform (10), described three-dimensional micro-displacement platform Z-direction voltage processing module (11) terminates at the front end of three-dimensional micro-displacement platform driver (9), and the other end is connected with display module (12) as a result.
2. the measuring system that has the reference model of nanoscale surface micro-structure based on detection according to claim 1, it is characterized in that: measuring sonde (7) is comprised of scan-probe (1), starting of oscillation module (2), focal length tunable laser (3) and photoelectricity 4 quadrant detector (6), focal length tunable laser (3) is comprised of lasing light emitter (4) and beam collimation focus lens group (5), and beam collimation focus lens group (5) is fixed in the positive front end of lasing light emitter (4); Scan-probe (1) is unsettled and be arranged in the focus place of focal length tunable laser (3) beam collimation focus lens group (5) with an end of needle point, is fixed on the starting of oscillation module without an end of needle point, and the starting of oscillation module is fixed in measuring sonde; Focal length tunable laser (3) is fixed on the upper left side of measuring sonde (7), photoelectricity 4 quadrant detector (6) is fixed on the upper right side of measuring sonde (7), the laser beam that lasing light emitter (4) sends is by the center of collimation focusing lens combination (5), focus on the back side of scan-probe (1) needle point, from the laser beam that needle point reflects, beat on photoelectricity 4 quadrant detector (6), focal length tunable laser (3), scan-probe (1) needle point, photoelectricity 4 quadrant detector (6) three form a plane perpendicular to scan-probe (1), and incident light and reflected light are also on this plane.
3. the measuring system that has the reference model of nanoscale surface micro-structure based on detection according to claim 1, it is characterized in that: the reference model (13) with nanoscale surface micro-structure comprises the reference model (17) with nanoscale regular surfaces microstructure and the reference model (18) with nanoscale irregular surface microstructure.
4. the measuring system that has the reference model of nanoscale surface micro-structure based on detection according to claim 2, it is characterized in that: three-dimensional micro-displacement platform Z-direction voltage processing module (11) comprises counting module (14), pattern recognition module (15), interpolation algorithm module (16).
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| CN107064563A (en) * | 2017-03-29 | 2017-08-18 | 中国科学院苏州纳米技术与纳米仿生研究所 | Light path damping device and method based on scanning probe |
| CN107064563B (en) * | 2017-03-29 | 2020-06-23 | 中国科学院苏州纳米技术与纳米仿生研究所 | Light path damping device and method based on scanning probe |
| CN111879451A (en) * | 2020-07-30 | 2020-11-03 | 合肥工业大学 | Microcosmic acting force measuring system and method for judging contact zero point and surface property of microcosmic acting force measuring system |
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