CN107064563B - Light path damping device and method based on scanning probe - Google Patents
Light path damping device and method based on scanning probe Download PDFInfo
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- CN107064563B CN107064563B CN201710196841.8A CN201710196841A CN107064563B CN 107064563 B CN107064563 B CN 107064563B CN 201710196841 A CN201710196841 A CN 201710196841A CN 107064563 B CN107064563 B CN 107064563B
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- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
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Abstract
The invention provides a light path shock absorption device and a method based on a scanning probe, which are used for reducing light path vibration. The invention has the advantages that the light signal in the light path is sensed by the four-quadrant optical detector, the position information of the light signal is fed back in real time, and the light path of the light source is adjusted by the scanning galvanometer, so that the position of the light spot on the sample is kept stable and unchanged relative to the sample, and the light spot is controlled to be stable and not to drift. The method improves the stability and reliability of the scanning probe microscope on the photoelectric measurement of the surface of the material on the basis of reducing the vibration of the light path, and improves the accuracy of the photoelectric response characterization of the scanning probe microscope in a micro-area.
Description
Technical Field
The invention relates to the field of photoelectric testing, in particular to a light path damping device and method based on a scanning probe.
Background
In microscopic photoelectric characterization analysis of materials, it is often necessary to involve an auxiliary optical path system. In a conventional laser-assisted optoelectronic test system, particularly in the case of a single laser light source and multiple devices being used together, the test system and the optical system are generally separate. During the measurement, the sample is first subjected to ordinary surface electrical characterization. Then, when the photoelectric response of the sample is represented, laser is added, a laser light source is emitted from another independent device, and laser spots are finally projected to a specified position through adjustment of a reflector, a collimating mirror and the like; and finally, testing the sample by scanning probe equipment to realize fixed-point in-situ photoelectric response characterization.
However, the scanning probe device and the laser light source device are two independent systems, and the shielding degree requirements of different devices on vibration noise are different, so that when the device works, the light source and the scanning probe device always have certain relative motion, and if the distance that the laser needs to be transmitted before reaching the region specified to be measured by the scanning probe is too long, light spots on a sample can shake and drift due to amplification of a light path, so that the light spots cannot be accurately focused at the specified position, and the accuracy of an experimental measurement result is influenced.
Disclosure of Invention
The invention aims to solve the technical problem of providing a light path damping device and a light path damping method based on a scanning probe, which can control light spots to be stable and not to drift.
In order to solve the above problems, the present invention provides a light path damping device based on a scanning probe, comprising: a controller; the first scanning galvanometer is arranged behind the light source and used for changing the light path of light emitted by the light source, the second scanning galvanometer is arranged between the first scanning galvanometer and the sample platform and used for changing the light path of the light reflected by the first scanning galvanometer and reflecting the light to the sample platform, the first scanning galvanometer and the second scanning galvanometer are respectively and electrically connected with the controller, and the controller controls the rotation of the first scanning galvanometer and the second scanning galvanometer; the first sampling mirror is arranged on a light path between the first scanning galvanometer and the second scanning galvanometer and used for collecting optical signals of the light path, and the second sampling mirror is arranged on the light path between the second scanning galvanometer and the sample stage and used for collecting optical signals of the light path; the first four-quadrant photodetector is arranged relative to the first sampling mirror and used for detecting the light from the first sampling mirror and transmitting the position information of the light on the first four-quadrant photodetector to the controller, and the second four-quadrant photodetector is arranged relative to the second sampling mirror and used for detecting the light from the second sampling mirror and transmitting the position information of the light on the second four-quadrant photodetector to the controller.
Further, the first scanning galvanometer and the light source are placed on the same horizontal plane, and the first scanning galvanometer and the second scanning galvanometer are placed on the same vertical plane.
And the reflecting mirror is arranged between the second scanning galvanometer and the sample stage and reflects the light reflected by the second scanning galvanometer to the sample stage.
Furthermore, the reflecting mirror and the second scanning galvanometer are placed on the same horizontal plane and are placed on the same vertical plane with the sample stage.
The invention also provides a light path shock absorption method based on the scanning probe, which comprises the following steps: the first scanning galvanometer reflects light emitted by the light source and reflects the light to a second scanning galvanometer, and the second scanning galvanometer receives the light reflected by the first scanning galvanometer and changes a light path to enable the light to be emitted to the sample platform; the first sampling mirror arranged on the light path between the first scanning galvanometer and the second scanning galvanometer collects light of the light path and reflects the light to the first four-quadrant optical detector; the first four-quadrant photodetector detects the position of the light on the first four-quadrant photodetector, and feeds back the position information to the controller; if the position of the light on the first four-quadrant photo-detector is not at the center of the first four-quadrant photo-detector, the controller adjusts the first scanning galvanometer to change the light path so that the light is at the center of the first four-quadrant photo-detector; the second sampling mirror arranged on the light path between the second scanning galvanometer and the sample stage collects the light of the light path and reflects the light to a second four-quadrant optical detector; the second four-quadrant photodetector detects the position of the light on the second four-quadrant photodetector, and feeds back the position information to the controller; if the position on the second four-quadrant photo detector is not at the center of the second four-quadrant photo detector, the controller adjusts the second scanning galvanometer to change the optical path so that the light is at the center of the second four-quadrant photo detector.
Further, the first scanning galvanometer and the light source are placed on the same horizontal plane, the first scanning galvanometer reflects light emitted by the light source towards the vertical direction, the first scanning galvanometer and the second scanning galvanometer are placed on the same vertical plane, and the second scanning galvanometer reflects received light towards the horizontal direction.
And the reflecting mirror is arranged between the second scanning galvanometer and the sample stage and reflects the light reflected by the second scanning galvanometer to the sample stage.
Furthermore, the reflecting mirror and the second scanning galvanometer are placed on the same horizontal plane and are placed on the same vertical plane with the sample stage, and the reflecting mirror reflects the light reflected by the second scanning galvanometer to the vertical direction.
Further, still include: if the light is at the center of the first four-quadrant photodetector, the controller does not adjust the first scanning galvanometer; and/or if the light is centered on the second four-quadrant photodetector, the controller does not adjust the second scanning galvanometer
The invention has the advantages that the light signal in the light path is sensed by the four-quadrant optical detector, the position information of the light signal is fed back in real time, and the light path of the light source is adjusted by the scanning galvanometer, so that the position of the light spot on the sample is kept stable and unchanged relative to the sample, and the light spot is controlled to be stable and not to drift. The method improves the stability and reliability of the scanning probe microscope on the photoelectric measurement of the surface of the material on the basis of reducing the vibration of the light path, and improves the accuracy of the photoelectric response characterization of the scanning probe microscope in a micro-area.
Drawings
Fig. 1 is a schematic structural diagram and an optical path diagram of an optical path damping device based on a scanning probe according to the present invention.
Detailed Description
The following describes in detail a specific embodiment of the scanning probe-based optical path damping apparatus and method according to the present invention with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram and an optical path diagram of an optical path damping device based on a scanning probe according to the present invention. Referring to fig. 1, the scanning probe-based optical path damping apparatus of the present invention includes a controller (not shown), a first galvanometer scanner 10, a second galvanometer scanner 11, a first sampling mirror 20, a second sampling mirror 22, a first four-quadrant photo detector 30, and a second four-quadrant photo detector 31.
The first galvanometer mirror 10 is disposed behind the light source 40 and changes the optical path of the light emitted from the light source 40. The light source 40 may be a laser light source. The second scanning galvanometer 11 is arranged between the first scanning galvanometer 10 and the sample stage 50, and is used for changing the light path of the light reflected by the first scanning galvanometer 10 and reflecting the light to the sample stage 50. The first scanning galvanometer 10 and the second scanning galvanometer 11 are respectively and electrically connected with a controller, and the controller controls the rotation of the first scanning galvanometer 10 and the second scanning galvanometer 11. The scanning galvanometers are of the existing structure, two piezoelectric ceramic pieces are attached to the back of each scanning galvanometer, and the controller controls the change of the piezoelectric ceramic pieces on the back of the scanning galvanometers to control the translation and rotation of the scanning galvanometers, so that the light reflection direction is changed, and the control of a light path is further realized.
The first sampling mirror 20 is disposed on a light path between the first scanning galvanometer 10 and the second scanning galvanometer 11, and is configured to collect an optical signal of the light path. The second sampling mirror 21 is disposed on a light path between the second scanning galvanometer 11 and the sample stage 50, and is configured to collect an optical signal of the light path. The first sampling mirror 20 and the second sampling mirror 21 are sampling mirrors conventional in the basic field, and those skilled in the art can obtain the device from the prior art. The sampling mirror has a working principle similar to that of the existing semi-transparent and semi-reflective mirror, and is different in that the light transmittance of the sampling mirror is higher than that of the semi-transparent and semi-reflective mirror, so that light loss of a light path caused by reflection can not be caused excessively.
The first fourth quadrant photo-detector 30 is arranged relative to the first sampling mirror 20, for example, the first sampling mirror 20 samples light and then the light is incident perpendicularly to the first fourth quadrant photo-detector. The first four quadrant photo detector is used for detecting the light signal from the first sampling mirror 30 and transmitting the position information of the light on the first four quadrant photo detector 30 to the controller, and the controller controls the first scanning mirror 10 to rotate according to the position information, so that the light is positioned at the center of the first four quadrant photo detector 30. The second fourth quadrant photo detector 31 is disposed opposite to the second sampling mirror 21, for example, the second sampling mirror 21 samples light and then the light is vertically incident on the second fourth quadrant photo detector 31. The second fourth quadrant photo detector 41 is configured to detect the light signal from the second sampling mirror 31, and transmit position information of the light on the second fourth quadrant photo detector 31 to the controller, and the controller controls the second scanning galvanometer 11 to rotate according to the position information, so that the light is located at the center of the second fourth quadrant photo detector 31.
Further, in the present embodiment, the apparatus further includes a reflecting mirror 60, and the reflecting mirror 60 is disposed between the second scanning galvanometer 31 and the sample stage 50, and reflects the light reflected by the second scanning galvanometer 31 to the sample stage 50. The first scanning galvanometer 10 and the light source 40 are placed on the same horizontal plane, the first scanning galvanometer 10 and the second scanning galvanometer 11 are placed on the same vertical plane, the reflecting mirror 60 and the second scanning galvanometer 31 are placed on the same horizontal plane and placed on the same vertical plane with the sample table 50, and therefore light emitted by the light source 40 is incident on the sample table 50. The lithography reflected by the mirror 60 is focused by the focusing lens 90 and then is incident on a predetermined position.
The invention also provides a light path shock absorption method based on the scanning probe. With reference to fig. 1, the method comprises the following steps:
in the step (1), the first scanning galvanometer 30 reflects the light emitted by the light source 40 and reflects the light to the second scanning galvanometer 11, and the second scanning galvanometer 11 receives the light reflected by the first scanning galvanometer 10 and changes the light path to enable the light to be emitted to the sample stage.
In the present embodiment, the first galvanometer mirror 10 is disposed on the same horizontal plane as the light source 40, the light emitted from the light source 40 is horizontally incident on the first galvanometer mirror 10 and reflected toward the vertical direction, the first galvanometer mirror 10 is disposed on the same vertical plane as the second galvanometer mirror 11, and the light reflected from the first galvanometer mirror 10 is vertically incident on the second galvanometer mirror 11 and reflected toward the horizontal direction. Further, the light reflected by the second scanning galvanometer 11 may enter the reflecting mirror 60, and after being reflected by the reflecting mirror 60, the reflecting mirror 60 and the second scanning galvanometer 11 are placed on the same horizontal plane and on the same vertical plane as the sample stage 50, and the light reflected by the second scanning galvanometer 11 horizontally enters the reflecting mirror 60 and is vertically reflected from the reflecting mirror 60 to the sample stage 50.
And (2) collecting light of the light path by the first sampling mirror 20 arranged on the light path between the first scanning galvanometer 10 and the second scanning galvanometer 11, and reflecting the light to the first four-quadrant photo detector 30. The first sampling mirror 20 collects only a small portion of the light, which does not affect the course of the light path.
And (3) the first four-quadrant photodetector 30 detects the position of the light on the first four-quadrant photodetector 30, and feeds back the position information to the controller. The position of the light on the first four quadrant photo detector 30 means that the light is in the center or non-center of the first four quadrant photo detector 30.
If the position of the light on the first four-quadrant photo detector 30 is not at the center of the first four-quadrant photo detector 30, the controller adjusts the first galvanometer mirror 10, controls the first galvanometer mirror 10 to rotate, and changes the light path so that the light is at the center of the first four-quadrant photo detector 30; if the light is in the center of the first four quadrant photodetector 30, the controller does not adjust the first galvanometer mirror 10.
And (5) collecting light of the optical path by the second sampling mirror 21 arranged on the optical path between the second scanning galvanometer 11 and the sample stage 50, and reflecting the light to the second four-quadrant photodetector 31. The second sampling mirror 21 collects only a small portion of the light, which does not affect the course of the light path.
And (6) the second four-quadrant photodetector 31 detects the position of the light on the second four-quadrant photodetector 31, and feeds back the position information to the controller. The position of the light on the second four quadrant photo detector 31 means that the light is in the center or non-center of the second four quadrant photo detector 31.
If the position of the light on the second fourth quadrant photo-detector 31 is not at the center of the second fourth quadrant photo-detector 31, the controller adjusts the second scanning galvanometer 11, controls the second scanning galvanometer 11 to rotate, and changes the light path so that the light is at the center of the second fourth quadrant photo-detector 31; if the light is in the center of the second four quadrant photodetector 31, the controller does not adjust the second scanning galvanometer 11.
The invention induces the light signal in the light path through the four-quadrant optical detector, feeds back the position information of the light signal in real time, and adjusts the light path of the light source through the scanning galvanometer, so that the position of the light spot on the sample is kept stable and unchanged relative to the sample. The method improves the stability and the reliability of the scanning probe microscope on the photoelectric measurement of the surface of the material on the basis of reducing the vibration of the light path.
The following describes an embodiment of the method for damping the light path based on the scanning probe according to the present invention.
Examples
Referring to fig. 1, before the surface photoelectric response measurement is performed on the sample, the laser light source is turned on; the laser light is irradiated to the surface of the sample 70 along the optical path (direction indicated by arrow) shown in fig. 1, and the scanning probe 80 is directed to the irradiation position. The first sampling mirror 20 and the second sampling mirror 21 are adjusted to collect the laser light on the optical path to the first four-quadrant photodetector 30 and the second four-quadrant photodetector 31. And starting the sample stage 50 (the sample stage 50 is an active vibration-proof stage), and starting to test the photoelectric response of the sample surface. Since the stage of the laser source 40 (the stage of the laser source 40 is a common optical stage) has relative motion with respect to the sample stage 50, the laser in the optical path will move back and forth on the sample due to the relative motion. At this time, the optical signals collected by the first fourth quadrant photodetector 30 and the second fourth quadrant photodetector 31 will also move; the optical signals on the first four-quadrant optical detector 30 and the second four-quadrant optical detector 31 are fed back in real time, and the piezoelectric ceramics on the first scanning galvanometer 10 and the second scanning galvanometer 11 are controlled to adjust the rotation of the scanning galvanometers so as to adjust the light path, so that the positions of light spots are fixed at the centers of the first four-quadrant optical detector 30 and the second four-quadrant optical detector 31 in real time, the light path is kept stable, the positions of the light spots on a sample are kept stable and unchanged relative to the sample, and the aim of damping the light path is fulfilled.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (5)
1. A method for damping a scanning probe-based optical path, the method employing a scanning probe-based optical path damping apparatus, the apparatus comprising:
a controller;
the first scanning galvanometer is arranged behind the light source and used for changing the light path of light emitted by the light source, the second scanning galvanometer is arranged between the first scanning galvanometer and the sample platform and used for changing the light path of the light reflected by the first scanning galvanometer and reflecting the light to the sample platform, the first scanning galvanometer and the second scanning galvanometer are respectively and electrically connected with the controller, and the controller controls the rotation of the first scanning galvanometer and the second scanning galvanometer;
the first sampling mirror is arranged on a light path between the first scanning galvanometer and the second scanning galvanometer and used for collecting optical signals of the light path, and the second sampling mirror is arranged on the light path between the second scanning galvanometer and the sample stage and used for collecting optical signals of the light path;
the first four-quadrant photodetector is arranged relative to the first sampling mirror and used for detecting the light from the first sampling mirror and transmitting the position information of the light on the first four-quadrant photodetector to the controller, and the second four-quadrant photodetector is arranged relative to the second sampling mirror and used for detecting the light from the second sampling mirror and transmitting the position information of the light on the second four-quadrant photodetector to the controller;
the method comprises the following steps:
the first scanning galvanometer reflects light emitted by the light source and reflects the light to a second scanning galvanometer, and the second scanning galvanometer receives the light reflected by the first scanning galvanometer and changes a light path to enable the light to be emitted to the sample platform;
the first sampling mirror arranged on the light path between the first scanning galvanometer and the second scanning galvanometer collects light of the light path and reflects the light to the first four-quadrant optical detector;
the first four-quadrant photodetector detects the position of the light on the first four-quadrant photodetector, and feeds back the position information to the controller;
if the position of the light on the first four-quadrant photo-detector is not at the center of the first four-quadrant photo-detector, the controller adjusts the first scanning galvanometer to change the light path so that the light is at the center of the first four-quadrant photo-detector;
the second sampling mirror arranged on the light path between the second scanning galvanometer and the sample stage collects the light of the light path and reflects the light to a second four-quadrant optical detector;
the second four-quadrant photodetector detects the position of the light on the second four-quadrant photodetector, and feeds back the position information to the controller;
if the position on the second four-quadrant photo detector is not at the center of the second four-quadrant photo detector, the controller adjusts the second scanning galvanometer to change the optical path so that the light is at the center of the second four-quadrant photo detector.
2. The method of claim 1, wherein the first galvanometer mirror is positioned on a horizontal plane with the light source, the first galvanometer mirror reflects light emitted by the light source toward a vertical direction, the first galvanometer mirror is positioned on a vertical plane with the second galvanometer mirror, and the second galvanometer mirror reflects received light toward a horizontal direction.
3. The method for damping the optical path of the scanning probe according to claim 2, further comprising a reflecting mirror disposed between the second scanning galvanometer and the sample stage to reflect the light reflected by the second scanning galvanometer toward the sample stage.
4. The method for damping the optical path based on the scanning probe according to claim 3, wherein the reflecting mirror is disposed on the same horizontal plane as the second scanning galvanometer and on the same vertical plane as the sample stage, and the reflecting mirror reflects the light reflected by the second scanning galvanometer to the vertical direction.
5. The method of claim 3, further comprising: if the light is at the center of the first four-quadrant photodetector, the controller does not adjust the first scanning galvanometer; and/or if the light is in the center of the second four quadrant photodetector, the controller does not adjust the second scanning galvanometer.
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| CN201710196841.8A CN107064563B (en) | 2017-03-29 | 2017-03-29 | Light path damping device and method based on scanning probe |
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| CN201710196841.8A CN107064563B (en) | 2017-03-29 | 2017-03-29 | Light path damping device and method based on scanning probe |
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| CN107064563B true CN107064563B (en) | 2020-06-23 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1054848A (en) * | 1990-02-16 | 1991-09-25 | 德国汤姆森-勃朗特有限公司 | Light scanning apparatus |
| CN102495238A (en) * | 2011-11-11 | 2012-06-13 | 北京航空航天大学 | Sixth harmonic imaging system based on tapping mode atomic force microscope |
| CN203310858U (en) * | 2011-08-30 | 2013-11-27 | 长春理工大学 | Measuring system based on detection of reference model having nanometer surface microstructure |
| CN104122416A (en) * | 2014-08-07 | 2014-10-29 | 苏州飞时曼精密仪器有限公司 | Laser detecting device based on scanning probe microscope |
| CN104849497A (en) * | 2014-02-17 | 2015-08-19 | 国家纳米科学中心 | Device for measuring subsurface structure characteristic and micro-area wideband dielectric property |
| CN106025781A (en) * | 2016-06-24 | 2016-10-12 | 桂林弘光光电科技有限公司 | Self-adaptive adjustment YAG solid-state laser device and application method thereof |
-
2017
- 2017-03-29 CN CN201710196841.8A patent/CN107064563B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1054848A (en) * | 1990-02-16 | 1991-09-25 | 德国汤姆森-勃朗特有限公司 | Light scanning apparatus |
| CN203310858U (en) * | 2011-08-30 | 2013-11-27 | 长春理工大学 | Measuring system based on detection of reference model having nanometer surface microstructure |
| CN102495238A (en) * | 2011-11-11 | 2012-06-13 | 北京航空航天大学 | Sixth harmonic imaging system based on tapping mode atomic force microscope |
| CN104849497A (en) * | 2014-02-17 | 2015-08-19 | 国家纳米科学中心 | Device for measuring subsurface structure characteristic and micro-area wideband dielectric property |
| CN104122416A (en) * | 2014-08-07 | 2014-10-29 | 苏州飞时曼精密仪器有限公司 | Laser detecting device based on scanning probe microscope |
| CN106025781A (en) * | 2016-06-24 | 2016-10-12 | 桂林弘光光电科技有限公司 | Self-adaptive adjustment YAG solid-state laser device and application method thereof |
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