CN202734797U - Substrate thickness measuring device - Google Patents
Substrate thickness measuring device Download PDFInfo
- Publication number
- CN202734797U CN202734797U CN 201220375840 CN201220375840U CN202734797U CN 202734797 U CN202734797 U CN 202734797U CN 201220375840 CN201220375840 CN 201220375840 CN 201220375840 U CN201220375840 U CN 201220375840U CN 202734797 U CN202734797 U CN 202734797U
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- China
- Prior art keywords
- platform
- vacuum
- thickness measuring
- substrate thickness
- magazine
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- Expired - Lifetime
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Abstract
The utility model relates to a substrate thickness measuring device which comprises a stander; material boxes which comprise a first material box for containing a material to be measured, second material boxes for containing a qualified material and a third material box for containing a defective material; a material picking mechanism which comprises a moving platform arranged on the stander and a vacuum absorption fixture arranged on the moving platform, wherein the vacuum absorption fixture has a plurality of vacuum chucks; a detection table which comprises a vacuum platform arranged on the stander and measuring probes arranged above the vacuum platform, wherein the vacuum platform can adsorb the material thereon and the number of the measuring probes is five; and a data acquisition, storage and control system which is connected with the material picking mechanism and the detection table. The substrate thickness measuring device adopts an automatic measuring device to replace the manual detection, adopts five points to simultaneously conduct the detection so as to accurately measure the precision of a substrate, adopts the vacuum adsorption to effectively prevent inaccuracy of the measuring data caused by the deformation of the substrate, and adopts the automatic system for data acquisition and storage to facilitate observation and statistics.
Description
Technical field
The utility model relates to a kind of measuring equipment, particularly relates to a kind of basic thickness measurement device.
Background technology
At present, to usually testing by the artificial vernier caliper that adopts with the thickness measuring of substrate, generally can only test its 4 point (be substrate edges, can not reflect full-size(d)); Simultaneously, substrate easily produces distortion, causes test data inaccurate, and in addition, the manual record test data is easily made mistakes, and all is to become the precision that affects thickness measuring.
Summary of the invention
The purpose of this utility model provides a kind of substrate thickness measuring equipment.
For achieving the above object, the technical solution adopted in the utility model is:
A kind of substrate thickness measuring equipment comprises:
Frame;
Magazine: described magazine is arranged on the described frame, comprises the first magazine of placing material to be measured, the second magazine of placing qualified material and the 3rd magazine of placing defective material;
Material fetching mechanism: described material fetching mechanism comprises the mobile platform that is arranged on the described frame, is arranged on the vacsorb anchor clamps on the described mobile platform, and described vacsorb anchor clamps have a plurality of vacuum cups;
Monitor station: described monitor station comprises the vacuum platform that is arranged on the described frame, the test probe that is arranged on described vacuum platform top, and described vacuum platform can adsorb the material of the section of being placed on it, and described test probe is provided with 5;
Data acquisition, storage and control system: described data acquisition, storage and control system are connected with described material fetching mechanism, monitor station.
Preferably, the Y-direction platform that described mobile platform comprises the X-direction platform that arranges along X-direction, arranges along Y direction, described Y-direction platform is arranged on the described frame, described X-direction platform is arranged on the described Y-direction platform, described vacsorb anchor clamps are arranged on the described X-direction platform, and described X-direction platform, Y-direction platform drive belt by stepper motor and carry out transmission.
Preferably, described vacuum gripping anchor clamps comprise the anchor clamps frame that is arranged on the described mobile platform, are arranged on the vacuum cup support that the first lift cylinder that vertically carries out lifting can be arranged and be connected to the underpart of the piston rod of described the first lift cylinder on the described anchor clamps frame, and described vacuum cup is arranged on the described vacuum cup support.
Further preferably, be provided with spring assembly between described vacuum cup and the vacuum cup support.
Preferably, described test probe is connected with the second lift cylinder that can control its vertically lifting, is provided with the locating piece that can adjust described test probe contact product and distance and precision between described test probe and the second lift cylinder.
Preferably, described test probe is distributed in four angles and the center of material to be measured.
Preferably, described magazine comprises base plate, is arranged on the side plate of the relative both sides of described base plate, and both sides offer breach on the described base plate, and the middle part of described side plate hollows out.
Preferably, described the second magazine is provided with 4.
Preferably, described upper rack is provided with protective cover.
Because technique scheme is used, the utility model compared with prior art has following advantages:
The utility model adopts 5 points to detect simultaneously by automatic measurement equipment replacement manual detection, measures comparatively accurately basic precision; Adopt vacuum suction, can effectively prevent the substrate distortion and cause the inaccurate of measurement data; System gathers storage data automatically, is convenient to observe and add up.
Description of drawings
Accompanying drawing 1 is schematic perspective view of the present utility model;
Accompanying drawing 2 is schematic top plan view of the present utility model;
Accompanying drawing 3 is the structural representation of magazine in the utility model;
Accompanying drawing 4 is the structural representation of material fetching mechanism in the utility model.
Wherein: 1, frame; 10, protective cover; 20, the first magazine; 21, the second magazine; 22, the 3rd magazine; 23, base plate; 24, side plate; 25, breach; 30, X-direction platform; 31, Y-direction platform; 40, anchor clamps frame; 41, the first lift cylinder; 42, vacuum cup support; 43, vacuum cup; 50, vacuum platform; 51, test probe; 52, the second lift cylinder.
Embodiment
Below in conjunction with drawings and Examples the utility model is further described:
A kind of substrate thickness measuring equipment as shown in Figure 1, 2 comprises:
Magazine: magazine is arranged on the frame 1, comprises the first magazine 20 of placing material to be measured, the second magazine 21 of placing qualified material and the 3rd magazine 22 of placing defective material.As shown in Figure 3: magazine comprises base plate 23, is arranged on the side plate 24 of base plate 23 relative both sides, and for convenient working person operation: both sides offer breach 25 and are convenient to hand and take, put plate on the base plate 23; Simultaneously, the middle part of side plate 24 hollows out, and can work as handle and use; The first magazine 20, the 3rd magazine 22 respectively arrange one, and the second magazine 21 arranges four, and the capacity of magazine is 200, when the number of substrates in the magazine surpasses 200 or during without substrate, can report to the police, and remind operator to change magazine;
Material fetching mechanism: material fetching mechanism comprises the mobile platform that is arranged on the frame 1, is arranged on the vacsorb anchor clamps on the mobile platform, in the present embodiment: the Y-direction platform 31 that mobile platform comprises the X-direction platform 30 that arranges along X-direction, arranges along Y direction, Y-direction platform 31 is arranged on the frame 1, X-direction platform 30 is arranged on the Y-direction platform 31, and X-direction platform 30, Y-direction platform 31 drive belt by stepper motor and carry out transmission; Vacuum gripping anchor clamps comprise the anchor clamps frame 40 that is arranged on the X-direction platform, be arranged on the vacuum cup support 42 of the underpart of the piston rod that the first lift cylinder 41 of vertically carrying out lifting can be arranged on the anchor clamps frame 40, be connected to the first lift cylinder 41 and be arranged on a plurality of vacuum cups 43 on the vacuum cup support 42, be provided with spring assembly between vacuum cup 43 and the vacuum cup support 42 and remedy height error, as shown in Figure 4;
Monitor station: monitor station comprises the vacuum platform 50 that is arranged on the frame 1, the test probe 51 that is arranged on vacuum platform 50 tops, and vacuum platform 50 is a vacuum suction table, can adsorb the material of the section of being placed on it; Test probe 51 is connected with the second lift cylinder 52 that can control its vertically lifting, be provided with the locating piece that to adjust test probe contact product and distance and precision between test probe 51 and the second lift cylinder 52, test probe 51 is provided with 5,5 test probes 51 are distributed in four angles and the center of material to be measured, adopt touch sensor, its measuring accuracy is between 0.005～0.007mm;
Data acquisition, storage and control system: data acquisition, storage and control system are connected with material fetching mechanism, monitor station.
Below the concrete course of work of setting forth lower the present embodiment:
Manually substrate to be measured is put into the first magazine 20, starting outfit; X-direction platform 30, Y-direction platform 31 move to the first magazine 20 tops, and vacuum cup 43 adsorbs under the effect of the first lift cylinder 41 and finishes feeding; X-direction platform 30, Y-direction platform 31 move to monitor station, and substrate is placed on vacuum platform 50 tops, and vacuum platform 50 is inhaled flat substrate, waits to be measured; Test probe 51 is pressed on the substrate 5 zones of test base the effect of the second lift cylinder 52 is lower; Data acquisition, storage and control system read the data of measuring, and carry out judgement such as extreme difference and average according to intrasystem program setting, and the substrate of different-thickness comprises in the present embodiment:
The qualified substrate of I class: extreme difference≤2mil, 33mil≤average＜35mil;
The qualified substrate of II class: extreme difference≤2mil, 35mil≤average＜37mil;
The qualified substrate of III class: extreme difference≤2mil, 37mil≤average≤39mil;
The qualified substrate of IV class: extreme difference≤2mil, 39mil＜average≤41mil;
Defective substrate: extreme difference＞2mil, or average＜33mil, or average＞41mil;
System places the substrate that is completed as in 4 the second magazines 21 and the second magazine 22 according to the substrate control vacuum cup 43 of different size, repeats said process again.
Above-described embodiment only is explanation technical conceive of the present utility model and characteristics, and its purpose is to allow the personage who is familiar with technique can understand content of the present utility model and according to this enforcement, can not limit protection domain of the present utility model with this.All equivalences of doing according to the utility model Spirit Essence change or modify, and all should be encompassed within the protection domain of the present utility model.
Claims (9)
1. substrate thickness measuring equipment is characterized in that: comprising:
Frame;
Magazine: described magazine is arranged on the described frame, comprises the first magazine of placing material to be measured, the second magazine of placing qualified material and the 3rd magazine of placing defective material;
Material fetching mechanism: described material fetching mechanism comprises the mobile platform that is arranged on the described frame, is arranged on the vacsorb anchor clamps on the described mobile platform, and described vacsorb anchor clamps have a plurality of vacuum cups;
Monitor station: described monitor station comprises the vacuum platform that is arranged on the described frame, the test probe that is arranged on described vacuum platform top, and described vacuum platform can adsorb the material of the section of being placed on it, and described test probe is provided with 5;
Data acquisition, storage and control system: described data acquisition, storage and control system are connected with described material fetching mechanism, monitor station.
2. substrate thickness measuring equipment according to claim 1, it is characterized in that: the Y-direction platform that described mobile platform comprises the X-direction platform that arranges along X-direction, arranges along Y direction, described Y-direction platform is arranged on the described frame, described X-direction platform is arranged on the described Y-direction platform, described vacsorb anchor clamps are arranged on the described X-direction platform, and described X-direction platform, Y-direction platform drive belt by stepper motor and carry out transmission.
3. substrate thickness measuring equipment according to claim 1, it is characterized in that: described vacuum gripping anchor clamps comprise the anchor clamps frame that is arranged on the described mobile platform, are arranged on the vacuum cup support that the first lift cylinder that vertically carries out lifting can be arranged and be connected to the underpart of the piston rod of described the first lift cylinder on the described anchor clamps frame, and described vacuum cup is arranged on the described vacuum cup support.
4. substrate thickness measuring equipment according to claim 3 is characterized in that: be provided with spring assembly between described vacuum cup and the vacuum cup support.
5. substrate thickness measuring equipment according to claim 1, it is characterized in that: described test probe is connected with the second lift cylinder that can control its vertically lifting, is provided with the locating piece that can adjust described test probe contact product and distance and precision between described test probe and the second lift cylinder.
6. substrate thickness measuring equipment according to claim 1 is characterized in that: described test probe is distributed in four angles and the center of material to be measured.
7. substrate thickness measuring equipment according to claim 1, it is characterized in that: described magazine comprises base plate, is arranged on the side plate of the relative both sides of described base plate, and both sides offer breach on the described base plate, and the middle part of described side plate hollows out.
8. substrate thickness measuring equipment according to claim 1, it is characterized in that: described the second magazine is provided with 4.
9. substrate thickness measuring equipment according to claim 1, it is characterized in that: described upper rack is provided with protective cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220375840 CN202734797U (en) | 2012-07-31 | 2012-07-31 | Substrate thickness measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220375840 CN202734797U (en) | 2012-07-31 | 2012-07-31 | Substrate thickness measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202734797U true CN202734797U (en) | 2013-02-13 |
Family
ID=47660487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220375840 Expired - Lifetime CN202734797U (en) | 2012-07-31 | 2012-07-31 | Substrate thickness measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202734797U (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104048625A (en) * | 2013-03-12 | 2014-09-17 | 昆山允可精密工业技术有限公司 | Automatic contact instrument used for measuring thin sheet material dimensions |
| CN104330093A (en) * | 2014-09-22 | 2015-02-04 | 昆山迈致治具科技有限公司 | Automatic distance sensing testing device |
| CN106840072A (en) * | 2017-03-17 | 2017-06-13 | 深圳市宇星鸿精密科技有限公司 | It is automatic to survey workpiece height instrument |
| CN108168486A (en) * | 2017-11-29 | 2018-06-15 | 深圳国创名厨商用设备制造有限公司南海分公司 | A kind of panel thickness detection device |
| CN108273760A (en) * | 2018-01-23 | 2018-07-13 | 上海读家电子科技有限公司 | A kind of detecting system and detection method for thick film wiring board print quality inspection |
| CN108436129A (en) * | 2018-02-11 | 2018-08-24 | 苏州丹卡精密机械有限公司 | A kind of joint automatic drilling system |
| CN109099850A (en) * | 2018-09-25 | 2018-12-28 | 深圳市航源智能设备有限公司 | A kind of FPC reinforcement 3D vision testing machine |
| CN111153246A (en) * | 2019-12-30 | 2020-05-15 | 维特罗伯特机械（苏州）有限公司 | Plate end effector with thickness measuring mechanism and material picking method |
| CN113458998A (en) * | 2021-06-23 | 2021-10-01 | 安徽天航机电有限公司 | Vacuum adsorption type clamping detection device for easily-deformed parts and use method thereof |
-
2012
- 2012-07-31 CN CN 201220375840 patent/CN202734797U/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104048625A (en) * | 2013-03-12 | 2014-09-17 | 昆山允可精密工业技术有限公司 | Automatic contact instrument used for measuring thin sheet material dimensions |
| CN104330093A (en) * | 2014-09-22 | 2015-02-04 | 昆山迈致治具科技有限公司 | Automatic distance sensing testing device |
| CN106840072A (en) * | 2017-03-17 | 2017-06-13 | 深圳市宇星鸿精密科技有限公司 | It is automatic to survey workpiece height instrument |
| CN108168486A (en) * | 2017-11-29 | 2018-06-15 | 深圳国创名厨商用设备制造有限公司南海分公司 | A kind of panel thickness detection device |
| CN108273760A (en) * | 2018-01-23 | 2018-07-13 | 上海读家电子科技有限公司 | A kind of detecting system and detection method for thick film wiring board print quality inspection |
| CN108436129A (en) * | 2018-02-11 | 2018-08-24 | 苏州丹卡精密机械有限公司 | A kind of joint automatic drilling system |
| CN109099850A (en) * | 2018-09-25 | 2018-12-28 | 深圳市航源智能设备有限公司 | A kind of FPC reinforcement 3D vision testing machine |
| CN111153246A (en) * | 2019-12-30 | 2020-05-15 | 维特罗伯特机械（苏州）有限公司 | Plate end effector with thickness measuring mechanism and material picking method |
| CN113458998A (en) * | 2021-06-23 | 2021-10-01 | 安徽天航机电有限公司 | Vacuum adsorption type clamping detection device for easily-deformed parts and use method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130213 |