CN103972229A - 形成带有散热器的半导体器件组合件的方法 - Google Patents

形成带有散热器的半导体器件组合件的方法 Download PDF

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Publication number
CN103972229A
CN103972229A CN201410033773.XA CN201410033773A CN103972229A CN 103972229 A CN103972229 A CN 103972229A CN 201410033773 A CN201410033773 A CN 201410033773A CN 103972229 A CN103972229 A CN 103972229A
Authority
CN
China
Prior art keywords
adhesive
die
heat sink
heat spreader
interface material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201410033773.XA
Other languages
English (en)
Chinese (zh)
Inventor
L·M·希金斯三世
B·J·卡彭特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP USA Inc
Original Assignee
Freescale Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freescale Semiconductor Inc filed Critical Freescale Semiconductor Inc
Publication of CN103972229A publication Critical patent/CN103972229A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565—Moulds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
CN201410033773.XA 2013-01-31 2014-01-24 形成带有散热器的半导体器件组合件的方法 Pending CN103972229A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/755,904 US9111878B2 (en) 2013-01-31 2013-01-31 Method for forming a semiconductor device assembly having a heat spreader
US13/755,904 2013-01-31

Publications (1)

Publication Number Publication Date
CN103972229A true CN103972229A (zh) 2014-08-06

Family

ID=51223366

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410033773.XA Pending CN103972229A (zh) 2013-01-31 2014-01-24 形成带有散热器的半导体器件组合件的方法

Country Status (3)

Country Link
US (1) US9111878B2 (enExample)
JP (1) JP6323942B2 (enExample)
CN (1) CN103972229A (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9831190B2 (en) 2014-01-09 2017-11-28 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor device package with warpage control structure
US9379034B1 (en) * 2014-12-30 2016-06-28 Stmicroelectronics Pte Ltd Method of making an electronic device including two-step encapsulation and related devices
US9899290B2 (en) 2016-03-23 2018-02-20 Nxp Usa, Inc. Methods for manufacturing a packaged device with an extended structure for forming an opening in the encapsulant
JP6748501B2 (ja) * 2016-07-14 2020-09-02 ローム株式会社 電子部品およびその製造方法
US9953904B1 (en) * 2016-10-25 2018-04-24 Nxp Usa, Inc. Electronic component package with heatsink and multiple electronic components
US11948855B1 (en) 2019-09-27 2024-04-02 Rockwell Collins, Inc. Integrated circuit (IC) package with cantilever multi-chip module (MCM) heat spreader
DE102020131849B4 (de) * 2020-12-01 2025-06-12 Infineon Technologies Ag Chip-Package, Halbleiteranordnung, Verfahren zum Bilden eines Chip-Packages, und Verfahren zum Bilden einer Halbleiteranordnung
US11557525B2 (en) * 2021-05-25 2023-01-17 Nxp Usa, Inc. Semiconductor package thermal spreader having integrated RF/EMI shielding and antenna elements
US20230037713A1 (en) * 2021-08-06 2023-02-09 Advanced Semiconductor Engineering, Inc. Semiconductor package structure and method for manufacturing the same

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11176873A (ja) * 1997-12-15 1999-07-02 Hitachi Ltd Ｂｇａ形半導体装置およびその実装構造体
CN1398149A (zh) * 2001-07-18 2003-02-19 Lg电子株式会社 具有散热元件的印刷电路板,其制作方法和包含它的器件
US20040017661A1 (en) * 2002-07-26 2004-01-29 Stmicroelectronics, Inc. Method and system for removing heat from an active area of an integrated circuit device
US20050116335A1 (en) * 2003-10-03 2005-06-02 Karim Abdul H. Semiconductor package with heat spreader
US20060043564A1 (en) * 2004-09-02 2006-03-02 Stats Chippac Ltd. Air pocket resistant semiconductor package
US20090166890A1 (en) * 2007-12-31 2009-07-02 Chrysler Gregory M Flip-chip package

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6146921A (en) 1998-09-16 2000-11-14 Intel Corporation Cavity mold cap BGA package with post mold thermally conductive epoxy attach heat sink
JP3573034B2 (ja) * 1999-11-17 2004-10-06 日本電気株式会社 多層プリント配線板およびその放熱構造
US6617682B1 (en) * 2000-09-28 2003-09-09 Intel Corporation Structure for reducing die corner and edge stresses in microelectronic packages
US6599779B2 (en) * 2001-09-24 2003-07-29 St Assembly Test Service Ltd. PBGA substrate for anchoring heat sink
US20040238947A1 (en) * 2003-05-28 2004-12-02 Intel Corporation Package and method for attaching an integrated heat spreader
US7498664B2 (en) * 2005-12-14 2009-03-03 Lsi Corporation Semiconductor package having increased resistance to electrostatic discharge
US8530990B2 (en) * 2009-07-20 2013-09-10 Sunpower Corporation Optoelectronic device with heat spreader unit

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11176873A (ja) * 1997-12-15 1999-07-02 Hitachi Ltd Ｂｇａ形半導体装置およびその実装構造体
CN1398149A (zh) * 2001-07-18 2003-02-19 Lg电子株式会社 具有散热元件的印刷电路板,其制作方法和包含它的器件
US20040017661A1 (en) * 2002-07-26 2004-01-29 Stmicroelectronics, Inc. Method and system for removing heat from an active area of an integrated circuit device
US20050116335A1 (en) * 2003-10-03 2005-06-02 Karim Abdul H. Semiconductor package with heat spreader
US20060043564A1 (en) * 2004-09-02 2006-03-02 Stats Chippac Ltd. Air pocket resistant semiconductor package
US20090166890A1 (en) * 2007-12-31 2009-07-02 Chrysler Gregory M Flip-chip package

Also Published As

Publication number Publication date
JP2014150253A (ja) 2014-08-21
US9111878B2 (en) 2015-08-18
US20140213018A1 (en) 2014-07-31
JP6323942B2 (ja) 2018-05-16

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PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information

Address after: Texas in the United States

Applicant after: NXP America Co Ltd

Address before: Texas in the United States

Applicant before: Fisical Semiconductor Inc.

CB02 Change of applicant information
RJ01 Rejection of invention patent application after publication

Application publication date: 20140806

RJ01 Rejection of invention patent application after publication