CN103449816B - 一种耐等离子腐蚀热喷涂用造粒氧化钇及其制备方法 - Google Patents
一种耐等离子腐蚀热喷涂用造粒氧化钇及其制备方法 Download PDFInfo
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- CN103449816B CN103449816B CN201310337420.4A CN201310337420A CN103449816B CN 103449816 B CN103449816 B CN 103449816B CN 201310337420 A CN201310337420 A CN 201310337420A CN 103449816 B CN103449816 B CN 103449816B
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- yttrium oxide
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- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 title claims abstract description 52
- 238000005507 spraying Methods 0.000 title claims abstract description 50
- 238000002360 preparation method Methods 0.000 title claims abstract description 19
- 238000001020 plasma etching Methods 0.000 title abstract description 6
- 239000000843 powder Substances 0.000 claims abstract description 33
- 239000012190 activator Substances 0.000 claims abstract description 10
- 230000009467 reduction Effects 0.000 claims abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000008367 deionised water Substances 0.000 claims abstract description 8
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 8
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 45
- 239000002002 slurry Substances 0.000 claims description 34
- 238000005469 granulation Methods 0.000 claims description 29
- 230000003179 granulation Effects 0.000 claims description 29
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 27
- 239000002253 acid Substances 0.000 claims description 24
- 238000007596 consolidation process Methods 0.000 claims description 15
- 235000006408 oxalic acid Nutrition 0.000 claims description 9
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000002156 mixing Methods 0.000 claims description 8
- 238000003756 stirring Methods 0.000 claims description 8
- 229940095064 tartrate Drugs 0.000 claims description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 229960000935 dehydrated alcohol Drugs 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 3
- 238000011084 recovery Methods 0.000 claims description 2
- 229960000583 acetic acid Drugs 0.000 claims 2
- 235000011054 acetic acid Nutrition 0.000 claims 2
- 230000000694 effects Effects 0.000 abstract description 6
- 230000002349 favourable effect Effects 0.000 abstract 2
- 238000000280 densification Methods 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 23
- 238000000034 method Methods 0.000 description 19
- 239000007921 spray Substances 0.000 description 9
- 238000001354 calcination Methods 0.000 description 7
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 238000002791 soaking Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000005524 ceramic coating Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000008187 granular material Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- 229910000753 refractory alloy Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
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- Coating By Spraying Or Casting (AREA)
Abstract
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CN201310337420.4A CN103449816B (zh) | 2013-08-06 | 2013-08-06 | 一种耐等离子腐蚀热喷涂用造粒氧化钇及其制备方法 |
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JP6808168B2 (ja) | 2015-12-24 | 2021-01-06 | Toto株式会社 | 耐プラズマ性部材 |
CN108408754B (zh) * | 2018-02-05 | 2019-11-12 | 常州市卓群纳米新材料有限公司 | 一种有利于控制喷涂后颜色的耐等离子腐蚀热喷涂用造粒氧化钇的制备方法 |
CN108706972B (zh) * | 2018-08-16 | 2020-12-01 | 常州市卓群纳米新材料有限公司 | 一种耐等离子腐蚀热喷涂用形貌可控纳米陶瓷球型颗粒的制备方法 |
CN110158009A (zh) * | 2019-06-24 | 2019-08-23 | 江苏立达高科特种材料有限公司 | 氧化钇热喷涂粉的制备方法 |
CN112479243A (zh) * | 2020-12-17 | 2021-03-12 | 常州市卓群纳米新材料有限公司 | 纳米氧化镥二次分散制备大比表面积氧化镥的方法 |
Citations (3)
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CN101182207A (zh) * | 2007-11-16 | 2008-05-21 | 北京矿冶研究总院 | 一种含氧化钇的喷涂粉末及其制备方法 |
CN101381092A (zh) * | 2007-09-06 | 2009-03-11 | 北京有色金属研究总院 | 一种大粒度、大比表面积球形氧化钇的制备方法 |
CN103086700A (zh) * | 2013-02-26 | 2013-05-08 | 江苏立达高科特种材料有限公司 | 一种热喷涂用的纳米氧化物陶瓷空心球的制备方法 |
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US20080311306A1 (en) * | 1997-08-22 | 2008-12-18 | Inframat Corporation | Superfine ceramic thermal spray feedstock comprising ceramic oxide grain growth inhibitor and methods of making |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101381092A (zh) * | 2007-09-06 | 2009-03-11 | 北京有色金属研究总院 | 一种大粒度、大比表面积球形氧化钇的制备方法 |
CN101182207A (zh) * | 2007-11-16 | 2008-05-21 | 北京矿冶研究总院 | 一种含氧化钇的喷涂粉末及其制备方法 |
CN103086700A (zh) * | 2013-02-26 | 2013-05-08 | 江苏立达高科特种材料有限公司 | 一种热喷涂用的纳米氧化物陶瓷空心球的制备方法 |
Non-Patent Citations (2)
Title |
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Preparation of Y2O3 Particles by Flame Spray Pyrolysis with Emulsion;Shin Ae Song.etal.;《Langmuir》;20091231;第25卷(第6期);3402-3406 * |
冀晓鹃等.热喷涂用氧化钇球形粉末的制备.《有色金属(冶炼部分)》.2008,40-42. * |
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