CN103403865B - 具有静态弯曲部的斜坡堆栈芯片封装 - Google Patents

具有静态弯曲部的斜坡堆栈芯片封装 Download PDF

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Publication number
CN103403865B
CN103403865B CN201180042191.2A CN201180042191A CN103403865B CN 103403865 B CN103403865 B CN 103403865B CN 201180042191 A CN201180042191 A CN 201180042191A CN 103403865 B CN103403865 B CN 103403865B
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ramp assembly
semiconductor dies
chip package
semiconductor die
semiconductor
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Chinese (zh)
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CN103403865A (zh
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J·A·哈拉达
D·C·道格拉斯
R·J·德罗斯特
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Oracle International Corp
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Oracle International Corp
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    • HELECTRICITY
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/43Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/117Shapes of semiconductor bodies
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    • H10W72/07251Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
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    • H10W72/221Structures or relative sizes
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    • H10W72/241Dispositions, e.g. layouts
    • H10W72/244Dispositions, e.g. layouts relative to underlying supporting features, e.g. bond pads, RDLs or vias
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    • H10W72/251Materials
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    • H10W72/931Shapes of bond pads
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    • H10W90/732Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Wire Bonding (AREA)
  • Semiconductor Integrated Circuits (AREA)
CN201180042191.2A 2010-09-02 2011-08-04 具有静态弯曲部的斜坡堆栈芯片封装 Active CN103403865B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/874,446 US8283766B2 (en) 2010-09-02 2010-09-02 Ramp-stack chip package with static bends
US12/874,446 2010-09-02
PCT/US2011/046519 WO2012030470A2 (en) 2010-09-02 2011-08-04 Ramp-stack chip package with static bends

Publications (2)

Publication Number Publication Date
CN103403865A CN103403865A (zh) 2013-11-20
CN103403865B true CN103403865B (zh) 2016-08-03

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Country Status (7)

Country Link
US (1) US8283766B2 (https=)
EP (1) EP2612356B1 (https=)
JP (1) JP6000952B2 (https=)
KR (1) KR101853754B1 (https=)
CN (1) CN103403865B (https=)
TW (1) TWI527132B (https=)
WO (1) WO2012030470A2 (https=)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8390109B2 (en) * 2011-02-17 2013-03-05 Oracle America, Inc. Chip package with plank stack of semiconductor dies
US8786080B2 (en) * 2011-03-11 2014-07-22 Altera Corporation Systems including an I/O stack and methods for fabricating such systems
US9082632B2 (en) * 2012-05-10 2015-07-14 Oracle International Corporation Ramp-stack chip package with variable chip spacing
WO2014003533A1 (en) * 2012-06-25 2014-01-03 Intel Corporation Multi-die semiconductor structure with intermediate vertical side chip and semiconductor package for same
KR101880173B1 (ko) * 2012-07-11 2018-07-19 에스케이하이닉스 주식회사 멀티 칩 패키지
KR101994930B1 (ko) 2012-11-05 2019-07-01 삼성전자주식회사 일체형 단위 반도체 칩들을 갖는 반도체 패키지
JP6129605B2 (ja) * 2013-03-25 2017-05-17 本田技研工業株式会社 電力変換装置の製造方法及びそれに用いられる治具
JP6133093B2 (ja) * 2013-03-25 2017-05-24 本田技研工業株式会社 電力変換装置
KR20150018099A (ko) * 2013-08-09 2015-02-23 에스케이하이닉스 주식회사 적층 반도체 장치
US9209165B2 (en) * 2013-10-21 2015-12-08 Oracle International Corporation Technique for controlling positions of stacked dies
US9825002B2 (en) * 2015-07-17 2017-11-21 Invensas Corporation Flipped die stack
US9871019B2 (en) 2015-07-17 2018-01-16 Invensas Corporation Flipped die stack assemblies with leadframe interconnects
US9837394B2 (en) 2015-12-02 2017-12-05 International Business Machines Corporation Self-aligned three dimensional chip stack and method for making the same
US9508691B1 (en) 2015-12-16 2016-11-29 Invensas Corporation Flipped die stacks with multiple rows of leadframe interconnects
US10566310B2 (en) 2016-04-11 2020-02-18 Invensas Corporation Microelectronic packages having stacked die and wire bond interconnects
US9929290B2 (en) 2016-06-20 2018-03-27 Globalfoundries Inc. Electrical and optical via connections on a same chip
US9728524B1 (en) 2016-06-30 2017-08-08 Invensas Corporation Enhanced density assembly having microelectronic packages mounted at substantial angle to board
CN107993997B (zh) 2016-10-26 2020-06-16 晟碟信息科技(上海)有限公司 半导体器件
CN108933109B (zh) 2017-05-27 2020-07-07 晟碟信息科技(上海)有限公司 成角度的裸芯的半导体器件
US10963780B2 (en) 2017-08-24 2021-03-30 Google Llc Yield improvements for three-dimensionally stacked neural network accelerators
KR20190052957A (ko) * 2017-11-09 2019-05-17 에스케이하이닉스 주식회사 다이 오버시프트 지시 패턴을 포함하는 반도체 패키지
US20190279962A1 (en) * 2018-03-09 2019-09-12 Oracle International Corporation Method and apparatus for stacking warped chips to assemble three-dimensional integrated circuits
US11222865B2 (en) * 2020-05-12 2022-01-11 Western Digital Technologies, Inc. Semiconductor device including vertical bond pads
US20230247795A1 (en) 2022-01-28 2023-08-03 The Research Foundation For The State University Of New York Regenerative preheater for phase change cooling applications

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6376904B1 (en) * 1999-12-23 2002-04-23 Rambus Inc. Redistributed bond pads in stacked integrated circuit die package
US6392143B1 (en) * 1999-01-18 2002-05-21 Kabushiki Kaisha Toshiba Flexible package having very thin semiconductor chip, module and multi chip module (MCM) assembled by the package, and method for manufacturing the same
CN101393876A (zh) * 2007-09-11 2009-03-25 桑迪士克股份有限公司 形成具有接纳电连接件倾斜边缘的半导体电路小片的方法
US20090321954A1 (en) * 2008-06-30 2009-12-31 Oh Tac Keun Stacked semiconductor package electrically connecting semiconductor chips using outer surfaces thereof and method for manufacturing the same

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5239447A (en) * 1991-09-13 1993-08-24 International Business Machines Corporation Stepped electronic device package
DK174111B1 (da) 1998-01-26 2002-06-24 Giga As Elektrisk forbindelseselement samt fremgangsmåde til fremstilling af et sådant
JP2001036309A (ja) 1999-07-15 2001-02-09 Nec Eng Ltd マルチチップモジュール接続構造
CN1207785C (zh) * 2000-03-21 2005-06-22 三菱电机株式会社 半导体器件、电子装置的制造方法、电子装置和携带式信息终端
JP2001313314A (ja) * 2000-04-28 2001-11-09 Sony Corp バンプを用いた半導体装置、その製造方法、および、バンプの形成方法
JP2002009221A (ja) * 2000-06-26 2002-01-11 Rohm Co Ltd 半導体装置及びその製造方法
US6921867B2 (en) * 2002-11-29 2005-07-26 Nokia Corporation Stress release feature for PWBs
KR100498488B1 (ko) * 2003-02-20 2005-07-01 삼성전자주식회사 적층형 반도체 패키지 및 그 제조방법
JP4215689B2 (ja) * 2004-06-17 2009-01-28 株式会社新川 ワイヤボンディング方法及びバンプ形成方法
DE102005051332B4 (de) * 2005-10-25 2007-08-30 Infineon Technologies Ag Halbleitersubstrat, Halbleiterchip, Halbleiterbauteil und Verfahren zur Herstellung eines Halbleiterbauteils
JP4191204B2 (ja) * 2006-05-12 2008-12-03 エルピーダメモリ株式会社 半導体装置およびその製造方法
US7829438B2 (en) * 2006-10-10 2010-11-09 Tessera, Inc. Edge connect wafer level stacking
TW200820402A (en) * 2006-10-26 2008-05-01 Chipmos Technologies Inc Stacked chip packaging with heat sink struct
US8304874B2 (en) * 2006-12-09 2012-11-06 Stats Chippac Ltd. Stackable integrated circuit package system
US8723332B2 (en) * 2007-06-11 2014-05-13 Invensas Corporation Electrically interconnected stacked die assemblies
KR20090055316A (ko) * 2007-11-28 2009-06-02 삼성전자주식회사 반도체 패키지와, 이를 구비하는 전자 기기 및 반도체패키지의 제조방법
JP2009164160A (ja) * 2007-12-28 2009-07-23 Panasonic Corp 半導体デバイス積層体および実装方法
US8178978B2 (en) * 2008-03-12 2012-05-15 Vertical Circuits, Inc. Support mounted electrically interconnected die assembly
JP4776675B2 (ja) * 2008-10-31 2011-09-21 株式会社東芝 半導体メモリカード
US8476749B2 (en) * 2009-07-22 2013-07-02 Oracle America, Inc. High-bandwidth ramp-stack chip package
US8290319B2 (en) * 2010-08-25 2012-10-16 Oracle America, Inc. Optical communication in a ramp-stack chip package

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6392143B1 (en) * 1999-01-18 2002-05-21 Kabushiki Kaisha Toshiba Flexible package having very thin semiconductor chip, module and multi chip module (MCM) assembled by the package, and method for manufacturing the same
US6376904B1 (en) * 1999-12-23 2002-04-23 Rambus Inc. Redistributed bond pads in stacked integrated circuit die package
CN101393876A (zh) * 2007-09-11 2009-03-25 桑迪士克股份有限公司 形成具有接纳电连接件倾斜边缘的半导体电路小片的方法
US20090321954A1 (en) * 2008-06-30 2009-12-31 Oh Tac Keun Stacked semiconductor package electrically connecting semiconductor chips using outer surfaces thereof and method for manufacturing the same

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US8283766B2 (en) 2012-10-09
WO2012030470A2 (en) 2012-03-08
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US20120056327A1 (en) 2012-03-08
JP6000952B2 (ja) 2016-10-05
WO2012030470A3 (en) 2012-05-03
CN103403865A (zh) 2013-11-20
EP2612356A2 (en) 2013-07-10
TW201234501A (en) 2012-08-16
KR101853754B1 (ko) 2018-06-20
TWI527132B (zh) 2016-03-21
KR20130136446A (ko) 2013-12-12

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